Double-cavity cold trap and condensed substance absorption treatment device and implementation method

Abstract

The invention discloses a double-cavity cold trap and condensed substance absorption treatment device and an implementation method, the double-cavity cold trap and condensed substance absorption treatment device comprises a double-cavity cold trap and an absorption treatment device, in the vapor deposition process of volatile chemical substances, excessive chemical substances and by-products are connected to a cold trap inlet gate valve through a pipeline; liquid nitrogen, dry ice or ice salt bath and the like can be placed in an inner cavity of the cold trap to condense gaseous chemical substances, and an outlet gate valve of the cold trap is connected with a vacuum pump; after the reaction is finished, the cold trap inlet gate valve is connected with inert carrier gas and a gas flow meter and is used for accelerating gasification of chemical substances condensed on the inner wall of the outer cavity and taking the chemical substances out of the cavity; a cold trap outlet gate valve is connected with an absorption barrel, a pipeline is inserted below the liquid level of absorption liquid, inert carrier gas is introduced before the pipeline is inserted into the liquid level to dilute gasified chemical substances, the concentration of the chemical substances and the intensity of reaction of the absorption liquid are reduced, and safe absorption is ensured. According to the invention, a downstream vacuum system can be effectively protected, and long-term safety production can be ensured.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of device development and chemical vapor deposition tail gas pretreatment, and relates to a double-cavity cold trap and a condensed substance absorption treatment device and an implementation method. BACKGROUND

[0002] Chemical vapor deposition is a gas-solid surface reaction, specifically, a process of injecting reaction precursor vapor in an ordered manner into a reaction cavity at a certain temperature and in a vacuum environment, and chemically reacting on the surface of a substrate to form a thin film. The commonly used chemical vapor deposition includes chemical vapor deposition (CVD) and atomic layer deposition (ALD).

[0003] In the chemical vapor deposition process, chemical precursors (compounds) with certain reaction activity are injected into the vapor deposition reactor in the form of vapor. Whether it is CVD or ALD, the precursor vapor injected into the reactor is in an excess state, and different precursors react to form target products while producing related organic by-products. The excess organic precursor and by-product vapor is directly pumped into the vacuum system, which has an important influence on the performance and service life of the pump; in addition, many chemical precursors are flammable and explosive, and a large amount of such precursors gathered in the vacuum system will pose a great safety hazard. The traditional cold trap absorption device is placed between the reactor outlet and the vacuum generating device, which can realize the condensation and temporary storage of chemical substances, but there are problems such as complex process, incomplete removal and safety risks in the later treatment (including recovery or chemical absorption).

[0004] In order to further improve the efficient condensation and safe treatment of excess chemical substances and by-products in the vapor deposition process, it is necessary to develop a device and method that has high-efficiency condensation absorption, safe transfer and recovery in the later stage, and mild chemical reaction treatment. SUMMARY

[0005] In view of the deficiencies in the prior art, the purpose of the present application is to provide a double-cavity cold trap and a condensed substance absorption treatment device and an implementation method, which have high-efficiency condensation absorption, safe transfer and recovery in the later stage, and mild chemical reaction treatment, solve the safety problems such as leakage and violent reaction in the transfer, recovery and chemical absorption of the current vapor deposition cold trap, effectively protect the downstream vacuum system, and ensure long-term safe production.

[0006] In order to solve the above technical problems, the application adopts the following technical solutions: A double-cavity cold trap and a condensed substance absorption treatment device, comprising a double-cavity cold trap and an absorption treatment device. The double-cavity cold trap comprises: an inner shell and an inner cavity inside the inner shell, an outer shell and an outer cavity inside the outer shell, a base at the bottom of the outer shell, an inner cavity cover at the top of the inner shell, an exhaust port at the center of the inner cavity cover, an inner cavity sealing O-ring groove and an inner cavity sealing O-ring between the inner cavity cover and the top edge of the inner shell, an outer cavity sealing O-ring groove and an outer cavity sealing O-ring between the inner cavity sealing O-ring and the top edge of the outer shell, a cold trap inlet and a cold trap inlet plug-in valve provided on the upper part of the outer shell, and a cold trap outlet and a cold trap outlet plug-in valve provided on the lower part of the outer shell; a first gas flow meter is arranged on the pipeline connected to the cold trap inlet. The absorption treatment device comprises: an absorption bucket and a top cover, an inlet pipeline and an exhaust pipeline penetrating through the top cover; a first branch pipe at the upper part of the inlet pipeline is connected to the cold trap outlet, a second gas flow meter is arranged on the second branch pipe at the top of the inlet pipeline, and the lower part of the inlet pipeline extends into the absorption liquid in the absorption bucket.

