Fluid shunting device and semiconductor equipment

Abstract

The invention provides a fluid shunting device and semiconductor equipment. The fluid shunting device comprises a shunting cavity, a plurality of groups of first adjusting plates and a plurality of first driving assemblies, the flow dividing cavity is hollow and comprises a spraying plate located at the bottom of the flow dividing cavity, a plurality of sets of through holes distributed at intervals are formed in the spraying plate in a penetrating mode, and each partition of the spraying plate at least corresponds to one set of through holes; the first adjusting plates and the through holes are arranged in a one-to-one correspondence manner, and the first adjusting plates are rotatably arranged at the through holes of the corresponding spraying plates; each first driving assembly is in driving connection with the corresponding set of first adjusting plates, and one first driving assembly drives the corresponding set of first adjusting plates to rotate so as to adjust the flow and / or direction of fluid in the corresponding set of through holes. The first driving assembly drives the corresponding group of first adjusting plates to rotate, and the first adjusting plates are rotated to different angles, so that the flow and / or direction of fluid in the through holes of each subarea can be independently adjusted.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a fluid distribution device and semiconductor equipment. Background Technology

[0002] Semiconductor equipment (e.g., etching machines, coating equipment) is equipped with a fluid distribution device for spraying fluid. The fluid distribution device has a spray plate with through holes, which divides the entire spray plate into 2-3 zones. The fluid is distributed to each zone through pipelines. The total flow rate of the fluid in each zone is 100%. The fluid is distributed to each zone according to a percentage. The flow rate of the fluid in multiple zones is adjusted in a coordinated manner. If the flow rate of the fluid in one zone is reduced, the flow rate of the fluid in other zones will also change accordingly. It is not possible to adjust the flow rate of the fluid in each zone individually, which will cause some changes in the overall critical dimensions of the semiconductor device.

[0003] In view of this, it is necessary to propose a fluid splitting device and a semiconductor device to solve the above problems. Summary of the Invention

[0004] The purpose of this invention is to provide a fluid distribution device and a semiconductor device to improve the problem that existing fluid distribution devices cannot individually adjust the fluid flow rate of each zone.

[0005] The present invention provides a fluid diversion device, comprising: a diversion cavity, a plurality of first regulating plates, and a plurality of first driving components; The diversion cavity is hollow inside and includes a spray plate located at the bottom of the diversion cavity. The spray plate is provided with a plurality of through holes spaced apart, and each section of the spray plate corresponds to at least one set of the through holes. The first adjusting plate is provided in a one-to-one correspondence with the through hole, and the first adjusting plate is rotatably disposed at the corresponding through hole of the spray plate; Each of the first drive components is driven to a corresponding set of first adjustment plates. The first drive component drives the corresponding set of first adjustment plates to rotate, thereby adjusting the flow rate and / or direction of the fluid in the corresponding set of through holes.

[0006] The beneficial effect of the fluid diversion device provided by the present invention is that: by setting a first adjusting plate at each through hole of the spray plate, each section of the spray plate corresponds to at least a set of the through holes, and the first driving component drives the corresponding set of the first adjusting plates to rotate, by rotating the first adjusting plates to different angles, the flow rate and / or direction of the fluid in the through holes of each section can be adjusted individually.

[0007] In one possible embodiment, several sets of through holes are spaced apart along the radial direction of the flow-dividing cavity, and each set of through holes is arranged in a ring array along the circumferential direction of the flow-dividing cavity. By adjusting the first driving component, the flow rate and / or direction of the fluid in the corresponding set of through holes in the circumferential direction can be adjusted.

[0008] In one possible embodiment, the first driving component includes a first driving member and a first transmission component connected to the first driving member. The first transmission component is connected to a corresponding set of the first adjusting plates. Driven by the first driving member and transmitted by the first transmission component, the corresponding set of the first adjusting plates rotates, thereby adjusting the flow rate and / or direction of the fluid in the corresponding set of through holes in the circumferential direction.

[0009] In one possible embodiment, the first transmission assembly includes a set of first rotating shafts, a set of first transmission wheels, and a first transmission belt. The first rotating shafts are connected to the corresponding first adjusting plates. The first transmission wheels are fixedly sleeved on the corresponding first rotating shafts. The first transmission belt is wound around the corresponding set of first transmission wheels. The first driving member is driven to rotate one of the first rotating shafts in the set of first rotating shafts. The first driving member drives the corresponding first rotating shaft to rotate. Under the transmission action of the first transmission belt, the corresponding set of first transmission wheels rotates synchronously, thereby driving the corresponding set of first adjusting plates to rotate synchronously, thereby adjusting the flow rate and / or direction of the fluid in the corresponding set of through holes in the circumferential direction.

[0010] Its beneficial effects are as follows: For a group of through holes distributed in a ring array, driven by a first driving member and transmitted through a first transmission belt, a corresponding group of first transmission wheels rotate synchronously, thereby driving a corresponding group of first adjusting plates to rotate synchronously around their respective first rotating shafts. This allows the first adjusting plates to open, close, or partially block the through holes, thereby achieving adjustment of the flow rate and / or direction of the fluid in the group of through holes. Moreover, since only one first driving member is used, the structure of the first driving assembly is simple and occupies a small volume.

[0011] In one possible embodiment, the spray plate is provided with a mounting groove for each group of through holes, the mounting groove is arranged around the corresponding group of through holes and communicates with the corresponding group of through holes, and the first driving component is located in the corresponding mounting groove.

[0012] Its beneficial effect is that placing the first drive component in the mounting slot can reduce space occupation and make the structure more compact.

[0013] In one possible embodiment, the through holes on the spray plate can be further divided into several rows of spaced distribution along the circumferential direction of the diversion cavity, and each row of through holes is linearly arrayed along the radial direction of the diversion cavity; The fluid diversion device further includes a plurality of second drive components disposed on the spray plate. Each second drive component corresponds to a row of through holes. By adjusting the second drive component, the flow rate and / or direction of the fluid in the corresponding row of through holes in the radial direction can be adjusted.

