Vapor deposition device for lithium battery silicon-carbon composite material and preparation method

Abstract

The invention relates to a vapor deposition device for a lithium battery silicon-carbon composite material and a preparation method, the vapor deposition device comprises a supporting assembly, a heating assembly and a deposition assembly, the supporting assembly comprises a bottom box, a case and a top box; the heating assembly comprises a lower shell, an upper shell, heat preservation pieces and heating pieces, and the heat preservation pieces and the heating pieces are installed on the upper shell and the lower shell correspondingly. The deposition assembly comprises a storage tank, a feeding pipe, a discharging pipe, a filtering part, a material turning plate and an air extracting pump, the storage tank is rotationally connected to the lower shell, the feeding pipe communicates with one end of the storage tank, the filtering part is detachably installed at the end, away from the feeding pipe, of the storage tank, the discharging pipe is installed on the filtering part, and the discharging pipe exhausts gas; the turning plate is mounted on the inner wall of the storage tank; and one end of the sucking pump is communicated with the discharging pipe. According to the device, constant negative pressure is kept through the storage tank, the storage tank rotates, porous carbon flies under the action of the material turning plate, silicon-containing gas fully permeates into holes of the porous carbon, deposition is uniform, and the deposition quality and efficiency are improved.

Description

Technical Field

[0001] This invention relates to the field of battery materials technology, and in particular to a vapor deposition apparatus and preparation method for silicon-carbon composite materials used in lithium batteries. Background Technology

[0002] As a crucial component of lithium-ion batteries, improving the performance of anode materials is essential. The preparation of silicon-carbon composites by combining high-capacity silicon with highly stable carbon materials has become a key focus. Currently, silicon-carbon composites are typically achieved by depositing silicon within the cavities of porous carbon in a fluidized bed at high temperatures. However, fluidized bed preparation is prone to uneven deposition, which negatively impacts the performance of the anode material. Summary of the Invention

[0003] Therefore, it is necessary to provide a vapor deposition apparatus and preparation method for silicon-carbon composite materials used in lithium batteries to address the above-mentioned problems.

[0004] A vapor deposition apparatus for silicon-carbon composite materials in lithium-ion batteries includes a support assembly, a heating assembly, and a deposition assembly. The support assembly includes a base box, a chassis, and a top box. One end of the chassis is pivotally connected to the base box, and one side of the top box is pivotally connected to one side of the chassis. The heating assembly includes a lower shell, an upper shell, an insulation component, and a heating component. The lower shell is mounted on the chassis, and the upper shell is mounted on the top box. Both the upper shell and the lower shell are equipped with the insulation component and the heating component. The deposition assembly includes a storage tank. The system includes a feed pipe, a discharge pipe, a filter element, a tilting plate, and a vacuum pump. The storage tank is used to store porous carbon and is rotatably connected to the lower shell. The feed pipe is connected to one end of the storage tank and is used to introduce silicon-containing gas and carrier gas into the storage tank. The filter element is detachably installed at the end of the storage tank away from the feed pipe. The discharge pipe is installed on the filter element and is used to discharge gas. The tilting plate is installed on the inner wall of the storage tank. One end of the vacuum pump is connected to the discharge pipe.

[0005] In one embodiment, there are multiple turning plates, each of which is evenly distributed along the circumference of the storage tank; each turning plate includes a first support portion and a second support portion, the second support portion is connected to one end of the first support portion to form a hook shape, and the end of the first support portion away from the second support portion is installed in the storage tank; the second support portion is provided with multiple through holes.

[0006] In one embodiment, the deposition assembly further includes a first through pipe and a second through pipe, which are respectively connected to both ends of the storage tank; the support assembly further includes a first support, a bearing seat, a second support, and a plurality of rollers, the first support and the second support are respectively installed at both ends of the chassis, the bearing seat is installed on the first support, the first through pipe is rotatably connected to the bearing seat, the rollers are rotatably connected to the second support, and the rollers are used to abut against the second through pipe; the feed pipe passes through the first through pipe, and the filter element is detachably installed on the second through pipe.

[0007] In one embodiment, the support assembly further includes a bracket mounted on the bottom of the chassis; the deposition assembly further includes a drive wheel, a driven wheel, a timing belt, and a stirring power element, the stirring power element being mounted on the bracket, the drive wheel being mounted on the output end of the stirring power element, the driven wheel being mounted on the first through pipe, one end of the timing belt being connected to the drive wheel, and the other end being connected to the driven wheel.

