Ceramic electrostatic chuck processing flow machine

Abstract

The application provides a ceramic electrostatic chuck processing flow casting machine, which comprises a support base, a feeding unit for mixing and feeding ceramic electrostatic chuck substrate materials, a flow casting unit for flow casting processing of the ceramic electrostatic chuck substrate, and a cleaning unit arranged below a base tape transmission assembly and used for cleaning the surface of the base tape transmission assembly. The material for manufacturing the ceramic electrostatic chuck substrate in the mixing frame shell is stirred and mixed by the scraping and stirring assembly and the auxiliary mixing assembly to form slurry, the stirring directions of the scraping and stirring assembly and the auxiliary mixing assembly are different, the problem of stirring dead angle can be avoided, the mixing efficiency of the slurry in the mixing frame shell is improved, the slurry with uneven particles is avoided to be discharged, and the quality of the flow casting of the ceramic electrostatic chuck substrate is improved.

Description

Technical Field

[0001] This invention relates to the field of ceramic electrostatic chuck processing, and more particularly to a ceramic electrostatic chuck casting machine. Background Technology

[0002] Ceramic electrostatic chucks are ultra-clean wafer carriers suitable for vacuum and plasma environments, playing a crucial role in semiconductor manufacturing and other fields. Their basic principle is based on electrostatic adsorption, using the attraction between opposite charges to hold the wafer. Ceramic electrostatic chucks are commonly used in semiconductor manufacturing, serving as core components of PVD, CVD, etching, and ion implantation equipment. They are widely applied in wafer manufacturing processes such as etching, chemical vapor deposition, and ion implantation in plasma and vacuum environments. In the optoelectronics industry, they are used to fix and hold various optical components, such as lenses and filters, with their high-precision positioning and holding capabilities playing a vital role. In precision instrument manufacturing, they are used to fix and hold various precision components, ensuring their accuracy and stability. Their excellent wear resistance and anti-aging properties ensure long-term stable application in precision instrument manufacturing. In other industrial sectors, they are also widely used in aerospace, automotive manufacturing, and electronics manufacturing to fix and hold objects of various materials, shapes, and sizes, ensuring the stability and precision of the production process.

[0003] The electrostatic chuck casting process is a key process for producing ceramic substrate thin films. It can prepare large-area, ultra-thin ceramic substrates and has a wide range of applications. It can be used for the preparation of single-phase or multi-phase ceramic thin film materials, and the product composition fluctuates little and the performance is stable.

[0004] Casting machines are essential equipment in the casting process. In the Chinese utility model patent "Announcement No.: CN21640027U, Title: An Automated Thin Film Casting Machine", the slurry in the mixing cylinder can be uniformly stirred by the coordinated arrangement of the drive motor, rotating rod, and stirring rod. Then, the slurry on the mixing cylinder and partition can be scraped off by the coordinated arrangement of the connecting rod and scraper, preventing slurry from adhering to the mixing cylinder and partition. However, in the above application, the stirring rod and scraper rotate in the same direction, which creates dead corners in the slurry flow, affecting the mixing efficiency of the slurry and easily causing unevenly sized slurry to be discharged, thus affecting the quality of the ceramic electrostatic chuck substrate. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to overcome the defects of the existing technology in which the stirring direction is singular, which affects the mixing efficiency and the quality of casting, and to provide a ceramic electrostatic chuck casting machine.

[0006] The present invention solves the above-mentioned technical problems through the following technical solution:

[0007] This invention provides a ceramic electrostatic chuck casting machine, including a support base.

[0008] The feeding unit is used for mixing and feeding the ceramic electrostatic chuck substrate material;

[0009] The feeding unit includes a mixing frame and a feeding housing. The feeding housing is located below the mixing frame. Both the mixing frame and the feeding housing are connected to a support frame at their bottoms. The support frame is connected to the top of a support base. A central rotating shaft is provided inside the mixing frame. One end of the central rotating shaft is connected to the output end of a mixing power source. A scraping component and an auxiliary mixing component are provided in the inner cavity of the mixing frame. The scraping component and the auxiliary mixing component are connected in a driving connection. The scraping component is connected to the surface of the central rotating shaft. A feeding component is provided in the inner cavity of the feeding housing.

[0010] A casting unit is used for casting ceramic electrostatic chuck substrates.

[0011] A cleaning unit is disposed below the baseband transmission assembly, and the cleaning unit is used to clean the surface of the baseband transmission assembly;

[0012] The cleaning unit includes a liquid storage box and a second brush removal component. The liquid storage box is provided with a flexible squeegee, a water spray component, a first brush removal component, and a second brush removal component in sequence. The upper end of the flexible squeegee is in contact with the surface of the baseband transmission component. The flexible squeegee, the water spray component, the first brush removal component, and the second brush removal component are connected by a drive transmission component.

[0013] In this technical solution, a scraping component and an auxiliary mixing component are used to stir and mix the materials for making ceramic electrostatic chuck substrates in the mixing frame to form a slurry. The scraping component and the auxiliary mixing component have different stirring directions, which can avoid the problem of stirring dead corners, thereby improving the mixing efficiency of the slurry in the mixing frame, preventing the discharge of slurry with uneven particles, and increasing the quality of ceramic electrostatic chuck substrate casting.

[0014] Preferably, the scraping assembly includes a scraping frame, and a plurality of scraping frames are connected to the surface of the central rotating shaft, with one end of the scraping frame contacting the inner wall of the mixing frame.

[0015] The multiple scraping frames are divided into two groups that are symmetrically distributed from left to right, and the multiple scraping frames in each group are arranged in a ring array;

[0016] The surface of the central rotating shaft is connected to a plurality of inner stirring bars arranged in a ring array. The end of the inner stirring bar away from the central rotating shaft is connected to a fixed sleeve. The side of the fixed sleeve is connected to an outer stirring bar. The end of the outer stirring bar away from the fixed sleeve is connected to one side of the scraper.

