Deformation type pressurizing and bonding device

Abstract

The present application relates to the technical field of bonding processing. A deformation type pressurized bonding device comprises an upper cover and a lower cavity arranged in a top-bottom manner, and the upper cover and the lower cavity enclose a processing cavity; the lower side of the upper cover is connected with an elastic expansion film, which is used as a lower pressing member for pressing a workpiece; the elastic expansion film divides the processing cavity into an upper vacuum chamber and a lower vacuum chamber arranged in a top-bottom manner; the upper cover is connected with a first gas path pipeline in communication with the upper vacuum chamber; the lower cavity is connected with a second gas path pipeline in communication with the lower vacuum chamber; the lower side of the lower cavity is connected with a longitudinal telescopic bellows, the bellows is in communication with the inner cavity of the lower vacuum chamber, and the bottom of the bellows is connected with a counterweight. The present application realizes pressurizing action through the deformation of the elastic chamber and the downward movement. Through the counterweight, the structure of the downward pulling bellows under the action of gravity offsets the vacuum degree change caused by the leakage of the sealed cavity. Therefore, the vacuum pump does not need to work all the time.

Description

Technical Field

[0001] This invention relates to the field of adhesive processing technology, and more specifically to a pressure bonding device. Background Technology

[0002] An electrostatic chuck comprises a multi-layered structure including a ceramic substrate layer, an electrostatic electrode layer, and an insulating layer. During the manufacturing process, these multiple layers are bonded together under pressure and cured in a vacuum environment.

[0003] Current vacuum pressure bonding equipment has the following drawbacks:

[0004] 1. Hard Contact Connection with Pressure: A pressure cylinder drives a lower platen to apply pressure to the workpiece. A similar structure can be found in patent CN205806128U (Carbon Slide Plate Curved Pressure Bonding Machine). Hard contact connection between the workpiece and the lower platen can easily lead to wear on the product surface. Furthermore, the pressure cylinder structure requires directional guidance from guide rails.

[0005] Second: It consumes a lot of energy. After the vacuum is reached, the vacuum pump must work continuously to maintain the vacuum level. Summary of the Invention

[0006] In view of the problems existing in the prior art, the present invention provides a deformation-type pressure bonding device, which solves at least one of the above-mentioned technical problems.

[0007] The technical solution of the present invention is: a deformation-type pressure bonding device, characterized in that it includes an upper cover and a lower cavity arranged vertically, wherein the upper cover and the lower cavity form a processing cavity;

[0008] An elastic expansion membrane is connected to the lower side of the upper cover, and the elastic expansion membrane is used as a pressing component for pressing down the workpiece.

[0009] The elastic expansion membrane divides the processing chamber into an upper vacuum chamber and a lower vacuum chamber, which are arranged vertically.

[0010] The upper cover is connected to a first gas passage pipe that is connected to and communicates with the upper vacuum chamber.

[0011] The lower cavity is connected to a second gas passage pipe that is connected to and communicates with the lower vacuum chamber.

[0012] The lower cavity is connected to a longitudinally telescopic bellows, which is connected to the inner cavity of the lower vacuum chamber. A counterweight is connected to the bottom of the bellows.

[0013] This invention utilizes the expansion and deformation of an elastic chamber to generate downward movement, thereby achieving pressurization. A counterweight, under the influence of gravity, pulls down the bellows structure, offsetting vacuum changes caused by leakage within the sealed cavity. This eliminates the need for a constantly operating vacuum pump. Furthermore, this invention simplifies the structure by eliminating components such as lifting guide rails and reduces the operating losses of the vacuum pump.

[0014] More preferably, the lower cavity is provided with an upwardly raised support platform, with the upper surface of the support platform serving as the placement surface for placing the workpiece, and the support platform is provided with ventilation holes.

[0015] More preferably, the corrugated pipe is positioned directly opposite the support platform.

[0016] More preferably, the upper cover is connected to a downwardly extending extension cylinder, the extension cylinder is connected to a radially inwardly extending radial extension ring, and the radial extension ring is connected to the edge of the elastic expansion membrane.

[0017] More preferably, a cavity column is connected to the lower side of the lower cavity, and the bottom of the counterweight is higher than the bottom of the cavity column.

[0018] More preferably, the first gas pipeline is connected to a first air inlet pipeline for introducing gas and a first atmospheric gas pipeline for exhausting gas.

[0019] The second gas pipeline connects a second atmospheric gas pipeline for introducing gas and a second gas extraction pipeline for extracting gas.

[0020] Valves are installed on the first air intake pipe, the first atmospheric pipe, the second atmospheric pipe, and the second exhaust pipe.