[0008] In one embodiment, the deposition assembly further includes a first bearing and a second bearing, the first bearing being mounted on the end of the storage tank away from the filter element, the feed pipe passing through the first bearing, the second bearing being mounted on the filter element, and the discharge pipe passing through the second bearing.

[0009] In one embodiment, the deposition assembly further includes a first baffle and a second baffle, which are respectively installed at both ends of the storage tank; the insulation component has a first groove and a second groove at both ends, the first groove being used to accommodate the first baffle and the second groove being used to accommodate the second baffle.

[0010] In one embodiment, the support assembly further includes a lifting power element and an opening and closing power element, one end of the lifting power element being pivotally connected to the bottom box and the other end being pivotally connected to one end of the chassis; one end of the opening and closing power element being pivotally connected to the chassis and the other end being pivotally connected to the top box.

[0011] In one embodiment, a control component is also included, which includes a controller and a flow meter. The heating element, the air pump, and the flow meter are all signal-connected to the controller. The flow meter is installed in the feed pipe.

[0012] A method for preparing silicon-carbon composite materials for lithium batteries, based on the aforementioned vapor deposition apparatus for silicon-carbon composite materials for lithium batteries, comprises the following steps: Vacuuming and preheating: Porous carbon is added to the storage tank, and then vacuuming is performed while heating to the predetermined temperature; after vacuuming, protective gas is introduced to a negative pressure state. Vapor deposition: Silicon-containing gas and carrier gas are introduced into the storage tank through the feed pipe. At the same time, the vacuum pump continuously pumps gas to maintain a constant negative pressure in the storage tank, and the heating element heats the tank. Furthermore, the storage tank rotates, and under the action of the tilting plate, the silicon-containing gas fully penetrates into the pores of the porous carbon to carry out the vapor deposition reaction, thereby obtaining a silicon-carbon composite material.

[0013] In one embodiment, the silicon-containing gas includes one or more of silane, disilane, trisilane, tetrasilane, monochlorosilane, dichlorosilane, trichlorosilane, and tetrachlorosilane; the protective gas is one or more of nitrogen, argon, helium, and neon; the carrier gas is one or more of nitrogen, argon, helium, and neon; the flow rate-to-volume ratio of the silicon-containing gas to the carrier gas is 1:(1-18); the negative pressure is -0.5 to -1 MPa; and the heating temperature of the heating element is 400 to 1000°C.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: The vapor deposition apparatus for lithium-ion battery silicon-carbon composite materials of the present invention maintains a constant negative pressure in the storage tank through a vacuum pump and heats it through a heating element. At the same time, the storage tank rotates, and under the action of the material turning plate, the porous carbon is blown away, allowing silicon-containing gas to fully penetrate into the pores of the porous carbon to carry out the vapor deposition reaction and obtain silicon-carbon composite material. The vapor deposition apparatus for lithium-ion battery silicon-carbon composite materials of the present invention provides uniform deposition, improves deposition quality and efficiency. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the assembly structure of a vapor deposition apparatus for lithium-ion battery silicon-carbon composite materials, according to an embodiment of the present invention. Figure 2 for Figure 1 A cross-sectional view of a vapor deposition apparatus for silicon-carbon composite materials used in lithium-ion batteries is shown, in which the top chamber is not shown; Figure 3 for Figure 2 Enlarged view of center circle A; Figure 4 for Figure 1 A schematic diagram of the structure of the central bearing housing, the second support, the roller, the first insulation part, and the deposition assembly; Figure 5 for Figure 4 A cross-sectional view along line BB, in which the first insulation section is not shown.

