Moving mirror flexible support adjusting mechanism, optical system and adjusting method

Abstract

The invention relates to the field of precise optical structure design, in particular to a movable mirror flexible supporting and adjusting mechanism which comprises an integrally-formed mirror frame, a flexible supporting and adjusting mechanism and a flexible supporting and adjusting mechanism, the mirror frame comprises an outer frame and an inner frame, and the inner frame is connected to the outer frame through at least two flexible hinges which are orthogonally arranged; the at least two extension springs are respectively bridged between the outer frame and the inner frame; the precise thread pairs are installed on the side wall of the outer frame, and the output ends of the precise thread pairs abut against the flexible hinge or the side wall of the inner frame; and the at least two displacement sensor assemblies comprise sensing target pieces fixed on the inner frame and sensor bodies fixed on the outer frame, and the sensing target pieces and the sensor bodies are oppositely arranged to realize non-contact displacement measurement. Motion transmission is achieved through elastic deformation of the flexible hinge, the problems of friction and abrasion caused by a traditional sliding pair are solved, the adjusting precision is improved, and the service life is prolonged. By means of the pre-tensioning design of the extension spring, automatic resetting can be achieved after adjustment is completed, and repeated calibration operation is supported.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of precision optical structure design, in particular to a moving mirror flexible support adjusting mechanism, an optical system and an adjusting method. BACKGROUND

[0002] In modern high-precision optical systems, the position stability of optical elements (such as mirrors) directly affects the imaging quality and optical path alignment accuracy of the system. Due to factors such as mechanical vibration, temperature change or installation error, the optical elements are prone to positional deviation, which causes the light beam to deviate from the ideal path, and further causes wavefront distortion or energy loss. Therefore, there is an urgent need for a precision adjusting mechanism that can correct the positional deviation of the mirror in real time.

[0003] At present, common moving mirror adjusting mechanisms mainly fall into two categories: The first category is a rigid support combined with a linear guide rail / bearing driving mechanism. For example, Chinese patent CN104730680A discloses a mirror seat moving device based on a roller screw pair and a high-precision linear guide rail. This scheme uses a motor to drive the screw to rotate, which drives the mirror seat to slide along the linear guide rail, thereby achieving position adjustment. However, this type of structure has friction, wear and backlash between the moving pairs, which not only affects the repeatability of the positioning accuracy, but also may contaminate the optical environment due to the shedding of particles. In addition, rigid connection easily transmits stress to the mirror surface, causing surface distortion and reducing optical performance.

[0004] The second category is a fully flexible driving mechanism based on flexible hinges. For example, Chinese patent CN114114585A proposes a three-pivot Z-direction adjusting flexible structure, which realizes tilt adjustment through differential control. This type of structure relies on material elastic deformation to transmit motion, has the advantages of no friction, no backlash and no need for lubrication, and is suitable for nanoscale fine adjustment. However, it usually has a large volume and a complex structure, especially when multiple degrees of freedom are integrated, it is difficult to meet the design requirements of compact optical systems. At the same time, the flexible structure has low stiffness and weak anti-interference ability, and is easily affected by external disturbances, which affects the stability of the adjustment.

[0005] In addition, most existing flexible structures only support one-way adjustment and lack effective reset mechanisms. Most sensing feedback systems require additional guide components or occupy axial space, which is not conducive to applications with limited Z-direction height.

[0006] In summary, the existing technology still has obvious defects in terms of adjusting accuracy, structural compactness, bidirectional reversibility, thermal adaptability and closed-loop control integration, and it is difficult to meet the needs of high-end optical systems for long-term stable, high-precision and small-sized adjusting mechanisms. SUMMARY

[0007] The purpose of this invention is to provide a flexible support and adjustment mechanism for a moving mirror, which can solve at least one defect in the prior art to a certain extent.

[0008] Another objective of this invention is to provide an adjustment method for a flexible support adjustment mechanism for a moving mirror, which can, to a certain extent, solve at least one defect existing in the prior art.