[0017] In this technical solution, the scraping and stirring component can be used to stir and mix the slurry in the mixing frame.

[0018] Preferably, the auxiliary mixing assembly includes an auxiliary mixing rotating shaft, and two fixed sleeves located on the same horizontal straight line are rotatably connected to the surface of the auxiliary mixing rotating shaft. The center of the auxiliary mixing rotating shaft is fixedly connected to a rotating gear through a through connection.

[0019] The side of the rotating gear meshes with the inner side of the fixed gear ring, and the outer side of the fixed gear ring is connected to a plurality of support columns arranged in a ring array. The support columns are connected to the inner wall of the mixing frame.

[0020] The auxiliary mixing rotating shaft surface is connected to multiple mixing and stirring blades.

[0021] In this technical solution, the mixing components and the scraping components have opposite stirring directions, which can improve the mixing efficiency of the slurry.

[0022] Preferably, the feeding assembly includes a feeding auger, which is disposed in the inner cavity of the feeding housing. One end of the feeding auger is rotatably and through-connected to the inner wall of one side of the feeding housing, and the end of the feeding auger away from the feeding housing is connected to the output end of the feeding power source.

[0023] The side of the feeding housing away from the material conveying power source is connected to the discharge pipe.

[0024] In this technical solution, the feeding component can be used to feed material to the casting component.

[0025] Preferably, the system includes a casting molding unit, which includes a protective shell and a film-forming knife assembly. The protective shell is connected to the top of the support base. A baseband transmission assembly is installed on the inner wall of the protective shell. A casting assembly is disposed above one side of the baseband transmission assembly. The upper part of the casting assembly is connected to the end of the discharge pipe away from the feeding shell. Drying assemblies are disposed on the upper and lower sides of the middle part of the baseband transmission assembly. A film-forming knife assembly is disposed on the other side of the baseband transmission assembly.

[0026] In this technical solution, a ceramic electrostatic chuck substrate can be fabricated using a casting molding unit.

[0027] Preferably, the drying component includes an upper air outlet duct and a lower air inlet duct, which are respectively located on the upper and lower sides of the baseband transmission component. The opposite ends of the upper air outlet duct and the lower air inlet duct are each connected to a conductive pipe, and the surface of the conductive pipe is fixedly and through-connected to the protective shell.

[0028] The opposite ends of the two conductive pipes are connected to the hot air circulator assembly, which is connected to the outside of the protective housing.

[0029] In this technical solution, a drying component can be used to dry the fabricated ceramic electrostatic chuck substrate.

[0030] Preferably, the water spray assembly includes a water spray tube, one end of which is rotatably and through-connected to one side of the liquid storage box and one side of the protective shell, and the other end of which is rotatably and through-connected to the surface of the discharge pipe.

[0031] One end of the discharge pipe is connected through to one side of the liquid storage box and one side of the protective shell, and the end of the discharge pipe away from the water spray cylinder is connected to the outlet end of the water spray pump. The water spray pump is connected to the outside of the protective shell.

[0032] The inlet end of the spray pump is connected to an inlet pipe, the surface of which is connected through the protective shell and the liquid storage box. The end of the inlet pipe away from the spray pump is connected to a filter screen.

[0033] In this technical solution, the baseband body can be cleaned by water washing using a water spray assembly.

[0034] Preferably, the brushing assembly includes a brushing rotating shaft, one end of which is rotatably connected to the inner wall of the liquid storage box, and the other end of which is rotatably connected through to one side of the liquid storage box and one side of the protective shell.

[0035] The surface of the brushing rotating shaft is connected to multiple cleaning soft brushes, with the cleaning soft brush located at the top in contact with the bottom surface of the baseband transmission component.

[0036] In this technical solution, the baseband body can be brushed using the brushing component.

[0037] Preferably, the second brushing component includes a sliding mounting plate, and a plurality of second cleaning soft brushes are connected to the top of the sliding mounting plate;

[0038] The inner wall of the liquid storage box is connected to multiple fixed columns. The surface of the fixed columns is slidably connected to the sliding mounting plate. Multiple elastic reset members are connected to both sides of the fixed columns. The end of the elastic reset member away from the fixed column is connected to the inner wall of the liquid storage box.

[0039] The bottom of the fixed column is connected to a driven push plate, and a push column is connected to one side of the driven push plate. The surface of the push column is slidably connected through to one side of the liquid storage box and one side of the protective shell.

[0040] The end of the push column away from the driven push plate is connected to the active push plate, and an eccentric wheel is contacted on the side of the active push plate away from the push column.

[0041] In this technical solution, the baseband body can be brushed from another direction using the brushing component two.

[0042] Preferably, the drive assembly includes a drive frame, which is connected to the outside of the protective shell. A drive power source is provided on the outside of the drive frame. The output end of the drive power source is connected to one end of the active push plate. The other end of the active push plate is connected to a drive shaft. One end of the drive shaft is rotatably connected to the inner wall of the drive frame.

[0043] Two main bevel gears are connected to the surface of the drive shaft. Each of the two main bevel gears is meshed with a secondary bevel gear on its side. The two secondary bevel gears are respectively connected to one end of the brushing rotating shaft and one end of the water spray cylinder.

[0044] In this technical solution, the protective housing can simultaneously provide driving force for the water spray assembly, brush removal assembly one, and brush removal assembly two.

[0045] Based on common knowledge in the field, the above-mentioned preferred conditions can be combined arbitrarily to obtain various preferred embodiments of the present invention.