[0014] In one possible embodiment, the fluid diversion device further includes several rows of second adjusting plates, each of which is corresponding to a through hole. The second adjusting plates are rotatably disposed at the corresponding through hole. The second adjusting plates and the first adjusting plates are spaced apart within the through holes. The second driving component is driven to connect with a corresponding row of second adjusting plates. The second driving component drives the corresponding row of second adjusting plates to rotate, thereby adjusting the flow rate and / or direction of the fluid in the corresponding radial row of through holes.

[0015] In one possible embodiment, the second driving assembly includes a second driving member and a second transmission assembly connected to the second driving member. The second transmission assembly is connected to a corresponding row of the second adjusting plates. Driven by the second driving member and transmitted by the second transmission assembly, the corresponding row of the second adjusting plates rotates, thereby adjusting the flow rate and / or direction of the fluid in the corresponding row of through holes in the radial direction.

[0016] In one possible embodiment, the second transmission assembly includes a row of second rotating shafts, a row of second transmission wheels, a transmission component, and a second transmission belt. The second adjusting plate is correspondingly arranged with the second transmission wheels. The second transmission wheels are rotatably mounted on the spray plate via the second rotating shafts. The second adjusting plate is connected to the corresponding second rotating shaft via the transmission component. The second transmission belt is wound around the corresponding row of second transmission wheels. The second driving component is connected to one of the second rotating shafts in the row of second rotating shafts. The second driving component drives the corresponding second rotating shaft to rotate. Under the transmission action of the second transmission belt, the corresponding row of second transmission wheels and the row of second rotating shafts rotate synchronously. The torque of the second rotating shaft is transmitted to the corresponding second adjusting plate via the transmission component, thereby driving the corresponding row of second adjusting plates to rotate synchronously, thereby adjusting the flow rate and / or direction of the fluid in the corresponding radial row of through holes.

[0017] Its beneficial effects are as follows: For a row of through holes distributed in a linear array, a second driving member drives a row of second transmission wheels to rotate synchronously through the transmission action of a second transmission belt, and through the transmission action of the transmission member, drives a row of second adjustment plates to rotate synchronously, thereby adjusting the flow rate and / or direction of the fluid in the row of through holes in the corresponding radial direction. Moreover, since only one second driving member is provided, the structure of the second driving assembly is simple and occupies a small volume.

[0018] In one possible embodiment, the spray plate is provided with a receiving groove for each row of through holes, and the second drive component is located in the corresponding receiving groove.

[0019] Its beneficial effect is that placing the second drive component in the receiving slot can reduce space occupation and make the structure more compact.

[0020] In one possible embodiment, two adjacent sets of through holes are aligned or staggered in the radial direction of the flow divider cavity.

[0021] In one possible embodiment, the spray plate has a central hole extending through its center; The fluid diversion device further includes a third adjusting plate rotatably disposed at the central hole and a third driving assembly drivenly connected to the third adjusting plate. The third driving assembly drives the third adjusting plate to rotate, thereby adjusting the flow rate and / or direction of the fluid in the central hole.

[0022] Its beneficial effect is that, for the central hole located at the center of the spray plate, the third adjustment plate can be rotated by the third drive assembly, thereby allowing the flow rate and / or direction of the fluid in the central hole to be adjusted individually.

[0023] In one possible embodiment, the third drive assembly includes a third rotating shaft connected to the corresponding third adjusting plate and a third drive member driven by the third rotating shaft. The third drive member drives the third rotating shaft to rotate, thereby causing the third adjusting plate to rotate, thereby adjusting the flow rate and / or direction of the fluid in the central hole.

[0024] Its beneficial effects are as follows: the third driving component drives the third rotating shaft to rotate, thereby driving the third adjusting plate to rotate around the third rotating shaft as the rotation center, thereby adjusting the flow rate and / or direction of the fluid in the central hole. The third driving component has a simple structure and occupies a small volume.

[0025] The present invention also provides a semiconductor device, including: a fluid splitting device as described in any of the above embodiments. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the fluid diversion device of the present invention.

[0027] Figure 2 This is a partial cross-sectional view of the fluid diversion device of the present invention in the longitudinal direction.

[0028] Figure 3 for Figure 2 A magnified view of a portion of region A in the middle.

[0029] Figure 4 for Figure 2 A magnified view of a portion of region B in the middle.

[0030] Figure 5 for Figure 2 A magnified view of a portion of region C.

[0031] Figure 6 This is a partial cross-sectional view of the fluid diversion device of the present invention in the lateral direction at the first drive assembly.

[0032] Figure 7 for Figure 6 A magnified view of a portion of region D.

[0033] Figure 8 This is a schematic diagram showing that each group of through holes in the fluid diversion device of the present invention is arranged in a ring array along the circumferential direction of the diversion cavity.

[0034] Figure 9 This is a schematic diagram showing that each row of through holes in the fluid diversion device of the present invention is linearly arrayed along the radial direction of the diversion cavity.

[0035] Explanation of reference numerals in the attached drawings: 100, diversion cavity; 110, spray plate; 111, through hole; 112, center hole; 113, mounting groove; 1131, main groove section; 1132, branch groove section; 1133, first opening; 114, receiving groove; 1141, first groove section; 1142, second groove section; 1143, second opening; 115, limiting hole; 116, groove; 1101, upper plate; 1102, middle plate; 1103, lower plate; 200, first adjusting plate; 300, first drive assembly; 310, first transmission assembly; 311 311. First rotating shaft; 312. First transmission wheel; 313. First transmission belt; 314. First bearing; 320. First driving component; 400. Second adjusting plate; 500. Second driving assembly; 510. Second transmission assembly; 511. Transmission component; 5111. Connecting shaft; 5112. First bevel gear; 5113. Second bevel gear; 512. Second rotating shaft; 513. Second transmission wheel; 514. Second transmission belt; 520. Second driving component; 600. Third adjusting plate; 700. Third driving assembly; 710. Third rotating shaft; 720. Third driving component. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0037] To address the problems existing in the prior art, embodiments of the present invention provide a fluid diversion device, see below. Figure 1 and Figure 2 The fluid diversion device includes a diversion cavity 100, several sets of first adjusting plates 200, and several first driving components 300. The diversion cavity 100 is hollow and includes a spray plate 110 located at the bottom of the diversion cavity 100. Several sets of through holes 111 are spaced apart and permeate the spray plate 110, with each section of the spray plate 110 corresponding to at least one set of through holes 111. Each first adjusting plate 200 is rotatably positioned at a corresponding through hole 111 of the spray plate 110. Each first driving component 300 is driven by a corresponding set of first adjusting plates 200, and by driving the corresponding set of first adjusting plates 200 to rotate, the flow rate and / or direction of the fluid in the corresponding set of through holes 111 is adjusted.

