Contour detection device and assembly method for general-purpose assisted robot optical processing

Abstract

This invention relates to a universal contour detection device and assembly method for assisted robotic optical processing, belonging to the field of advanced optical manufacturing technology, and solves the technical problem of the lack of an in-situ high-precision detection device in the optical processing of large-aperture mirrors by robotic arms in the prior art. The contour detection device includes: a workpiece turntable and a swing-arm air-floating turntable; a workpiece table is provided on the upper surface of the workpiece turntable; the workpiece to be measured is placed on the workpiece table; the upper end of the swing-arm air-floating turntable is connected to the end effector of the robotic arm via a quick-change detection fixture; the lower end of the swing-arm air-floating turntable is connected to the arm via an arm fixture; a probe is provided at one end of the arm, which is located near the upper surface of the workpiece to be measured. In the contour detection device of this invention, the end effector of the robotic arm remains stationary during the measurement of the optical element's surface shape; compared to the measurement mode of a moving probe at the end effector, the accuracy and stability of the robotic arm in the stationary state are better.

Description

Technical Field

[0001] This invention relates to the field of advanced optical manufacturing technology, and in particular to a general-purpose contour detection device and assembly method for optical processing of assisted robots. Background Technology

[0002] Large-aperture complex curved surface optical elements are key components of high-end optical systems in fields such as space optics and astronomical optics. The requirements for the aperture of these elements are becoming larger and larger, the surface accuracy is increasing, and the application needs are becoming more and more extensive.

[0003] Due to its non-contact, in-situ detection, large dynamic range, and high detection accuracy, the swing-arm contour detection device is used in the grinding and rough polishing stages of optical components. Its detection accuracy is well connected with the interferometric detection range, playing an important role in the manufacturing process of large-aperture optical components.

[0004] like Figure 4 As shown, a traditional swing-arm profile detection device consists of a tilted high-precision air-bearing turntable, a rigid measuring arm, and a high-precision non-contact displacement sensor probe (represented by the probe in the figure) located at the end of the measuring arm. High-precision surface profile measurement is achieved by constructing a sampling trajectory that most closely approximates a sphere for complex curved surfaces. When the air-bearing turntable is tilted, and the rotation axis is closest to the center of the sphere through the reflector, the tilt angle is... satisfy:

[0005] ;

[0006] in, : The distance from the center point of the mirror to the axis of rotation of the air-bearing turntable; R bfs The reflector is closest to the radius of the sphere.

[0007] During testing, the measuring arm is fixed to the air-bearing turntable, carrying a displacement sensor probe that rotates around the turntable's axis. The probe sweeps an arc across the mirror surface, measuring the deviation of the aspherical surface from its closest spherical surface at the trajectory location. After measuring one arc, the reflector rotates a certain angle α around the turntable, and the probe continues measuring the next arc. After the reflector completes one rotation, the result is as follows: Figure 5 The diagram shows the distribution of measurement points of the displacement sensor on the mirror surface.

[0008] With the increasing demand for large-aperture mirrors, the number of large-aperture mirrors manufactured has increased dramatically. Traditional gantry CNC machine tools are large in size, expensive, and have poor portability. Robotic arm processing equipment, due to its flexible assembly, small footprint, high mobility and replicability, and low cost, is increasingly being used in the optical processing field. It has been successfully applied to the mass production of optical components with apertures up to 1 meter. However, as the aperture of optical components increases, robotic arm optical processing faces a new major challenge: the inspection of optical components.

[0009] Due to their articulated cantilever structure, robotic arms suffer from poor end-effector stability. Traditional methods of measurement using styluses result in large systematic errors, making them unsuitable for guiding surface optical machining. Optical components with apertures on the order of 1 meter are relatively small and easy to handle. After one round of machining, they can be directly transferred to inspection equipment (such as a coordinate measuring machine) for testing. After inspection, they can be returned to the robot for the next round of machining, repeating this iterative process until the surface shape meets the required specifications. However, handling larger aperture optical components is difficult, time-consuming, and labor-intensive, impacting manufacturing efficiency. Furthermore, frequent handling poses safety hazards.