[0016] The meanings of the numbers in the attached diagram are as follows: 100. Vapor deposition apparatus for silicon-carbon composite materials in lithium batteries; 10. Support assembly; 11. Base box; 12. Chassis; 13. Top box; 14. Bracket; 15. Lifting power element; 16. Opening and closing power element; 17. Bearing seat; 18. Second support; 19. Roller; 20. Heating component; 21. Lower housing; 22. Upper housing; 23. Insulation component; 231. First slide groove; 232. Second slide groove; 233. First insulation section; 234. Second insulation section; 24. Heating component; 30. Deposition assembly; 31. Storage tank; 32. Feed pipe; 33. Discharge pipe; 34. Filter element; 341. Filter section; 342. Fixing section; 343. Extension section; 35. Tilting plate; 351. First support section; 352. Second support section; 353. Through hole; 36. Cover plate; 37. First through pipe; 38. Second through pipe; 39. First bearing; 31a. Second bearing; 32a. First baffle; 33a. Second baffle; 34a. Driven wheel. Detailed Implementation

[0017] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0018] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0019] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0020] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0021] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0022] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0023] Please refer to Figures 1 to 5A vapor deposition apparatus 100 for silicon-carbon composite materials in lithium batteries, according to one embodiment of the invention, includes a support assembly 10, a heating assembly 20, and a deposition assembly 30. The support assembly 10 includes a base box 11, a housing 12, and a top box 13. One end of the housing 12 is pivotally connected to the base box 11, and one side of the top box 13 is pivotally connected to one side of the housing 12. The heating assembly 20 includes a lower housing 21, an upper housing 22, a thermal insulation component 23, and a heating component 24. The lower housing 21 is mounted on the housing 12, and the upper housing 22 is mounted on the top box 13. Both the upper housing 22 and the lower housing 21 are equipped with the thermal insulation component 23 and the heating component 24. The deposition assembly... The device 30 includes a storage tank 31, a feed pipe 32, a discharge pipe 33, a filter element 34, a tilting plate 35, and a vacuum pump (not shown). The storage tank 31 is used to store porous carbon and is rotatably connected to the lower shell 21. The feed pipe 32 is connected to one end of the storage tank 31 and is used to introduce silicon-containing gas and carrier gas into the storage tank 31. The filter element 34 is detachably installed at the end of the storage tank 31 away from the feed pipe 32. The discharge pipe 33 is installed on the filter element 34 and is used to discharge gas. The tilting plate 35 is installed on the inner wall of the storage tank 31. One end of the vacuum pump is connected to the discharge pipe 33. The vapor deposition apparatus 100 for lithium battery silicon-carbon composite materials in this embodiment maintains a constant negative pressure in the storage tank 31 through a vacuum pump and heats it through a heating element 24. At the same time, the storage tank 31 rotates, and under the action of the material turning plate 35, the porous carbon is blown away, allowing silicon-containing gas to fully penetrate into the pores of the porous carbon to carry out the vapor deposition reaction and obtain silicon-carbon composite materials.

[0024] like Figure 1 and Figure 2 As shown, in this embodiment, the support assembly 10 includes a base box 11, a chassis 12, and a top box 13. One end of the chassis 12 is pivotally connected to the base box 11, and one side of the top box 13 is pivotally connected to one side of the chassis 12. The top box 13 is used to cover the chassis 12. Optionally, the support assembly 10 also includes a bracket 14 installed at the bottom of the chassis 12. Furthermore, the support assembly 10 also includes a lifting power element 15 and an opening and closing power element 16. One end of the lifting power element 15 is pivotally connected to the bottom box 11, and the other end is pivotally connected to one end of the housing 12. The lifting power element 15 is used to drive one end of the housing 12 to rotate around one end of the bottom box 11, so as to facilitate the unloading of materials in the storage tank 31. One end of the opening and closing power element 16 is pivotally connected to the housing 12, and the other end is pivotally connected to the top box 13. The opening and closing power element 16 is used to drive one side of the top box 13 to rotate around one side of the housing 12, so as to open or close the top box 13. In one embodiment, both the lifting power element 15 and the opening and closing power element 16 are hydraulic rods.

[0025] like Figure 2 and Figure 4 The support assembly 10 also includes a first support (not shown in the figure), a bearing seat 17, a second support 18, and a plurality of rollers 19. The first support and the second support 18 are respectively installed at both ends of the chassis 12, the bearing seat 17 is installed on the first support, and the rollers 19 are rotatably connected to the second support 18.