[0038] In this embodiment, a first adjusting plate 200 is provided at each through hole 111 on the spray plate 110. The first adjusting plate 200 is designed to be rotatable and adjustable. On the one hand, the degree of obstruction of the through hole 111 by the first adjusting plate 200 can be adjusted, thereby realizing the adjustment of the fluid flow rate of the through hole 111. On the other hand, the tilt angle of the first adjusting plate 200 can be adjusted, thereby realizing the adjustment of the fluid direction of the through hole 111. Regarding the adjustment of fluid flow rate, for example, when the first regulating plate 200 is in a vertical state (open state), the first regulating plate 200 does not block the through hole 111, and at this time, the fluid flow rate of the through hole 111 is the maximum; when the first regulating plate 200 is in an inclined state (partially open state), the first regulating plate 200 partially blocks the through hole 111, and at this time, the fluid flow rate of the through hole 111 decreases; when the first regulating plate 200 is in a horizontal state (closed state), the first regulating plate 200 completely blocks the through hole 111, and at this time, no fluid flows through the through hole 111, such as... Figure 3 As shown. To adjust the fluid direction, by adjusting the first adjusting plate 200 to different tilt angles, the fluid will flow along the tilt direction of the first adjusting plate 200, thus adjusting the flow direction of the fluid ejected from the through hole 111, so that the fluid ejected from the through hole 111 can be sprayed toward different areas on the wafer.

[0039] Since each partition of the spray plate 110 corresponds to at least one set of through-holes 111, the amount of fluid sprayed onto different areas of the wafer can be adjusted by regulating the first driving components 300 at different partitions of the spray plate 110 to individually rotate the first adjusting plates 200 located in different partitions, thereby improving the uniformity of critical dimensions in different areas of the wafer. For example, in an etching process, the uniformity of etching can be ensured by finely adjusting the flow rate and / or direction of the fluid in the through-holes 111 of each partition. Moreover, by synchronously adjusting the multiple first adjusting plates 200 distributed in each partition, the fluid flow rate of each partition can be adjusted individually, finely, and rapidly, thereby improving the efficiency of fluid flow rate regulation at each partition.

[0040] It should be noted that the fluid can be gas or liquid. In dry processes, the spray device can be used to spray gas; in wet processes, the spray device can be used to spray liquid.

[0041] In one embodiment, see Figure 8 Several groups of through holes 111 are spaced apart along the radial direction of the flow distribution cavity 100, and each group of through holes 111 is arranged in a ring array along the circumferential direction of the flow distribution cavity 100, such as... Figure 8 The area between the two dashed lines defines a set of through holes 111. (See also...) Figure 6By adjusting the first driving component 300, the flow rate and / or direction of the fluid in a corresponding set of through holes 111 in the circumferential direction can be adjusted. In this embodiment, since each first driving component 300 can individually adjust the flow rate and / or direction of the fluid in a corresponding set of through holes 111 in the circumferential direction, the flow rate and / or direction of the fluid in the through holes 111 located in different rings can be adjusted according to actual spraying requirements by adjusting each ring individually, so as to ensure that when the fluid is sprayed from the distribution cavity 100 to the wafer surface, a relatively uniform fluid distribution can be formed in the radial direction. Each set of through holes 111 is arranged in a ring array in the circumferential direction of the distribution cavity 100, which can further ensure that the fluid is also uniformly distributed in the circumferential direction on the wafer surface. By controlling the flow rate and / or direction of the fluid in different sets of through holes 111 in a grouping manner, independent adjustment of the flow rate and / or direction of the fluid in different zones on the spray plate 110 can be achieved.

[0042] In one embodiment, see Figure 3 , Figure 4 as well as Figure 7 The first driving assembly 300 includes a first driving member 320 and a first transmission assembly 310 connected to the first driving member 320. The first transmission assembly 310 is connected to a corresponding set of first adjusting plates 200. Driven by the first driving member 320 and transmitted by the first transmission assembly 310, the corresponding set of first adjusting plates 200 rotate, thereby adjusting the flow rate and / or direction of the fluid in the corresponding set of through holes 111 in the circumferential direction. In this embodiment, since the first transmission assembly 310 acts as a transmission between the first driving member 320 and the corresponding set of first adjusting plates 200, only one first driving member 320 is needed to drive the corresponding set of first adjusting plates 200 to rotate and adjust, thereby simultaneously adjusting the flow rate and / or direction of the fluid in the corresponding set of through holes 111 in the circumferential direction.

[0043] In one embodiment, see Figure 3 and Figure 4 The first transmission assembly 310 includes a set of first rotating shafts 311, a set of first transmission wheels 312, and a first transmission belt 313. The first rotating shafts 311 are connected to the corresponding first adjusting plates 200. The first transmission wheels 312 are fixedly sleeved on the corresponding first rotating shafts 311. The first transmission belt 313 is wound around the corresponding set of first transmission wheels 312. The first driving member 320 is driven to rotate one of the first rotating shafts 311 in the set of first rotating shafts 311. The first driving member 320 drives the corresponding first rotating shaft 311 to rotate. Under the transmission action of the first transmission belt 313, the corresponding set of first transmission wheels 312 rotate synchronously, thereby driving the corresponding set of first adjusting plates 200 to rotate synchronously, thereby adjusting the flow rate and / or direction of the fluid in the corresponding set of through holes 111 in the circumferential direction.