[0010] Therefore, the optical processing of large-aperture mirrors by robotic arms is facing a lack of in-situ high-precision inspection devices. Summary of the Invention

[0011] This invention aims to solve the technical problem of the lack of in-situ high-precision detection devices in the optical processing of large-aperture mirrors by robotic arms in the prior art, and provides a universal contour detection device and assembly method for auxiliary robotic optical processing.

[0012] To solve the above-mentioned technical problems, the technical solution of the present invention is as follows:

[0013] A general-purpose contour detection device for optical processing of assisted robots includes: a workpiece turntable and a swing arm air-floating turntable;

[0014] A workpiece table is provided on the upper surface of the workpiece turntable; the workpiece to be measured is placed on the workpiece table.

[0015] The upper end of the swing arm air-bearing turntable is connected to the end of the robot arm via a quick-change testing fixture; the lower end of the swing arm air-bearing turntable is connected to the arm via an arm fixture; a probe is provided at one end of the arm, which is located near the upper surface of the workpiece to be tested.

[0016] The robotic arm is used to provide the tilt and displacement position of the swing arm air-float turntable relative to the workpiece turntable;

[0017] The swing arm air flotation turntable is used to rotate around the rotation axis of the air flotation turntable;

[0018] The boom is used to adjust the relative distance between the probe and the rotation axis of the air-bearing turntable by moving along the boom fixture;

[0019] The probe is used to measure the surface profile of the workpiece on the workpiece table by rotating around the rotation axis of the air-bearing turntable.

[0020] In the above technical solution, the quick-change tooling includes a quick-change tooling mother plate and a quick-change tooling daughter plate connected in sequence; the quick-change tooling daughter plate and the quick-change tooling mother plate can be quickly snapped together and installed; when the workpiece to be tested is not being tested, the quick-change tooling daughter plate and the swing arm air-floating turntable are placed on the shelf.

[0021] In the above technical solution, the boom tooling is provided with a groove, and the boom is provided with a protruding limiting strip arranged along the length direction, which cooperates with the groove;

[0022] The boom moves within a certain distance along the direction of the protruding limiting strip on the boom fixture.

[0023] In the above technical solution, the range of distance the boom moves along the protruding limiting strip on the boom fixture is determined according to the diameter of the workpiece to be measured.

[0024] In the above technical solution, the probe is connected to the boom via a probe connecting fixture.

[0025] In the above technical solution, the tilt and displacement of the swing arm air-floating turntable provided by the robotic arm relative to the workpiece turntable include:

[0026] Displacement motion in the vertical Z-axis direction, displacement motion in the horizontal X-axis direction, displacement motion in the horizontal Y-axis direction perpendicular to the X-axis, tilting motion in the rotational direction of rotational axis A around the X-axis, tilting motion in the rotational direction of rotational axis B around the Y-axis, and tilting motion in the rotational direction of rotational axis C around the Z-axis.

[0027] A method for assembling and adjusting a universal assisted robot optical processing device, applicable to the aforementioned contour detection device for universal assisted robot optical processing, includes the following steps:

[0028] The first step is to calculate the theoretical tilt angle θ and theoretical arm length L of the swing arm air-bearing turntable based on the surface shape parameters of the workpiece to be tested.

[0029] The second step is to move the end of the robotic arm until the quick-change tooling mother plate is in a horizontal position, move the end of the robotic arm to assemble and connect the quick-change tooling mother plate and the quick-change tooling daughter plate, and remove the detection device from the shelf.

