Positioning mechanism for plasma coating

Abstract

The invention discloses a positioning mechanism for plasma coating, which relates to the field of plasma coating equipment and comprises a coating box, an upper cavity cover is fixed on the inner top wall of the coating box through screws, a lower cavity cover matched with the upper cavity cover is arranged below the upper cavity cover, and a coating nozzle is mounted in the center of the top of the upper cavity cover. The coating nozzle penetrates through the cover body and the box body through a connecting pipe and is connected with an external plasma generator; protective shells are fixed to the inner walls of the two sides of the lower cavity cover correspondingly, positioning mechanisms are arranged in the protective shells, the two positioning mechanisms are each composed of a clamping assembly and an alternate contraction assembly, the clamping assemblies clamp, position and rotate a base material, the alternate contraction assemblies switch clamping and positioning points of the base material after the clamping assemblies rotate, and the clamping assemblies are fixed to the lower cavity cover; according to the invention, the dynamic rotation of the base material in the coating process is realized, a new contact positioning point is automatically switched, the problem of the contact blind area of a fixed clamp is thoroughly eliminated, and plasma particles are uniformly deposited.

Description

Technical Field

[0001] This invention relates to the technical field of plasma coating equipment, specifically a positioning mechanism for plasma coating. Background Technology

[0002] Plasma deposition technology is an advanced thin film preparation process. Its core principle is to use plasma as a deposition source and uniformly deposit materials in the form of thin films onto the substrate surface through specific physical and chemical processes. This technology makes full use of the high activity and high energy characteristics of plasma, and can achieve high-quality thin film deposition at relatively low temperatures, thus it is widely used in the preparation of various functional thin films.

[0003] The positioning mechanisms of existing plasma coating machines mostly adopt fixed clamps or single adsorption structures, which have obvious defects: the contact area between the fixed clamp and the substrate is prone to forming coating blind spots, resulting in incomplete coating on the substrate surface; although adsorption positioning can reduce contact, particle deposition and shading problems still exist on the adsorption surface, and it cannot be adapted to the stable positioning of irregular or irregular substrates. In addition, traditional positioning mechanisms lack dynamic adjustment capabilities, and the fixed posture of the substrate during the coating process further aggravates the blind spot problem, affecting product consistency and functionality. Summary of the Invention

[0004] Based on this, the purpose of the present invention is to provide a positioning mechanism for plasma coating, so as to solve the technical problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: A positioning mechanism for plasma coating includes a coating chamber, an upper chamber cover fixed to the inner top wall of the coating chamber by screws, a matching lower chamber cover below the upper chamber cover, a coating nozzle installed at the top center of the upper chamber cover, and the coating nozzle being connected to an external plasma generator through a connecting pipe passing through the cover and the chamber. The inner walls on both sides of the lower cavity cover are fixed with protective shells. The protective shells are equipped with positioning mechanisms. Each of the two positioning mechanisms consists of a clamping component and an alternating contraction component. The clamping component is used to clamp and position the substrate and rotate it. The alternating contraction component is used to switch the clamping and positioning point of the substrate after the clamping component rotates, so as to ensure that the substrate does not shift and the original clamping blind area is exposed.

[0006] Specifically, the clamping assembly includes a turntable and a drive motor. The turntable has an I-shaped cross-section. A rotating shaft is fixed to one outer wall of the turntable and is rotatably connected to the inner wall of the protective shell. Guide rods are symmetrically fixed to the other side of the turntable. A first sleeve is fitted on each of the two guide rods. The ends of the two first sleeves penetrate the protective shell and are fixed with a first abutment block. The two first abutment blocks are in contact with the side wall of the substrate. A connecting plate is fixed to each of the two first sleeves near the outer wall of the turntable. The two connecting plates are fixedly connected by an annular plate.

[0007] Specifically, in this technical solution, the drive motor is mounted on the inner wall of the protective shell by screws. The outer wall of the output end of the drive motor and the outer wall of the inner ring of the turntable are both fixedly fitted with transmission wheels. The two transmission wheels are connected by a transmission chain. A threaded rod passes through the annular plate, and the inner ring of the annular plate is threadedly engaged with the threaded rod.