[0046] The positive and progressive effects of this invention are as follows:

[0047] This invention utilizes a scraping component and an auxiliary mixing component to stir and mix the materials for making ceramic electrostatic chuck substrates within a mixing frame to form a slurry. The scraping component and the auxiliary mixing component have different stirring directions, which can avoid the problem of stirring dead zones, thereby improving the mixing efficiency of the slurry within the mixing frame and preventing the discharge of slurry with uneven particles, thus increasing the quality of the ceramic electrostatic chuck substrate casting.

[0048] The design of the water spray component, brush removal component one, and brush removal component two allows for brushing and washing of the baseband body, and the drying component is used to dry the baseband body, thereby improving the cleaning effect of the baseband body. The flexible squeegee strip can be used to scrape off the cleaning water on the baseband body, thus improving the drying efficiency of the drying component.

[0049] Furthermore, brushing component one and brushing component two can brush the baseband body horizontally and vertically, which can prevent the baseband body from having any unbrushed areas during brushing.

[0050] Simultaneously, brushing component one and brushing component two can scrape or loosen impurities with strong adhesion to the baseband body surface (such as residual slurry, particle agglomerates, oil stains or oxide layers, etc.), thereby making it easier for the water spray component to wash away impurities on the baseband body surface, improving the cleanliness of the baseband body, and avoiding impurities adhering to the baseband body from affecting the casting process of the ceramic electrostatic chuck substrate.

[0051] Furthermore, the scraping and mixing components are driven by a mixing power source, while the water spraying component, brush removal component one, and brush removal component two are driven by a drive transmission power source. No additional power equipment is required, which can reduce energy consumption and reduce the manufacturing and operating costs of the casting machine, making the casting machine more environmentally friendly to use. Attached Figure Description

[0052] Figure 1 This is a schematic diagram of the overall front-side three-dimensional structure of the ceramic electrostatic chuck casting machine according to an embodiment of the present invention.

[0053] Figure 2 for Figure 1 The diagram shows the overall rear-side three-dimensional structure of the ceramic electrostatic chuck casting machine.

[0054] Figure 3 for Figure 1 The diagram shows the overall front cross-sectional structure of the ceramic electrostatic chuck casting machine.

[0055] Figure 4 for Figure 1 The diagram shows a three-dimensional structure of the feeding unit and casting assembly of the ceramic electrostatic chuck casting machine.

[0056] Figure 5 for Figure 1 The diagram shows a cross-sectional view of the feeding unit of a ceramic electrostatic chuck casting machine.

[0057] Figure 6 for Figure 4 The diagram shows a three-dimensional structure of the rotating shaft, mixing power source, scraping assembly, and auxiliary mixing assembly of the ceramic electrostatic chuck casting machine.

[0058] Figure 7 for Figure 6 The diagram shows a front cross-sectional view of the rotating shaft, mixing power source, scraping assembly, and auxiliary mixing assembly of the ceramic electrostatic chuck casting machine.

[0059] Figure 8 for Figure 6 The diagram shows a side cross-sectional view of the rotating shaft, mixing power source, scraping assembly, and auxiliary mixing assembly of the ceramic electrostatic chuck casting machine.

[0060] Figure 9 for Figure 1 The diagram shows a three-dimensional structural schematic of the cleaning unit and the casting unit of the ceramic electrostatic chuck casting machine.

[0061] Figure 10 for Figure 9 The diagram shows a cross-sectional view of the cleaning unit and the casting unit of the ceramic electrostatic chuck casting machine.

[0062] Figure 11 for Figure 9 The diagram shows a three-dimensional structural schematic of the drying component of a ceramic electrostatic chuck casting machine.

[0063] Figure 12 for Figure 9 The diagram shows a three-dimensional structural diagram of the cleaning unit of a ceramic electrostatic chuck casting machine.

[0064] Figure 13 for Figure 12 The diagram shows a side view of the cleaning unit of the ceramic electrostatic chuck casting machine.

[0065] Figure 14 for Figure 12 The diagram shows the three-dimensional structure of the water spray assembly, brush removal assembly 1, brush removal assembly 2, and drive assembly of the ceramic electrostatic chuck casting machine. Figure 1 .

[0066] Figure 15 for Figure 12 The diagram shows the three-dimensional structure of the water spray assembly, brush removal assembly 1, brush removal assembly 2, and drive assembly of the ceramic electrostatic chuck casting machine. Figure 2 .

[0067] Explanation of reference numerals in the attached figures

[0068] 1. Support base;

[0069] 2. Mixed frame shells;

[0070] 3. Feeding housing;

[0071] 4. Support frame; 41. Support side plate one; 42. Support side plate two; 43. Support frame plate; 44. Reinforcing plate;

[0072] 5. Central rotation axis;

[0073] 6. Mixed power source;

[0074] 7. Scraping assembly; 71. Scraping frame; 72. Inner stirring bar; 73. Fixing sleeve; 74. Outer stirring bar;

[0075] 8. Auxiliary mixing assembly; 81. Auxiliary mixing rotating shaft; 82. Rotating gear; 83. Fixed gear ring; 84. Support column; 85. Mixing and stirring blades;

[0076] 9. Feeding assembly; 91. Conveying auger; 92. Conveying power source; 93. Discharge pipeline;

[0077] 10. Protective outer casing;

[0078] 11. Baseband transmission assembly; 111. Drive roller; 112. Baseband body; 113. Central support shaft;

[0079] 12. Casting assembly; 121. Casting head; 122. Scraper; 123. Lifting device;

[0080] 13. Drying assembly; 131. Upper air outlet duct; 132. Lower air inlet duct; 133. Connecting duct; 134. Hot air circulator assembly;

[0081] 14. Diaphragm lifting knife assembly;

[0082] 15. Liquid storage box;

[0083] 16. Flexible wiper blades;

[0084] 17. Spray assembly; 171. Spray nozzle; 172. Discharge pipe; 173. Spray pump; 174. Inlet pipe; 175. Filter screen housing;

[0085] 18. Brush component one; 181. Brush rotating shaft; 182. Clean soft brush one;

[0086] 19. Brush assembly two; 191. Sliding mounting plate; 192. Cleaning soft brush two; 193. Fixing post; 194. Elastic reset element; 195. Driven push plate; 196. Push post; 197. Active push plate; 198. Eccentric wheel;

[0087] 20. Drive assembly; 201. Drive housing; 202. Drive power source; 203. Drive shaft; 204. Main bevel gear; 205. Secondary bevel gear. Detailed Implementation

[0088] The present invention will be further illustrated by way of embodiments below, but the present invention is not limited to the scope of the embodiments described herein.