[0030] The third step is to rotate the end of the robotic arm around the Z-axis so that the probe is positioned on the Y-axis; adjust the probe connecting fixture so that the probe is tilted at an angle θ; move the arm by adjusting the arm fixture so that the distance between the probe and the rotation axis of the air-bearing turntable is L; the direction of the Z-axis is vertical and the direction of the Y-axis is horizontal.

[0031] Fourth step, the end effector of the robotic arm rotates around the X-axis by an angle θ, so that the angle between the rotation axis of the air-bearing turntable and the Z-axis is θ degrees; the direction of the X-axis is the horizontal direction perpendicular to the Y-axis;

[0032] Fifth step: Place the workpiece to be tested on the workpiece table, align the center of the workpiece with the center of the workpiece turntable, and attach a cross-shaped target to the center of the workpiece.

[0033] Step 6: Adjust the translational posture;

[0034] Move the end effector of the robotic arm so that the probe is aligned with the crosshair target at the center of the workpiece to be measured, and record the current detection zero coordinate values ​​of the robotic arm [X,Y,Z,Ex,Ey,Ez]; in these detection zero coordinate values: X is the coordinate on the X-axis, Y is the coordinate on the Y-axis, Z is the coordinate on the Z-axis, Ex is the rotation angle coordinate relative to the X-axis, Ey is the rotation angle coordinate relative to the Y-axis, and Ez is the rotation angle coordinate relative to the Z-axis;

[0035] Step 7: Begin testing;

[0036] At the starting position, the probe rotates once around the rotation axis of the air-bearing turntable, completing one reciprocating scan measurement at the starting position;

[0037] Then, the workpiece turntable rotates relative to each other. Where N is the number of contour lines; the probe then rotates around the rotation axis of the air-bearing turntable for one revolution to complete the reciprocating scanning measurement of the second contour line distribution position;

[0038] This process continues until the workpiece turntable rotates to... The last contour line distribution position is scanned back and forth to obtain the surface contour distribution of the optical element of the workpiece under test.

[0039] Step 8: Control the end of the robotic arm to lift up, disconnect the swing arm air-floating turntable from the position of the quick-change tooling for inspection, grab the processing grinding head tool, and perform a round of processing on the surface of the workpiece to be tested;

[0040] Step 9: After one round of machining of the surface shape of the workpiece to be tested is completed, the robot arm is gripped by the quick-change tooling and moved to the zero coordinate value [X,Y,Z,Ex,Ey,Ez] to perform the next round of testing, and so on.

[0041] The present invention has the following beneficial effects:

[0042] The universal contour detection device for optical processing of assisted robots of the present invention keeps the end of the robotic arm stationary during the measurement of the surface shape of optical elements; compared with the probe measurement mode with the end of the robotic arm moving, the robotic arm in the stationary state has better accuracy and stability.

[0043] The universal contour detection device for optical processing of assisted robots of the present invention utilizes an air-floating turntable to carry a non-contact probe for scanning and measurement. This allows the non-contact probe to adjust its position in six degrees of freedom (three translational degrees of freedom and three rotational degrees of freedom), resulting in high sampling density and high detection efficiency.

[0044] The universal contour detection device for optical processing of assisted robots of the present invention, because the contour lines are distributed by overlapping sampling, makes it possible to eliminate systematic errors with high precision and achieve high-precision measurement of surface contours based on the theoretically equal height of the sampling points at the overlapping points.

[0045] The universal contour detection device for optical processing of assisted robots of the present invention enables convenient and rapid switching and precise reset of the detection device and the processing device through quick-change detection fixtures, thus ensuring the processing efficiency of optical components.

[0046] The universal assisted robot optical processing contour detection device of the present invention can quickly switch the arm length parameters of optical elements with different apertures by limiting the arm length movement, thereby realizing high-precision detection of universal optical elements. Attached Figure Description

[0047] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0048] Figure 1 This is a schematic diagram of the contour detection device for general-purpose assisted robot optical processing according to the present invention.