[0008] Specifically, in this technical solution, a fixing plate is embedded in the inner wall of the protective shell at the threaded rod. A horizontal rod is fixed to the outer wall of the fixing plate. An insertion hole is opened at the end of the threaded rod near the fixing plate. A through groove is opened on the horizontal rod. An electromagnet is fixed in the middle of the through groove. Pushing blocks are movably arranged on both sides of the through groove and electromagnet. Sliding rods are symmetrically arranged on the two pushing blocks. Each sliding rod is fixedly connected to the outer wall of the electromagnet. A spring is sleeved on the outside of each sliding rod and fixed to the pushing block and the outer wall of the electromagnet. The hole wall has a groove that matches the pushing block.

[0009] Specifically, the alternating contraction assembly includes two shafts and a U-shaped mounting plate. The two shafts are symmetrically distributed on both sides of the rotating shaft in the clamping assembly. Both shafts are rotatably connected to the inner wall of the protective shell. Driven sprockets are fixedly sleeved on the outer walls of both shafts. Driven sprockets are fixedly sleeved on the outer walls of the rotating shaft. The drive sprockets are connected to the two driven sprockets via chain drive. A first magnetic block is fixed at the center of the side of the two shafts away from the inner wall of the protective shell.

[0010] Specifically, in this technical solution, the two mounting plates are respectively covered outside the corresponding shafts. Both mounting plates are fixedly connected to the inner sidewall of the protective shell, and a lead screw is inserted through the center of each of the two mounting plates. A second magnetic block is fixed to one end of each lead screw near the shaft. The second magnetic block is magnetically connected to the first magnetic block. A second sleeve is fitted outside each of the two lead screws. The ends of the two second sleeves penetrate the protective shell and are fixed with a second abutment block.

[0011] Specifically, in this technical solution, the two second sleeves are on the same horizontal line as the first sleeve in the clamping assembly, and the two second sleeves are connected by a U-shaped plate, which is located on the outer wall of the other end of the second sleeve.

[0012] Specifically, in this technical solution, pressure sensors are installed in both of the second abutment blocks and are electrically connected to an external control terminal.

[0013] Specifically, in this technical solution, the top of the upper cavity cover is connected to a vacuum tube on one side of the coating nozzle, and the vacuum tube passes through the coating box and is connected to a vacuum pump.

[0014] Specifically, in this technical solution, the upper cavity cover has insertion slots on both sides of its bottom end, and the lower cavity cover has insertion blocks that match the insertion slots fixed on both sides of its top end. The bottom wall of the coating box is symmetrically equipped with electric telescopic cylinders by screws, and the telescopic ends of the two electric telescopic cylinders are fixedly connected to the bottom wall of the lower cavity cover by screws.

[0015] In summary, the present invention has the following advantages: the clamping component enables the substrate to rotate dynamically during the coating process, effectively dispersing the deposition obstruction formed by the fixed contact point; in conjunction with the alternating shrinkage component, the magnetic transmission mechanism drives the second abutment block to extend and retract, automatically switching to a new contact positioning point after the substrate rotates 180°, ensuring that the original contact area is completely exposed under the coating nozzle, completely eliminating the problem of contact blind spots of the fixed fixture, allowing plasma particles to be deposited evenly, and ensuring that the substrate surface is fully coated in all directions; Furthermore, the symmetrical abutment block clamping mode does not rely on the flatness of the substrate surface. It can adapt to irregular and non-standard substrates by flexibly adjusting the abutment position. Combined with continuous positioning during rotation, it solves the problem of poor coating consistency caused by the lack of dynamic adjustment capability in traditional mechanisms. At the same time, the protective shell effectively protects the core components such as the transmission wheel, magnetic block, and lead screw inside the positioning mechanism, preventing the plasma environment or coating particles from corroding the internal components and extending the service life of the mechanism. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the coating box structure on the positive axis of the present invention; Figure 2 This is a schematic diagram of the upper cavity cover and lower cavity cover from the positive axis side of the present invention; Figure 3 For the present invention Figure 2 Front view sectional structural schematic diagram; Figure 4 This is a side-section schematic diagram of the protective shell structure of the present invention. Figure 5 This is a schematic diagram of the oblique axial structure of the protective shell of the present invention; Figure 6This is a schematic diagram of the clamping component structure of the present invention; Figure 7 This is a schematic diagram of the alternating contraction component structure of the present invention; Figure 8 This is a schematic diagram of the separation structure of the alternating contraction component of the present invention; Figure 9 This is a schematic diagram of the fixing plate and threaded rod structure of the present invention.