[0021] More preferably, a solenoid valve is installed on the first gas line.

[0022] More preferably, the counterweight block includes at least three longitudinally arranged counterweight units, and adjacent counterweight units are detachably connected.

[0023] It makes it easy to adjust the number of counterweights.

[0024] More preferably, the pressurization process includes the following steps:

[0025] Step 1: Open the top cover and place the workpiece inside;

[0026] Close the top cover and shut off the first air line;

[0027] Step two: Open the second vacuum line and start evacuating the vacuum. The bellows contracts and rises, and the vacuum level in the lower vacuum chamber reaches the set value.

[0028] Step 3: Open the first air inlet pipe and introduce compressed air. The expansion diaphragm expands and pressurizes the workpiece.

[0029] Step 4: Close the second suction line; the corrugated pipe extends and the counterweight descends.

[0030] Step 5: Pressurize until the set time is reached, open the second atmospheric pipe and the first exhaust pipe, open the top cover, and remove the workpiece.

[0031] In a further preferred embodiment, in step one, the first air passage is closed by controlling the solenoid valve to be in a closed state, closing the first air intake passage, and closing the first air passage.

[0032] Beneficial effects:

[0033] 1. Pressurization is achieved by expanding and deforming the elastic chamber, generating downward motion. The pressurization stroke is small (<25mm).

[0034] 2. By using counterweights, the bellows structure is pulled down under the influence of gravity, offsetting the vacuum level changes caused by leakage in the sealed cavity, thus eliminating the need for a continuous vacuum pump. Suitable for environments requiring a vacuum level of <500Pa. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of a specific embodiment 1 of the present invention.

[0036] In the diagram: 1 is the top cover, 2 is the upper vacuum chamber, 3 is the expansion membrane, 4 is the pressurization pipeline, 5 is the solenoid valve, 6 is the first air inlet pipeline, 7 is the first atmospheric pipeline, 8 is the workpiece, 9 is the lower vacuum chamber, 10 is the lower cavity, 11 is the second air pipeline, 12 is the second air extraction pipeline, 13 is the second atmospheric pipeline, 14 is the cavity column, 15 is the corrugated pipe, and 16 is the counterweight. Detailed Implementation

[0037] See Figure 1Specific embodiment 1: A deformation-type pressure bonding device includes an upper cover 1 and a lower cavity 10 arranged vertically, forming a processing chamber. An elastic expansion membrane 3 is connected to the lower side of the upper cover 1, serving as a pressing element for pressing down on a workpiece 8. The elastic expansion membrane 3 divides the processing chamber into an upper vacuum chamber 2 and a lower vacuum chamber 9 arranged vertically. A first air passage 4 connected to the upper vacuum chamber 2 is connected to the upper cover 1. A second air passage 11 connected to the lower vacuum chamber 9 is connected to the lower cavity 10. A longitudinally telescopic corrugated pipe 15 is connected to the lower side of the lower cavity 10, communicating with the inner cavity of the lower vacuum chamber 9. A counterweight 16 is connected to the bottom of the corrugated pipe 15. This invention achieves pressure application by generating downward movement through the expansion and deformation of the elastic chamber. The counterweight, under the action of gravity, pulls down the structure of the corrugated pipe 15, offsetting the vacuum changes caused by leakage in the sealed chamber. Therefore, a vacuum pump does not need to operate continuously. This invention eliminates the need for components such as lifting guide rails, simplifying the structure and reducing the operating losses of the vacuum pump.

[0038] The lower cavity 10 has an upwardly raised support platform, with its upper surface serving as the placement surface for the workpiece 8. Ventilation holes are provided on the support platform. These vent holes connect the inner cavity of the lower cavity to the bellows.

[0039] The corrugated pipe 15 is directly opposite the support platform.

[0040] The upper cover 1 is connected to a downwardly extending extension cylinder, which is connected to a radially inwardly extending radial extension ring, which is connected to the edge of the elastic expansion membrane 3.

[0041] The lower cavity 10 is connected to a cavity column 14, and the bottom of the counterweight 16 is higher than the bottom of the cavity column 14.

[0042] The first gas line 4 connects to the first inlet gas line 6 for introducing gas and the first exhaust gas line 7; the second gas line 11 connects to the second exhaust gas line 13 for introducing gas and the second exhaust gas line 12; valves are installed on the first inlet gas line 6, the first exhaust gas line 7, the second exhaust gas line 13, and the second exhaust gas line 12. The first exhaust gas line 7 and the second exhaust gas line 13 are both open to the atmosphere.