[0007] The application also comprises the following technical features: Specifically, an inner cavity handle is arranged on the inner cavity cover; the inner cavity cover and the inner cavity sealing O-ring are connected through an inner cavity and an upper cover fastener; the inner cavity cover and the outer cavity sealing O-ring are connected through an inner cavity and an outer cavity fastener; and an outer cavity handle is arranged on the outer shell.

[0008] Specifically, a fixing bolt hole is arranged on the base.

[0009] Specifically, the inner cavity is used for storing liquid nitrogen, dry ice or ice salt bath to provide an ultra-cold environment; and the outer cavity between the inner shell and the outer shell is used as a volatile chemical substance transmission and condensation channel.

[0010] Specifically, the exhaust port is used for discharging the gas generated after the liquid nitrogen or dry ice in the inner cavity is vaporized.

[0011] Specifically, the first gas flow meter is used for controlling the flow of inert carrier gas, accelerating the vaporization of the substances condensed on the inner wall of the outer cavity and taking them out of the cavity.

[0012] Specifically, the second gas flow meter is used for controlling the flow of inert carrier gas, diluting the vaporized chemical substances, reducing the concentration of the chemical substances and weakening the reaction intensity between the chemical substances and the absorption liquid.

[0013] An implementation method of the double-cavity cold trap and the condensate substance absorption treatment device comprises a cold trap condensation process and a condensate substance absorption treatment process. The cold trap condensation process comprises: the gas containing chemical substances enters the outer cavity from the cold trap inlet plug-in valve, the chemical substances are condensed under the action of the ultra-cold environment provided by the inner cavity and remain in the cold trap, the remaining gas is discharged from the cold trap outlet plug-in valve, and the chemical substances condensed in the cold trap are directly recycled or subjected to absorption treatment. The condensing matter absorption treatment comprises: when the chemical matter to be condensed inside the outer cavity needs to be removed, the cold trap inlet plug-in valve is connected with the inert carrier gas and the first gas flow meter, which is used for accelerating the gasification of the chemical matter condensed on the inner wall of the outer cavity and taking it out of the cavity; the cold trap outlet plug-in valve is connected with the absorption barrel and the pipeline is inserted below the liquid level of the absorption liquid, and at the same time, the inert carrier gas is introduced into the gasified chemical matter through the second gas flow meter before the pipeline is inserted into the liquid level, so as to dilute the gasified chemical matter, reduce the intensity of the reaction between the chemical matter and the absorption liquid, and ensure the safe absorption.

[0014] Specifically, the cold trap condensation specifically comprises: during the reaction process of the volatile chemical matter, the excess chemical matter and by-products are connected to the cold trap inlet plug-in valve through a pipeline, the inner cavity is placed in liquid nitrogen, dry ice or ice salt bath to condense the gaseous chemical matter, the cold trap outlet plug-in valve is connected with a vacuum pump, and the plug-in valves are all in the open state, so that the excess chemical matter and by-products flow through the double-cavity cold trap with the carrier gas to realize condensation and absorption; after the reaction is completed, the plug-in valves are closed to ensure that the condensed matter inside the double-cavity cold trap is not leaked and is safely transferred; the cold trap inlet plug-in valve is connected with the inert carrier gas and the first gas flow meter, which is used for introducing the inert carrier gas to accelerate the gasification of the chemical matter condensed on the inner wall of the outer cavity and take it out of the cavity.

[0015] Specifically, the absorption liquid is one of water, alkaline liquid and acidic liquid.

[0016] Compared with the prior art, the present application has the following technical effects: The present application adopts a two-stage inert gas assisted high-efficiency condensation, safe transfer, complete removal and safe treatment design scheme, and can select the recovery or chemical absorption safe treatment of the condensed matter inside the cold trap according to the actual use requirements.

[0017] The chemical vapor deposition process can realize effective condensation, and the condensation inner cooling source can be fully utilized. By installing a fixed pressure one-way valve at the root exhaust port, the gasification speed of the liquid nitrogen or dry ice in the inner cavity is reduced, and the condensation efficiency is improved. In addition, different starting threshold pressure one-way valves can be adjusted and replaced according to the actual condensation process needs, to realize efficient utilization of the condensation inner cooling source and efficient condensation of the cold trap.