[0089] Figures 1 to 15 The diagram shown is a structural schematic of an embodiment of the ceramic electrostatic chuck casting machine of the present invention. The ceramic electrostatic chuck casting machine includes a support base 1.

[0090] The feeding unit is used for mixing and feeding the ceramic electrostatic chuck substrate material;

[0091] The feeding unit includes a mixing frame shell 2 and a feeding shell 3. The feeding shell 3 is located below the mixing frame shell 2. Both the mixing frame shell 2 and the feeding shell 3 are connected to a support frame 4 at their bottom. The support frame 4 is connected to the top of the support base 1. A central rotating shaft 5 is provided inside the mixing frame shell 2. One end of the central rotating shaft 5 is connected to the output end of the mixing power source 6. A scraping component 7 and an auxiliary mixing component 8 are provided in the inner cavity of the mixing frame shell 2. The scraping component 7 and the auxiliary mixing component 8 are connected in a driving connection. The scraping component 7 is connected to the surface of the central rotating shaft 5. A feeding component 9 is provided in the inner cavity of the feeding shell 3.

[0092] The top of the mixing frame 2 is connected to a feeding pipe, and a cover plate is detachably installed above the feeding pipe.

[0093] In use, the material for making the ceramic electrostatic chuck substrate is added into the mixing frame 2 through the feeding pipe.

[0094] A transfer pipe is connected between the mixing frame 2 and the feeding shell 3, and the inner cavities of the mixing frame 2 and the feeding shell 3 are connected through the transfer pipe.

[0095] The material transfer pipe is located at the bottom center of the mixing frame shell 2 and on one side of the top of the feeding shell 3, and a shut-off valve is installed inside the material transfer pipe;

[0096] This shut-off valve can be a manual shut-off valve or an electric shut-off valve.

[0097] The support frame 4 includes a first support side plate 41 and a second support side plate 42. The outer side of the mixing frame shell 2 is connected to two symmetrically distributed first support side plates 41. The outer side of the feeding shell 3 is connected to two symmetrically distributed second support side plates 42. The bottom of the first support side plate 41 and the second support side plate 42 are both connected to the top of the support frame plate 43. The bottom of the support frame plate 43 is connected to the top of the support base 1.

[0098] The cross-section of the support frame plate 43 is an inverted U-shaped structure, and two symmetrically distributed reinforcing plates 44 are connected to the inner side of the support frame plate 43.

[0099] When in use, the support frame 4 can support the mixing frame 2 and the feeding shell 3 and other structures.

[0100] The two ends of the central rotating shaft 5 are rotatably connected to the two sides of the mixing frame 2, the mixing power source 6 is connected inside the fixed frame, and the fixed frame is connected to the outside of the mixing frame 2.

[0101] A casting unit is used for casting ceramic electrostatic chuck substrates.

[0102] A cleaning unit is disposed below the baseband transmission assembly 11 and is used to clean the surface of the baseband transmission assembly 11.

[0103] The cleaning unit includes a liquid storage box 15 and a second brush removal component 19. The liquid storage box 15 is provided with a flexible squeegee 16, a water spray component 17, a first brush removal component 18, and a second brush removal component 19 in sequence. The upper end of the flexible squeegee 16 is in contact with the surface of the baseband transmission component 11. The flexible squeegee 16, the water spray component 17, the first brush removal component 18, and the second brush removal component 19 are connected by a drive transmission component 20.

[0104] In this technical solution, the scraping component 7 and the auxiliary mixing component 8 are used to stir and mix the materials for making ceramic electrostatic chuck substrates in the mixing frame 2 to form a slurry. The scraping component 7 and the auxiliary mixing component 8 have different stirring directions, which can avoid the problem of stirring dead corners, thereby improving the mixing efficiency of the slurry in the mixing frame 2, preventing the discharge of slurry with uneven particles, and increasing the quality of ceramic electrostatic chuck substrate casting.

[0105] In comparison, the stirring uniformity (particle size deviation) in the prior art is generally controlled at ≤5μm, while the stirring uniformity (particle size deviation) of this application can be optimized to ≤2μm, which is 60% higher than the prior art; the baseband impurity residue rate in the prior art is ≤0.5%, while the baseband impurity residue rate in this application is ≤0.1%; the substrate qualification rate in the prior art is ≤92%, while the substrate qualification rate in this application is ≥98%; at the same time, the stirring efficiency of this application is improved by more than 30% and the stirring time is shortened by 25% compared with the prior art; this application effectively reduces the defects and impurities on the substrate surface and improves the overall quality and performance of the substrate.

[0106] The scraping assembly 7 includes a scraping frame 71, and a plurality of scraping frames 71 are connected to the surface of the central rotating shaft 5. One end of the scraping frame 71 contacts the inner wall of the mixing frame 2.

[0107] The plurality of scraping frames 71 are divided into two groups that are symmetrically distributed from left to right, and the plurality of scraping frames 71 in each group are arranged in a ring array;

[0108] The surface of the central rotating shaft 5 is connected to a plurality of inner stirring bars 72 arranged in a ring array. The end of the inner stirring bar 72 away from the central rotating shaft 5 is connected to a fixed sleeve 73. The side of the fixed sleeve 73 is connected to an outer stirring bar 74. The end of the outer stirring bar 74 away from the fixed sleeve 73 is connected to one side of the scraper 71.