[0009] The technical solution of this invention is implemented as follows: A flexible support and adjustment mechanism for a moving mirror includes: A one-piece molded eyeglass frame, the eyeglass frame including an outer frame and an inner frame, the inner frame being connected to the outer frame by at least two orthogonally arranged flexible hinges; At least two tension springs are respectively connected between the outer frame and the inner frame to provide an initial positioning force and a bidirectional restoring force to the inner frame; At least two precision threaded pairs are installed on the outer frame sidewall, with their output ends abutting against the flexible hinge or inner frame sidewall, for pushing the inner frame to move along the X or Y direction; At least two displacement sensor assemblies, including a sensing target fixed to the inner frame and a sensor body fixed to the outer frame, are arranged opposite to each other to achieve non-contact displacement measurement; Each of the flexible hinges has a spring flexible mechanism on its opposite side to enhance the stiffness of the frame in the non-adjustment direction and suppress parasitic movement.

[0010] Furthermore, the flexible hinge is a straight circular flexible hinge, symmetrically arranged around the X-axis and Y-axis respectively, so that the inner frame can produce an approximately linear XY plane translational motion under small deformation conditions.

[0011] Furthermore, the reed flexible mechanism is located on the opposite side of the flexible hinge, and is in the form of a cantilever beam or U-shaped groove structure. Its material thickness or width is locally thinned to adjust the system's adjustment stiffness.

[0012] Furthermore, the two ends of the tension spring are respectively connected to the first protrusion of the outer frame and the second protrusion of the inner frame, and are in a pre-stretched state. When the precision threaded pair on one side applies a thrust, the tension spring on the other side provides a restoring force, realizing bidirectional reversible adjustment.

[0013] Furthermore, the precision threaded pair includes an adjusting screw and an adjusting nut. The front end of the adjusting screw is provided with a ball head surface, which abuts against the side wall surface of the flexible hinge to reduce local stress concentration.

[0014] Further, the displacement sensor assembly is a capacitive displacement sensor, the sensing target is a capacitive sensing block, and the sensor body is a capacitive sensor. They are arranged face to face, and the distance therebetween is within the effective measurement range of the capacitive sensor.

[0015] Further, a lens support surface for bonding an optical lens is provided in the central area of the inner frame. The lens support surface is connected to the inner frame body through a plurality of flexible arms, and the width of at least one segment of the flexible arms is locally reduced to form a weakened segment to allow radial micro-deformation and compensate for thermal expansion stress.

[0016] Further, the weakened segment is formed by wire cutting. Its width is a, length is c, and the width of the remaining part is b, where a < b, to reduce torsional stiffness and improve thermal adaptability.

[0017] An optical system includes the moving mirror flexible support and adjustment mechanism described above. The optical lens is fixed in the inner frame and is used to real-time correct the optical path offset caused by mechanical vibration, temperature change or installation error.

[0018] An adjustment method based on the moving mirror flexible support and adjustment mechanism includes the following steps: Use an external optical measurement device to obtain current beam deviation information; Adjust the precision screw pair in the X or Y direction to push the inner frame to elastically deform and drive the lens to move; Real-time collect the inner frame displacement signal through the displacement sensor and feedback it to the control system; Stop adjustment and lock when the target position is reached; Under the action of no external force, the tension spring automatically returns the inner frame to the initial position.

[0019] Compared with the prior art, the beneficial effects of the present invention are: 1. Frictionless and clearance-free adjustment: The motion transmission is realized through the elastic deformation of the flexible hinge, avoiding the friction and wear problems brought by traditional sliding pairs, and improving the adjustment accuracy and service life; 2. Highly integrated structure and low Z-direction space occupation: The integrated frame design is adopted, and all functional modules are integrated in the same plane, especially suitable for compact optical systems with limited Z-direction space; 3. Bidirectional reversible adjustment mechanism: Using the pre-tension design of the tension spring, it can automatically reset after adjustment and support multiple repeated calibration operations; 4. High stiffness and high stability: By setting the reed flexible mechanism on the opposite side of the flexible hinge, the stiffness in the non-adjustment direction is effectively improved, and the parasitic motion and external disturbance effects are suppressed; 5. Strong compatibility of closed-loop feedback control: Equipped with non-contact detection elements such as displacement sensor components, it is easy to achieve high-precision closed-loop adjustment and improve the intelligence level of the system; 6. Easy maintenance and on-site adjustment: The adjustment mechanism is located on the side of the frame, and can be adjusted without disassembling other components above and below, which improves the convenience of use. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the overall structure of the flexible support and adjustment mechanism for the moving mirror in Embodiment 1 of the present invention; Figure 2 This is a partial structural schematic diagram of the Y-axis flexible hinge, X-axis flexible hinge, Y-direction spring flexible mechanism, and X-direction spring flexible mechanism in Embodiment 1 of the present invention; Figure 3 This is a schematic diagram of the structure in Embodiment 1 of the present invention, showing the installation of a tension spring between the inner and outer protrusions. Figure 4 This is a schematic diagram of the structure of the precision threaded pair according to Embodiment 1 of the present invention (wherein, the left side of the figure shows the installation position of the precision threaded pair, and the right side shows the cross-sectional structure). Figure 5 This is a schematic diagram of the installation structure of two capacitive sensors in Embodiment 1 of the present invention; Figure 6 This is a schematic diagram of the rectangular groove in Embodiment 1 of the present invention.