[0018] The chemical matter can realize safe transfer of the cold trap after condensation. The present application designs and installs plug-in valves at the inlet and outlet of the cold trap, opens the inlet and outlet plug-in valves to realize airflow circulation and condensation during the chemical vapor deposition condensation process, and closes the inlet and outlet plug-in valves after the condensation is completed to realize safe storage of the condensed matter in the cold trap, which is convenient for the recovery or chemical absorption treatment of the matter later.

[0019] The present application adopts inert carrier gas assisted gasification and transfer of the condensed matter in the cold trap, which promotes the efficient gasification and transfer of the condensed matter in the cold trap, and is convenient for the recovery or chemical absorption treatment of the condensed matter in the cold trap later.

[0020] The application adopts secondary inert carrier gas to further reduce the concentration of gasified chemical substances in the cold trap, and further reduce the intensity of the reaction between the chemical substances and the absorption liquid, thereby ensuring the safety and reliability of the chemical absorption process of the condensed substances.

[0021] The application has clear structure and convenient use, and the user can adjust the relevant parameters according to the actual application requirements to realize efficient condensation, safe transfer and controllable processing in the chemical vapor deposition process. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the application.

[0023] Figure 2 It is a processing size diagram of the double-layer cold trap of the embodiment.

[0024] Figure 3 It is a physical diagram of the double-layer cold trap of the embodiment.

[0025] Figure 4 It is a schematic diagram of the connection mode of the double-cavity cold trap in the ALD process.

[0026] The meanings of the various reference numerals in the drawings are as follows: 1. inner shell, 2. inner cavity, 3. outer shell, 4. outer cavity, 5. base, 6. inner cavity upper cover, 7. exhaust port, 8. inner cavity sealing O-ring, 9. outer cavity sealing O-ring, 10. cold trap inlet plug-in valve, 11. cold trap outlet plug-in valve, 12. first gas flow meter, 13. absorption barrel, 14. inlet pipeline, 15. exhaust pipeline, 16. second gas flow meter, 17. absorption liquid, 18. inner cavity and upper cover fastener, 19. inner cavity and outer cavity fastener, 20. inner cavity handle, 21. outer cavity handle, 22. fixing bolt hole. DETAILED DESCRIPTION

[0027] The application provides a double-cavity cold trap and a condensed substance absorption and processing device, which comprises a double-cavity cold trap and an absorption and processing device.

[0028] The double-cavity cold trap comprises: an inner shell 1 and an inner cavity 2 inside the inner shell 1, an outer shell 3 surrounding the inner shell 1 and an outer cavity 4 inside the outer shell 3, a base 5 at the bottom of the outer shell 3, an inner cavity upper cover 6 arranged at the top of the inner shell 1, an exhaust port 7 arranged at the center of the inner cavity upper cover 6, an inner cavity sealing O-ring 8 groove and the inner cavity sealing O-ring 8 located between the inner cavity upper cover 6 and the top edge of the inner shell 1, an outer cavity sealing O-ring 9 groove and the outer cavity sealing O-ring 9 located between the inner cavity sealing O-ring 8 and the top edge of the outer shell 3, a cold trap inlet and a cold trap inlet plug-in valve 10 arranged on the upper part of the outer shell 3, a cold trap outlet and a cold trap outlet plug-in valve 11 arranged on the lower part of the outer shell 3; a first gas flow meter 12 is arranged on the pipeline connected to the cold trap inlet.

[0029] The absorption treatment device comprises an absorption bucket 13 and its top cover, an inlet pipe 14 and an exhaust pipe 15 penetrating the top cover; a first branch pipe at the upper part of the inlet pipe 14 is connected with the cold trap outlet, a second gas flow meter 16 is arranged on the second branch pipe at the top of the inlet pipe 14, and the lower part of the inlet pipe 14 extends into the absorption liquid 17 in the absorption bucket 13.

[0030] The pipe connected with the cold trap inlet is used for passing the inert carrier gas into the outer cavity 4 and controlling the flow rate through the first gas flow meter 12, so as to accelerate the gasification of the substances condensed on the inner wall of the outer cavity 4 and take them out of the cavity; the second branch pipe is used for passing the inert carrier gas into the absorption bucket 13 and controlling the flow rate through the second gas flow meter 16, so that the inert carrier gas can dilute the gaseous chemical substances, reduce the concentration of the chemical substances and weaken the reaction intensity between the chemical substances and the absorption liquid 17; the absorption liquid 17 in the absorption bucket 13 can react with the gaseous substances to generate stable substances; the above-mentioned double-cavity cold trap and absorption treatment device can realize two processes including cold trap condensation and absorption treatment of the condensed substances.

