Gas guiding device and semiconductor apparatus

Abstract

The application provides a gas guiding device and a semiconductor device, and relates to the technical field of semiconductors. The gas guiding device comprises a first pipeline, an ion generator and a guiding member. The first pipeline has an air inlet end and an air outlet end. The ion generator is arranged on the outer side wall of the first pipeline and is close to the air inlet end, and is used for charging a polymer in the gas entering the first pipeline from the air inlet end. The guiding member is arranged on the inner side wall of the first pipeline and is close to the air outlet end, and is used for guiding the charged polymer to move towards the air outlet end. The gas guiding device can effectively avoid the accumulation of carbon-containing polymers on the inner wall of the pipeline.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more specifically, to a gas guiding device and semiconductor equipment. Background Technology

[0002] In CVD technology, thin film deposition processes using carbon-containing gas sources often produce carbon-containing polymers. These polymers have strong adhesion and easily adhere to the inner wall of pipes during the gas extraction process. Long-term accumulation in the pipes will cause blockages and seriously affect the operation of CVD and other vacuum coating equipment.

[0003] To ensure the normal operation of the equipment, the pipes need to be disassembled, replaced and cleaned regularly. However, replacing the pipes is time-consuming and labor-intensive, reduces the efficiency of the equipment, and can easily cause contamination inside the cavity. Summary of the Invention

[0004] The purpose of this application includes, for example, providing a gas guiding device that can effectively prevent polymer buildup on the inner wall of a pipe.

[0005] The purpose of this application also includes providing a semiconductor device that can effectively prevent polymer buildup on the inner wall of a pipe.

[0006] The embodiments of this application can be implemented as follows: In a first aspect, embodiments of this application provide a gas guiding device, which includes: a first conduit, an ion generator, and a guide element.

[0007] The first pipe has an inlet end and an outlet end; The ion generator is disposed on the outer wall of the first pipe and close to the air inlet, and is used to charge the polymer in the gas introduced into the first pipe from the air inlet. The guide is disposed on the inner wall of the first pipe and near the outlet end, for guiding the charged polymer toward the outlet end.

[0008] Optionally, the guide includes an electrode with the opposite polarity to the first pipe, the electrode being disposed on the inner wall of the first pipe and close to the outlet end.

[0009] Optionally, the number of electrodes is two, and the two electrodes are symmetrically arranged on the inner sidewall of the first pipe.

[0010] Optionally, the electrode is a needle-shaped electrode, with the tip of the needle-shaped electrode facing the inside of the first channel.

[0011] Optionally, the first pipe is provided with a metal wire mesh at the air inlet end.

[0012] Optionally, an insulating element is provided on the first pipe, and the electrode is disposed on the insulating element.

[0013] Optionally, the insulating element is a rubber ring.

[0014] Optionally, the gas guiding device further includes a second pipe connected to the first pipe, wherein the central axis of the first pipe and the central axis of the second pipe are arranged at an angle, and a vacuum pump is provided at the end of the second pipe away from the first pipe.

[0015] Optionally, both the first pipe and the second pipe include an inner layer, an outer layer, and an insulating layer disposed between the inner layer and the outer layer; The gas guiding device also includes a power source, the negative terminal of which is electrically connected to the inner layer, the positive terminal of which is electrically connected to the electrode, and the outer layer is grounded.

[0016] Optionally, the guide includes a first magnetic pole and a second magnetic pole, the first magnetic pole and the second magnetic pole having opposite magnetic properties, the first magnetic pole and the second magnetic pole being disposed opposite to each other on the inner side wall of the first pipe, and both being close to the air outlet end.

[0017] Optionally, the gas guiding device further includes a second pipe connected to the first pipe, wherein the central axis of the first pipe and the central axis of the second pipe are arranged at an angle, and a vacuum pump is provided at the end of the second pipe away from the first pipe; the magnetic field formed between the first magnetic pole and the second magnetic pole can deflect the polymer toward one side of the second pipe.

[0018] Optionally, there may be multiple first pipes, each of which is connected to the second pipe, and each first pipe is provided with the ion generator and the guide.