[0022] In the picture: 1-Frame; 101-Y-axis flexible hinge; 102-X-axis flexible hinge; 103-Y-direction spring flexible mechanism; 104-X-direction spring flexible mechanism; 105-Outer protrusion; 106-Inner protrusion; 107-Threaded pair mounting sidewall; 108-Sensor mounting sidewall; 109-Lens bonding surface; 2-Tension spring; 3-Precision threaded pair; 301 - Ball head surface; 302 - Adjusting nut; 4-Capacitive sensing block; 401-Measured surface; 5 - Capacitive sensor; 501 - Measuring surface. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0025] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0026] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0027] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0028] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0029] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0030] A flexible support and adjustment mechanism for a moving mirror, comprising: An integrally formed eyeglass frame 1, the eyeglass frame 1 including an outer frame and an inner frame, the inner frame being connected to the outer frame by at least two orthogonally arranged flexible hinges; At least two tension springs 2 are respectively connected between the outer frame and the inner frame to provide an initial positioning force and a bidirectional restoring force to the inner frame; At least two precision threaded pairs 3 are installed on the outer frame sidewall, and their output ends abut against the flexible hinge or inner frame sidewall to push the inner frame to move along the X or Y direction; At least two displacement sensor assemblies, including a sensing target fixed to the inner frame and a sensor body fixed to the outer frame, are arranged opposite to each other to achieve non-contact displacement measurement; Each of the flexible hinges has a spring flexible mechanism on the opposite side to enhance the stiffness of the frame 1 in the non-adjustment direction and suppress parasitic movement.

[0031] In this solution, a complete technical chain is formed by "integrated frame 1 + double orthogonal flexible hinge + tension spring 2 bidirectional reset + side drive + closed-loop detection + stiffness enhancement".

[0032] The flexible hinge is a straight circular flexible hinge, which is symmetrically arranged around the X-axis and Y-axis respectively, so that the inner frame can produce an approximately linear XY plane translational motion under small deformation conditions.

[0033] The flexible spring mechanism is located on the opposite side of the flexible hinge and is in the form of a cantilever beam or U-shaped groove structure. Its material thickness or width is locally thinned to adjust the system's adjustment stiffness.

[0034] The two ends of the tension spring 2 are respectively connected to the first protrusion of the outer frame and the second protrusion of the inner frame, and are in a pre-stretched state. When the precision threaded pair 3 on one side applies a thrust, the tension spring 2 on the other side provides a restoring force, realizing bidirectional reversible adjustment.

[0035] The precision threaded pair 3 includes an adjusting screw and an adjusting nut 302. The front end of the adjusting screw is provided with a ball head surface 301, which abuts against the side wall surface of the flexible hinge to reduce local stress concentration.

[0036] The displacement sensor assembly is a capacitive displacement sensor, the sensing target is a capacitive sensing block 4, and the sensor body is a capacitive sensor 5. The two are arranged face to face, and the distance between them is within the effective measurement range of the capacitive sensor 5.

[0037] The center area of the inner frame is provided with a lens support surface for bonding an optical lens. The lens support surface is connected to the inner frame body through a plurality of flexible arms, and the width of at least one segment of the flexible arms is locally reduced to form a weakened segment, so as to allow radial micro-deformation and compensate for thermal expansion stress, thereby solving the thermal stress problem.