[0026] like Figures 1 to 4 As shown, the heating assembly 20 includes a lower housing 21, an upper housing 22, a heat insulation component 23, and a heating component 24. The lower housing 21 is mounted on the chassis 12, and the upper housing 22 is mounted on the top box 13. Both the upper housing 22 and the lower housing 21 are equipped with the heat insulation component 23 and the heating component 24. Optionally, the heat insulation component 23 has a first sliding groove 231 and a second sliding groove 232 at both ends. Further, the heat insulation component 23 includes a first heat insulation part 233 and a second heat insulation part 234. The first heat insulation part 233 is mounted on the lower housing 21, and the second heat insulation part 234 is mounted on the upper housing 22. The second heat insulation part 234 is correspondingly arranged with the first heat insulation part 233. In one embodiment, the first heat insulation part 233 and the second heat insulation part 234 have a first sliding groove 231 and a second sliding groove 232 at both ends.

[0027] like Figures 1 to 5 As shown, the deposition assembly 30 includes a storage tank 31, a feed pipe 32, a discharge pipe 33, a filter element 34, a tilting plate 35, and a vacuum pump (not shown). The storage tank 31 is used to store porous carbon and is rotatably connected to the lower shell 21. The feed pipe 32 is connected to one end of the storage tank 31 and is used to introduce silicon-containing gas and carrier gas into the storage tank 31. The filter element 34 is detachably installed at the end of the storage tank 31 away from the feed pipe 32. The discharge pipe 33 is installed on the filter element 34 and is used to discharge gas. The tilting plate 35 is installed on the inner wall of the storage tank 31. One end of the vacuum pump is connected to the discharge pipe 33 and is used to exhaust gas from the storage tank 31.

[0028] Optionally, the filter element 34 includes a filter section 341, a fixing section 342, an extension section 343, and a filter screen (not shown). The filter section 341 and the extension section 343 are respectively connected to the two ends of the fixing section 342. One end of the discharge pipe 33 is connected to the filter section 341, and the other end passes through the fixing section 342 and the extension section 343. The filter screen is installed inside the filter section 341. Furthermore, there are multiple turning plates 35, each of which is evenly distributed along the circumference of the storage tank 31. Each turning plate 35 includes a first support portion 351 and a second support portion 352. The second support portion 352 is connected to one end of the first support portion 351 to form a hook shape. The end of the first support portion 351 away from the second support portion 352 is installed in the storage tank 31. The second support portion 352 is provided with multiple through holes 353 to sprinkle porous carbon. In use, as the storage tank 31 rotates, the turning plate 35 hooks up part of the porous carbon. As the storage tank 31 rotates further, when the porous carbon in the turning plate 35 is separated from the porous carbon pile, the porous carbon in the turning plate 35 is sprinkled from the through holes 353, so that the porous carbon is in full contact with the silicon-containing gas.

[0029] In one embodiment, the deposition assembly 30 further includes a cover plate 36 covering one end of the storage tank 31, a discharge pipe 33 passing through the cover plate 36, and a filter element 34 installed on the cover plate 36. The deposition assembly 30 also includes a first through pipe 37 and a second through pipe 38, which are respectively connected to the two ends of the storage tank 31; the first through pipe 37 is rotatably connected to the bearing seat 17, and the roller 19 is used to abut against the second through pipe 38; the feed pipe 32 passes through the first through pipe 37, and the filter element 34 is detachably installed on the second through pipe 38; the cover plate 36 covers the second through pipe 38.

[0030] like Figure 2 and Figure 3 As shown, the deposition assembly 30 further includes a first bearing 39 and a second bearing 31a. The first bearing 39 is installed at the end of the storage tank 31 away from the filter element 34. The feed pipe 32 passes through the first bearing 39, the second bearing 31a is installed on the filter element 34, and the discharge pipe 33 passes through the second bearing 31a. Optionally, both the first bearing 39 and the second bearing 31a are magnetohydrodynamic sealed bearings. The second bearing 31a is installed on the fixing part 342. When the storage tank 31 rotates, the feed pipe 32 remains stationary under the action of the first bearing 39, and the discharge pipe 33 remains stationary under the action of the second bearing 31a.

[0031] Please review section 2 again. Figure 4The deposition assembly 30 further includes a first baffle 32a and a second baffle 33a, which are respectively installed at both ends of the storage tank 31; the first chute 231 is used to accommodate the first baffle 32a, and the second chute 232 is used to accommodate the second baffle 33a; the first baffle 32a and the second baffle 33a can both seal the first chute 231 and the second chute 232 to reduce heat dissipation, and when one end of the chassis 12 is rotated around the bottom box 11, the first baffle 32a and the second baffle 33a can also limit the movement to prevent the storage tank 31 from sliding off the chassis 12.