[0049] Figure 2 for Figure 1 The diagram shows a schematic of the arm connection device in the contour detection device for optical processing of a general-purpose assisted robot.

[0050] Figure 3 for Figure 1 The diagram shows the structure of the quick-change tooling subplate in the contour detection device for general-purpose assisted robot optical processing, placed on the shelf.

[0051] Figure 4 This is a schematic diagram of a traditional swing-arm contour detection device.

[0052] Figure 5 This is a distribution map of measurement points of the displacement sensor on the mirror surface obtained using a traditional swing-arm profile detection device.

[0053] Figure 6 This diagram illustrates the difference between the surface shape detection results and the interferometer detection results of this invention.

[0054] The reference numerals in the figure are:

[0055] 1-Workpiece turntable; 2-Workpiece table surface; 3-Workpiece to be tested; 4-Robot arm; 5-Operating end effector of the robot arm;

[0056] 61-Quick-change tooling mother plate; 62-Quick-change tooling daughter plate; 63-Shelf;

[0057] 7-Swing arm air-float turntable; 71-Air-float turntable rotation shaft; 8-Arm tooling; 81-Groove;

[0058] 9-Arm; 91-Protruding limiting strip; 10-Probe; 11-Probe connecting fixture. Detailed Implementation

[0059] The inventive concept of this invention is as follows:

[0060] This invention proposes a general-purpose contour detection device and assembly method for assisting robotic arm processing in optical processing, which can be used to assist robotic arms in processing and improve the efficiency and accuracy of robotic arms in processing large-diameter optical components.

[0061] The present invention will now be described in detail with reference to the accompanying drawings.

[0062] The universal contour detection device for optical processing of assisted robots of the present invention includes: a workpiece turntable 1 and a swing arm air-floating turntable 7;

[0063] A workpiece table 2 is provided on the upper surface of the workpiece turntable 1; the workpiece 3 to be measured is placed on the workpiece table 2.

[0064] The upper end of the swing arm air-float turntable 7 is connected to the end arm 5 of the robot arm 4 via a quick-change fixture; the lower end of the swing arm air-float turntable 7 is connected to the arm 9 via an arm fixture 8; the swing arm air-float turntable 7 is used to rotate around the air-float turntable rotation axis 71. The quick-change fixture includes, in sequence, a quick-change fixture mother plate 61 and a quick-change fixture daughter plate 62; the quick-change fixture daughter plate 62 and the quick-change fixture mother plate 61 can be quickly snapped together. The lower end of the quick-change fixture daughter plate 62 in the quick-change fixture is fixedly connected to the upper end of the swing arm air-float turntable 7; such as Figure 3 As shown, when not in use, the quick-change tooling subplate 62, carrying the swing arm air-floating turntable 7, is placed on the shelf 63. A probe 10 is provided at one end of the arm 9, which is located near the upper surface of the workpiece 3 to be measured. The probe 10 is used to scan and measure the workpiece 3 on the workpiece table 2 by rotating around the rotation axis 71 of the air-floating turntable, so as to obtain the surface contour measurement information of the workpiece 3 (optical element).

[0065] The robotic arm 4 has six degrees of freedom, used to provide the tilt and displacement position of the swing arm air-floating turntable 7 relative to the workpiece turntable 1. The six degrees of freedom of the robotic arm 4 include: three translational degrees of freedom equivalent to the X, Y, and Z axes, and three rotational degrees of freedom equivalent to the A, B, and C rotational axes. Rotational axes A, B, and C are labeled A, B, and C in the figure, as shown below. Figure 1 As shown, the Z-axis is the vertical direction, the X-axis is the horizontal direction, and the Y-axis is the horizontal direction perpendicular to the X-axis; rotation axis A is the direction of rotation around the X-axis, rotation axis B is the direction of rotation around the Y-axis, and rotation axis C is the direction of rotation around the Z-axis.