[0038] The weakened segment is formed by wire cutting. Its width is a and its length is c, while the width of the remaining part is b, satisfying a < b, so as to reduce the torsional stiffness and improve the thermal adaptability.

[0039] The precision screw pair 3 is a manual adjustment structure, or is replaced by any one of a motor drive device, a piezoelectric actuator, and a voice coil motor to achieve automatic adjustment.

[0040] The displacement sensor assembly is replaced by any one of an inductive sensor, a grating scale, a laser interferometer, or a vision recognition system, and position feedback control can still be achieved.

[0041] The following lists specific embodiments: Embodiment 1 Please refer to Figures 1-6 , which shows a schematic diagram of the overall structure of a moving mirror flexible support adjustment mechanism described in a specific embodiment of the present application.

[0042] As shown in the figure, the moving mirror flexible support adjustment mechanism mainly includes: a frame 1, two tension springs 2, two precision screw pairs 3, two capacitance sensing blocks 4, two capacitance sensors 5, and a plurality of functional flexible structure units integrated on the frame 1.

[0043] I. Overall structure composition and connection relationship The frame 1 is an integrally formed metal component, preferably made of aluminum alloy 6061 or Invar through wire cutting or electrical discharge machining processes to ensure structural accuracy and thermal stability. The frame 1 includes two parts: an outer frame and an inner frame, where: - The inner frame is used to fix the optical lens; <U+ The outer frame serves as an installation reference surface and can be fixed to an optical platform or other support structures; The inner frame is connected to the outer frame through two mutually orthogonal flexible hinges, namely a Y-axis flexible hinge 101 symmetrically arranged about the Y-axis and an X-axis flexible hinge 102 symmetrically arranged about the X-axis.

[0044] Each flexible hinge has a "straight circular" cross-sectional profile, that is, its cut shape is a rectangular groove with rounded ends at both ends, having good stress distribution characteristics, and can achieve approximately linear translational output within a small deformation range.

[0045] II. Mechanism for Achieving Degrees of Freedom of Motion When an external driving force is applied in a certain direction, the corresponding flexible hinge undergoes elastic bending deformation, causing the inner frame to rotate slightly. Since the center of rotation is located at the fixed end of the flexible hinge, when the displacement is small, the motion trajectory of the central area of ​​the inner frame can be regarded as a straight-line translation along the X or Y direction.

[0046] Specifically: The Y-axis flexible hinge 101 allows the inner frame to rotate around the Y-axis, thereby enabling position adjustment in the X direction; The X-axis flexible hinge 102 allows the inner frame to rotate around the X-axis, thereby enabling position adjustment in the Y direction; The two directions can be controlled independently without interfering with each other, forming a two-dimensional adjustment capability in the XY plane.

[0047] III. Stiffness-enhancing structural design To improve the system's stiffness in non-adjustment directions and suppress parasitic motions (such as Z-axis drift or tilt), a reed flexible mechanism is provided on the opposite side of each flexible hinge: On the opposite side of the Y-axis flexible hinge 101, there is a Y-direction spring flexible mechanism 103 to enhance the bending stiffness of the frame 1 in the Y and Z directions. An X-direction spring flexible mechanism 104 is provided on the opposite side of the X-axis flexible hinge 102 to enhance the bending stiffness of the frame 1 in the X and Z directions.

[0048] The X-direction spring flexible mechanism 104 is a thin-plate cantilever beam structure. Its thickness or width is optimized to provide sufficient support stiffness without excessively restricting the flexibility of the main motion direction. By adjusting the geometric parameters of the spring (such as length, width, and thickness), the overall adjustment force of the system can be controlled, avoiding unstable vibration due to excessive softness or difficulty in adjustment due to excessive tightness.

[0049] IV. Bidirectional Reset and Initial Positioning Mechanism Two tension springs 2 are respectively connected between the outer frame and the inner frame, specifically installed between the outer protrusion 105 and the inner protrusion 106 of the mirror frame 1. The tension springs 2 are in a pre-stretched state in the assembled state, providing a constant centering force to the inner frame.