[0032] like Figure 2 and Figure 4 As shown, the deposition assembly 30 further includes a drive wheel (not shown), a driven wheel 34a, a timing belt (not shown), and a stirring power element (not shown). The stirring power element is mounted on the bracket 14, the drive wheel is mounted on the output end of the stirring power element, the driven wheel 34a is mounted on the first through pipe 37, one end of the timing belt is connected to the drive wheel, and the other end is connected to the driven wheel 34a. Optionally, both the drive wheel and the driven wheel 34a are sprockets, and the timing belt is a chain belt, which is the prior art. Through the cooperation of the stirring power element, the drive wheel, the driven wheel 34a, and the timing belt, the storage tank 31 is driven to rotate.

[0033] The vapor deposition apparatus 100 for lithium-ion battery silicon-carbon composite materials also includes a control component (not shown). The control component includes a controller and a flow meter. The heating element 24, the vacuum pump, the stirring power element, and the flow meter are all signal-connected to the controller. The flow meter is installed in the feed pipe 32 and works with the controller to control the intake air flow. The controller controls the heating temperature and heating time of the heating element 24, and also controls the operation of the vacuum pump and the stirring power element. Optionally, the control component further includes a feed valve and a discharge valve. The feed valve is installed in the feed pipe 32, and the discharge valve is installed in the discharge pipe 33. The controller controls the operation of the feed valve and the discharge valve.

[0034] In use, loosen the cover plate 36, detach the cover plate 36 and filter element 34 from the second through pipe 38, add an appropriate amount of porous carbon into the storage tank 31, and then install the cover plate 36 and filter element 34 into the second through pipe 38. Next, evacuate the air using a vacuum pump and heat the carbon using the heating element 24. While evacuating, heat the carbon to the predetermined temperature to fully expel the gas inside the pores of the porous carbon. After evacuation, introduce protective gas to a negative pressure state. Then, introduce silicon-containing gas and carrier gas into the storage tank 31 through the feed pipe 32. At the same time, the vacuum pump continues to evacuate the air to maintain a constant negative pressure in the storage tank 31, while the heating element 24 heats the carbon. Furthermore, the storage tank 31 rotates, and under the action of the tipping plate 35, the porous carbon is scattered and blown from a height through the through hole 353. Under the negative pressure environment, the silicon-containing gas fully penetrates into the pores of the porous carbon to carry out a vapor phase deposition reaction, obtaining a silicon-carbon composite material. This ensures uniform deposition and improves deposition efficiency and quality. After deposition is completed, the storage tank 31 stops rotating, the silicon-containing gas and carrier gas are stopped being introduced, and heating and evacuation are stopped. Then, the cover plate 36 is loosened, and the cover plate 36 and filter 34 are removed from the second pipe 38. The lifting power element 15 drives one end of the chassis 12 to rotate around one end of the bottom box 11, which facilitates the pouring of the silicon-carbon composite material in the storage tank 31.

[0035] A method for preparing silicon-carbon composite materials for lithium batteries, based on the aforementioned vapor deposition apparatus 100 for lithium battery silicon-carbon composite materials, comprises the following steps: Vacuuming and Preheating: Porous carbon is added to storage tank 31, and then vacuumed while heating to a predetermined temperature. After vacuuming, a protective gas is introduced to a negative pressure state. Specifically, the cover plate 36 is loosened, and the cover plate 36 and filter element 34 are detached from the second pipe 38. An appropriate amount of porous carbon is then added to storage tank 31, and the cover plate 36 and filter element 34 are installed in the second pipe 38. Next, a vacuum pump is used to evacuate the gas, and the heating element 24 is used to heat the gas while vacuuming, to fully expel the gas from the pores of the porous carbon. Optionally, the protective gas is one or a mixture of nitrogen, argon, helium, and neon, and the predetermined temperature is 400–1000°C; in one embodiment, the protective gas is nitrogen, and the predetermined temperature is 500°C.

