High-frequency component airtight tooling

Abstract

The application discloses a high-frequency assembly airtight tool, and relates to the technical field of high-frequency assembly detection. In the application, an airtight tool upper die is connected to the output end of a vertical driving part; an airtight tool lower die is arranged at a leak detection opening of a helium mass spectrum leak detector; an airtight test hole is in communication with the leak detection opening of the helium mass spectrum leak detector; two airtight assemblies are symmetrically and elastically arranged on a cutting position assembly; and the inner cavities of the airtight assemblies are used for tightly placing high-frequency assemblies. When the airtight assemblies are in close cooperation with lower sealing grooves, the airtight tool upper die is in close cooperation with upper sealing grooves, and the airtight tool upper die is connected to a helium gas output opening of the helium mass spectrum leak detector through a helium gas hose. The application is vacuumized through the leak detection opening of the helium mass spectrum leak detector, and a certain amount of helium gas is input into the inner cavity of the upper die cover through the helium gas output opening of the helium mass spectrum leak detector and the helium gas hose. If the helium gas in the inner cavity of the upper die cover is sucked into the inner part of the helium mass spectrum leak detector under negative pressure, the helium mass spectrum leak detector will give an alarm, which indicates that the high-frequency assembly is unqualified in airtightness.

Description

Technical Field

[0001] This invention belongs to the field of high-frequency component testing technology, and in particular relates to a high-frequency component airtight tooling. Background Technology

[0002] After high-frequency components are manufactured, they typically undergo airtightness testing, which requires the use of a helium mass spectrometer leak detector. A helium mass spectrometer leak detector is a highly sensitive instrument that uses helium as a tracer gas to accurately detect and locate minute leaks in a system. It is primarily used to test whether components meet the airtightness requirements specified in the product drawings.

[0003] Existing helium mass spectrometer leak detectors typically feature a detachable testing platform with a perforated gasket in the center. The high-frequency component is pressed directly against the perforation, the instrument is opened, and vacuum extraction begins. Once a certain negative pressure is reached, helium gas is blown externally. If helium is drawn into the device, the leak detector will alarm, indicating a failure to meet gas tightness standards. However, due to the small size of the high-frequency component, the existing gas tightness testing can only be performed after it has been brazed to the casing, resulting in a delay and hindering the efficiency of high-frequency component gas tightness testing. Summary of the Invention

[0004] The purpose of this invention is to provide a high-frequency component airtight tooling, which solves the problems in the background art by the specific structural design of the bearing component, the upper mold of the airtight tooling, the lower mold of the airtight tooling, the cutting component and the airtight component.

[0005] To solve the above-mentioned technical problems, the present invention is achieved through the following technical solution: The present invention is a high-frequency component airtight tooling, including a bearing component, an airtight tooling lower mold, and a cutting component; the bearing component includes a horizontal driving part and a vertical driving part, the output end of the vertical driving part is connected to the airtight tooling upper mold; the airtight tooling lower mold is located at the leak detection port of a helium mass spectrometer leak detector, the airtight tooling lower mold includes an airtight test hole and a lower sealing groove concentrically located outside the airtight test hole, the airtight test hole is connected to the leak detection port of the helium mass spectrometer leak detector.

[0006] The positioning component is mounted on the lower mold of the airtight fixture and connected to the output end of the horizontal drive unit. Two airtight components are symmetrically and elastically mounted on the positioning component. The inner cavity of the airtight component is used to tightly house the high-frequency component. The airtight component includes an upper sealing groove. When the airtight component and the lower sealing groove are controlled to achieve a tight fit, the upper mold of the airtight fixture achieves a tight fit with the upper sealing groove. The upper mold of the airtight fixture is connected to the helium output port of the helium mass spectrometer leak detector through a helium hose.

[0007] The present invention is further configured such that the bearing assembly further includes a bearing frame, the horizontal driving part and the vertical driving part are both installed on the top of the bearing frame, the vertical driving part is located at the center of the bearing frame, and the horizontal driving part is located on one side of the vertical driving part; two support rods are symmetrically fixedly provided at the top of the bearing frame, and connecting flanges are fixedly provided on the periphery of the support rods, and the support rods are located on both sides of the vertical driving part and arranged along the width direction of the bearing frame.