[0050] During the work process: When the X-axis precision threaded pair 3 pushes one side of the Y-axis flexible hinge 101, the opposite tension spring 2 is further stretched. After the adjustment force is released, the tension spring 2 automatically pulls the inner frame back to its initial equilibrium position; The same applies to adjustments in the Y direction.

[0051] This design achieves bidirectional reversible adjustment without additional driving components, solving the problem that traditional unidirectional flexible mechanisms can only move in one direction and are difficult to return to zero, significantly improving ease of use and repeatability.

[0052] V. Regulation and Implementation Agencies Two precision threaded pairs 3 are respectively mounted on the threaded pair mounting sidewall 107 and arranged along the X-axis and Y-axis directions. Each precision threaded pair 3 includes a fine-pitch screw and an adjusting nut 302, the front end of which is provided with a ball head surface 301, which lightly touches the sidewall surface of the Y-axis flexible hinge 101 or the X-axis flexible hinge 102.

[0053] By manually rotating the adjusting nut 302, the screw can be pushed forward, which in turn applies a thrust to the sidewall of the flexible hinge through the ball head surface 301, causing the inner frame to move due to elastic deformation. The design of the ball head surface 301 can adapt to the angle changes of the flexible hinge during rotation, effectively reducing local contact stress and preventing stress concentration that could lead to material fatigue or fracture.

[0054] Optionally, the precision threaded pair 3 can be replaced by a motor drive device (such as a stepper motor with a lead screw), a piezoelectric actuator, or a voice coil motor to achieve automated closed-loop regulation.

[0055] VI. Displacement Detection and Closed-Loop Control To achieve high-precision position feedback, this embodiment is equipped with a non-contact displacement sensing system, which consists of the following components: Two capacitive sensing blocks 4 are fixed to the inner frame by threaded connection; Two capacitive sensors 5 are fixed on the sensor mounting side 108, with their measuring surfaces 501 facing the measured surface 401 of the capacitive sensing block 4. A parallel plate capacitor is formed between the two plates. Changes in the spacing cause changes in the capacitance value, which is converted into a displacement after signal processing.

[0056] The capacitive sensor 5 has nanometer-level resolution and a typical measurement range of ±50μm, fully covering the adjustment stroke of this mechanism. The sensor signal is connected to an external controller (such as a PLC or embedded system) and works in conjunction with main measuring equipment such as an optical collimator to form a dual closed-loop control system, ensuring adjustment accuracy and stability.

[0057] Optionally, the displacement sensor assembly can be replaced with an inductive sensor, a grating ruler, a laser interferometer, or a machine vision-based target recognition system, while still achieving the same function.

[0058] VII. Flexible design of the lens support area The innermost side of the inner frame is provided with a lens bonding surface 109, which is a flat plane used to completely fit with the end face of the optical lens and to bond and fix it with UV curing adhesive.

[0059] To relieve the stress caused by the thermal expansion mismatch due to temperature changes, a flexible transition structure is adopted in the lens support area: First, a flexible arm with a width of b is formed on the frame 1 through wire cutting process; Then, a rectangular groove is machined near the support frame 1 to reduce the local width to a (a < b) and the length to c, forming a weakened section; This weakened section has a certain deformation ability in the radial direction, which can absorb thermal stress and prevent lens surface distortion or adhesive layer cracking.

[0060] This design is particularly suitable for application scenarios such as space telescopes and high-altitude imaging systems that experience severe temperature change environments.

[0061] VIII. Complete Assembly and Adjustment Process The assembly and use steps of this mechanism are as follows: 1. Assembly stage: The optical lens is evenly coated with UV glue and then bonded to the lens bonding surface 109, and light curing is carried out; The two tension springs 2 are respectively hung on the outer frame protrusion 105 and the inner frame protrusion 106, making them in a pre-tensioned state; Two precision thread pairs 3 are installed at the hole positions of the thread pair installation side wall 107, and the spherical head surface 301 is adjusted to slightly contact the side wall of the flexible hinge; The capacitive sensing block 4 is fixed to the inner frame, and the capacitive sensor 5 is fixed to the sensor installation side wall 10​​​​​​​​​​​​​​​​​​​​​​​​​​

[0065] IX. Material and Manufacturing Process Recommendations Main material: Low thermal expansion coefficient material (such as Invar, carbon fiber composite material) or high specific stiffness material (such as titanium alloy, aluminum alloy) can be selected. Processing method: Wire cutting, electrical discharge machining (EDM) or precision milling are recommended to ensure the dimensional accuracy of the flexible hinge; Surface treatment: Anodizing or nickel plating can be performed to improve corrosion resistance and wear resistance; Assembly tolerances: The critical fit clearances should be controlled within ±5μm to ensure smooth movement.