[0044] In this embodiment, a mounting groove 113 is provided around a group of through holes 111 arranged in a ring array and communicates with them. A first drive assembly 300 is provided in the mounting groove 113. It has good integration and does not occupy the space in the diversion cavity 100. The first drive assembly 300 adopts a group of first rotating shafts 311, a group of first transmission wheels 312, a first transmission belt 313 and a first drive member 320. Since the first transmission belt 313 is wound around the corresponding group of first transmission wheels 312, when the first drive member 320 drives one of the first rotating shafts 311 to rotate, the other first rotating shafts 311 will rotate synchronously under the action of the first transmission belt 313, thereby driving the first adjustment plate 200 connected to the first rotating shaft 311 to rotate. Thus, the flow rate and / or direction of the fluid in the group of through holes 111 arranged in a ring array can be adjusted through the first adjustment plate 200, while ensuring that the fluid is uniformly distributed in the circumferential direction on the wafer surface. In addition, the first drive assembly 300 adopts a belt drive method, which can drive a set of first adjustment plates 200 to rotate synchronously by only one first drive component 320. This can greatly reduce the number of first drive components 320, simplify the drive structure, and reduce the manufacturing and maintenance costs of the device.

[0045] In one specific embodiment, see Figure 3 , Figure 4 , Figure 6 as well as Figure 7 Each set of through holes 111 on the spray plate 110 is provided with a mounting groove 113. The mounting groove 113 is arranged around the corresponding set of through holes 111 and communicates with the corresponding set of through holes 111. The first drive component 300 is located in the corresponding mounting groove 113. The mounting groove 113 can be set to a shape that matches the structure of the first drive component 300 to reduce the size of the mounting groove 113 and avoid making the groove on the spray plate 110 too large, which would affect the structural stability of the spray plate 110.

[0046] In one specific embodiment, see Figure 3 and Figure 4 The first rotating shaft 311 is horizontally positioned and located in the corresponding mounting groove 113. Part of the first rotating shaft 311 extends into the corresponding through hole 111, and the first transmission wheel 312 is located in the corresponding mounting groove 113.

[0047] In one specific embodiment, see Figure 3 , Figure 4 , Figure 6 as well as Figure 7A mounting slot 113 is used to accommodate a corresponding first drive component 300. The mounting slot 113 includes a main slot section 1131 and a plurality of branch slot sections 1132 spaced apart on the main slot section 1131. The main slot section 1131 is used to accommodate a first drive component 320, a first transmission wheel 312 and a first transmission belt 313. The main slot section 1131 is in the shape of a ring or C or other curved shape. A group of first transmission wheels 312 are spaced apart along the extension direction of the corresponding main slot section 1131. One end of the branch slot section 1132 is connected to the corresponding main slot section 1131 and the other end is connected to the corresponding through hole 111. The branch slot section 1132 is adapted to the first rotating shaft 311. The branch slot section 1132 and the first rotating shaft 311 are arranged in a one-to-one correspondence. The first rotating shaft 311 passes through the corresponding branch slot section 1132.

[0048] It should be emphasized that the first transmission wheel 312 is arranged vertically, such as... Figure 3 and Figure 4 As shown, the first transmission belt 313 is sequentially wound around the surface of a set of first transmission pulleys 312. Viewed from above, the first transmission belt 313 is C-shaped, as... Figure 6 As shown; from a cross-sectional perspective, the first transmission belt 313 is located on the upper and lower surfaces of the first transmission wheel 312, respectively. Figure 3 and Figure 4 As shown.

[0049] In one embodiment, see Figure 6 and Figure 7 One end of one of the first rotating shafts 311 in a group of first rotating shafts 311, away from the first adjusting plate 200, is connected to the first driving member 320. The other ends of the first rotating shafts 311 in the group of first rotating shafts 311, away from the first adjusting plate 200, are rotatably disposed on the groove wall of the corresponding mounting groove 113. The first driving member 320 is disposed in the corresponding mounting groove 113.

[0050] In one specific embodiment, the ends of the remaining first rotating shafts 311 in a group of first rotating shafts 311 that are away from the first adjusting plate 200 are rotatably mounted on the wall of the corresponding mounting groove 113 via positioning holes, first bearings 314, or connecting seats. In the case of positioning holes, the positioning holes are located on the wall of the corresponding mounting groove 113; in the case of connecting seats, the connecting seats have insertion holes adapted to the first rotating shafts 311 for inserting the ends of the corresponding first rotating shafts 311 that are away from the first adjusting plate 200, and the connecting seats are located on the wall of the mounting groove 113; in the case of first bearings 314, the first bearings 314 are located on the wall of the mounting groove 113, such as... Figure 7 As shown.

[0051] In one embodiment, see Figure 9The through holes 111 on the spray plate 110 can also be divided into several rows of spaced-apart holes along the circumferential direction of the diversion cavity 100. Each row of through holes 111 is linearly arrayed along the radial direction of the diversion cavity 100, such as... Figure 9 The area defined by the dashed box indicates the range of a row of through holes 111. (See also...) Figure 2 The fluid diversion device also includes several second drive components 500 disposed on the spray plate 110. Each second drive component 500 is respectively configured corresponding to a row of through holes 111. By adjusting the second drive component 500, the flow rate and / or direction of the fluid in the corresponding radial row of through holes 111 can be adjusted. In this embodiment, each second drive component 500 can individually adjust the flow rate and / or direction of the fluid in the corresponding radial row of through holes 111. Therefore, according to actual spraying requirements, the flow rate and / or direction of the fluid in the through holes 111 located at different radial positions can be adjusted by individually adjusting each row.

[0052] In one embodiment, see Figure 2 The fluid diversion device also includes several rows of second adjusting plates 400, each corresponding to a through hole 111. The second adjusting plates 400 are rotatably disposed at their respective through holes 111. The second adjusting plates 400 and first adjusting plates 200 are spaced apart within the through holes 111. A second driving assembly 500 is driven to rotate the corresponding row of second adjusting plates 400. By driving the corresponding row of second adjusting plates 400 to rotate through the second driving assembly 500, the flow rate and / or direction of the fluid in the corresponding radial row of through holes 111 can be adjusted. In this embodiment, only one second driving assembly 500 is needed to drive the rotation of the row of second adjusting plates 400, thereby simultaneously adjusting the flow rate and / or direction of the fluid in the corresponding radial row of through holes 111.