[0017] Attached Figure Descriptions: 1. Coating Box; 101. Upper Chamber Cover; 1011. Insertion Slot; 102. Lower Chamber Cover; 1021. Insertion Block; 103. Coating Nozzle; 1031. Connecting Pipe; 104. Vacuum Tube; 2. Electric Telescopic Cylinder; 3. Protective Shell; 301. Fixing Plate; 302. Horizontal Bar; 3021. Through Slot; 303. Electromagnet; 3031. Sliding Rod; 304. Pushing Block; 4. Positioning Mechanism; 5. Clamping Assembly; 501. Turntable; 5011. Rotating Shaft; 502. Guide Rod; 503. First Set 5031, First abutting block; 504, Connecting plate; 5041, Annular plate; 505, Threaded rod; 5051, Insertion hole; 506, Drive motor; 5061, Transmission wheel; 5062, Transmission chain; 6, Alternating contraction assembly; 601, Drive sprocket; 602, Shaft; 6021, Driven sprocket; 603, Chain; 604, First magnetic block; 605, Mounting plate; 606, Lead screw; 6061, Second magnetic block; 607, Second sleeve; 6071, Second abutting block; 608, U-shaped plate. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0019] The embodiments of the present invention will now be described.

[0020] It should be noted that the coating box 1 is equipped with a controller (not shown in the figure). The controller is electrically connected to the plasma generator, vacuum pump, electric telescopic cylinder 2, electromagnet 303, drive motor 506 and pressure sensor through wires. As the core control unit of the entire positioning mechanism 4, the controller can accurately control the operating status of each component according to the preset program or real-time feedback signal.

[0021] In this embodiment, please refer to Figure 1 - Figure 5As shown, a positioning mechanism for plasma coating includes a coating chamber 1. An upper chamber cover 101 is fixed to the inner top wall of the coating chamber 1 by screws. A matching lower chamber cover 102 is provided below the upper chamber cover 101. A coating nozzle 103 is installed at the center of the top of the upper chamber cover 101. The coating nozzle 103 is connected to an external plasma generator through a connecting pipe 1031 that passes through the cover and the chamber. A vacuum tube 104 is connected to the top of the upper chamber cover 101 on one side of the coating nozzle 103. The vacuum tube 104 passes through the coating chamber 1 and is connected to a vacuum pump. Insertion slots 1011 are provided on both sides of the bottom end of the upper chamber cover 101. Insertion blocks 1021 that match the insertion slots 1011 are fixed on both sides of the top end of the lower chamber cover 102. Electric telescopic cylinders 2 are symmetrically installed on the bottom wall of the coating chamber 1 by screws. The telescopic ends of the two electric telescopic cylinders 2 are fixedly connected to the bottom wall of the lower chamber cover 102 by screws. The inner walls on both sides of the lower cavity cover 102 are fixed with protective shells 3. The protective shells 3 are equipped with positioning mechanisms 4. Both positioning mechanisms 4 are composed of clamping components 5 and alternating contraction components 6. The clamping components 5 are used to clamp and position the substrate and rotate it. The alternating contraction components 6 are used to switch the clamping and positioning points of the substrate after the clamping components 5 are rotated, so as to ensure that the substrate does not shift and the original clamping blind area is exposed.