[0066] like Figure 2 As shown, the boom fixture 8 has a groove 81, and the boom 9 has a protruding limiting strip 91 arranged along its length, which cooperates with the groove 81. The boom 9 is used to adjust the relative distance between the probe 10 set at one end of the boom 9 and the rotating shaft 71 of the air-bearing turntable by moving within a certain distance along the direction of the protruding limiting strip 91 on the boom fixture 8, so as to meet the measurement of optical elements of different diameters. The range of distances by which the boom 9 moves along the direction of the protruding limiting strip 91 on the boom fixture 8 is determined according to the different diameters of the workpiece 3 (optical element) to be measured. Figure 2 The display angle of the mid-arm tooling 8 and Figure 1 The display angles are perpendicular.

[0067] The assembly and adjustment method of the universal auxiliary robot optical processing applicable to the above-mentioned contour detection device of the present invention includes the following steps:

[0068] The first step is to calculate the theoretical tilt angle θ and theoretical arm length L of the swing arm air-bearing turntable 7 based on the surface shape parameters of the workpiece 3 to be tested (θ in the...). Figure 1 (As already marked in the text).

[0069] The second step is to move the end of the robotic arm 5 to a horizontal position when the quick-change tooling mother plate 61 is in a horizontal state, and move the end of the robotic arm 5 of the mobile robot 4 to the upper end of the shelf 63 so that the quick-change tooling mother plate 61 is connected to the quick-change tooling daughter plate 62, and take out the swing arm air-floating turntable 7 from the shelf 63.

[0070] Third, the end effector 5 of the robotic arm rotates around the Z-axis, so that the probe 10 is located on the Y-axis. Adjust the probe connecting fixture 11 so that the probe 10 is tilted at a relative angle θ; adjust the arm fixture 8 to move the arm 9 so that the distance between the probe 10 and the rotation axis 71 of the air-bearing turntable is L.

[0071] The fourth step is to rotate the end of the robotic arm 5 around the X-axis by an angle of θ, so that the angle between the rotation axis 71 of the air-bearing turntable and the Z-axis is θ degrees.

[0072] Fifth step, place the workpiece 3 to be tested on the workpiece table 2, align the center of the workpiece 3 with the center of the workpiece turntable 1, and attach a cross target to the center of the workpiece 3.

[0073] Step 6: Adjust the translational posture.

[0074] The end effector 5 of the moving robotic arm is aligned with the crosshair target at the center of the workpiece 3. At this point, the detection pose alignment is complete, and the current position parameter values ​​of the robotic arm 4 are recorded, i.e., the detection zero-position coordinate values ​​[X,Y,Z,Ex,Ey,Ez]. In these position parameter values: X is the coordinate on the X-axis, Y is the coordinate on the Y-axis, Z is the coordinate on the Z-axis, Ex is the rotation angle coordinate relative to the X-axis, Ey is the rotation angle coordinate relative to the Y-axis, and Ez is the rotation angle coordinate relative to the Z-axis.

[0075] Step 7: Begin the test.

[0076] At the starting position, the probe 10 rotates around the air-bearing turntable rotation axis 71 of the swing arm air-bearing turntable 7 from +180 degrees to -180 degrees for scanning measurement, and then continues to move from -180 degrees to +180 degrees to complete one reciprocating scanning measurement at the starting position.

[0077] Then, the workpiece turntable 1 rotates relative to the workpiece. (Where N is the number of contour lines), the probe 10 then moves from +180 degrees to -180 degrees with the swing arm air-bearing turntable 7, and then continues to rotate back to +180 degrees, completing the reciprocating scanning measurement of the second contour line distribution position;

[0078] This process continues until the workpiece turntable 1 rotates to... The reciprocating scan of the last contour line position is completed, thereby obtaining the surface contour distribution of the workpiece 3 (optical element) to be measured.