[0008] The present invention is further configured such that the upper mold of the airtight tooling includes a hollow upper mold cover, a connecting ring fixed at the top center of the upper mold cover and connected to the output end of the vertical drive unit, and a gas pipe connector communicating with the inner cavity of the upper mold cover is installed on the peripheral side of the upper mold cover, and the gas pipe connector is connected to the helium output port of the helium mass spectrometer leak detector through a helium hose.

[0009] The present invention is further configured such that the top of the upper mold cover is a closed structure, the bottom of the upper mold cover is an open structure, and a push ring is fixedly provided at the bottom of the upper mold cover, and an upper sealing ring that is in tight fit with the upper sealing groove is fixedly installed at the bottom of the push ring.

[0010] The invention is further configured such that the lower mold of the airtight tooling includes a lower mold plate coaxial with the upper mold cover, a guide channel is provided at the top center of the lower mold plate, and positioning tubes located on both sides of the guide channel are fixedly provided on the top of the lower mold plate. The positioning tubes are slidably sleeved on the corresponding support rods, and the connecting flange installed on the top of the positioning tubes is connected to the connecting flange on the support rod by fasteners.

[0011] The present invention is further configured such that roller channels are provided on both sides of the guide channel, the roller channels and the guide channel both penetrate the peripheral side of the lower mold plate, and the airtightness test hole and the lower sealing groove are both located at the axial center inside the guide channel.

[0012] The present invention is further configured such that the cutting component includes a cutting frame that slides within a guide channel, a plurality of guide wheels are linearly arrayed on both sides of the cutting frame, the guide wheels are tumbling within a roller channel, two limiting slides are symmetrically provided on the top of the support frame, a movable frame fixed to the cutting frame is provided through the limiting slides, and the movable frame is connected to the output end of the horizontal drive unit.

[0013] The invention is further configured such that two support shells are symmetrically fixed inside the cutting frame, and a test port coaxial with the support shell is opened at the bottom of the support shell. A limiting protrusion is fixed on the inner wall of the support shell. The airtight component includes a force-bearing plate, an upper sealing groove is concentrically disposed at the top of the force-bearing plate, and a lower sealing ring penetrating the top of the force-bearing plate is fixed at the bottom of the force-bearing plate. The outer diameter of the lower sealing ring is consistent with the diameter of the test port, and the lower sealing ring and the lower sealing groove are sealed together.

[0014] The bottom of the force-bearing plate is fixed with an arc-shaped limiting member that slides with the limiting protrusion. The bottom of the support shell is equipped with an elastic member that is connected to the force-bearing plate. The inner wall of the lower sealing ring is fixed with a support ring. The airtight O-ring tightly fitted on the outside of the high-frequency component is tightly fitted inside the lower sealing ring and supported by the support ring.

[0015] The present invention is further configured such that horizontal support frames are fixedly provided on both sides of the bearing frame, and a limit ring is installed at the end of the horizontal support frame. When the force plate is not under force, its top surface is flush with the bottom surface of the limit ring. An installation plate is fixedly provided below the horizontal support frame, and a cylinder output end provided at the bottom of the installation plate is connected to a push ring column. Initially, the top surface of the push ring column is flush with the bottom surface of the cutting frame.

[0016] The present invention has the following beneficial effects: 1. The present invention controls the downward movement of the upper mold cover to press against the lower sealing ring, so that the lower part of the high frequency component inside the airtight component is sealed by the lower sealing groove and the lower mold plate, and the upper part of the high frequency component is sealed by the upper mold cover. At this time, the high frequency component is in a sealed environment at the leak detection port of the helium mass spectrometer. Vacuum is drawn through the leak detection port of the helium mass spectrometer, and then a certain amount of helium is input into the inner cavity of the upper mold cover through the helium output port and the helium hose of the helium mass spectrometer. If the helium in the inner cavity of the upper mold cover is sucked into the interior of the helium mass spectrometer by negative pressure, the helium mass spectrometer will issue an alarm, indicating that the airtightness of the high frequency component is unqualified.

[0017] 2. The present invention provides a cutting frame that slides horizontally on the lower mold plate, two support shells that are symmetrically installed on the cutting frame, and an airtight component for tightly placing high-frequency components installed inside the support shell. By controlling the cutting frame to achieve the alternating movement of different airtight components below the vertical drive section, continuous testing of high-frequency components can be achieved, thus improving the airtightness testing efficiency of high-frequency components.