[0022] During plasma coating of the substrate, the operator activates the electric telescopic cylinder 2 via the controller, controlling its telescopic end to retract downwards, causing the lower cavity cover 102 to move downwards synchronously until the lower cavity cover 102 is completely separated from the upper cavity cover 101, exposing the positioning area inside the lower cavity cover 102. The operator then smoothly places the substrate to be coated into the preset bearing position inside the lower cavity cover 102. At this time, the electromagnet 303 inside the horizontal rod 302 is de-energized, and under the elastic action of the spring, pushes the block 304 into the slot in the insertion hole 5051, activating the clamping assembly 5 and driving the motor 506 to control... Turntable 501 rotates, which drives guide rod 502, first sleeve 503 and first abutting block 5031 to rotate synchronously. Due to the action of push block 304, threaded rod 505 is in a fixed state. At this time, the two moving first sleeves 503 will move forward along the thread of threaded rod 505 until the first abutting block 5031 abuts against the two side walls of the substrate, completing the clamping and positioning of the substrate. During the clamping process, the second sleeve 607 in the alternating contraction assembly 6 moves backward and is blocked by protective shell 3. Under the action of magnetic transmission, it will not affect the operation of clamping assembly 5. Then, the controller starts the electric telescopic cylinder 2 to extend its telescopic end upward, pushing the lower cavity cover 102 upward until the plug block 1021 is fully embedded in the plug slot 1011, realizing the tight closure of the upper cavity cover 101 and the lower cavity cover 102. At this time, a closed space is formed inside the coating box 1. Then, the vacuum pump extracts the air inside the coating box 1 through the vacuum tube 104, so that the air pressure inside the box reaches the preset vacuum degree, creating a stable environment for plasma coating. Then, by starting the plasma generator, the generated highly active plasma is transported to the coating nozzle 103 through the connecting tube 1031. The coating nozzle 103 sprays the plasma evenly onto the surface of the substrate. After a period of time, the controller starts the drive motor 506 to reverse, causing the turntable 501 to rotate at a constant speed. Through the guide rod 502 and the first sleeve 503, the substrate rotates synchronously, so that the surface of the substrate is initially covered by plasma in all directions. During the reverse rotation of the turntable 501, the second sleeve 607 in the alternating contraction assembly 6 is driven to move forward, and the second abutment block 6071 also contacts and clamps the side walls of the substrate. At this time, the pressure sensor sends a signal to the controller after sensing the pressure. The controller de-energizes the electromagnet 303, and the push block 304 is inserted into the slot under the action of the spring. This causes the original first abutment block 5031 to gradually move away from the side wall of the substrate, while the second abutment block 6071 firmly clamps the substrate, realizing seamless switching of the clamping positioning point. Plasma particles can be uniformly deposited on the lower surface of the substrate and the area covered by the first abutment block 5031, completely eliminating the problem of contact blind spots of the fixing fixture and ensuring that the surface of the substrate is fully coated in all directions. When the coating time reaches the preset value, the external controller first sends a command to the plasma generator to stop plasma generation, and the coating nozzle 103 stops spraying. Then, the vacuum pump is controlled to stop working, and inert gas is slowly filled into the coating chamber 1 through the vacuum tube 104 to gradually restore the air pressure in the chamber to normal pressure, so as to avoid damage to the substrate caused by sudden pressure changes. Then, the controller starts the electric telescopic cylinder 2, controls its telescopic end to retract downward, and drives the lower chamber cover 102 to move down synchronously until the lower chamber cover 102 is completely separated from the upper chamber cover 101. The external controller de-energizes the electromagnet 303 and starts the drive motor 506 to rotate forward, so that the second abutment block 6071 retracts, cancels the clamping of the substrate, and the staff can easily take out the substrate that has been coated. This enables dynamic rotation, effectively dispersing the deposition obstruction formed by fixed contact points, and automatically switching to new contact positioning points after the substrate rotates, ensuring that the original contact area is fully exposed under the coating nozzle 103, completely eliminating the problem of contact blind spots of the fixed fixture, allowing plasma particles to be deposited evenly, ensuring that the substrate surface is fully coated in all directions. Furthermore, the double-sided symmetrical abutment block clamping mode does not rely on the flatness of the substrate surface, and can be adapted to irregular and irregular substrates by flexibly adjusting the abutment position. Combined with continuous positioning during the rotation process, it solves the problem of poor coating consistency caused by the lack of dynamic adjustment capability in traditional mechanisms.