[0036] Vapor deposition: Silicon-containing gas and carrier gas are introduced into the storage tank 31 through the feed pipe 32. At the same time, the vacuum pump continuously pumps gas to keep the storage tank 31 under constant negative pressure, and the heating element 24 heats it. Moreover, the storage tank 31 rotates, and under the action of the tipping plate 35, the silicon-containing gas fully penetrates into the pores of the porous carbon to carry out the vapor deposition reaction and obtain silicon-carbon composite material. Specifically, as the storage tank 31 rotates, porous carbon is scattered and dispersed from a height through the through-holes 353 under the action of the tipping plate 35. Under negative pressure, the silicon-containing gas fully penetrates into the pores of the porous carbon. Optionally, the silicon-containing gas includes one or more of silane, disilane, trisilane, tetrasilane, monochlorosilane, dichlorosilane, trichlorosilane, and tetrachlorosilane; the carrier gas is one or more of nitrogen, argon, helium, and neon; the heating temperature of the heating element 24 is 400–1000°C; in one embodiment, the silicon-containing gas is silane, the carrier gas is nitrogen, and the heating temperature of the heating element 24 is 550°C. Further, the flow-volume ratio of the silicon-containing gas to the carrier gas is 1:(1-18), and the negative pressure is -0.5 to -1 MPa. In one embodiment, the flow-volume ratio of the silicon-containing gas to the carrier gas is 1:10, and the negative pressure is -0.8 MPa.

[0037] Unloading: After deposition is completed, the storage tank 31 stops rotating, the silicon-containing gas and carrier gas are stopped being introduced, and heating and evacuation are stopped. Then the top box 13 is opened and cooled to room temperature. Next, the cover plate 36 is loosened and the cover plate 36 and filter 34 are removed from the second pipe 38. The lifting power element 15 drives one end of the machine box 12 to rotate around one end of the bottom box 11, which facilitates the pouring of silicon-carbon composite material in the storage tank 31.

[0038] The vapor deposition apparatus 100 for lithium-ion battery silicon-carbon composite materials uses a hook-shaped tipping plate 35 that rotates with the storage tank 31 to move porous carbon away from the porous carbon pile. As the storage tank 31 rotates further, the porous carbon in the tipping plate 35 is spilled out through the through holes 353, thus making full contact with the silicon-containing gas. Moreover, by continuously evacuating the gas, the storage tank 31 is kept at a constant negative pressure, which facilitates the full penetration of the silicon-containing gas into the pores of the porous carbon, resulting in uniform deposition. In addition, strong heat is released during the deposition process. If the heat cannot be removed in time, it will cause a sharp increase in local temperature (hot spot), which may cause local melting and sintering of silicon, or even induce homogeneous nucleation of silanes in the gas phase to generate silicon powder. By continuously evacuating the gas, some of the heat is removed to prevent overheating.

[0039] The vapor deposition apparatus 100 for lithium-ion battery silicon-carbon composite materials of the present invention maintains a constant negative pressure in the storage tank 31 by means of a vacuum pump and heats it by means of a heating element 24. At the same time, the storage tank 31 rotates, and under the action of the material turning plate 35, the porous carbon is blown away, so that the silicon-containing gas can fully penetrate into the pores of the porous carbon to carry out the vapor deposition reaction and obtain silicon-carbon composite material. The vapor deposition apparatus 100 for lithium-ion battery silicon-carbon composite materials of the present invention achieves uniform deposition and improves deposition quality and efficiency.

[0040] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0041] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A vapor deposition apparatus for silicon-carbon composite materials in lithium-ion batteries, characterized in that, The system includes a support assembly, a heating assembly, and a deposition assembly. The support assembly includes a base box, a chassis, and a top box. One end of the chassis is pivotally connected to the base box, and one side of the top box is pivotally connected to one side of the chassis. The heating assembly includes a lower shell, an upper shell, an insulation component, and a heating element. The lower shell is mounted on the chassis, and the upper shell is mounted on the top box. Both the upper and lower shells are equipped with the insulation component and the heating element. The deposition assembly includes a storage tank, a feed pipe, a discharge pipe, a filter element, a tilting plate, and a vacuum pump. The storage tank is used to store porous carbon and is rotatably connected to the lower shell. The feed pipe is connected to one end of the storage tank and is used to introduce silicon-containing gas and carrier gas into the storage tank. The filter element is detachably installed on the end of the storage tank away from the feed pipe. The discharge pipe is installed on the filter element and is used to discharge gas. The tilting plate is installed on the inner wall of the storage tank. One end of the vacuum pump is connected to the discharge pipe.