[0018] 3. While performing airtightness testing on high-frequency components, this invention controls the right-side cylinder to gradually move the push ring column upwards into the inner cavity of the lower sealing ring. The push ring column pushes the bottom of the airtight O-ring, pushing the entire high-frequency component out of the lower sealing ring. This allows the tested high-frequency component to be removed. After controlling the push ring column to move downwards to complete the reset, the next high-frequency component to be tested is tightly placed into the inner cavity of the right-side lower sealing ring. This achieves batch airtightness testing of high-frequency components and improves the efficiency of airtightness testing of high-frequency components. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of the airtight tooling for the high-frequency components in this invention.

[0021] Figure 2 These are diagrams showing different working states of the airtight tooling for the high-frequency components in this invention.

[0022] Figure 3 This is a schematic diagram of the structure of the carrier component in this invention.

[0023] Figure 4 This is a schematic diagram of the structure of the lower mold of the airtight tooling in this invention.

[0024] Figure 5 This is a schematic diagram of the structure of the upper mold of the airtight tooling in this invention.

[0025] Figure 6 This is a schematic diagram of the cutting component in this invention.

[0026] Figure 7 This is a diagram showing the fit between the airtight component and the high-frequency component in this invention.

[0027] Figure 8 This is a schematic diagram of the airtight component in this invention.

[0028] The attached diagram lists the components represented by each number as follows:

[0029] 1. Bearing assembly; 2. Horizontal drive unit; 3. Vertical drive unit; 4. Upper mold of airtight fixture; 5. Lower mold of airtight fixture; 6. Airtightness test hole; 7. Lower sealing groove; 8. Cutting assembly; 9. Airtight assembly; 10. High-frequency assembly; 11. Upper sealing groove; 12. Bearing frame; 13. Support rod; 14. Upper mold cover; 15. Connecting ring; 16. Air pipe connector; 17. Push ring; 18. Upper sealing ring; 19. Lower mold plate; 20. Guide channel ; 21. Positioning tube; 22. Roller channel; 23. Cutting frame; 24. Guide wheel; 25. Limiting slide; 26. Moving frame; 27. Support shell; 28. Test port; 29. ​​Limiting protrusion; 30. Force plate; 31. Lower sealing ring; 32. Arc-shaped limiting component; 33. Elastic component; 34. Support ring; 35. Airtight O-ring; 36. Horizontal support frame; 37. Limiting ring; 38. Mounting plate; 39. Cylinder; 40. Pushing ring column. Detailed Implementation

[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] Example 1, please refer to Figures 1 to 8 This invention relates to a high-frequency component airtight fixture, comprising a support component 1, an airtight fixture lower mold 5, and a positioning component 8. The support component 1 includes a horizontal drive part 2 and a vertical drive part 3, which can be cylinders or electric actuators. The output end of the vertical drive part 3 is connected to the airtight fixture upper mold 4. The airtight fixture lower mold 5 is located at the leak detection port of a helium mass spectrometer leak detector. The airtight fixture lower mold 5 includes an airtight test hole 6 and a lower sealing groove 7 concentrically located outside the airtight test hole 6. The airtight test hole 6 is connected to the leak detection port of the helium mass spectrometer leak detector. That is, when the airtight fixture lower mold 5 is tightly installed on the leak detection port of the helium mass spectrometer leak detector, the airtight test hole 6 on it is connected to the leak detection port.

[0032] The cutting assembly 8 is mounted on the lower mold 5 of the airtight tooling and connected to the output end of the horizontal drive unit 2. That is, the cutting assembly 8 has two airtight mounting positions. Initially, the two airtight mounting positions are symmetrically located on both sides of the vertical drive unit 3. Figure 1 and Figure 2 As shown in (A1), two airtight components 9 are symmetrically and elastically installed on the cutting component 8. The inner cavity of the airtight component 9 is used to tightly place the high-frequency component 10. The airtight component 9 includes an upper sealing groove 11. When the airtight component 9 and the lower sealing groove 7 are controlled to achieve a tight fit, the upper mold 4 of the airtight fixture achieves a tight fit with the upper sealing groove 11. That is, the lower part of the high-frequency component 10 is sealed by the lower mold 5 of the airtight fixture and the airtight component 9, and the upper part of the high-frequency component 10 is sealed by the upper mold 4 of the airtight fixture. The upper mold 4 of the airtight fixture is connected to the helium outlet of the helium mass spectrometer leak detector through a helium hose. A one-way valve close to the upper mold 4 of the airtight fixture is installed on the helium hose.