[0043] The first intake pipe 6 introduces compressed gas. The second extraction pipe 12 connects to the vacuum pump.

[0044] A solenoid valve 5 is installed on the first gas line 4.

[0045] The counterweight 16 includes at least three longitudinally arranged counterweight units, and adjacent counterweight units are detachably connected. This facilitates adjustment of the number of counterweights.

[0046] The pressurization process includes the following steps:

[0047] Step 1: Open the top cover 1 and place the workpiece 8 inside;

[0048] Close the top cover 1 and close the first air passage 4;

[0049] Step 2: The second vacuum line 12 is opened to start vacuuming. The bellows 15 contracts and rises, and the vacuum level in the lower vacuum chamber 9 reaches the set value.

[0050] Step 3: Open the first air inlet pipe 6 to introduce compressed air, expand the expansion membrane 3 to expand, and pressurize the workpiece 8;

[0051] Step 4: Close the second air extraction line 12, extend the corrugated pipe 15, and lower the counterweight 16.

[0052] Step 5: Pressurize to the set time, open the second atmospheric pipe 13, open the first exhaust pipe, open the top cover 1, and take out the workpiece 8.

[0053] In step one, the first air line 4 is closed by controlling the solenoid valve 5 to be in the closed state, the first air intake line 6 is closed, and the first air supply line 7 is closed.

[0054] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A deformation-type pressure bonding device, characterized in that, It includes an upper cover and a lower cavity, which are arranged vertically, and the upper cover and the lower cavity form a processing cavity; An elastic expansion membrane is connected to the lower side of the upper cover, and the elastic expansion membrane is used as a pressing component for pressing down the workpiece. The elastic expansion membrane divides the processing chamber into an upper vacuum chamber and a lower vacuum chamber, which are arranged vertically. The upper cover is connected to a first gas passage pipe that is connected to and communicates with the upper vacuum chamber. The lower cavity is connected to a second gas passage pipe that is connected to and communicates with the lower vacuum chamber. The lower cavity is connected to a longitudinally telescopic bellows, which is connected to the inner cavity of the lower vacuum chamber. A counterweight is connected to the bottom of the bellows.

2. The deformation-type pressure bonding device according to claim 1, characterized in that: The lower cavity is provided with an upwardly raised support platform, with the upper surface of the support platform serving as the placement surface for placing the workpiece, and ventilation holes are provided on the support platform.

3. The deformation-type pressure bonding device according to claim 2, characterized in that: The corrugated pipe is directly opposite the support platform.

4. The deformation-type pressure bonding device according to claim 1, characterized in that: The upper cover is connected to a downwardly extending extension cylinder, which is connected to a radially inwardly extending radial extension ring, which is connected to the edge of the elastic expansion membrane.

5. The deformation-type pressure bonding device according to claim 1, characterized in that: The lower side of the lower cavity is connected to a cavity column, and the bottom of the counterweight is higher than the bottom of the cavity column.

6. The deformation-type pressure bonding device according to claim 1, characterized in that: The first gas pipeline is connected to a first air inlet pipeline for introducing gas and a first atmospheric gas pipeline for exhausting gas. The second gas pipeline connects a second atmospheric gas pipeline for introducing gas and a second gas extraction pipeline for extracting gas. Valves are installed on the first air intake pipe, the first atmospheric pipe, the second atmospheric pipe, and the second exhaust pipe.

7. The deformation-type pressure bonding device according to claim 1, characterized in that: A solenoid valve is installed on the first gas line.

8. The deformation-type pressure bonding device according to claim 1, characterized in that: The counterweight block includes at least three longitudinally arranged counterweight units, and adjacent counterweight units are detachably connected.

9. The deformation-type pressure bonding device according to claim 1, characterized in that: The pressurization process includes the following steps: Step 1: Open the top cover and place the workpiece inside; Close the top cover and shut off the first air line; Step two: Open the second vacuum line and start evacuating the vacuum. The bellows contracts and rises, and the vacuum level in the lower vacuum chamber reaches the set value. Step 3: Open the first air inlet pipe and introduce compressed air. The expansion diaphragm expands and pressurizes the workpiece. Step 4: Close the second suction line; the corrugated pipe extends and the counterweight descends. Step 5: Pressurize until the set time is reached, open the second atmospheric pipe and the first exhaust pipe, open the top cover, and remove the workpiece.

10. The deformation-type pressure bonding device according to claim 9, characterized in that: In step one, the first air line is closed by controlling the solenoid valve to be in the closed state, closing the first air intake line, and closing the first air supply line.

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