[0079] Step 8: Control the lifting of the end effector 5 of the robotic arm, disconnecting it from the position between the quick-change tooling mother plate 61 and the quick-change tooling daughter plate 62, and place the swing arm air-floating turntable 7 and its connected components on the shelf 63. The quick-change tooling mother plate 61 of the end effector 5 of the robotic arm grasps the processing grinding head tool and performs a round of processing on the surface shape of the workpiece 3 (optical element) to be tested.

[0080] In the ninth step, after the first round of machining of the surface of the workpiece 3 (optical element) is completed, the end effector 5 of the robotic arm places the machining grinding head tool on the support, and grabs the quick-change tooling mother plate 61 to the quick-change tooling daughter plate 62. The end effector 5 of the robotic arm moves to the detection zero coordinate value [X,Y,Z,Ex,Ey,Ez] position, and the contour detection device performs the next round of detection. This process is repeated to realize the in-situ detection and guidance of machining by the robotic arm 4.

[0081] The universal contour detection device for optical processing of assisted robots of this invention has been experimentally tested. During the test, rapid switching between the detection device and the processing device was achieved, and rapid adjustment of the arm parameters for optical elements of different apertures was realized. The surface shape detection results were consistent with the interferometer detection results. The surface shape PV (peak-valley value) in the detection accuracy reached 1.914 mm, which is better than 2 mm. See [link to relevant documentation]. Figure 6 This meets the accuracy requirements for external testing of large-aperture optical components and verifies its feasibility.

[0082] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A general-purpose contour detection device for optical processing of assisted robots, characterized in that, include: Workpiece turntable (1) and swing arm air-float turntable (7); A workpiece table (2) is provided on the upper surface of the workpiece turntable (1); the workpiece (3) to be tested is placed on the workpiece table (2); The upper end of the swing arm air-float turntable (7) is connected to the end of the robot arm (4) (5) through a quick-change tooling; the lower end of the swing arm air-float turntable (7) is connected to the arm (9) through an arm tooling (8); a probe (10) is provided at one end of the arm (9), and the probe (10) is located near the upper surface of the workpiece (3) to be tested; The robotic arm (4) is used to provide the tilt and displacement position of the swing arm air-floating turntable (7) relative to the workpiece turntable (1); The swing arm air flotation turntable (7) is used to rotate around the air flotation turntable rotation axis (71); The boom (9) is used to adjust the relative distance between the probe (10) and the rotating shaft (71) of the air-bearing turntable by moving along the boom fixture (8); The probe (10) is used to measure the surface profile of the workpiece (3) on the workpiece table (2) by rotating around the rotation axis (71) of the air-bearing turntable.

2. The contour detection device for general-purpose assisted robot optical processing according to claim 1, characterized in that, The quick-change fixture includes a quick-change fixture mother plate (61) and a quick-change fixture daughter plate (62) connected in sequence. The quick-change fixture daughter plate (62) and the quick-change fixture mother plate (61) can be quickly snapped together. When the workpiece (3) to be tested is not being tested, the quick-change fixture daughter plate (62) and the swing arm air-floating turntable (7) are placed on the shelf (63).

3. The contour detection device for general-purpose assisted robot optical processing according to claim 1, characterized in that, The boom tooling (8) is provided with a groove (81), and the boom (9) is provided with a protruding limiting strip (91) arranged along the length direction. The protruding limiting strip (91) cooperates with the groove (81). The boom (9) moves within a certain distance along the direction of the protruding limiting strip (91) on the boom fixture (8).

4. The contour detection device for general-purpose assisted robot optical processing according to claim 3, characterized in that, The range of distances that the boom (9) moves along the protruding limiting strip (91) on the boom fixture (8) is determined according to the diameter of the workpiece (3) to be measured.

5. The contour detection device for general-purpose assisted robot optical processing according to claim 2, characterized in that, The probe (10) is connected to the boom (9) via the probe connecting fixture (11).