[0053] In one embodiment, see Figure 3 The second driving assembly 500 includes a second driving member 520 and a second transmission assembly 510 connected to the second driving member 520. The second transmission assembly 510 is connected to a corresponding row of second adjusting plates 400. Driven by the second driving member 520 and transmitted by the second transmission assembly 510, the corresponding row of second adjusting plates 400 rotates, thereby adjusting the flow rate and / or direction of the fluid in the corresponding row of radial through holes 111. In this embodiment, since the second transmission assembly 510 acts as a transmission between the second driving member 520 and the corresponding row of second adjusting plates 400, only one second driving member 520 is needed to drive the corresponding row of second adjusting plates 400 to rotate and adjust, thereby simultaneously adjusting the flow rate and / or direction of the fluid in the corresponding row of radial through holes 111.

[0054] In a preferred embodiment, see Figure 3 and Figure 4 The second transmission assembly 510 includes a row of second rotating shafts 512, a row of second transmission wheels 513, a transmission component 511, and a second transmission belt 514. A second adjusting plate 400 is correspondingly arranged with each of the second transmission wheels 513. The second transmission wheels 513 are rotatably mounted on the spray plate 110 via the second rotating shafts 512. The second adjusting plate 400 is connected to the corresponding second rotating shaft 512 via the transmission component 511. The second transmission belt 514 is wound around the corresponding row of second transmission wheels 513. The second driving component 520 is connected to the row of second rotating shafts 512. A second shaft 512 is connected to one of the shafts 512. The second driving member 520 drives the corresponding second shaft 512 to rotate. Under the transmission action of the second transmission belt 514, the corresponding row of second transmission wheels 513 and the row of second shafts 512 rotate synchronously. The torque of the second shaft 512 is transmitted to the corresponding second adjusting plate 400 through the transmission member 511, thereby driving the corresponding row of second adjusting plates 400 to rotate synchronously, thereby adjusting the flow rate and / or direction of the fluid in the corresponding row of through holes 111 in the radial direction.

[0055] When the second driving member 520 drives one of the second rotating shafts 512 to rotate, the remaining second rotating shafts 512 will rotate synchronously under the action of the second transmission belt 514. Since the transmission member 511 plays a transmission role between the corresponding second rotating shaft 512 and the corresponding second adjusting plate 400, the torque of the second rotating shaft 512 is transmitted to the corresponding second adjusting plate 400 through the transmission member 511, thereby driving the corresponding row of second adjusting plates 400 to rotate synchronously. Thus, the rotation of the row of second adjusting plates 400 is used to adjust the flow rate and / or direction of the fluid in the row of through holes 111 distributed in the radial direction, so as to adjust the fluid flow rate in the local area of ​​the spray plate 110 in the radial direction, thereby improving the problem of uneven processing in the local area of ​​the wafer.

[0056] It should be emphasized that, see Figure 3 and Figure 4 The second drive wheel 513 is horizontally arranged, and the second drive belt 514 is sequentially wound around the wheel surface of a row of second drive wheels 513. The second drive belt 514 is arranged in the radial direction of the diversion cavity 100.

[0057] In one embodiment, see Figure 3 and Figure 4The transmission component 511 includes a connecting shaft 5111 mounted on the second adjusting plate 400, a first bevel gear 5112 fixedly sleeved on the connecting shaft 5111, and a second bevel gear 5113 fixedly sleeved on the second rotating shaft 512. The first bevel gear 5112 and the second bevel gear 5113 are meshed together. The second rotating shaft 512 is vertically arranged, and the connecting shaft 5111 is perpendicular to the second rotating shaft 512. In this embodiment, through the meshing of the first bevel gear 5112 and the second bevel gear 5113, the vertical torque force on the second rotating shaft 512 is converted into a horizontal torque force on the connecting shaft 5111. By using bevel gears to convert the direction of force, the structural design of the transmission system can be simplified. It should be noted that those skilled in the art can also use other structures of the transmission component 511, as long as it can achieve the transmission of torque force in different directions. The specific structure of the transmission component 511 is not limited here.

[0058] In one specific embodiment, see Figure 2 , Figure 3 as well as Figure 4 Each row of through holes 111 on the spray plate 110 is provided with a receiving groove 114, and the second drive assembly 500 is located in the corresponding receiving groove 114. The receiving groove 114 includes a plurality of first groove segments 1141 and a plurality of second groove segments 1142. The first groove segments 1141 are arranged one-to-one with the through holes 111 and are connected to the corresponding through holes 111. The first groove segments 1141 are located on the side of the through holes 111 away from the center of the spray plate 110. The first groove segments 1141 are used to accommodate the second rotating shaft 512, the second transmission wheel 513, the transmission component 511, and the second drive component 520. The second groove segments 1142 are located between two adjacent first groove segments 1141 and are connected to the adjacent first groove segments 1141. The plurality of second groove segments 1142 are used to accommodate the second transmission belt 514. The second groove segment 1142 is connected to the adjacent through hole 111 and the second transmission belt 514 is disposed against the hole wall of the through hole 111, or the second groove segment 1142 is disposed around the through hole 111 to avoid the through hole 111.

[0059] In one specific embodiment, see Figure 4 The end of the second rotating shaft 512 is rotatably mounted on the wall of the corresponding receiving groove 114. The end of the second rotating shaft 512 is rotatably mounted on the wall of the receiving groove 114 via a limiting hole 115, a second bearing, or a fixed seat. If a limiting hole 115 is provided, it is located on the wall of the receiving groove 114; if a fixed seat is provided, it has a through hole adapted to the second rotating shaft 512 for the end of the corresponding second rotating shaft 512 to pass through.