[0033] The specific structure of the bearing component 1 in this invention is as follows: Figure 3As shown, the support assembly 1 also includes a support frame 12, which is mounted on the external lifting frame by fastening bolts and is located above the helium mass spectrometer leak detector. The lifting control method of the lifting frame is a conventional method in the prior art, such as a cylinder or hydraulic cylinder. The horizontal drive unit 2 and the vertical drive unit 3 are both mounted on the top of the support frame 12, with the vertical drive unit 3 located at the center of the support frame 12 and the horizontal drive unit 2 located on one side of the vertical drive unit 3. Two support rods 13 are symmetrically fixed to the top of the support frame 12, and connecting flanges are fixed to the periphery of the support rods 13. The support rods 13 are located on both sides of the vertical drive unit 3 and are arranged along the width direction of the support frame 12.

[0034] The specific structure of the airtight tooling upper mold 4 in this invention is as follows: Figure 5 As shown, the airtight tooling upper mold 4 includes a hollow upper mold cover 14. A connecting ring 15 connected to the output end of the vertical drive unit 3 is fixed at the center of the top of the upper mold cover 14. A gas pipe connector 16 communicating with the inner cavity is installed on the periphery of the upper mold cover 14. The gas pipe connector 16 is connected to the helium output port of the helium mass spectrometer leak detector through a helium hose. The top of the upper mold cover 14 is a closed structure, and the bottom of the upper mold cover 14 is an open structure. A push ring 17 is fixedly provided at the bottom of the upper mold cover 14, and an upper sealing ring 18 is fixedly installed at the bottom of the push ring 17 to seal with the upper sealing groove 11.

[0035] The specific structure of the airtight tooling lower mold 5 in this invention is as follows: Figure 4 As shown, the lower mold 5 of the airtight tooling also includes a lower mold plate 19 coaxial with the upper mold cover 14. A guide channel 20 is provided at the top center of the lower mold plate 19. Positioning tubes 21 located on both sides of the guide channel 20 are fixedly provided on the top of the lower mold plate 19. The positioning tubes 21 are slidably sleeved on the corresponding support rods 13. The connecting flanges installed on the top of the positioning tubes 21 are connected to the connecting flanges on the support rods 13 by fasteners. Through this structural design, the entire lower mold 5 of the airtight tooling can be stably installed on the two support rods 13 inside the bearing frame 12. Roller channels 22 are provided on both opposite side walls of the guide channel 20. The roller channels 22 and the guide channel 20 both penetrate the circumference of the lower mold plate 19. The airtightness test hole 6 and the lower sealing groove 7 are both located at the axial center inside the guide channel 20.

[0036] When the high-frequency component 10 is tightly installed in the inner cavity of the airtight component 9 and the airtight component 9 is moved to directly below the vertical drive unit 3, the upper mold cover 14 is gradually moved downward by the vertical drive unit 3. The push ring 17, which moves downward synchronously with the upper mold cover 14, contacts the top of the airtight component 9. The upper sealing ring 18 at the bottom of the push ring 17 then achieves a tight seal with the upper sealing groove 11. The push ring 17 then pushes the airtight component 9 downward until it achieves a tight seal with the lower sealing groove 7. At this point, the lower part of the high-frequency component 10 inside the airtight component 9 is sealed by the lower sealing groove 7 and the lower mold plate 19, while the upper part of the high-frequency component 10 is sealed by the upper mold cover 14. Thus, the high-frequency component 10 at this time... In the sealed environment at the leak detection port of the helium mass spectrometer leak detector, a vacuum is first drawn through the leak detection port of the helium mass spectrometer leak detector, and then a certain amount of helium is introduced into the inner cavity of the upper mold cover 14 through the helium output port and helium hose of the helium mass spectrometer leak detector. If the helium in the inner cavity of the upper mold cover 14 is sucked into the interior of the helium mass spectrometer leak detector by negative pressure, the helium mass spectrometer leak detector will sound an alarm, indicating that the airtightness of the high-frequency component 10 is unqualified. After the airtightness test is completed, the upper mold cover 14 is moved upward by the vertical drive unit 3 to complete the reset. At this time, the bottom of the airtight component 9 is completely separated from the lower sealing groove 7, and the top of the airtight component 9 is completely separated from the upper mold cover 14. Then the airtightness test of the next high-frequency component 10 can be started.