[0019] Secondly, this application also provides a semiconductor device including the gas guiding device described in any of the above optional embodiments. The gas guiding device includes: a first conduit, an ion generator, and a guide member. The first conduit has an inlet end and an outlet end. The ion generator is disposed on the outer wall of the first conduit, near the inlet end, for charging a polymer in a gas introduced into the first conduit from the inlet end. The guide member is disposed on the inner wall of the first conduit, near the outlet end, for guiding the charged polymer toward the outlet end.

[0020] The beneficial effects of the gas guiding device and semiconductor device provided in this application include, for example: During use, gas containing polymers (such as carbon-containing polymers) enters through the inlet of the first pipe. The polymers in the gas are charged by the ion generator and then guided to move towards the outlet of the first pipe by the guide, thus preventing them from accumulating on the inner wall of the first pipe. This eliminates the need for frequent pipe replacements, saving time and effort, improving equipment efficiency, and reducing the risk of internal contamination. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the first gas guiding device in an optional embodiment of this application; Figure 2 This is a schematic diagram of the second gas guiding device in an optional embodiment of this application; Figure 3 This is a schematic diagram of a third gas guiding device in an optional embodiment of this application.

[0023] Icons: 100-First pipe; 110-Inlet; 120-Outlet; 130-Metal mesh; 140-Insulator; 200-Ion generator; 300-Guide; 310-Electrode; 321-First magnetic pole; 322-Second magnetic pole; 400-Second pipe; 410-Inner layer; 420-Outer layer; 430-Insulation layer; 500-Air pump; 600-Power supply. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0026] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0027] In the description of this application, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of the invention is usually placed during use, they are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0028] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0029] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.

[0030] As disclosed in the background section, carbon-containing polymers easily adhere to the inner wall of pipes. Long-term accumulation of carbon-containing polymers inside the pipes will cause blockages, severely affecting the operation of vacuum coating equipment such as CVD. Currently, to ensure normal equipment operation, pipes need to be disassembled and replaced for cleaning periodically. However, pipe replacement is time-consuming and labor-intensive, reducing equipment efficiency and easily causing contamination within the equipment cavity. Embodiments of this application provide a gas guiding device, at least to solve the above-mentioned technical problems.

[0031] Please refer to Figure 1 The gas guiding device provided in the embodiments of this application includes a first pipe 100, an ion generator 200, and a guide 300. The first pipe 100 has an inlet end 110 and an outlet end 120; the ion generator 200 is disposed on the outer side wall of the first pipe 100 and near the inlet end 110, and the ion generator 200 is used to charge the polymer in the gas introduced into the first pipe 100 from the inlet end 110. The guide 300 is disposed on the inner side wall of the first pipe 100 and near the outlet end 120, and the guide 300 is used to guide the charged polymer to move towards the outlet end 120.

[0032] During use, the gas guiding device allows the polymer-containing gas to enter through the inlet 110 of the first pipe 100. The ion generator 200 charges the polymer in the gas, and the guide 300 guides the polymer towards the outlet 120 of the first pipe 100. This prevents the polymer from accumulating on the inner wall of the first pipe 100, thus eliminating the need for frequent pipe replacements, saving time and effort, improving equipment efficiency, and reducing the risk of internal contamination.

[0033] It should be noted that the ion generator 200 can make the polymer in the gas negatively charged, or it can make the polymer in the gas positively charged. The embodiments of this application are all described using the ion generator 200 as a negative ion generator as an example, that is, the ion generator 200 makes the polymer in the gas negatively charged. As for the case where the ion generator 200 makes the polymer in the gas positively charged, the embodiments of this application can be referred to similarly. In practical applications, it is only necessary to set the polarity of the relevant structures to be reversed accordingly.

[0034] Furthermore, it should be noted that in CVD technology, thin film deposition processes using carbon-containing gas sources often produce carbon-containing polymers. These polymers have strong adhesive properties and easily adhere to the inner wall of the pipe during the gas extraction process. Long-term accumulation in the pipe will cause blockage, severely affecting the operation of CVD and other vacuum coating equipment. Therefore, the gas guiding device provided in the optional embodiments of this application can effectively guide the carbon-containing polymers, preventing them from accumulating on the inner wall of the first pipe 100. This embodiment uses a carbon-containing polymer as an example. Of course, in other embodiments, similar guiding effects can be achieved for other types of polymers.