[0023] Please see Figure 4 , Figure 6 and Figure 9 As shown, the clamping assembly 5 includes a turntable 501 and a drive motor 506. The turntable 501 has an I-shaped cross-section. A rotating shaft 5011 is fixed to one outer wall of the turntable 501, and the rotating shaft 5011 is rotatably connected to the inner wall of the protective shell 3. Guide rods 502 are symmetrically fixed to the other side of the turntable 501. A first sleeve 503 is fitted on each of the two guide rods 502. The ends of the two first sleeves 503 penetrate the protective shell 3 and are fixed with first abutment blocks 5031. The two first abutment blocks 5031 are in contact with the side wall of the substrate. A connecting plate 504 is fixed to the outer wall of the sleeve 503 near the turntable 501. The two connecting plates 504 are fixedly connected by an annular plate 5041. The drive motor 506 is installed on the inner wall of the protective shell 3 by screws. The outer wall of the output end of the drive motor 506 and the outer wall of the inner ring of the turntable 501 are both fixedly fitted with transmission wheels 5061. The two transmission wheels 5061 are connected by transmission chain 5062. A threaded rod 505 is passed through the annular plate 5041. The inner ring of the annular plate 5041 is threadedly engaged with the threaded rod 505. The inner wall of the protective shell 3 is embedded with a fixing plate 301 at the threaded rod 505. A horizontal rod 302 is fixed to the outer wall of the fixing plate 301. An insertion hole 5051 is opened at the end of the threaded rod 505 near the fixing plate 301. A through groove 3021 is opened on the horizontal rod 302. An electromagnet 303 is fixed in the middle of the through groove 3021. Pushing blocks 304 are movably arranged on both sides of the through groove 3021 and the electromagnet 303. Sliding rods 3031 are symmetrically arranged on the two pushing blocks 304. Each sliding rod 3031 is fixedly connected to the outer wall of the electromagnet 303. A spring is sleeved on the outside of each sliding rod 3031 and fixed to the pushing block 304 and the outer wall of the electromagnet 303. The hole wall of the insertion hole 5051 is provided with a groove that matches the pushing block 304.

[0024] When clamping the substrate, the electromagnet 303 is de-energized. The pushing block 304, under the elastic action of the spring, extends out of the slot 3021 along the slide bar 3031 and inserts into the slot in the insertion hole 5051 of the threaded rod 505, fixing the threaded rod 505. At this time, the drive motor 506 starts, and its output drives the turntable 501 to rotate via the transmission wheel 5061 and transmission chain 5062. The turntable 501 drives the two guide rods 502 to rotate. The first sleeve 503 is rotated, and the two rotating first sleeves 503 drive the connecting plate 504 to rotate, so that the annular plate 5041 moves along the thread on the threaded rod 505. Since the threaded rod 505 is fixed by the push block 304, the movement of the annular plate 5041 will drive the two first sleeves 503 to move along the guide rod 502 towards the substrate, thereby causing the first abutting block 5031 to gradually approach and finally abut against the two side walls of the substrate, completing the clamping action of the substrate. When the substrate needs to be rotated during the coating process to switch the clamping positioning point, the controller energizes the electromagnet 303. The electromagnet 303 generates magnetic attraction to push the block 304, causing the push block 304 to overcome the spring force and retract along the slide bar 3031 into the slot 3021, disengaging from the slot in the threaded rod 505 insertion hole 5051, thus releasing the fixation on the threaded rod 505. This allows the threaded rod 505 to rotate with the annular plate 5041. Under the action of the alternating contraction component 6, the second abutment block 6071 moves forward and contacts the clamping substrate. The built-in pressure sensor senses the pressure and sends a signal to the controller. After receiving the signal, the controller de-energizes the electromagnet 303 and re-fixes the threaded rod 505. At this time, rotating the annular plate 5041 will drive the first sleeve 503 to move along the outer wall of the threaded rod 505, controlling the first abutment block 5031 to move in the opposite direction and gradually move away from the substrate, achieving seamless switching of the clamping positioning point and ensuring stable positioning and all-round coverage of the substrate during the coating process.

[0025] Please see Figure 4 , Figure 5 , Figure 7 and Figure 8 As shown, the alternating contraction assembly 6 includes two shafts 602 and a U-shaped mounting plate 605. The two shafts 602 are symmetrically distributed on both sides of the rotating shaft 5011 provided in the clamping assembly 5. Both shafts 602 are rotatably connected to the inner wall of the protective shell 3. The outer walls of both shafts 602 are fixedly fitted with driven sprockets 6021. The outer walls of the rotating shaft 5011 are fixedly fitted with driving sprockets 601. The driving sprockets 601 and the two driven sprockets 6021 are connected by a chain 603. A first magnetic block 604 is fixed at the center of the side of the two shafts 602 away from the inner wall of the protective shell 3. Two mounting plates 605 are respectively covered on the outside of the corresponding shafts 602. Both mounting plates 605 are fixedly connected to the inner wall of the protective shell 3. A lead screw 606 is inserted through the center of each mounting plate 605. A second magnetic block 6061 is fixed to one end of each lead screw 606 near the shaft 602. The second magnetic block 6061 is magnetically connected to the first magnetic block 604. A second sleeve 607 is sleeved on the outside of each lead screw 606. The ends of the two second sleeves 607 penetrate the protective shell 3 and are fixed with a second abutment block 6071. The two second sleeves 607 are on the same horizontal line as the first sleeve 503 in the clamping assembly 5. The two second sleeves 607 are connected by a U-shaped plate 608. The U-shaped plate 608 is located on the outer wall of the other end of the second sleeve 607. A pressure sensor is installed in each of the two second abutment blocks 6071 and is electrically connected to an external control terminal.