[0031] The inner cavity upper cover 6 is provided with an inner cavity handle 20; the inner cavity upper cover 6 and the inner cavity sealing O-ring 8 are connected through the inner cavity and upper cover fastener 18; the inner cavity upper cover 6 and the outer cavity sealing O-ring 9 are connected through the inner cavity and outer cavity fastener 19; the outer shell 3 is provided with an outer cavity handle 21. The inner cavity handle 20 and the outer cavity handle 21 are used for lifting the inner cavity 2 and the outer cavity 4. The inner cavity sealing O-ring 8, the inner cavity upper cover 6 and the inner cavity and upper cover fastener 18 are matched with each other to realize the sealing of the inner cavity 2. The outer cavity sealing O-ring 9 and the inner cavity and outer cavity fastener 19 are matched with the outer edge of the inner cavity 2 to realize the sealing of the outer cavity 4.

[0032] The base 5 is provided with a fixing bolt hole 22 for placing and fixing the whole double-cavity cold trap.

[0033] The inner cavity 2 is used for containing liquid nitrogen, dry ice or ice salt bath and the like, and is used for providing an ultracold environment; the outer cavity 4 between the inner shell 1 and the outer shell 3 is a channel for transmitting and condensing volatile chemical substances.

[0034] The exhaust port 7 is used for discharging the gas after the liquid nitrogen or dry ice contained in the inner cavity 2 is gasified, and a fixed pressure one-way valve can be installed on the exhaust port 7 according to actual needs, so as to reduce the gasification speed of the liquid nitrogen or dry ice contained in the inner cavity 2 and improve the condensation efficiency.

[0035] The first gas flow meter 12 is used for controlling the flow rate of the inert carrier gas, so as to accelerate the gasification of the substances condensed on the inner wall of the outer cavity 4 and take them out of the cavity.

[0036] The second gas flow meter 16 is used for controlling the flow rate of the inert carrier gas, so that the inert carrier gas can dilute the gaseous chemical substances, reduce the concentration of the chemical substances and weaken the reaction intensity between the chemical substances and the absorption liquid 17.

[0037] The application also provides a method for implementing the double-cavity cold trap and the condensate absorption treatment device, which comprises a cold trap condensation and a condensate absorption treatment process. The cold trap condensation comprises that the gas containing the chemical substance enters the outer cavity 4 from the cold trap inlet plug valve 10, the chemical substance is condensed and remains in the cold trap under the action of the super-cooling environment provided by the inner cavity 2, and the remaining gas is discharged from the cold trap outlet plug valve 11, and the chemical substance condensed in the cold trap is directly recycled or subjected to absorption treatment. The condensate absorption treatment comprises that when the chemical substance condensed in the inner cavity 4 needs to be removed, the cold trap inlet plug valve 10 is connected with the inert carrier gas and the first gas flow meter 12, which is used for accelerating the gasification of the chemical substance condensed on the inner wall of the outer cavity 4 and taking it out of the cavity, the cold trap outlet plug valve 11 is connected with the absorption barrel 13 and the pipeline is inserted below the liquid level of the absorption liquid 17, and the inert carrier gas is introduced into the gasified chemical substance through the second gas flow meter 16 before the pipeline is inserted into the liquid level, so as to dilute the gasified chemical substance, reduce the intensity of the reaction between the chemical substance and the absorption liquid 17, and ensure the safe absorption.

[0038] The cold trap condensation specifically comprises that the cold trap inlet plug valve 10 and the cold trap outlet plug valve 11 and the first gas flow meter 12 are connected, in the reaction process of the volatile chemical substance (such as chemical vapor deposition, atomic layer deposition, etc.), the excess chemical substance and by-products are connected to the cold trap inlet plug valve 10 through the pipeline, the inner cavity 2 is provided with liquid nitrogen, dry ice or ice salt bath, etc. to condense the gaseous chemical substance, the cold trap outlet plug valve 11 is connected with a vacuum pump, and the plug valves are in an open state, so that the excess chemical substance and by-products flow through the double-cavity cold trap with the carrier gas to realize condensation and absorption; after the reaction is completed, the plug valves are closed to ensure that the condensed substance in the double-cavity cold trap is not leaked, and the safe transfer is realized; the cold trap inlet plug valve 10 is connected with the inert carrier gas and the first gas flow meter 12, which is used for introducing the inert carrier gas to accelerate the gasification of the chemical substance condensed on the inner wall of the outer cavity 4 and take it out of the cavity.