[0035] Additionally, guide 300 may include electrode 310 (see Figure 1 and Figure 2 The polymer is moved by an electric field; it may also include magnetic poles (see below). Figure 3 The polymer is moved by a magnetic field. This ensures the polymer moves smoothly towards the outlet 120 of the first pipe 100, preventing polymer buildup on the inner wall of the first pipe 100 and eliminating the need for frequent pipe replacements. The following details the cases where the guide 300 includes electrodes 310 or magnetic poles: Please refer to Figure 1 The following description uses an example where the guide 300 includes an electrode 310 and the polymer is a carbon-containing polymer. Some optional embodiments of this application provide a gas guiding device including a first pipe 100, an ion generator 200, and an electrode 310. The first pipe 100 has an inlet end 110 and an outlet end 120. The ion generator 200 is disposed on the outer wall of the first pipe 100, near the inlet end 110. As an example, the ion generator 200 is used to generate negative ions and electrons. When a gas containing polymer enters from the inlet end 110 of the first pipe 100, the polymer in the gas becomes negatively charged. Furthermore, the electrode 310 has the opposite polarity to the first pipe 100; the electrode 310 is positively charged relative to the first pipe 100. The electrode 310 is disposed on the inner wall of the first pipe 100, near the outlet end 120.

[0036] Since the ion generator 200 is close to the air inlet 110 of the first pipe 100, and the ion generator 200 generates negative ions and electrons, when the gas containing carbon polymer enters from the air inlet 110 of the first pipe 100, the carbon polymer in the gas will become negatively charged. Since the electrode 310 is close to the air outlet 120 of the first pipe 100, and the electrode 310 is positively charged relative to the first pipe 100, an electric field is formed between the electrode 310 and the inner wall of the first pipe 100. This electric field can accelerate the movement of the carbon polymer, and the inner wall of the first pipe 100 presents a negative potential, which repels the negatively charged carbon polymer.

[0037] During use, the gas guiding device introduces a gas containing carbon polymer into the first pipe 100 through the inlet 110. The ion generator 200 generates negative ions and electrons, causing the carbon polymer in the gas to become negatively charged. Since the electrode 310 near the outlet 120 is positively charged relative to the first pipe 100, the carbon polymer accelerates towards the outlet 120 of the first pipe 100 under the electric field formed by the electrode 310 and the inner wall of the first pipe 100. Furthermore, the negative potential of the inner wall of the first pipe 100 repels the negatively charged carbon polymer, thus preventing the negatively charged polymer particles from adhering to the inner wall of the first pipe 100, reducing polymer accumulation and preventing pipe blockage.

[0038] When the carbon-containing polymer passes through electrode 310, the negatively charged polymer particles come into contact with the positively charged electrode 310, and the charge is neutralized, resulting in a neutral state. Finally, the polymer particles are discharged from the outlet 120, thus eliminating the need for frequent pipe replacements, saving time and effort, improving equipment efficiency, and reducing the risk of internal contamination.

[0039] In some embodiments, there are two electrodes 310, which are symmetrically arranged on the inner sidewall of the first pipe 100.

[0040] The two electrodes 310 are symmetrically arranged along the central axis of the first pipe 100. On the one hand, the symmetrical arrangement of the electrodes 310 is conducive to the symmetrical distribution of the electric field within the first pipe 100, avoiding chaotic movement trajectories of the charged polymers. On the other hand, due to the symmetrical arrangement of the electrodes 310, the electric fields at the center of the first pipe 100 cancel each other out and are weakened, thereby reducing the electric force on the charged polymers. When the charged polymers move to the outlet end 120 of the first pipe 100, especially polymer particles with low initial velocities, the smaller electric force facilitates their movement along the flow direction and smooth discharge from the outlet end 120 of the first pipe 100. Otherwise, if the charged polymers are subjected to a large electric force, they may deviate from the flow direction and move towards the electrodes 310, adsorbing onto the surface of the electrodes 310 and causing the accumulation of carbon-containing polymers.