[0037] Example 2, based on Example 1, such as Figure 6 As shown, the cutting assembly 8 includes a cutting frame 23 that slides within the guide channel 20. Several guide wheels 24 are linearly arrayed on both sides of the cutting frame 23. The guide wheels 24 roll within the roller channel 22. Two limiting slides 25 are symmetrically arranged on the top of the support frame 12. A movable frame 26 fixed to the cutting frame 23 passes through the limiting slides 25. The movable frame 26 is connected to the output end of the horizontal drive unit 2. During the horizontal movement of the cutting frame 23 along the guide channel 20 by the movable frame 26 controlled by the horizontal drive unit 2, the smooth movement of the entire cutting assembly 8 can be achieved through the rolling action of the guide wheels 24 and the roller channel 22.

[0038] The internal structure of the cutting frame 23 in this invention is as follows: Figure 6 As shown, two support shells 27 are symmetrically fixed inside the cutting frame 23. The bottom of the support shell 27 is provided with a test port 28 coaxial with it. The inner wall of the support shell 27 is fixed with a limiting protrusion 29. The airtight component 9 includes a force plate 30. The upper sealing groove 11 is concentrically located on the top of the force plate 30. The bottom of the force plate 30 is fixed with a lower sealing ring 31 that passes through its top. The outer diameter of the lower sealing ring 31 is the same as the diameter of the test port 28. The lower sealing ring 31 and the lower sealing groove 7 are sealed together.

[0039] The bottom of the force-bearing plate 30 is fixed with an arc-shaped limiting member 32 that slides with the limiting protrusion 29. The bottom of the support shell 27 is equipped with an elastic member 33 that is connected to the force-bearing plate 30. The inner wall of the lower sealing ring 31 is fixed with a support ring 34. The airtight O-ring 35 tightly fitted on the outside of the high-frequency component 10 is tightly fitted in the lower sealing ring 31 and supported by the support ring 34. When the force-bearing plate 30 is not subjected to external pressure, the bottom of the lower sealing ring 31 is flush with the top of the support ring 34, so that the entire airtight component 9 will not be interfered with by the movement of the lower mold plate 19 during the synchronous horizontal movement with the support shell 27.

[0040] Other structures of the bearing component 1 in this invention are as follows: Figure 3 As shown, horizontal support frames 36 are fixed on both sides of the support frame 12. Limiting rings 37 are installed at the ends of the horizontal support frames 36. When the force plate 30 is not under force, its top surface is flush with the bottom surface of the limiting ring 37. A mounting plate 38 is fixed below the horizontal support frame 36. The output end of the cylinder 39 at the bottom of the mounting plate 38 is connected to a push ring column 40. The outer diameter of the push ring column 40 is the same as the inner diameter of the support ring 34. The inner diameter of the push ring column 40 is the same as the outer diameter of the high frequency component 10. Initially, the top surface of the push ring column 40 is flush with the bottom surface of the cutting frame 23. This ensures that the horizontally moving cutting frame 23 is not interfered with by the movement of the push ring column 40 and the limiting ring 37.