[0039] The absorption liquid 17 is one of water, alkaline liquid and acidic liquid, and different absorption liquids 17 can be selected according to the type of the gas.

[0040] The specific embodiments of the application are given below, and it should be noted that the application is not limited to the following specific embodiments, and any equivalent transformation made on the basis of the technical solutions of the application falls within the protection scope of the application.

[0041] Embodiment: Atomic layer deposition (ALD) preparation of alumina (Al2O3) cold trap absorption and post-chemical absorption treatment: This embodiment provides a double-cavity cold trap and a condensate absorption treatment device and a method for implementing the same, and the precursors selected for the ALD process for preparing Al2O3 are trimethylaluminum (Al(CH3)3) and deionized water (H2O).

[0042] The double-layer cold trap processing size is as shown in Figure 2 ; Figure 3 The processing physical map is shown.

[0043] The double-layer cold trap inner cavity injects cold source selection liquid nitrogen, and a one-way valve is additionally installed at the exhaust port, and the pneumatic pressure is 0.12 MPa.

[0044] In the process of preparing aluminum oxide by ALD, the ALD equipment reactor outlet is connected with the double-cavity cold trap inlet gate valve, the outlet gate valve is connected with the vacuum pump, and the connection mode is as shown in Figure 4 .

[0045] After the ALD reaction is completed, the cold trap internal condensate includes Al(CH3)3 and H2O, and the alkaline solution of sodium hydroxide (NaOH) is selected as the absorption liquid, and the specific connection mode is as shown in Figure 1 . The inert carrier gas is nitrogen (N2), the gas flow meter 1 and the gas flow meter 2 are set to 100 sccm and 200 sccm respectively.

[0046] After the treatment is completed and the liquid nitrogen in the cold trap is removed, the inert carrier gas injection and the rear-end chemical absorption are kept for 10 minutes, so as to ensure that the condensate in the cold trap is completely volatilized and completely removed.

[0047] The preferred embodiments of the present application are described in detail in combination with the drawings, but the present application is not limited to the specific details in the above-described embodiments, and various simple modifications can be made to the technical solutions of the present application within the technical concept of the present application, and these simple modifications all belong to the protection scope of the present application.

[0048] In addition, it should be noted that each specific technical feature described in the above-described specific embodiments can be combined in any appropriate manner without contradiction. In order to avoid unnecessary repetition, various possible combination manners are not described again in the present application.

[0049] In addition, various different embodiments of the present application can also be combined in any manner, as long as it does not deviate from the technical concept of the present application, and it should be considered as disclosed content of the present application.

Claims

1. A dual-chamber cold trap and condensate absorption treatment device, characterized by, It comprises a double-cavity cold trap and an absorption treatment device. The double-cavity cold trap comprises an inner shell (1) and an inner cavity (2) inside the inner shell (1), an outer shell (3) surrounding the inner shell (1) and an outer cavity (4) inside the outer shell (3), a base (5) at the bottom of the outer shell (3), an inner cavity upper cover (6) arranged at the top of the inner shell (1), an exhaust port (7) arranged at the center of the inner cavity upper cover (6), an inner cavity sealing O-ring (8) groove and the inner cavity sealing O-ring (8) located between the inner cavity upper cover (6) and the top edge of the inner shell (1), an outer cavity sealing O-ring (9) groove and the outer cavity sealing O-ring (9) located between the inner cavity sealing O-ring (8) and the top edge of the outer shell (3), a cold trap inlet and a cold trap inlet plug valve (10) arranged on the upper part of the outer shell (3), a cold trap outlet and a cold trap outlet plug valve (11) arranged on the lower part of the outer shell (3); a first gas flow meter (12) is arranged on the pipeline connected to the cold trap inlet; The absorption treatment device comprises an absorption barrel (13) and a top cover thereof, an inlet pipeline (14) and an exhaust pipeline (15) penetrating through the top cover; a first branch pipe at the upper part of the inlet pipeline (14) is connected to the cold trap outlet, a second gas flow meter (16) is arranged on the second branch pipe at the top of the inlet pipeline (14), and an absorption liquid (17) is arranged in the absorption barrel (13) into which the lower part of the inlet pipeline (14) extends.

