A water-accumulation-preventing coupling head with a super-hydrophobic surface and a processing method thereof
By setting a cross-micropillar structure and a superhydrophobic layer on the outer surface of the extended copper nozzle of the water-guided laser coupler, the problem of water droplet and water mist accumulation is solved, realizing stable water beam transmission and high-precision processing, which is suitable for precision processing in fields such as aero-engines and semiconductor chips.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- INST OF LASER MFG HENAN ACAD OF SCI
- Filing Date
- 2026-04-21
- Publication Date
- 2026-07-17
AI Technical Summary
In existing water-guided laser coupling heads, backwash water droplets and mist accumulate at the extended copper nozzle outlet during processing, resulting in poor water beam transmission stability and processing accuracy and consistency. Existing solutions increase structural complexity or affect water beam stability.
A micro-pillar structure formed by the intersection of axial and annular grooves is set on the outer surface of the extended copper nozzle, and a superhydrophobic layer is formed through heat treatment. Combined with the hollow cavity design, water droplets and water mist are prevented from accumulating on the surface, thus maintaining the stability of the water jet.
It improves the stability of water-optical coupling and the stability of the processing, reduces the cost of use, and is suitable for precision processing such as micro-holes with a depth-to-diameter ratio ≥30 or core extraction with an ultra-large depth-to-diameter ratio, thereby improving processing quality and yield.
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Abstract
Citation Information
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