2. The vapor deposition apparatus for silicon-carbon composite materials in lithium batteries according to claim 1, characterized in that, There are multiple turning plates, and each turning plate is evenly distributed along the circumference of the storage tank; each turning plate includes a first support part and a second support part, the second support part is connected to one end of the first support part to form a hook shape, and the end of the first support part away from the second support part is installed in the storage tank. The second support portion is provided with multiple through holes.

3. The vapor deposition apparatus for silicon-carbon composite materials in lithium batteries according to claim 1, characterized in that, The deposition assembly further includes a first through pipe and a second through pipe, which are respectively connected to the two ends of the storage tank; the support assembly further includes a first support, a bearing seat, a second support, and a plurality of rollers, the first support and the second support are respectively installed at the two ends of the chassis, the bearing seat is installed on the first support, the first through pipe is rotatably connected to the bearing seat, the rollers are rotatably connected to the second support, and the rollers are used to abut against the second through pipe; the feed pipe passes through the first through pipe, and the filter element is detachably installed on the second through pipe.

4. The vapor deposition apparatus for silicon-carbon composite materials in lithium batteries according to claim 3, characterized in that, The support assembly also includes a bracket installed at the bottom of the chassis; the deposition assembly also includes a drive wheel, a driven wheel, a timing belt and a stirring power element, the stirring power element is installed on the bracket, the drive wheel is installed at the output end of the stirring power element, the driven wheel is installed on the first through pipe, one end of the timing belt is connected to the drive wheel and the other end is connected to the driven wheel.

5. The vapor deposition apparatus for silicon-carbon composite materials in lithium batteries according to claim 1, characterized in that, The deposition assembly further includes a first bearing and a second bearing. The first bearing is installed at the end of the storage tank away from the filter element. The feed pipe passes through the first bearing. The second bearing is installed in the filter element. The discharge pipe passes through the second bearing.

6. The vapor deposition apparatus for silicon-carbon composite materials in lithium batteries according to claim 1, characterized in that, The deposition assembly further includes a first baffle and a second baffle, which are respectively installed at both ends of the storage tank; the insulation component has a first groove and a second groove at both ends, the first groove is used to accommodate the first baffle, and the second groove is used to accommodate the second baffle.

7. The vapor deposition apparatus for silicon-carbon composite materials in lithium batteries according to claim 1, characterized in that, The support assembly further includes a lifting power element and an opening and closing power element. One end of the lifting power element is pivotally connected to the bottom box, and the other end is pivotally connected to one end of the chassis. One end of the opening and closing power element is pivotally connected to the chassis, and the other end is pivotally connected to the top box.

8. The vapor deposition apparatus for silicon-carbon composite materials in lithium batteries according to claim 1, characterized in that, It also includes a control component, which includes a controller and a flow meter. The heating element, the air pump, and the flow meter are all signal-connected to the controller. The flow meter is installed on the feed pipe.

9. A method for preparing silicon-carbon composite materials for lithium batteries, characterized in that, The vapor deposition apparatus for lithium-ion battery silicon-carbon composite materials according to claim 1 comprises the following steps: Vacuuming and preheating: Porous carbon is added to the storage tank, and then vacuuming is performed while heating to the predetermined temperature; after vacuuming, protective gas is introduced to a negative pressure state. Vapor deposition: Silicon-containing gas and carrier gas are introduced into the storage tank through the feed pipe. At the same time, the vacuum pump continuously pumps gas to maintain a constant negative pressure in the storage tank, and the heating element heats the tank. Furthermore, the storage tank rotates, and under the action of the tilting plate, the silicon-containing gas fully penetrates into the pores of the porous carbon to carry out the vapor deposition reaction, thereby obtaining a silicon-carbon composite material.

10. The method for preparing silicon-carbon composite material for lithium batteries according to claim 9, characterized in that, The silicon-containing gas includes one or more of silane, disilane, trisilane, tetrasilane, monochlorosilane, dichlorosilane, trichlorosilane, and tetrachlorosilane; the protective gas is one or more of nitrogen, argon, helium, and neon; the carrier gas is one or more of nitrogen, argon, helium, and neon; the flow rate-to-volume ratio of the silicon-containing gas to the carrier gas is 1:(1-18); the negative pressure is -0.5 to -1 MPa; and the heating temperature of the heating element is 400 to 1000 °C.

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