[0041] In some other embodiments, there are two or more electrodes 310. The multiple electrodes 310 are evenly spaced along the circumference of the first pipe 100. The multiple evenly distributed electrodes 310 are beneficial to the uniform distribution of the electric field in the first pipe 100 and also to the movement of polymer particles along the flow field direction, so as to smoothly discharge the gas outlet 120 of the first pipe 100.

[0042] In some embodiments, electrode 310 is a needle electrode with the tip of the needle electrode facing the inside of the first conduit 100.

[0043] When carbon-containing polymers pass through needle electrodes, they do not easily accumulate on the surface of the needle electrodes. The design of the needle electrodes can minimize the accumulation of carbon-containing polymers on the surface of electrode 310.

[0044] In some other embodiments, the electrode 310 may also be in other shapes, such as a pyramid, as long as it makes it difficult for the carbon-containing polymer to accumulate on the surface of the electrode 310.

[0045] Please refer to Figure 2 In some embodiments, the first pipe 100 is provided with a metal mesh 130 at the air inlet end 110.

[0046] The metal mesh 130 is located inside the first pipe 100 and is fixedly connected to the inner wall of the first pipe 100. At this time, the first pipe 100 and the metal mesh 130 are at the same negative potential. The first pipe 100 and the metal mesh 130 form an electrostatic field with the electrode 310, which makes the electric field more in line with the gas flow direction and more conducive to accelerating the flow of carbon-containing polymer to the gas outlet 120 of the first pipe 100.

[0047] In some embodiments, an insulating element 140 is provided on the first conduit 100, and an electrode 310 is disposed on the insulating element 140.

[0048] The insulating component 140 is insulated from and sealed to the first pipe 100. The electrode 310 is disposed on the insulating component 140, so that the electrode 310 can be positively charged relative to the first pipe 100.

[0049] In an optional embodiment, the insulating element 140 is a rubber ring, which is embedded in the first pipe 100 and coincides with the central axis of the first pipe 100. The electrode 310 is fixedly connected to the inner side of the rubber ring. The fixed connection between the electrode 310 and the rubber ring includes, but is not limited to, bonding, insertion, etc., as long as the electrode 310 can be fixed to the rubber ring.

[0050] In some embodiments, the gas guiding device further includes a second pipe 400 connected to the first pipe 100, wherein the central axis of the first pipe 100 and the central axis of the second pipe 400 are arranged at an angle, and a vacuum pump 500 is provided at one end of the second pipe 400 away from the first pipe 100.

[0051] The first pipe 100 and the second pipe 400 can be integrally formed. The air outlet 120 of the first pipe 100 is connected to one end of the second pipe 400, and the air pump 500 is set at the other end of the second pipe 400. The connection between the first pipe 100 and the second pipe 400 forms a corner.

[0052] Under the influence of the electric field formed between the electrode 310 and the inner wall of the first pipe 100, and the suction action of the air pump 500, the carbon-containing polymer accelerates towards the air outlet 120 of the first pipe 100. When the carbon-containing polymer passes the electrode 310, the negatively charged polymer particles come into contact with the positively charged electrode 310, and the charge is neutralized to become neutral. Then it is discharged from the air outlet 120, so that it is not easy to accumulate on the inner wall of the first pipe 100 and at the connection between the first pipe 100 and the second pipe 400.

[0053] In some embodiments, the first conduit 100 and the second conduit 400 both include an inner layer 410, an outer layer 420 and an insulating layer 430 disposed between the inner layer 410 and the outer layer 420; the gas guiding device also includes a power supply 600, the negative terminal of the power supply 600 is electrically connected to the inner layer 410, the positive terminal of the power supply 600 is electrically connected to the electrode 310, and the outer layer 420 is grounded.

[0054] The inner layer 410 of the first pipe 100 is connected to the inner layer 410 of the second pipe 400, the outer layer 420 of the first pipe 100 is connected to the outer layer 420 of the second pipe 400, and the insulation layer 430 of the first pipe 100 is connected to the insulation layer 430 of the second pipe 400.