[0041] like Figure 2 As shown in (A1), initially, the two support shells 27 are symmetrically arranged on the left and right sides of the vertical drive unit 3. After the two high-frequency components 10 are tightly placed inside each lower sealing ring 31, the horizontal drive unit 2 controls the entire cutting frame 23 to move the right-side airtight component 9 to the right-side unloading position. At this time, the left-side airtight component 9 moves to just below the vertical drive unit 3, as shown in (A1). Figure 2 As shown in (A2), the upper mold cover 14 is then controlled by the vertical drive unit 3 to gradually move downward. The push ring 17, which moves downward synchronously with the upper mold cover 14, contacts the top of the force plate 30. The upper sealing ring 18 at the bottom of the push ring 17 achieves a tight fit with the upper sealing groove 11. The push ring 17 then pushes the lower sealing ring 31 downward to compress the elastic element 33 until the lower sealing ring 31 achieves a tight fit with the lower sealing groove 7. At this time, the high-frequency component 10 inside the lower sealing ring 31 passes through the lower sealing groove 7 and the lower mold plate 19. The high-frequency component 10 is sealed by the upper mold cover 14. At this time, the high-frequency component 10 is in a sealed environment at the leak detection port of the helium mass spectrometer. Then, a vacuum is first drawn through the leak detection port of the helium mass spectrometer, and then a certain amount of helium is introduced into the inner cavity of the upper mold cover 14 through the helium output port and helium hose of the helium mass spectrometer. If the helium in the inner cavity of the upper mold cover 14 is sucked into the helium mass spectrometer by negative pressure, the helium mass spectrometer will sound an alarm, indicating that the airtightness of the high-frequency component 10 is not up to standard.

[0042] After completing the airtightness test of the high-frequency component 10 inside the lower sealing ring 31 on the right side, the upper mold cover 14 is moved upward by the vertical drive unit 3 to complete the reset. Then, the entire cutting frame 23 is moved to the left by the horizontal drive unit 2 until the airtight component 9 on the left side moves to the unloading station on the left side after the airtightness test is completed. At this time, the airtight component 9 on the right side just moves to directly below the vertical drive unit 3. Figure 2 As shown in (A3), the airtightness test of the high-frequency component 10 on the right side is started according to the same airtightness test method described above. While the airtightness test of the high-frequency component 10 on the right side is being performed, the push ring column 40 is gradually moved upward into the inner cavity of the lower sealing ring 31 by the cylinder 39 on the left side. The push ring column 40 pushes the bottom of the airtight O-ring 35 to push the entire high-frequency component 10 out of the lower sealing ring 31. In this way, the high-frequency component 10 after the test can be removed. After the push ring column 40 is moved downward to complete the reset, the next high-frequency component 10 to be tested is tightly placed into the inner cavity of the lower sealing ring 31.

[0043] When the horizontal drive unit 2 controls the entire cutting frame 23 to move to the right again... Figure 2 At the location shown in (A2), while the airtightness test of the left high-frequency component 10 is being performed, the right cylinder 39 controls the push ring 40 to gradually move upward into the inner cavity of the lower sealing ring 31. The push ring 40 pushes the bottom of the airtight O-ring 35, pushing the entire high-frequency component 10 out of the lower sealing ring 31. In this way, the tested high-frequency component 10 can be removed. After the push ring 40 is controlled to move downward to complete the reset, the next high-frequency component 10 to be tested is tightly placed into the inner cavity of the right lower sealing ring 31. This realizes the batch airtightness test of the high-frequency component 10 and improves the airtightness test efficiency of the high-frequency component 10.

[0044] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0045] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A high-frequency component airtight tooling, characterized in that, include: The support component (1) includes a horizontal drive unit (2) and a vertical drive unit (3), and the output end of the vertical drive unit (3) is connected to an airtight tooling upper mold (4). The lower mold (5) of the airtight tooling is located at the leak detection port of the helium mass spectrometer. The lower mold (5) of the airtight tooling includes an airtight test hole (6) and a lower sealing groove (7) concentrically located outside the airtight test hole (6). The airtight test hole (6) is connected to the leak detection port of the helium mass spectrometer. Cutting component (8), the cutting component (8) is disposed on the lower mold (5) of the airtight tooling and connected to the output end of the horizontal drive unit (2). Two airtight components (9) are symmetrically and elastically installed on the cutting component (8). The inner cavity of the airtight component (9) is used to tightly place the high frequency component (10). The airtight component (9) includes an upper sealing groove (11). When the airtight component (9) and the lower sealing groove (7) are sealed together, the upper mold (4) of the airtight tooling is sealed together with the upper sealing groove (11). The upper mold (4) of the airtight tooling is connected to the helium outlet of the helium mass spectrometer leak detector through a helium hose.

2. The high-frequency component airtight tooling according to claim 1, characterized in that, The bearing assembly (1) also includes a bearing frame (12). The horizontal drive part (2) and the vertical drive part (3) are both installed on the top of the bearing frame (12). The vertical drive part (3) is located at the center of the bearing frame (12), and the horizontal drive part (2) is located on one side of the vertical drive part (3).