[0026] When the substrate is rotated, the rotation of the turntable 501 drives the rotating shaft 5011 to rotate, and the drive sprocket 601 on the rotating shaft 5011 rotates accordingly. Through the transmission of the chain 603, the two driven sprockets 6021 rotate synchronously, thereby driving the two shafts 602 to rotate. When the shafts 602 rotate, the first magnetic block 604 on them also rotates. Due to the magnetic connection between the first magnetic block 604 and the second magnetic block 6061, the second magnetic block 6061 will rotate following the rotation of the first magnetic block 604, thereby driving the lead screw 606 to rotate. The rotation of 06 causes the second sleeve 607 to move along the axial direction of the lead screw 606. Since the two second sleeves 607 are connected by the U-shaped plate 608, the two second sleeves 607 will move synchronously, causing the second abutment block 6071 to contact and clamp the substrate. At the same time, the pressure sensor senses the pressure and sends a signal to the controller. After receiving the signal, the controller de-energizes the electromagnet 303 and re-fixes the threaded rod 505, so that the first abutment block 5031 can gradually move away from the substrate under the action of the annular plate 5041, realizing seamless switching of the clamping positioning point.

[0027] The working principle of this invention is as follows: During plasma coating of the substrate, the operator activates the electric telescopic cylinder 2 via the controller, controlling its telescopic end to retract downwards, causing the lower cavity cover 102 to move downwards synchronously until the lower cavity cover 102 is completely separated from the upper cavity cover 101, exposing the positioning area inside the lower cavity cover 102. The operator then smoothly places the substrate to be coated into the preset bearing position inside the lower cavity cover 102. At this time, the electromagnet 303 inside the horizontal rod 302 is de-energized, and the pushing block 304 extends out of the through slot 3021 along the slide rod 3031 under the elastic action of the spring, and inserts into the slot opened in the insertion hole 5051 of the threaded rod 505 to fix the threaded rod 505. At this time, the drive motor 506 starts, and its output end drives the turntable 50 through the transmission wheel 5061 and the transmission chain 5062. 1. Rotation: Turntable 501 drives two guide rods 502 to rotate, the two guide rods 502 drive the first sleeve 503 to rotate, and the two rotating first sleeves 503 drive the connecting plate 504 to rotate, so that the annular plate 5041 moves along the thread on the threaded rod 505. Since the threaded rod 505 is fixed by the push block 304, the movement of the annular plate 5041 will drive the two first sleeves 503 to move along the guide rod 502 towards the substrate, so that the first abutting block 5031 gradually approaches and finally abuts against the two side walls of the substrate, completing the clamping action of the substrate. During the clamping process, the second sleeve 607 in the alternating contraction assembly 6 moves backward and is blocked by the protective shell 3. Under the action of magnetic transmission, it will not affect the operation of the clamping assembly 5. Then, the controller starts the electric telescopic cylinder 2 to extend its telescopic end upward, pushing the lower cavity cover 102 upward until the plug block 1021 is fully embedded in the plug slot 1011, realizing the tight closure of the upper cavity cover 101 and the lower cavity cover 102. At this time, a closed space is formed inside the coating box 1. Then, the vacuum pump extracts the air inside the coating box 1 through the vacuum tube 104, so that the air pressure inside the box reaches the preset vacuum degree, creating a stable environment for plasma coating. Then, by starting the plasma generator, the generated highly active plasma is transported to the coating nozzle 103 through the connecting tube 1031. The coating nozzle 103 sprays the plasma evenly onto the surface of the substrate. After a period of time, the controller starts the drive motor 506 to reverse and energizes the electromagnet 303. The electromagnet 303 generates magnetic attraction to push the block 304, causing the push block 304 to overcome the spring force and retract along the slide bar 3031 into the slot 3021, disengaging from the slot in the threaded rod 505's insertion hole 5051. This releases the threaded rod 505 from its fixation, allowing it to rotate with the annular plate 5041. This causes the turntable 501 to rotate at a constant speed. The rotation of the turntable 501 drives the rotating shaft 5011 to rotate, and the drive sprocket 601 on the shaft 5011 rotates accordingly. Through the transmission