[0055] When there are two electrodes 310, the positive terminal of the power supply 600 is electrically connected to both electrodes 310 at the same time, and the negative terminal of the power supply 600 is electrically connected to the inner layer 410 of the first pipe 100 or the inner layer 410 of the second pipe 400, so that the two electrodes 310 are positively charged relative to the inner layer 410.

[0056] When the first pipe 100 is provided with a metal mesh 130, the metal mesh 130 is connected to the inner layer 410 of the first pipe 100, so that the electrode 310 is positively charged relative to the metal mesh 130.

[0057] In some embodiments, there are multiple first pipes 100, and each of the multiple first pipes 100 is connected to a second pipe 400. Each first pipe 100 is provided with an ion generator 200 and an electrode 310.

[0058] The outlet ends 120 of multiple first pipes 100 are all connected to the same end of the second pipe 400. The arrangement of the ion generator 200 and the electrode 310 on each first pipe 100 is basically the same.

[0059] The working principle of the gas guiding device with electrode 310 provided in the embodiments of this application is as follows: During use, gas containing carbon polymer can enter through the inlet end 110 of multiple first pipes 100. The ion generator 200 on each first pipe 100 generates negative ions and electrons, making the carbon polymer in the gas negatively charged. Since the electrode 310 near the outlet end 120 is positively charged relative to the first pipe 100, the electric field formed between the electrode 310 and the inner wall of the first pipe 100, as well as the suction pump 5, create a positive charge. Under the suction action of 00, the carbon-containing polymer accelerates towards the outlet 120 of the first pipe 100. When the carbon-containing polymer passes the electrode 310, the negatively charged polymer particles come into contact with the positively charged electrode 310, and the charge is neutralized and becomes neutral. Then it is discharged from the outlet 120 into the second pipe 400, so it is not easy to accumulate on the inner wall of the first pipe 100 and the connection between the first pipe 100 and the second pipe 400. Therefore, there is no need to frequently replace the pipes, saving time and effort, improving equipment efficiency, and making it less likely to cause contamination inside the cavity.

[0060] Please see Figure 3 The following description uses an example where the guide 300 includes magnetic poles and the polymer is a carbon-containing polymer. In some other optional embodiments, the guide 300 includes magnetic poles, including a first magnetic pole 321 and a second magnetic pole 322. The first magnetic pole 321 and the second magnetic pole 322 have opposite magnetic properties. The first magnetic pole 321 and the second magnetic pole 322 are disposed oppositely on the inner wall of the first pipe 100 and are both close to the outlet end 120. The first magnetic pole 321 and the second magnetic pole 322 are the S pole and the N pole, respectively. The S pole is disposed on the side of the first pipe 100 away from the second pipe 400, and the N pole is disposed on the side of the first pipe 100 close to the second pipe 400, such as... Figure 3 The deflection direction A of the polymer particles is shown.

[0061] It should be noted that a magnetic field is formed between the S pole and the N pole. Since both the S pole and the N pole are close to the outlet 120 of the first pipe 100, and the N pole is closer to the second pipe 400 than the S pole, the magnetic field formed between the S pole and the N pole can deflect the carbon-containing polymer toward one side of the second pipe 400.

[0062] Under the influence of the magnetic field formed between the S and N poles and the suction action of the air pump 500, the charged polymer accelerates towards the outlet 120 of the first pipe 100. When the charged polymer passes between the S and N poles, it will deflect towards one side of the second pipe 400 and enter the second pipe 400, thus avoiding accumulation on the inner wall of the first pipe 100 and the connection between the first pipe 100 and the second pipe 400.

[0063] In some embodiments, there are multiple first pipes 100, all of which are connected to a second pipe 400. Each first pipe 100 is provided with an ion generator 200 and a magnetic pole. The outlet ends 120 of the multiple first pipes 100 are all connected to the same end of the second pipe 400. The arrangement of the ion generator 200 and the magnetic pole on each first pipe 100 is basically the same.