[0060] In one specific embodiment, two adjacent sets of through holes 111 are aligned or staggered in the radial direction of the flow divider 100. The alignment of two adjacent sets of through holes 111 in the radial direction of the flow divider 100 can be understood as one through hole 111 located in the inner ring and its adjacent through hole 111 located in the outer ring being located in the same radial direction of the flow divider 100, such as... Figure 2 As shown, this design features a denser distribution of through-holes 111, allowing for more precise adjustment of fluid flow in localized areas. Adjacent sets of through-holes 111 are staggered in the radial direction of the flow-dividing cavity 100. This can be understood as a through-hole 111 located in the inner ring of two adjacent sets of through-holes 111 being located in different radial directions within the flow-dividing cavity 100 compared to its adjacent through-hole 111 located in the outer ring. Figure 6 As shown, by rationally arranging the position distribution of the through holes 111, while meeting the requirements for fluid flow regulation, the number of the first rotating shaft 311, the first transmission wheel 312, the second rotating shaft 512, the second transmission wheel 513, and the transmission component 511 can be reduced, thereby simplifying the structure of the first drive assembly 300 and the second drive assembly 500 and reducing the manufacturing and maintenance costs of the device.

[0061] In some specific embodiments, see Figure 2 , Figure 6 as well as Figure 7 The first transmission wheel 312 and the second transmission wheel 513 are gears, and the first transmission belt 313 and the second transmission belt 514 are chains; or, the first transmission wheel 312 and the second transmission wheel 513 are pulleys, and the first transmission belt 313 and the second transmission belt 514 are belts. It should be noted that the spray plate 110 has internal slots for installing the first drive assembly 300 and the second drive assembly 500. To avoid occupying too much space, the first drive wheel 312, the second drive wheel 513, the first drive belt 313, and the second drive belt 514 are all miniature components. The first drive belt 313 and the second drive belt 514 are linear. The thin line design of the first drive belt 313 and the second drive belt 514 facilitates bending. Since the first drive belt 313 is set in the curved main groove section 1131, the thin line shape of the first drive belt 313 makes it easier for the first drive belt 313 to be wound around a set of first drive wheels 312 along the extension direction of the main groove section 1131, and also makes it easier to transmit power around a set of first drive wheels 312.

[0062] In one embodiment, see Figure 2 , Figure 5 as well as Figure 6The spray plate 110 has a central hole 112 through its center. The fluid diversion device also includes a third adjusting plate 600 rotatably disposed at the central hole 112 and a third driving assembly 700 drivenly connected to the third adjusting plate 600. The third driving assembly 700 drives the third adjusting plate 600 to rotate, thereby adjusting the flow rate and / or direction of the fluid in the central hole 112.

[0063] In one embodiment, see Figure 5 The third drive assembly 700 includes a third rotating shaft 710 connected to the corresponding third adjusting plate 600 and a third drive member 720 driven by the third rotating shaft 710. The third drive member 720 drives the third rotating shaft 710 to rotate, thereby driving the third adjusting plate 600 to rotate, thereby adjusting the flow rate and / or direction of the fluid in the central hole 112.

[0064] In this embodiment, a separate third drive assembly 700 is provided for the central hole 112 located at the center of the spray plate 110 to independently control the rotation adjustment of the third adjusting plate 600 within the central hole 112. On one hand, the degree of obstruction of the central hole 112 by the third adjusting plate 600 can be adjusted, thereby regulating the fluid flow rate of the central hole 112. On the other hand, the tilt angle of the third adjusting plate 600 can be adjusted, thereby regulating the direction of the central hole 112. Regarding the regulation of fluid flow rate, for example, when the third adjusting plate 600 is in a vertical state (open state), the third adjusting plate 600 does not obstruct the central hole 112, and at this time, the fluid flow rate of the central hole 112 is at its maximum; when the third adjusting plate 600 is in a tilted state (partially open state), the third adjusting plate 600 partially obstructs the central hole 112, and at this time, the fluid flow rate of the central hole 112 decreases. Figure 5 As shown; when the third adjusting plate 600 is in a horizontal state (closed state), the third adjusting plate 600 completely blocks the central hole 112, and at this time, no fluid flows through the central hole 112. To adjust the fluid direction, by adjusting the third adjusting plate 600 to different tilt angles, the flow direction of the fluid ejected from the central hole 112 can be adjusted because the fluid will flow along the tilt direction of the third adjusting plate 600.

[0065] In one specific embodiment, see Figure 5 The central hole 112 has a groove 116 on its wall, and the third drive assembly 700 is located within the groove 116. The third rotating shaft 710 is horizontally positioned and located within the groove 116. A portion of the third rotating shaft 710 extends into the corresponding through hole 111 and is connected to the corresponding third adjusting plate 600. The third drive component 720 is located within the groove 116. The opening of the groove 116 is adapted to the third rotating shaft 710.

[0066] In one embodiment, see Figure 3 , Figure 4 as well as Figure 5 The spray plate 110 is divided into an upper plate 1101, a middle plate 1102 and a lower plate 1103 from top to bottom. The upper plate 1101 and the middle plate 1102 are detachably installed and fixed by fasteners or buckles, and the middle plate 1102 and the lower plate 1103 are detachably installed and fixed by fasteners or buckles. The first drive assembly 300 is located in the lower layer plate 1103 and the second drive assembly 500 is located in the middle layer plate 1102. The top of the mounting groove 113 has a first opening 1133, which is located on the top surface of the lower layer plate 1103. The top of the receiving groove 114 has a second opening 1143, which is located on the top surface of the middle layer plate 1102. Alternatively, the first drive assembly 300 is located in the middle layer plate 1102 and the second drive assembly 500 is located in the lower layer plate 1103. The top of the mounting groove 113 has a first opening 1133, which is located on the top surface of the middle layer plate 1102. The top of the receiving groove 114 has a second opening 1143, which is located on the top surface of the lower layer plate 1103. In this embodiment, by setting the first opening 1133 of the mounting slot 113 on the top surface of the lower plate portion 1103 or the top surface of the middle plate portion 1102, the installation and maintenance of the first drive assembly 300 are facilitated. By setting the second opening 1143 of the receiving slot 114 on the top surface of the lower plate portion 1103 or the top surface of the middle plate portion 1102, the installation and maintenance of the second drive assembly 500 are facilitated.