of the chain 603, the two driven sprockets 6021 rotate synchronously, thereby driving the two shafts 602 to rotate. When the shafts 602 rotate, the first magnetic block 604 on them also rotates. Rotation: Due to the magnetic connection between the first magnetic block 604 and the second magnetic block 6061, the second magnetic block 6061 will rotate along with the rotation of the first magnetic block 604, thereby driving the lead screw 606 to rotate. The rotation of the lead screw 606 causes the second sleeve 607 to move along the axial direction of the lead screw 606. Since the two second sleeves 607 are connected by the U-shaped plate 608, the two second sleeves 607 will move synchronously, driving the second abutment block 6071 to contact and clamp the substrate. At the same time, the pressure sensor senses the pressure and sends a signal to the controller. After receiving the signal, the controller de-energizes the electromagnet 303 and re-fixes the threaded rod 505, so that the first abutment block 5031 can gradually move away from the substrate under the drive of the annular plate 5041, realizing seamless switching of the clamping positioning point. When the coating time reaches the preset value, the external controller first sends a command to the plasma generator to stop plasma generation, and the coating nozzle 103 stops spraying. Then, the vacuum pump is controlled to stop working, and inert gas is slowly filled into the coating chamber 1 through the vacuum tube 104 to gradually restore the air pressure in the chamber to normal pressure, so as to avoid damage to the substrate caused by sudden pressure changes. Then, the controller starts the electric telescopic cylinder 2, controls its telescopic end to retract downward, and drives the lower chamber cover 102 to move down synchronously until the lower chamber cover 102 is completely separated from the upper chamber cover 101. The external controller de-energizes the electromagnet 303 and starts the drive motor 506 to rotate forward, so that the second abutment block 6071 retracts, canceling the clamping of the substrate, and the staff can easily take out the coated substrate.

[0028] Although embodiments of the present invention have been shown and described, these specific embodiments are merely explanations of the invention and are not intended to limit it. The specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. After reading this specification, those skilled in the art may make modifications, substitutions, and variations to the embodiments as needed without departing from the principles and spirit of the invention, but such modifications, substitutions, and variations are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A positioning mechanism for plasma coating, comprising a coating box (1), characterized in that, The inner top wall of the coating chamber (1) is fixed with an upper chamber cover (101) by screws. A matching lower chamber cover (102) is provided below the upper chamber cover (101). A coating nozzle (103) is installed at the top center of the upper chamber cover (101). The coating nozzle (103) is connected to an external plasma generator through a connecting pipe (1031) that passes through the cover and the chamber. The inner walls of both sides of the lower cavity cover (102) are fixed with protective shells (3). The protective shells (3) are equipped with positioning mechanisms (4). Both positioning mechanisms (4) are composed of clamping components (5) and alternating shrinking components (6). The clamping components (5) are used to clamp and position the substrate and rotate it. The alternating shrinking components (6) are used to switch the clamping and positioning points of the substrate after the clamping components (5) are rotated, so as to ensure that the substrate does not shift and the original clamping blind area is exposed.

2. The positioning mechanism for plasma coating according to claim 1, characterized in that, The clamping assembly (5) includes a turntable (501) and a drive motor (506). The turntable (501) has an I-shaped cross-section. A rotating shaft (5011) is fixed on one outer wall of the turntable (501). The rotating shaft (5011) is rotatably connected to the inner wall of the protective shell (3). A guide rod (502) is symmetrically fixed on the other side of the turntable (501). A first sleeve (503) is sleeved on each of the two guide rods (502). The ends of the two first sleeves (503) penetrate the protective shell (3) and are fixed with a first abutting block (5031). The two first abutting blocks (5031) are in contact with the side wall of the substrate. A connecting plate (504) is fixed near the outer wall of the turntable (501) of the two first sleeves (503). The two connecting plates (504) are fixedly connected by an annular plate (5041).