[0064] The working principle of the gas guiding device with magnetic poles provided in the embodiments of this application is as follows: During the use of the gas guiding device, the gas containing carbon polymer enters through the inlet 110 of the first pipe 100. The ion generator 200 generates negative ions and electrons, making the carbon polymer in the gas negatively charged. Under the suction action of the pump 500, the charged polymer will accelerate towards the outlet 120 of the first pipe 100. When the charged polymer passes between the S pole and the N pole, the charged polymer will deflect towards one side of the second pipe 400 under the action of the magnetic field between the S pole and the N pole, thereby entering the second pipe 400 and not easily accumulating on the inner wall of the first pipe 100 and the connection between the first pipe 100 and the second pipe 400.

[0065] The technical effects of the gas guiding device provided in the embodiments of this application include at least the following: In the electrode scheme, the electric field formed by the electrode 310 and the inner wall of the first pipe 100 enables the carbon-containing polymer to accelerate towards the outlet 120 of the first pipe 100; the symmetrical arrangement of the electrodes 310 facilitates the symmetrical distribution of the electric field within the first pipe 100, avoiding chaotic movement trajectories of the charged polymer, and the symmetrical arrangement of the electrodes 310 weakens the electric field at the center of the first pipe 100, so that when the charged polymer moves between the two electrodes 310, it experiences a smaller electric field force, which facilitates the polymer's movement along the flow direction and smooth discharge from the outlet 120 of the first pipe 100; the needle-shaped electrode design can minimize the accumulation of carbon-containing polymer on the surface of the electrode 310; through the first pipe 100 A metal mesh 130 is provided at the air inlet 110, which makes the electric field more aligned with the gas flow direction, which is more conducive to accelerating the flow of carbon-containing polymer to the air outlet 120 of the first pipe 100. Since the accumulation of carbon-containing polymer on the inner wall of the pipe and at the corners of the pipe is reduced, frequent pipe replacement is not required, saving time and effort, improving equipment efficiency, and making it less likely to cause contamination inside the cavity. In the magnetic pole scheme, under the suction action of the air pump 500, the charged polymer will accelerate towards the air outlet 120 of the first pipe 100. When the charged polymer passes between the S pole and the N pole, the charged polymer will deflect towards one side of the second pipe 400 under the action of the magnetic field between the S pole and the N pole, so that it is not easy to accumulate on the inner wall of the first pipe 100 and at the connection between the first pipe 100 and the second pipe 400.

[0066] Embodiments of this application also provide a semiconductor device including the aforementioned gas guiding device. This semiconductor device, by integrating the gas guiding device, effectively suppresses the adhesion and accumulation of polymers on the inner wall of a pipe (including areas prone to accumulation such as pipe joints). Specifically, the semiconductor device uses an ion generator 200 to charge polymer particles near the inlet end, and then constructs a directional electrostatic field between an electrode 310 positioned near the outlet end and the inner wall of the first pipe 100, wherein the electrode 310 has the opposite polarity to the polymer particles. On the one hand, this causes the charged polymer to accelerate towards the outlet end along the airflow direction; on the other hand, it causes the inner wall of the pipe to present a potential with the same polarity as the polymer particles, generating a like-pair repulsion effect, significantly weakening the electrostatic adsorption force of the polymer on the pipe wall. Simultaneously, the symmetrically arranged needle-shaped electrodes 310 not only optimize the uniformity of the electric field distribution and prevent particle trajectory dispersion, but also reduce the probability of polymer residence on their surface due to their pointed structure; the metal mesh 130 at the inlet end and the insulating component 140 ensure the reliability of the electric field effect. Alternatively, the magnetic field formed between the S and N poles can be used to guide the deflection of charged polymers, reducing their accumulation on the inner wall of the pipe. In summary, this semiconductor device integrating a gas guiding mechanism significantly extends the maintenance-free cycle of the pipeline, reduces equipment downtime and the risk of cavity contamination caused by frequent disassembly and cleaning, and improves the operational stability and overall production efficiency of semiconductor equipment such as CVD systems.

[0067] In summary, the embodiments of this application provide a gas guiding device and a semiconductor device. During use, the gas containing polymer enters through the inlet 110 of the first pipe 100. The polymer in the gas is charged by the ion generator 200 and then guided by the guide 300 to move towards the outlet 120 of the first pipe 100. This prevents the polymer from accumulating on the inner wall of the first pipe 100, thus eliminating the need for frequent pipe replacements, saving time and effort, improving equipment efficiency, and reducing the risk of internal contamination.