[0109] The scraping frame 71 is composed of a rigid L-shaped fixing strip and an adhesive strip. A flexible adhesive strip is connected to one side of the fixing strip, and the adhesive strip is in contact with the inner wall of the mixing frame 2.

[0110] The multiple inner stirring bars 72 are divided into two groups that are symmetrically distributed from left to right. The multiple inner stirring bars 72 in each group are arranged in a ring array. The number of inner stirring bars 72 and fixed sleeves 73 is the same.

[0111] In this technical solution, the scraping and stirring component 7 can be used to stir and mix the slurry in the mixing frame 2.

[0112] The auxiliary mixing assembly 8 includes an auxiliary mixing rotating shaft 81, and two fixed sleeves 73 located on the same horizontal straight line are rotatably connected to the surface of the auxiliary mixing rotating shaft 81. The center of the auxiliary mixing rotating shaft 81 is fixedly connected to a rotating gear 82 through connection.

[0113] The side of the rotating gear 82 meshes with the inner side of the fixed gear ring 83. The outer side of the fixed gear ring 83 is connected to a plurality of support columns 84 arranged in a ring array. The support columns 84 are connected to the inner wall of the mixing frame shell 2.

[0114] The auxiliary mixing rotating shaft 81 has multiple mixing and stirring blades 85 connected to its surface.

[0115] In this technical solution, the mixing component 8 and the scraping component 7 have opposite stirring directions, which can improve the mixing efficiency of the slurry.

[0116] When in use, the mixing power source 6 drives the central rotating shaft 5 to rotate, which in turn drives the scraper 71 and the inner stirring bar 72 to rotate. When the inner stirring bar 72 rotates, it drives the fixed sleeve 73 to rotate, which in turn drives the outer stirring bar 74 to rotate. When the scraper 71, the inner stirring bar 72 and the outer stirring bar 74 rotate, the slurry in the mixing frame 2 can be stirred and mixed.

[0117] When the fixed sleeve 73 rotates, it can drive the auxiliary mixing rotating shaft 81 to rotate, which in turn drives the rotating gear 82 to rotate around the central rotating shaft 5. At this time, under the action of the fixed gear ring 83, the rotating gear 82 can rotate along the fixed gear ring 83, which can drive the auxiliary mixing rotating shaft 81 to rotate, and then drive the mixing stirring blade 85 to rotate. The mixing stirring blade 85 is used to further mix the slurry in the mixing frame shell 2, and the mixing stirring blade 85 and the scraping component 7 have different mixing directions.

[0118] When the scraper 71 rotates, it can clean the inner wall of the mixing frame 2, preventing the slurry from adhering to the inner wall of the mixing frame 2, so as to facilitate the subsequent cleaning of the mixing frame 2.

[0119] The feeding assembly 9 includes a feeding auger 91, which is disposed in the inner cavity of the feeding housing 3. One end of the feeding auger 91 is rotatably connected to the inner wall of one side of the feeding housing 3, and the end of the feeding auger 91 away from the feeding housing 3 is connected to the output end of the feeding power source 92.

[0120] The side of the feeding housing 3 away from the material conveying power source 92 is connected to the discharge pipe 93.

[0121] In this technical solution, the feeding component 9 can be used to feed material to the casting component 12.

[0122] In use, the material conveying power source 92 drives the material conveying auger 91 to rotate, which can send the slurry to the discharge pipe 93, and then send the slurry into the casting head 121 through the discharge pipe 93. The slurry then flows onto the base belt body 112 through the casting head 121, so that the slurry can be cast and formed.

[0123] The material conveying power source 92 is connected inside the mounting frame, and the mounting frame is connected to the outside of the material supply housing 3.

[0124] A flow control valve is installed at the discharge pipe 93. The flow control valve can control the flow rate of the slurry to ensure the consistency of the film thickness. The flow rate of the slurry can also be controlled by controlling the rotation speed of the conveying auger 91.

[0125] The system includes a casting molding unit, which includes a protective shell 10 and a film-lifting knife assembly 14. The protective shell 10 is connected to the top of the support base 1. A baseband transmission assembly 11 is installed on the inner wall of the protective shell 10. A casting assembly 12 is arranged above one side of the baseband transmission assembly 11. The upper part of the casting assembly 12 is connected to the end of the discharge pipe 93 away from the feeding shell 3. Drying assemblies 13 are arranged on the upper and lower sides of the middle of the baseband transmission assembly 11. The film-lifting knife assembly 14 is arranged on the other side of the baseband transmission assembly 11.

[0126] In this technical solution, a ceramic electrostatic chuck substrate can be fabricated using a casting molding unit.

[0127] A maintenance access door is provided on one side of the protective housing 10.

[0128] The baseband transmission assembly 11 includes two drive rollers 111, the surfaces of which are covered with a baseband body 112. The two drive rollers 111 are connected by the baseband body 112, and the end face of one of the drive rollers 111 is connected to the output end of the drive motor.

[0129] A drive roller 111 near the feeding assembly 9 is a cooling forming roller;

[0130] A plurality of intermediate support shafts 113 are provided between the two drive rollers 111, and the surface of the intermediate support shafts 113 is in contact with the base belt body 112;

[0131] Both ends of the transmission roller 111 and the central support shaft 113 are rotatably connected to the protective shell 10.

[0132] In use, the transmission roller 111 drives the baseband body 112 to rotate, thereby moving the baseband body 112.

[0133] The casting assembly 12 includes a casting head 121 and a scraper 122. The scraper 122 is disposed on one side of the casting head 121. The casting head 121 is disposed above the cooling forming roller. The upper end of the casting head 121 is connected to one end of the discharge pipe 93.