3. The positioning mechanism for plasma coating according to claim 2, characterized in that, The drive motor (506) is mounted on the inner wall of the protective shell (3) by screws. The outer wall of the output end of the drive motor (506) and the outer wall of the inner ring of the turntable (501) are both fixedly fitted with transmission wheels (5061). The two transmission wheels (5061) are connected by a transmission chain (5062). A threaded rod (505) is inserted in the annular plate (5041). The inner ring of the annular plate (5041) is threadedly engaged with the threaded rod (505).

4. The positioning mechanism for plasma coating according to claim 2, characterized in that, The inner wall of the protective shell (3) is embedded with a fixing plate (301) at the threaded rod (505). A horizontal rod (302) is fixed to the outer wall of the fixing plate (301). An insertion hole (5051) is provided at the end of the threaded rod (505) near the fixing plate (301). A through groove (3021) is provided on the horizontal rod (302). An electromagnet (303) is fixed in the middle of the through groove (3021). The through groove (3021) is located at the electromagnet Push blocks (304) are movably provided on both sides of the iron (303). Slide rods (3031) are symmetrically provided on the two push blocks (304). Each slide rod (3031) is fixedly connected to the outer wall of the electromagnet (303). A spring is sleeved on the outside of each slide rod (3031) and fixed to the outer wall of the push block (304) and the electromagnet (303). The hole wall of the insertion hole (5051) is provided with a groove that matches the push block (304).

5. The positioning mechanism for plasma coating according to claim 1, characterized in that, The alternating contraction assembly (6) includes two shafts (602) and a U-shaped mounting plate (605). The two shafts (602) are symmetrically distributed on both sides of the rotating shaft (5011) provided in the clamping assembly (5). Both shafts (602) are rotatably connected to the inner wall of the protective shell (3). The outer walls of the two shafts (602) are fixedly fitted with driven sprockets (6021). The outer walls of the rotating shaft (5011) are fixedly fitted with driving sprockets (601). The driving sprockets (601) and the two driven sprockets (6021) are connected by a chain (603). A first magnetic block (604) is fixed at the center of the side of the two shafts (602) away from the inner wall of the protective shell (3).

6. The positioning mechanism for plasma coating according to claim 5, characterized in that, Two mounting plates (605) are respectively covered outside the corresponding shaft (602). Both mounting plates (605) are fixedly connected to the inner wall of the protective shell (3). A lead screw (606) is provided at the center of each mounting plate (605). A second magnetic block (6061) is fixed at one end of each lead screw (606) near the shaft (602). The second magnetic block (6061) is magnetically connected to the first magnetic block (604). A second sleeve (607) is sleeved on the outside of each lead screw (606). The ends of the two second sleeves (607) penetrate the protective shell (3) and are fixed with a second abutment block (6071).

7. A positioning mechanism for plasma coating according to claim 6, characterized in that, The two second sleeves (607) are on the same horizontal line as the first sleeve (503) in the clamping assembly (5). The two second sleeves (607) are connected by a U-shaped plate (608), which is located on the outer wall of the other end of the second sleeve (607).

8. A positioning mechanism for plasma coating according to claim 6, characterized in that, Pressure sensors are installed in both of the second abutment blocks (6071) and are electrically connected to an external control terminal.

9. A positioning mechanism for plasma coating according to claim 1, characterized in that, The top of the upper chamber cover (101) is connected to a vacuum tube (104) on one side of the coating nozzle (103). The vacuum tube (104) passes through the coating box (1) and is connected to the vacuum pump.

10. A positioning mechanism for plasma coating according to claim 1, characterized in that, The upper cavity cover (101) has insertion slots (1011) on both sides of its bottom end. The lower cavity cover (102) has insertion blocks (1021) that match the insertion slots (1011) on both sides of its top end. The bottom wall of the coating box (1) is symmetrically equipped with electric telescopic cylinders (2) by screws. The telescopic ends of the two electric telescopic cylinders (2) are fixedly connected to the bottom wall of the lower cavity cover (102) by screws.

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