[0067] In some embodiments, the first drive member 320, the second drive member 520, and the third drive member 720 may be micro-drive members such as micro motors or micro rotary cylinders. Micro-drive members are small in size and light in weight, making them more suitable for installation inside the spray plate 110.

[0068] In one specific embodiment, see Figure 2 , Figure 6 as well as Figure 7 The through hole 111 is circular in shape. The first adjusting plate 200, the second adjusting plate 400, and the third adjusting plate 600 are adapted to the through hole 111 and are also circular in shape. The setting direction of the first rotating shaft 311 is consistent with the radial direction of the first adjusting plate 200, and the setting direction of the third rotating shaft 710 is consistent with the radial direction of the third adjusting plate 600.

[0069] In one specific embodiment, the fluid diversion device further includes a controller that is controlled and connected to the first drive member 320, the second drive member 520 and the third drive member 720 respectively. The controller is used to control the operation of the first drive member 320, the second drive member 520 and the third drive member 720.

[0070] The present invention also provides a semiconductor device, including: a fluid splitting device as described in any of the above embodiments.

[0071] The adjustment principle of the fluid diversion device and semiconductor equipment of the present invention will be explained below with specific examples.

[0072] During the manufacturing process, initially, all first adjusting plates 200 are in the same first state, which can be open, closed, or partially blocked. All second adjusting plates 400 are in the same second state, which can also be open, closed, or partially blocked. However, the first adjusting plates 200 and 400 are not simultaneously closed to ensure fluid flow within the through-hole 111 by adjusting the first adjusting plates 200 and / or the second adjusting plates 400. In actual manufacturing, uneven processing in localized areas of the wafer is common, such as uneven fluid distribution in certain circumferential or radial regions. To address uneven processing in circumferential regions, for example, if the fluid flow rate is low in a certain circumferential region, the corresponding first driving component 300 is adjusted to drive at least one set of first adjusting plates 200 corresponding to that circumferential region to rotate, thereby increasing the flow rate in that region and ensuring uniform fluid distribution on the spray plate 110, thus improving the problem of uneven processing in localized areas of the wafer. To address the issue of unevenness in the radial region, such as insufficient fluid flow in a certain radial region, the corresponding second drive component 500 is adjusted to drive at least one row of second adjustment plates 400 corresponding to that radial region to rotate, thereby increasing the flow rate in that radial region and ensuring the uniformity of fluid distribution sprayed onto the spray plate 110, thus improving the problem of uneven processing in local areas of the wafer.

[0073] The technical effects of the fluid diversion device of the present invention will be explained in detail below.

[0074] 1. A rotatable first adjusting plate 200 is provided at each through hole 111 of the spray plate 110. By rotating and adjusting the first adjusting plate 200, the degree of obstruction of the through hole 111 by the first adjusting plate 200 can be adjusted, thereby controlling the fluid flow rate of the through hole 111. For example, the through hole 111 can be fully opened, partially obstructed, or completely closed. By adjusting the tilt angle of the first adjusting plate 200, the flow direction of the fluid sprayed from the through hole 111 can be changed, so that the fluid can be accurately sprayed to different areas on the wafer.

[0075] 2. The spray plate 110 is divided into multiple zones, each zone corresponding to at least one set of through holes 111. By adjusting the first drive component 300 of each zone, the rotation of the first adjustment plate 200 within that zone can be independently controlled, thereby adjusting the flow rate and / or direction of the fluid in the through holes 111 within that zone. This design allows for precise adjustment of the fluid requirements for different regions of the wafer to optimize the uniformity of critical dimensions.

[0076] 3. For a group of through holes 111 distributed in a ring array, a first driving element 320 can drive the flow rate and / or direction of the fluid in the group of through holes 111 in the circumferential direction of the flow distribution cavity 100, ensuring that the circumferential distribution of the fluid on the wafer surface is also uniform. Moreover, since only one first driving element 320 is provided, the structure of the first driving assembly 300 is simple and occupies a small volume.

[0077] 4. For a row of through holes 111 distributed in a linear array, a second driving member 520 can drive the rotation of a row of second adjusting plates 400 distributed in the radial direction, thereby adjusting the flow rate and / or direction of the fluid in the row of through holes 111 distributed in the radial direction, so as to precisely control and adjust the fluid flow rate in a local area of ​​the spray plate 110 in the radial direction.

[0078] 5. A third adjusting plate 600 is installed at the central hole 112 in the center of the spray plate 110. The rotation of the third adjusting plate 600 can be independently driven by the third driving assembly 700, thus changing the degree of obstruction of the central hole 112 by the third adjusting plate 600. If the third adjusting plate 600 obstructs more, the fluid flow rate through the central hole 112 will decrease; if the third adjusting plate 600 obstructs less, the fluid flow rate through the central hole 112 will increase. The tilt angle of the third adjusting plate 600 can also be adjusted, thereby changing the direction of the spray from the central hole 112.

[0079] 6. The spray plate 110 is designed with a three-layer structure: an upper plate 1101, a middle plate 1102, and a lower plate 1103. These three plates can be easily disassembled and installed using fasteners or clips. The first opening 1133 of the mounting groove 113 and the second opening 1143 of the receiving groove 114 can be located on the top surface of the lower plate 1103 or the top surface of the middle plate 1102, respectively. By disassembling the upper plate 1101, the middle plate 1102, and the lower plate 1103 to expose the first opening 1133 of the mounting groove 113 and the second opening 1143 of the receiving groove 114, the first drive assembly 300 and the second drive assembly 500 can be easily installed, repaired, and replaced from the first opening 1133 of the mounting groove 113 and the second opening 1143 of the receiving groove 114, thereby greatly improving the maintainability of the device.

[0080] In the description of this invention, it should be understood that the terms “comprising” and “having” as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0081] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0082] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0083] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways. Unless otherwise defined, the technical or scientific terms used herein should be understood in their ordinary sense by one of ordinary skill in the art to which this invention pertains.