[0068] The guide 300 may include an electrode 310 or a magnetic pole. Under the action of the electric field formed between the electrode 310 and the inner wall of the first pipe 100 and the suction action of the air pump 500, or under the action of the magnetic field formed by the magnetic pole and the suction action of the air pump 500, the gas guiding device can guide the polymer to move towards the outlet end 120 of the first pipe 100, and then discharge it from the outlet end 120 into the second pipe 400. This prevents the polymer from accumulating on the inner wall of the first pipe 100 and at the connection between the first pipe 100 and the second pipe 400, thus eliminating the need for frequent pipe replacements, saving time and effort, improving equipment efficiency, and reducing the risk of internal contamination.

[0069] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A gas guiding device, characterized in that, include: The first pipe (100) has an air inlet (110) and an air outlet (120). An ion generator (200) is disposed on the outer wall of the first pipe (100) and near the air inlet (110) for charging polymers in the gas introduced into the first pipe (100) through the air inlet (110); and, A guide (300) is disposed on the inner wall of the first pipe (100) and near the outlet (120) for guiding the charged polymer toward the outlet (120).

2. The gas guiding device according to claim 1, characterized in that, The guide (300) includes an electrode (310) with the opposite polarity to the first pipe (100). The electrode (310) is disposed on the inner side wall of the first pipe (100) and close to the outlet end (120).

3. The gas guiding device according to claim 2, characterized in that, The number of electrodes (310) is two, and the two electrodes (310) are symmetrically arranged on the inner sidewall of the first pipe (100).

4. The gas guiding device according to claim 2, characterized in that, The electrode (310) is a needle-shaped electrode, with the tip of the needle-shaped electrode facing the inside of the first channel (100).

5. The gas guiding device according to claim 2, characterized in that, The first pipe (100) is provided with a metal wire mesh (130) at the air inlet end (110).

6. The gas guiding device according to claim 2, characterized in that, An insulating element (140) is provided on the first pipe (100), and the electrode (310) is disposed on the insulating element (140).

7. The gas guiding device according to claim 6, characterized in that, The insulating component (140) is a rubber ring.

8. The gas guiding device according to claim 2, characterized in that, The gas guiding device further includes a second pipe (400) connected to the first pipe (100), the central axis of the first pipe (100) and the central axis of the second pipe (400) are set at an angle, and a vacuum pump (500) is provided at the end of the second pipe (400) away from the first pipe (100).

9. The gas guiding device according to claim 8, characterized in that, Both the first conduit (100) and the second conduit (400) include an inner layer (410), an outer layer (420), and an insulating layer (430) disposed between the inner layer (410) and the outer layer (420). The gas guiding device also includes a power supply (600), the negative terminal of which is electrically connected to the inner layer (410), the positive terminal of which is electrically connected to the electrode (310), and the outer layer (420) is grounded.

10. The gas guiding device according to claim 1, characterized in that, The guide (300) includes a first magnetic pole (321) and a second magnetic pole (322). The first magnetic pole (321) and the second magnetic pole (322) have opposite magnetic properties. The first magnetic pole (321) and the second magnetic pole (322) are disposed oppositely on the inner wall of the first pipe (100) and are both close to the air outlet (120).

11. The gas guiding device according to claim 10, characterized in that, The gas guiding device further includes a second pipe (400) connected to the first pipe (100), the central axis of the first pipe (100) and the central axis of the second pipe (400) are set at an angle, and a vacuum pump (500) is provided at one end of the second pipe (400) away from the first pipe (100); the magnetic field formed between the first magnetic pole (321) and the second magnetic pole (322) can cause the polymer to deflect toward one side of the second pipe (400).

12. The gas guiding device according to claim 8, 9 or 11, characterized in that, There are multiple first pipes (100), and each of the multiple first pipes (100) is connected to the second pipe (400). Each first pipe (100) is provided with the ion generator (200) and the guide (300).

13. A semiconductor device, characterized in that, Includes the gas guiding device according to any one of claims 1-12.

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