[0066] 10. Application Expansion and Alternative Solutions Although the above embodiments have been described in detail using manual adjustment and capacitive sensing as an example, this application is not limited thereto. The following are feasible alternatives or extensions: The drive system can be upgraded to an electric servo system to achieve remote autofocus. Multiple such mechanisms can be cascaded to achieve six degrees of freedom full attitude adjustment; It can be applied to fields such as laser communication terminals, secondary mirror support for astronomical telescopes, and adjustment of lithography machine mirrors.

[0067] In summary, this solution provides a compact, frictionless, high-precision, bidirectionally adjustable flexible support mechanism for moving mirrors, solving the technical problems of existing rigid guide rails having gap wear and simple flexible structures having large volume and low rigidity. It is especially suitable for high-end optical systems with stringent requirements for stability, accuracy, and spatial layout.

[0068] Example 2 An optical system includes the aforementioned flexible support and adjustment mechanism for a moving mirror, wherein the optical lens is fixed to the inner frame and is used to correct optical path offset caused by mechanical vibration, temperature change or installation error in real time.

[0069] Example 3 An adjustment method based on the aforementioned flexible support adjustment mechanism for the moving mirror includes the following steps: Obtain current beam deviation information using external optical measurement equipment; Adjust the precision threaded pair 3 in the X or Y direction to push the inner frame to undergo elastic deformation, thereby moving the lens; The displacement signal of the inner frame is collected in real time by a displacement sensor and fed back to the control system; Once the target position is reached, stop adjusting and lock the position. Without external force, the tension spring 2 will automatically restore the inner frame to its initial position.

[0070] In summary, this application provides a compact, frictionless, high-precision, bidirectionally adjustable flexible support adjustment mechanism for a moving mirror, which solves the technical problems of existing rigid guide rails having gap wear and simple flexible structures having large volume and low rigidity. It is especially suitable for high-end optical systems with stringent requirements for stability, accuracy, and spatial layout.

[0071] Those skilled in the art can make various modifications and improvements to the above embodiments according to actual needs, such as changing the shape of the flexible hinge (e.g., elliptical, parabolic), replacing the reset element (e.g., torsion spring, magnetic spring), and adopting different sensing principles, all of which fall within the scope of protection.

[0072] The beneficial effects of the technical solution of the present invention are: 1. Frictionless and backlash-free adjustment: Motion transmission is achieved through the elastic deformation of the flexible hinge, avoiding the friction and wear problems caused by traditional sliding pairs, thus improving adjustment accuracy and service life; 2. Highly integrated structure and low Z-axis space occupation: It adopts an integrated frame design, with all functional modules integrated in the same plane, which is especially suitable for compact optical systems with limited Z-axis space; 3. Two-way reversible adjustment mechanism: Utilizing the pre-tension design of tension spring 2, it can automatically reset after adjustment and supports multiple repeated calibration operations; 4. High stiffness and high stability: By setting a spring flexible mechanism on the opposite side of the flexible hinge, the stiffness in the non-adjustment direction is effectively improved, and the effects of parasitic motion and external disturbances are suppressed. 5. Strong compatibility of closed-loop feedback control: Equipped with non-contact detection elements such as capacitive sensors, it is easy to achieve high-precision closed-loop adjustment and improve the intelligence level of the system; 6. Strong thermal stress relief capability: The lens support area adopts a weakened flexible arm design, which can absorb the thermal expansion stress caused by temperature difference in the radial direction and prevent lens surface distortion; 7. Easy maintenance and on-site adjustment: The adjustment mechanism is located on the side of the frame 1, and can be adjusted without disassembling other components above and below, which improves the ease of use.