Claims

1. A fluid diversion device, characterized in that, include: The flow diversion cavity, several sets of first adjustment plates, and several first drive components; The diversion cavity is hollow inside and includes a spray plate located at the bottom of the diversion cavity. The spray plate is provided with a plurality of through holes spaced apart, and each section of the spray plate corresponds to at least one set of the through holes. The first adjusting plate is provided in a one-to-one correspondence with the through hole, and the first adjusting plate is rotatably disposed at the corresponding through hole of the spray plate; Each of the first drive components is driven to a corresponding set of first adjustment plates. The first drive component drives the corresponding set of first adjustment plates to rotate, thereby adjusting the flow rate and / or direction of the fluid in the corresponding set of through holes.

2. The fluid diversion device according to claim 1, characterized in that, Several groups of through holes are spaced apart along the radial direction of the flow-dividing cavity, and each group of through holes is arranged in a ring array along the circumferential direction of the flow-dividing cavity. By adjusting the first driving component, the flow rate and / or direction of the fluid in the corresponding group of through holes in the circumferential direction can be adjusted.

3. The fluid diversion device according to claim 2, characterized in that, The first driving assembly includes a first driving member and a first transmission assembly connected to the first driving member. The first transmission assembly is connected to a corresponding set of the first adjusting plates. Driven by the first driving member and transmitted by the first transmission assembly, the corresponding set of the first adjusting plates rotate, thereby adjusting the flow rate and / or direction of the fluid in the corresponding set of through holes in the circumferential direction.

4. The fluid diversion device according to claim 3, characterized in that, The first transmission assembly includes a set of first rotating shafts, a set of first transmission wheels, and a first transmission belt. The first rotating shafts are connected to the corresponding first adjusting plates. The first transmission wheels are fixedly sleeved on the corresponding first rotating shafts. The first transmission belt is wound around the corresponding set of first transmission wheels. The first driving member is driven to drive one of the first rotating shafts in the set of first rotating shafts. The first driving member drives the corresponding first rotating shaft to rotate. Under the transmission action of the first transmission belt, the corresponding set of first transmission wheels rotates synchronously, thereby driving the corresponding set of first adjusting plates to rotate synchronously, thereby adjusting the flow rate and / or direction of the fluid in the corresponding set of through holes in the circumferential direction.

5. The fluid diversion device according to claim 2, characterized in that, The spray plate is provided with a mounting groove for each group of through holes. The mounting groove is arranged around the corresponding group of through holes and is connected to the corresponding group of through holes. The first drive component is located in the corresponding mounting groove.

6. The fluid diversion device according to claim 2, characterized in that, The through holes on the spray plate can also be divided into several rows of spaced distribution along the circumferential direction of the diversion cavity, and each row of through holes is linearly arrayed along the radial direction of the diversion cavity; The fluid diversion device further includes a plurality of second drive components disposed on the spray plate. Each second drive component corresponds to a row of through holes. By adjusting the second drive component, the flow rate and / or direction of the fluid in the corresponding row of through holes in the radial direction can be adjusted.

7. The fluid splitting device according to claim 6, characterized in that, The fluid diversion device further includes several rows of second adjusting plates, each of which is corresponding to a through hole. The second adjusting plates are rotatably disposed at the corresponding through hole. The second adjusting plates and the first adjusting plates are spaced apart within the through holes. The second driving component is driven to connect with the corresponding row of second adjusting plates. The second driving component drives the corresponding row of second adjusting plates to rotate, thereby adjusting the flow rate and / or direction of the fluid in the corresponding radial row of through holes.

8. The fluid diversion device according to claim 7, characterized in that, The second driving assembly includes a second driving member and a second transmission assembly connected to the second driving member. The second transmission assembly is connected to a corresponding row of the second adjusting plates. Driven by the second driving member and transmitted by the second transmission assembly, the corresponding row of the second adjusting plates rotates, thereby adjusting the flow rate and / or direction of the fluid in the corresponding row of through holes in the radial direction.

9. The fluid diversion device according to claim 8, characterized in that, The second transmission assembly includes a row of second rotating shafts, a row of second transmission wheels, a transmission component, and a second transmission belt. The second adjusting plate is arranged in a one-to-one correspondence with the second transmission wheels. The second transmission wheels are rotatably mounted on the spray plate via the second rotating shafts. The second adjusting plate is connected to the corresponding second rotating shaft via the transmission component. The second transmission belt is wound around the corresponding row of second transmission wheels. The second driving component is connected to one of the second rotating shafts in the row of second rotating shafts. The second driving component drives the corresponding second rotating shaft to rotate. Under the transmission action of the second transmission belt, the corresponding row of second transmission wheels and the row of second rotating shafts rotate synchronously. The torque of the second rotating shaft is transmitted to the corresponding second adjusting plate via the transmission component, thereby driving the corresponding row of second adjusting plates to rotate synchronously, thereby adjusting the flow rate and / or direction of the fluid in the corresponding radial row of through holes.

10. The fluid diversion device according to claim 6, characterized in that, The spray plate is provided with a receiving groove for each row of through holes, and the second drive component is located in the corresponding receiving groove.

11. The fluid diversion device according to claim 2, characterized in that, The two adjacent sets of through holes are aligned or staggered in the radial direction of the flow divider cavity.

12. The fluid diversion device according to any one of claims 1-11, characterized in that, The spray plate has a central hole running through its center; The fluid diversion device further includes a third adjusting plate rotatably disposed at the central hole and a third driving assembly drivenly connected to the third adjusting plate. The third driving assembly drives the third adjusting plate to rotate, thereby adjusting the flow rate and / or direction of the fluid in the central hole.

13. The fluid diversion device according to claim 12, characterized in that, The third drive assembly includes a third rotating shaft connected to the corresponding third adjusting plate and a third drive component driven by the third rotating shaft. The third drive component drives the third rotating shaft to rotate, thereby driving the third adjusting plate to rotate, thereby adjusting the flow rate and / or direction of the fluid in the central hole.

14. A semiconductor device, characterized in that, include: The fluid splitting device as described in any one of claims 1-13.

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