[0134] The top of the scraper 122 is connected to the bottom of the lifting device 123, and the lifting device 123 is connected to the inner wall of the top surface of the protective housing 10.

[0135] In use, the discharge pipe 93 feeds the slurry into the casting head 121, and the casting head 121 evenly casts the slurry onto the base belt body 112. Then, the thickness of the slurry on the base belt body 112 is controlled by the scraper 122.

[0136] It is worth noting that, as needed, the lifting device 123 can be used to move the scraper 122, thereby controlling the distance between the scraper 122 and the baseband body 112, and thus controlling the thickness of the ceramic electrostatic chuck substrate.

[0137] The hot air circulator group 134 includes a circulating fan and a heat generator, which can be a heating wire, a heating tube, a heating substrate, etc.

[0138] Heat can be generated by the hot air circulator assembly 134, and hot air can be formed. The hot air circulates between the protective shell 10, the upper air outlet duct 131, the lower air inlet duct 132, the connecting pipe 133 and the hot air circulator assembly 134.

[0139] It is worth noting that a temperature controller is provided at one end of the lower air inlet duct 132 and the upper air outlet duct 131 near the baseband transmission assembly 11. The temperature controller is electrically connected to the hot air circulator group 134. The temperature controller can detect the temperature at the baseband transmission assembly 11 and control the heating temperature of the hot air circulator group 134 according to the detection result.

[0140] The film-forming knife assembly 14 is connected to the inner wall of the protective housing 10, and one end of the film-forming knife assembly 14 is in contact with the baseband body 112.

[0141] In use, the film-removing knife assembly 14 can peel the dried ceramic electrostatic chuck substrate from the baseband body 112, facilitating subsequent processing.

[0142] The protective shell 10 has a discharge port on one side, and two guide shafts symmetrically distributed vertically are rotatably connected to the discharge port;

[0143] A winding mechanism is provided on the outside of the outlet, which is used to wind up the stripped ceramic electrostatic chuck substrate.

[0144] The winding mechanism includes a tension control component and a web-correcting component. The tension control component ensures that the film maintains constant tension during winding, preventing wrinkles or breakage. The web-correcting component adjusts the winding position of the film to ensure neat winding.

[0145] It should be noted that the protective shell 10 is also equipped with an exhaust system to remove solvent vapors generated during the drying process and keep the working environment clean.

[0146] The drying component 13 includes an upper air outlet duct 131 and a lower air inlet duct 132. The upper air outlet duct 131 and the lower air inlet duct 132 are respectively located on the upper and lower sides of the baseband transmission component 11. The opposite ends of the upper air outlet duct 131 and the lower air inlet duct 132 are each connected to a conductive pipe 133. The surface of the conductive pipe 133 is fixedly and through-connected to the protective shell 10.

[0147] The opposite ends of the two conductive pipes 133 are connected to the hot air circulator group 134, which is connected to the outside of the protective housing 10.

[0148] In this technical solution, the drying component 13 can be used to dry the ceramic electrostatic chuck substrate.

[0149] In use, the upper air outlet duct 131 blows circulating hot air onto the ceramic electrostatic chuck substrate made by the casting assembly 12 for molding and drying. Then, the ceramic electrostatic chuck substrate base strip body 112 is separated by the film-lifting knife assembly 14, and then the ceramic electrostatic chuck substrate is wound up by the winding mechanism.

[0150] The bottom of the flexible wiper strip 16 is connected to a rigid plate, and the side of the rigid plate is in contact with the inner wall of the liquid storage box 15.

[0151] The water spray assembly 17 includes a water spray tube 171, one end of which is rotatably connected to one side of the liquid storage box 15 and one side of the protective shell 10, and the other end of which is rotatably connected to the surface of the discharge pipe 172.

[0152] One end of the discharge pipe 172 is connected through to one side of the liquid storage box 15 and one side of the protective shell 10. The end of the discharge pipe 172 away from the water spray cylinder 171 is connected to the outlet end of the water spray pump 173. The water spray pump 173 is connected to the outside of the protective shell 10.

[0153] The inlet end of the spray pump 173 is connected to an inlet pipe 174. The surface of the inlet pipe 174 is connected through the protective shell 10 and the liquid storage box 15. The end of the inlet pipe 174 away from the spray pump 173 is connected to a filter screen shell 175.

[0154] The surface of the water spray cylinder 171 is provided with a plurality of spray holes, which are funnel-shaped structures. The larger end of the spray hole is located inside the water spray cylinder 171, and the smaller end is located outside the discharge pipe 172.

[0155] In this technical solution, the baseband body 112 can be cleaned by water washing using the water spray assembly 17.

[0156] In use, the liquid in the storage box 15 can be pumped into the discharge pipe 172 and the spray tube 171 by the spray water pump 173 and the inlet pipe 174. At this time, the spray tube 171 is rotated by the drive component 20, and water is sprayed onto the surface of the baseband body 112 by the spray tube 171 to perform a water washing operation on the surface of the baseband body 112.

[0157] The brushing assembly 18 includes a brushing rotating shaft 181. One end of the brushing rotating shaft 181 is rotatably connected to the inner wall of the liquid storage box 15, and the other end of the brushing rotating shaft 181 is rotatably connected through to one side of the liquid storage box 15 and one side of the protective shell 10.

[0158] The surface of the brushing rotating shaft 181 is connected to a plurality of cleaning soft brushes 182, and the cleaning soft brushes 182 located at the top are in contact with the bottom surface of the baseband transmission assembly 11.

[0159] In this technical solution, the baseband body 112 can be brushed using the brushing component 18.

[0160] In use, the drive assembly 20 drives the brush rotation shaft 181 to rotate, which in turn drives the cleaning soft brush 182 to rotate, and the cleaning soft brush 182 is used to brush the surface of the baseband body 112.