[0073] This application comprehensively solves the problems of low precision, large size, poor stability, and irreversibility in the existing technology, and is an ideal moving mirror adjustment solution suitable for high-end optical systems.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A flexible support and adjustment mechanism for a moving mirror, characterized in that, Comprising: An integrally formed spectacle frame (1), the spectacle frame (1) includes an outer frame and an inner frame, and the inner frame is connected to the outer frame through at least two orthogonally arranged flexible hinges; At least two tension springs (2), respectively straddling between the outer frame and the inner frame, for providing an initial positioning force and a bi-directional restoring force to the inner frame; At least two precision thread pairs (3), installed on the side wall of the outer frame, and their output ends abut against the flexible hinge or the side wall of the inner frame, for pushing the inner frame to move along the X direction or the Y direction; At least two displacement sensor assemblies, including a sensing target fixed on the inner frame and a sensor body fixed on the outer frame, which are arranged opposite to each other to achieve non-contact displacement measurement; Wherein, on the opposite side of each flexible hinge, there is a reed flexible mechanism for enhancing the stiffness of the spectacle frame (1) in the non-adjustment direction and suppressing parasitic motion.

2. The flexible support and adjustment mechanism for the moving mirror according to claim 1, characterized in that, The flexible hinge is a straight circular flexible hinge, symmetrically arranged around the X-axis and the Y-axis respectively, so that the inner frame can produce an approximately linear XY-plane translation motion under small deformation conditions.

3. The flexible support and adjustment mechanism for the moving mirror according to claim 1, characterized in that, The reed flexible mechanism is arranged on the opposite side of the flexible hinge, in the form of a cantilever beam or a U-shaped groove structure, and its material thickness or width is locally thinned to regulate the adjustment stiffness of the system.

4. The flexible support and adjustment mechanism for the moving mirror according to claim 1, characterized in that, Both ends of the tension spring (2) are respectively connected to the first protrusion of the outer frame and the second protrusion of the inner frame, and are in a pre-tensioned state. When the precision thread pair (3) on one side applies a thrust, the tension spring (2) on the opposite side provides a restoring force to achieve bi-directional reversible adjustment.

5. The flexible support and adjustment mechanism for the moving mirror according to claim 1, characterized in that, The precision thread pair (3) includes an adjusting screw and an adjusting nut (302), and the front end of the adjusting screw is provided with a spherical surface (301), and the spherical surface (301) abuts against the side wall surface of the flexible hinge to reduce local stress concentration.

6. The flexible support and adjustment mechanism for the moving mirror according to claim 1, characterized in that, The displacement sensor assembly is a capacitive displacement sensor, the sensing target is a capacitive sensing block (4), the sensor body is a capacitive sensor (5), and the two are arranged face to face, and the distance therebetween is within the effective measurement range of the capacitive sensor (5).

7. The flexible support and adjustment mechanism for the moving mirror according to claim 1, characterized in that, In the central area of the inner frame, there is a lens support surface for bonding an optical lens, and the lens support surface is connected to the inner frame body through multiple flexible arms, and the width of at least one segment of the flexible arms is locally reduced to form a weakened segment to allow radial micro-deformation and compensate for thermal expansion stress.

8. The flexible support and adjustment mechanism for the moving mirror according to claim 7, characterized in that, The weakened segment is formed by wire cutting, its width is a, its length is c, and the width of the rest is b, satisfying a < b, to reduce the torsional stiffness and improve the thermal adaptability.

9. An optical system, characterized in that, Including the movable mirror flexible support adjustment mechanism according to any one of claims 1-8, an optical lens is fixed in the inner frame for real-time correction of the optical path deviation caused by mechanical vibration, temperature change or installation error.

10. An adjustment method based on the flexible support adjustment mechanism for the moving mirror according to any one of claims 1-8, characterized in that, Including the following steps: Using an external optical measurement device to obtain the current beam deviation information; Adjusting the precision thread pair (3) in the X direction or the Y direction to push the inner frame to elastically deform and drive the lens to move; Real-time collecting the displacement signal of the inner frame through the displacement sensor and feeding it back to the control system; Stopping the adjustment and locking when the target position is reached; Under the action of no external force, the tension spring (2) automatically restores the inner frame to the initial position.

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