2. The dual-chamber cold trap and condensed material absorption treatment device of claim 1, wherein, An inner cavity handle (20) is arranged on the inner cavity upper cover (6); the inner cavity upper cover (6) and the inner cavity sealing O-ring (8) are connected through inner cavity and upper cover fasteners (18); the inner cavity upper cover (6) and the outer cavity sealing O-ring (9) are connected through inner cavity and outer cavity fasteners (19); and an outer cavity handle (21) is arranged on the outer shell (3).

3. The dual-chamber cold trap and condensed material absorption treatment device of claim 1, wherein, A fixing bolt hole (22) is arranged on the base (5).

4. The dual-chamber cold trap and condensed material absorption treatment device of claim 1, wherein, The inner cavity (2) is used for providing an ultra-cold environment by containing liquid nitrogen, dry ice or an ice-salt bath; and the outer cavity (4) between the inner shell (1) and the outer shell (3) is a volatile chemical substance transmission and condensation channel.

5. The dual-chamber cold trap and condensed material absorption treatment device of claim 1, wherein, The exhaust port (7) is used for discharging the gas generated after the liquid nitrogen or dry ice contained in the inner cavity (2) is vaporized.

6. The dual-chamber cold trap and condensed material absorption treatment device of claim 1, wherein, The first gas flow meter (12) is used for controlling the flow of inert carrier gas, accelerating the vaporization of the substances condensed on the inner wall of the outer cavity (4) and taking them out of the cavity.

7. The dual-chamber cold trap and condensed material absorption treatment device of claim 1, wherein, The second gas flow meter (16) is used for controlling the flow of inert carrier gas, diluting the vaporized chemical substances, reducing the concentration of the chemical substances and weakening the reaction intensity between the chemical substances and the absorption liquid (17).

8. A method of implementing the dual-cavity cold trap and condensate absorption treatment apparatus according to any one of claims 1 to 7, characterized by, It comprises a cold trap condensation and absorption treatment process of condensed substances. The cold trap condensation comprises the following steps: the gas containing chemical substances enters the outer cavity through the cold trap inlet plug valve, the chemical substances are condensed under the action of the ultra-cold environment provided by the inner cavity and remain in the cold trap, the remaining gas is discharged from the cold trap outlet plug valve, and the condensed chemical substances in the cold trap are directly recycled or subjected to absorption treatment. The condensing matter absorption treatment includes: when the chemical matter to be condensed inside the outer cavity needs to be removed, the cold trap inlet plug valve is connected with the inert carrier gas and the first gas flow meter, which is used to accelerate the gasification of the chemical matter condensed on the inner wall of the outer cavity and take it out of the cavity; the cold trap outlet plug valve is connected with the absorption barrel and the pipeline is inserted below the liquid level of the absorption liquid, and at the same time, the inert carrier gas is introduced into the gasified chemical matter through the second gas flow meter before the pipeline is inserted into the liquid level, so as to dilute the gasified chemical matter, reduce the intensity of the reaction between the chemical matter and the absorption liquid, and ensure the safe absorption.

9. The method of implementing a dual-chamber cold trap and condensate absorption treatment device according to claim 8, characterized in that, The cold trap condensing specifically includes: during the reaction process of the volatile chemical matter, the excess chemical matter and by-products are connected to the cold trap inlet plug valve through the pipeline, the inner cavity is placed in liquid nitrogen, dry ice or ice salt bath to condense the gaseous chemical matter, the cold trap outlet plug valve is connected with the vacuum pump, and the plug valves are all in the open state, so that the excess chemical matter and by-products flow through the double-cavity cold trap with the carrier gas to realize the condensation and absorption; after the reaction is completed, the plug valves are closed to ensure that the condensed matter inside the double-cavity cold trap is not leaked, and the safe transfer is realized; the cold trap inlet plug valve is connected with the inert carrier gas and the first gas flow meter, which is used to introduce the inert carrier gas to accelerate the gasification of the chemical matter condensed on the inner wall of the outer cavity and take it out of the cavity.

10. The method for implementing the dual-cavity cold trap and condensate absorption and treatment device as described in claim 8, characterized in that, The absorption liquid is one of water, alkaline liquid and acidic liquid.

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