[0161] The brush removal component 2 19 includes a sliding mounting plate 191, and a plurality of cleaning soft brushes 2 192 are connected to the top of the sliding mounting plate 191.

[0162] The inner wall of the liquid storage box 15 is connected to a plurality of fixed posts 193. The surface of the fixed posts 193 is slidably connected to the sliding mounting plate 191. A plurality of elastic reset members 194 are connected to both sides of the fixed posts 193. The end of the elastic reset member 194 away from the fixed posts 193 is connected to the inner wall of the liquid storage box 15.

[0163] The bottom of the fixed column 193 is connected to the driven push plate 195, and the side of the driven push plate 195 is connected to the push column 196. The surface of the push column 196 is slidably connected through to one side of the liquid storage box 15 and one side of the protective shell 10.

[0164] The end of the push column 196 away from the driven push plate 195 is connected to the active push plate 197, and the side of the active push plate 197 away from the push column 196 is in contact with an eccentric wheel 198.

[0165] In this technical solution, the baseband body 112 can be brushed from another direction using the brushing component 2 19.

[0166] In use, the drive assembly 20 drives the eccentric wheel 198 to rotate. With the cooperation of the elastic reset member 194, the active push plate 197 can move back and forth, thereby driving the push column 196, the driven push plate 195 and the sliding mounting plate 191 to move in the same direction in sequence. This allows the sliding mounting plate 191 to sway along the fixed column 193, thereby driving the second cleaning brush 192 to sway back and forth. Thus, the second cleaning brush 192 can be used to clean the surface of the baseband body 112.

[0167] The drive assembly 20 includes a drive frame 201, which is connected to the outside of the protective shell 10. A drive power source 202 is provided on the outside of the drive frame 201. The output end of the drive power source 202 is connected to one end of the active push plate 197. The other end of the active push plate 197 is connected to a drive shaft 203. One end of the drive shaft 203 is rotatably connected to the inner wall of the drive frame 201.

[0168] Two main bevel gears 204 are connected to the surface of the drive shaft 203. Both main bevel gears 204 are meshed with secondary bevel gears 205 on their sides. The two secondary bevel gears 205 are respectively connected to one end of the brushing rotating shaft 181 and one end of the water spray cylinder 171.

[0169] In this technical solution, the protective housing 10 can simultaneously provide driving force for the water spray assembly 17, the brush removal assembly 18, and the brush removal assembly 2 19.

[0170] In use, the drive power source 202 drives the eccentric wheel 198 to rotate, which in turn drives the drive shaft 203 to rotate, which in turn drives the two main bevel gears 204 to rotate, which in turn drives the corresponding secondary bevel gears 205 to rotate. When the two secondary bevel gears 205 rotate, they can drive the water spray tube 171 and the brush rotating shaft 181 to rotate respectively.

[0171] The entire casting machine is also equipped with a human-machine interface, which allows operators to control and monitor the casting machine and centrally control the equipment's operating parameters, such as feeding speed, base belt speed, and drying temperature.

[0172] Meanwhile, multiple sensors are installed at different locations throughout the casting machine to monitor parameters such as casting thickness and temperature in real time, ensuring the stability of the production process.

[0173] The mixing power source 6, the conveying power source 92, and the drive power source 202 are motors or other devices that can output rotational kinetic energy.

[0174] The lifting device 123 is an electric push rod, a lifting cylinder, a hydraulic lifting cylinder, or other equipment with autonomous extension and retraction functions.

[0175] The elastic reset component 194 is a spring or other component with elastic reset function.

[0176] While specific embodiments of the present invention have been described above, those skilled in the art should understand that these are merely illustrative examples, and the scope of protection of the present invention is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but all such changes and modifications fall within the scope of protection of the present invention.

Claims

1. A ceramic electrostatic chuck casting machine, comprising a support base (1), characterized in that, The ceramic electrostatic chuck processing casting machine further includes: a feeding unit, which is used to mix and feed the ceramic electrostatic chuck substrate material; The feeding unit includes a mixing frame (2) and a feeding housing (3). The feeding housing (3) is located below the mixing frame (2). Both the mixing frame (2) and the feeding housing (3) are connected to a support frame (4). The support frame (4) is connected to the top of the support base (1). A central rotating shaft (5) is provided inside the mixing frame (2). One end of the central rotating shaft (5) is connected to the output end of the mixing power source (6). A scraping component (7) and an auxiliary mixing component (8) are provided in the inner cavity of the mixing frame (2). The scraping component (7) and the auxiliary mixing component (8) are connected in a transmission. The scraping component (7) is connected to the surface of the central rotating shaft (5). A feeding component (9) is provided in the inner cavity of the feeding housing (3). A casting unit is used for casting ceramic electrostatic chuck substrates. A cleaning unit is disposed below the baseband transmission assembly (11) and is used to clean the surface of the baseband transmission assembly (11). The cleaning unit includes a liquid storage box (15) and a second brush removal component (19). The liquid storage box (15) is provided with a flexible squeegee (16), a water spray component (17), a first brush removal component (18) and a second brush removal component (19) in sequence. The upper end of the flexible squeegee (16) is in contact with the surface of the baseband transmission component (11). The flexible squeegee (16), the water spray component (17), the first brush removal component (18) and the second brush removal component (19) are connected by a drive transmission component (20). The scraping assembly (7) includes a scraper (71), and a plurality of scrapers (71) are connected to the surface of the central rotating shaft (5). One end of the scraper (71) is in contact with the inner wall of the mixing frame (2). The multiple scraping frames (71) are divided into two groups that are symmetrically distributed on the left and right, and the multiple scraping frames (71) in each group are arranged in a ring array; The surface of the central rotating shaft (5) is connected to a plurality of inner stirring bars (72) arranged in a ring array. The end of the inner stirring bar (72) away from the central rotating shaft (5) is connected to a fixed sleeve (73). The side of the fixed sleeve (73) is connected to an outer stirring bar (74). The end of the outer stirring bar (74) away from the fixed sleeve (73) is connected to one side of the scraper (71). The auxiliary mixing assembly (8) includes an auxiliary mixing rotating shaft (81), and two fixed sleeves (73) located on the same horizontal straight line are rotatably connected to the surface of the auxiliary mixing rotating shaft (81). The center of the auxiliary mixing rotating shaft (81) is fixedly connected to the rotating gear (82). The rotating gear (82) is meshed with the inner side of the fixed gear ring (83), and the outer side of the fixed gear ring (83) is connected to a plurality of support columns (84) arranged in a ring array. The support columns (84) are connected to the inner wall of the mixing frame shell (2). The auxiliary mixing rotating shaft (81) has multiple mixing blades (85) connected to its surface.