3. The high-frequency component airtight tooling according to claim 2, characterized in that, Two support rods (13) are symmetrically fixed at the top of the support frame (12). A connecting flange is fixed on the periphery of the support rod (13). The support rods (13) are located on both sides of the vertical drive part (3) and arranged along the width direction of the support frame (12).

4. The high-frequency component airtight tooling according to claim 3, characterized in that, The airtight tooling upper mold (4) includes a hollow upper mold cover (14). A connecting ring (15) connected to the output end of the vertical drive unit (3) is fixed at the top center of the upper mold cover (14). A gas pipe connector (16) communicating with its inner cavity is installed on the periphery of the upper mold cover (14). The gas pipe connector (16) is connected to the helium output port of the helium mass spectrometer leak detector through a helium hose.

5. The high-frequency component airtight tooling according to claim 4, characterized in that, The top of the upper mold cover (14) is a closed structure, the bottom of the upper mold cover (14) is an open structure, and a push ring (17) is fixedly provided at the bottom of the upper mold cover (14). An upper sealing ring (18) that is in tight fit with the upper sealing groove (11) is fixedly installed at the bottom of the push ring (17).

6. The high-frequency component airtight tooling according to claim 4, characterized in that, The airtight tooling lower mold (5) also includes a lower mold plate (19) coaxial with the upper mold cover (14). A guide channel (20) is provided at the top center of the lower mold plate (19). Positioning tubes (21) located on both sides of the guide channel (20) are fixedly provided on the top of the lower mold plate (19). The positioning tubes (21) are slidably sleeved on the corresponding support rod (13). The connecting flange installed on the top of the positioning tube (21) is connected to the connecting flange on the support rod (13) by fasteners.

7. The high-frequency component airtight tooling according to claim 6, characterized in that, Roller channels (22) are provided on both sides of the guide channel (20). The roller channels (22) and the guide channel (20) both penetrate the periphery of the lower mold plate (19). The airtightness test hole (6) and the lower sealing groove (7) are both located at the axial center inside the guide channel (20).

8. The high-frequency component airtight tooling according to claim 7, characterized in that, The cutting component (8) includes a cutting frame (23) that slides within the guide channel (20). The cutting frame (23) has several guide wheels (24) arranged linearly on both sides. The guide wheels (24) roll within the roller channel (22). The top of the support frame (12) has two limiting slides (25) symmetrically arranged. A movable frame (26) fixed to the cutting frame (23) passes through the limiting slides (25). The movable frame (26) is connected to the output end of the horizontal drive unit (2).

9. A high-frequency component airtight tooling according to claim 8, characterized in that, The inner side of the cutting frame (23) is symmetrically fixed with two support shells (27). The bottom of the support shell (27) is provided with a test port (28) coaxial with it. The inner wall of the support shell (27) is fixed with a limiting protrusion (29). The airtight component (9) includes a force-receiving plate (30), the upper sealing groove (11) is concentrically located on the top of the force-receiving plate (30), and a lower sealing ring (31) is fixedly provided at the bottom of the force-receiving plate (30) through its top. The outer diameter of the lower sealing ring (31) is consistent with the diameter of the test port (28), and the lower sealing ring (31) and the lower sealing groove (7) are in a tight fit. The bottom of the force-receiving plate (30) is fixed with an arc-shaped limiting member (32) that slides with the limiting protrusion (29). The bottom of the inner wall of the support shell (27) is equipped with an elastic member (33) that is connected to the force-receiving plate (30). The inner wall of the lower sealing ring (31) is fixed with a support ring (34). The airtight O-ring (35) tightly fitted on the outside of the high-frequency component (10) is tightly fitted inside the lower sealing ring (31) and supported by the support ring (34).

10. A high-frequency component airtight fixture according to claim 9, characterized in that, The support frame (12) is fixed with horizontal support frames (36) on both sides. The end of the horizontal support frame (36) is equipped with a limit ring (37). When the force plate (30) is not under force, its top surface is flush with the bottom surface of the limit ring (37). The horizontal support frame (36) is fixed with a mounting plate (38) below it. The output end of the cylinder (39) at the bottom of the mounting plate (38) is connected to a push ring column (40). Initially, the top surface of the push ring column (40) is flush with the bottom surface of the cutting frame (23).

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