6. The contour detection device for general-purpose assisted robot optical processing according to claim 1, characterized in that, The tilting and displacement of the swing arm air-floating turntable (7) provided by the robotic arm (4) relative to the workpiece turntable (1) include: Displacement motion in the vertical Z-axis direction, displacement motion in the horizontal X-axis direction, displacement motion in the horizontal Y-axis direction perpendicular to the X-axis, tilting motion in the rotational direction of rotational axis A around the X-axis, tilting motion in the rotational direction of rotational axis B around the Y-axis, and tilting motion in the rotational direction of rotational axis C around the Z-axis.

7. A method for assembling and adjusting a universal assisted robot optical processing device, applicable to the contour detection device for universal assisted robot optical processing as described in claim 5, characterized in that, The assembly and adjustment method includes the following steps: The first step is to calculate the theoretical tilt angle θ and theoretical arm length L of the swing arm air-float turntable (7) according to the test mirror shape parameters of the workpiece (3); The second step is to move the end of the robotic arm (5) to a horizontal position when the quick-change tooling mother plate (61) is in a horizontal position, move the end of the robotic arm (5) to assemble and connect the quick-change tooling mother plate (61) and the quick-change tooling daughter plate (62), and remove the detection device from the shelf (63); Third step, the end of the robotic arm (5) rotates around the Z-axis so that the probe (10) is located on the Y-axis; adjust the probe connecting fixture (11) so that the probe (10) is tilted relative to the Y-axis by an angle θ; move the arm (9) by adjusting the arm fixture (8) so that the distance between the probe (10) and the rotating axis (71) of the air-bearing turntable is L; the direction of the Z-axis is vertical and the direction of the Y-axis is horizontal. Fourth step, the end of the robotic arm (5) rotates around the X-axis by an angle θ, so that the angle between the rotation axis (71) of the air-bearing turntable and the Z-axis is θ degrees; the direction of the X-axis is the horizontal direction perpendicular to the Y-axis; Fifth step, place the workpiece (3) to be tested on the workpiece table (2) and align the center of the workpiece (3) to be tested with the center of the workpiece turntable (1), and attach a cross target to the center of the workpiece (3). Step 6: Adjust the translational posture; Move the end of the robotic arm (5) so that the probe (10) is aligned with the crosshair target at the center of the workpiece (3) to be measured, and record the detection zero coordinate value [X,Y,Z,Ex,Ey,Ez] of the current robotic arm (4); in the detection zero coordinate value: X is the coordinate on the X-axis, Y is the coordinate on the Y-axis, Z is the coordinate on the Z-axis, Ex is the rotation angle coordinate relative to the X-axis, Ey is the rotation angle coordinate relative to the Y-axis, and Ez is the rotation angle coordinate relative to the Z-axis; Step 7: Begin testing; At the starting position, the probe (10) rotates around the rotation axis (71) of the air-bearing turntable for one revolution, completing one reciprocating scan measurement at the starting position; Then, the workpiece turntable (1) rotates relative to the workpiece. , where N is the number of contour lines; the probe (10) rotates around the air-bearing turntable rotation axis (71) once more to complete the reciprocating scanning measurement of the second contour line distribution position; This process continues until the workpiece turntable (1) rotates to... , complete the reciprocating scan of the last contour distribution position; thus obtain the surface contour distribution of the optical element of the workpiece to be measured (3); Step 8: Control the end of the robotic arm (5) to lift up, disconnect the swing arm air-floating turntable (7) from the position of the quick-change tooling, grab the processing grinding head tool, and perform a round of processing on the surface of the workpiece (3) to be tested; Step 9: After the first round of machining of the surface of the workpiece (3) to be tested is completed, the swing arm air-floating turntable (7) is gripped by the quick-change tooling for detection. The end of the robotic arm (5) moves to the detection zero coordinate value [X,Y,Z,Ex,Ey,Ez] and performs the next round of detection. This process is repeated.

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