2. The ceramic electrostatic chuck casting machine as described in claim 1, characterized in that: The feeding assembly (9) includes a feeding auger (91), which is located in the inner cavity of the feeding housing (3). One end of the feeding auger (91) is rotatably connected to the inner wall of one side of the feeding housing (3), and the end of the feeding auger (91) away from the feeding housing (3) is connected to the output end of the feeding power source (92). The feeding housing (3) is connected to the discharge pipe (93) on the side away from the material conveying power source (92).

3. The ceramic electrostatic chuck casting machine as described in claim 1, characterized in that: The system includes a casting molding unit, which includes a protective shell (10) and a film-lifting knife assembly (14). The protective shell (10) is connected to the top of the support base (1). A baseband transmission assembly (11) is installed on the inner wall of the protective shell (10). A casting assembly (12) is provided on one side of the baseband transmission assembly (11). The upper part of the casting assembly (12) is connected to the end of the discharge pipe (93) away from the feeding shell (3). Drying assemblies (13) are provided on the upper and lower sides of the middle of the baseband transmission assembly (11). A film-lifting knife assembly (14) is provided on the other side of the baseband transmission assembly (11).

4. The ceramic electrostatic chuck casting machine as described in claim 3, characterized in that: The drying component (13) includes an upper air outlet duct (131) and a lower air inlet duct (132). The upper air outlet duct (131) and the lower air inlet duct (132) are respectively located on the upper and lower sides of the baseband transmission component (11). The opposite ends of the upper air outlet duct (131) and the lower air inlet duct (132) are each connected to a conductive pipe (133). The surface of the conductive pipe (133) is fixedly and through-connected to the protective shell (10). The opposite ends of the two conductive pipes (133) are connected to the hot air circulator assembly (134), which is connected to the outside of the protective housing (10).

5. The ceramic electrostatic chuck casting machine as described in claim 1, characterized in that: The water spray assembly (17) includes a water spray tube (171), one end of which is rotatably connected to one side of the liquid storage box (15) and one side of the protective shell (10), and the other end of which is rotatably connected to the surface of the discharge pipe (172). One end of the discharge pipe (172) is connected through to one side of the liquid storage box (15) and one side of the protective shell (10). The end of the discharge pipe (172) away from the water spray cylinder (171) is connected to the outlet end of the water spray pump (173). The water spray pump (173) is connected to the outside of the protective shell (10). The inlet end of the spray pump (173) is connected to an inlet pipe (174). The surface of the inlet pipe (174) is connected through to one side of the protective shell (10) and one side of the liquid storage box (15). The end of the inlet pipe (174) away from the spray pump (173) is connected to a filter screen shell (175).

6. The ceramic electrostatic chuck casting machine as described in claim 1, characterized in that: The brushing assembly (18) includes a brushing rotating shaft (181), one end of which is rotatably connected to the inner wall of the liquid storage box (15), and the other end of which is rotatably connected through to one side of the liquid storage box (15) and one side of the protective shell (10). The surface of the brushing rotating shaft (181) is connected to a plurality of cleaning soft brushes (182), and the cleaning soft brush (182) located directly above is in contact with the bottom surface of the baseband transmission assembly (11).

7. The ceramic electrostatic chuck casting machine as described in claim 1, characterized in that: The brush removal component 2 (19) includes a sliding mounting plate (191), and a plurality of cleaning soft brushes 2 (192) are connected to the top of the sliding mounting plate (191). The inner wall of the liquid storage box (15) is connected to a plurality of fixed posts (193). The surface of the fixed posts (193) is slidably connected to the sliding mounting plate (191). Both sides of the fixed posts (193) are connected to a plurality of elastic reset members (194). The end of the elastic reset member (194) away from the fixed post (193) is connected to the inner wall of the liquid storage box (15). The bottom of the fixed column (193) is connected to a driven push plate (195), and a push column (196) is connected to one side of the driven push plate (195). The surface of the push column (196) is slidably connected through to one side of the liquid storage box (15) and one side of the protective shell (10). The end of the push column (196) away from the driven push plate (195) is connected to the active push plate (197), and the side of the active push plate (197) away from the push column (196) is in contact with an eccentric wheel (198).

8. The ceramic electrostatic chuck casting machine as described in claim 1, characterized in that: The drive assembly (20) includes a drive frame (201), which is connected to the outside of the protective shell (10). A drive power source (202) is provided on the outside of the drive frame (201). The output end of the drive power source (202) is connected to one end of the active push plate (197). The other end of the active push plate (197) is connected to a drive shaft (203). One end of the drive shaft (203) is rotatably connected to the inner wall of the drive frame (201). The drive shaft (203) has two main bevel gears (204) connected to its surface. The two main bevel gears (204) are each meshed with a secondary bevel gear (205) on their sides. The two secondary bevel gears (205) are respectively connected to one end of the brushing rotating shaft (181) and one end of the water spray cylinder (171).

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