Scribing saw machine vision instrument support

Abstract

The utility model discloses a scribing machine vision instrument support which comprises a main body installation support, a lens fixing support, a stand column, a camera, a lens, a connection fixing support and an annular light source, the main body installation support is provided with the lens fixing support, the lens fixing support is provided with the stand column, the stand column is provided with the camera and the lens, and the stand column is connected with the connection fixing support. The connection fixing support connects the annular light source, the column and the lens to form a lens system. In terms of structure, the support is generally designed to be adjustable, enough flexibility is guaranteed, and the lens is finely adjusted to be accurately aligned with a cutting head of the scribing machine. The annular light source can provide uniform and stable illumination for the lens so as to ensure that a clear image can be obtained under any working condition. The connecting and fixing support is further provided with a lens blowing self-cleaning structure, dirt and dust on the surface of the lens are blown away through airflow, and therefore cleanliness and definition of the lens are kept.

Description

Technical Field

[0001] The utility model relates to the field of dicing machines, in particular to a machine vision instrument bracket of a dicing machine. Background Art

[0002] Wafer dicing machine, also known as dicing machine for short, is a semiconductor device that is widely used in the processing of semiconductor wafers to cut large wafers into small chips. These chips are key components for manufacturing various electronic products, such as mobile phones, computer chips, etc.

[0003] During the manufacturing process, the wafer dicing machine uses a high-speed rotating diamond blade to cut and process the chips on the wafer. The diamond blade has extremely high hardness and precision, which can ensure the quality and efficiency of cutting. In the cutting process, the machine vision system plays a very important role. It needs to perform a series of alignment operations on the workpiece to ensure that the dicing machine can accurately cut according to the cutting path of the workpiece.

[0004] To achieve this goal, the wafer dicing machine needs to be equipped with a machine vision system consisting of a set of low-magnification and high-magnification lenses and corresponding cameras. The low-magnification lens is used to observe the entire wafer and determine the position and direction of the cutting path; the high-magnification lens is used to perform fine alignment operations on each chip to ensure that each chip can be cut out accurately.

[0005] Existing visual instrument brackets usually only serve to fix the lens and camera, and cannot meet the needs of precise adjustment in scenarios that require high-precision visual positioning. At the same time, the dicing machine will generate a large amount of water mist during operation, which will adhere to the lens and affect imaging. Utility Model Content

[0006] In order to solve the above problems, the utility model provides a machine vision instrument bracket for a dicing machine which is precisely adjusted, convenient and practical.

[0007] A machine vision instrument bracket for a dicing machine in the utility model comprises a main body mounting bracket, a lens fixing bracket, a column, a camera, a lens, a connecting fixing bracket and an annular light source, wherein the main body mounting bracket is provided with a lens fixing bracket, the lens fixing bracket is provided with a column, the column is provided with a camera and a lens, the column is connected to the connecting fixing bracket, the connecting fixing bracket is connected to the annular light source, and the column and the lens constitute a lens system.

[0008] In the above solution, the lens fixing bracket is composed of two brackets, front and rear, and an adjustment mechanism is provided inside the lens fixing bracket.

[0009] In the above scheme, the adjustment mechanism includes a semicircular groove and an adjusting cylindrical pin. A semicircular groove is opened in the middle of the two brackets. The two brackets can accommodate the passage of the column after being combined. The lens fixing bracket is connected to the main mounting bracket through the adjusting cylindrical pin.

[0010] In the above scheme, a lens air blowing self-cleaning mechanism is provided in the column, and the lens air blowing self-cleaning mechanism includes a nitrogen inlet and a nitrogen pipeline.

[0011] In the above solution, the lens is a low-magnification lens.

[0012] In the above solution, the lens is a high-magnification lens.

[0013] The advantages and beneficial effects of the utility model are as follows: the utility model provides a precisely adjustable, convenient and practical machine vision instrument bracket for a wafer dicing machine. Structurally, the bracket is usually designed to be adjustable to ensure that it has sufficient flexibility to fine-tune the lens so that it is accurately aligned with the cutting head of the wafer dicing machine. The ring light source can provide uniform and stable illumination for the lens to ensure a clear image under any working conditions. The connecting and fixing bracket is also equipped with a lens air blowing self-cleaning structure, which uses airflow to blow away dirt and dust on the surface of the lens, thereby maintaining its cleanliness and clarity. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0015] Figure 1 It is a structural schematic diagram of the utility model;

[0016] Figure 2 This is a schematic diagram of the structure of the air-blowing self-cleaning mechanism of the lens.

[0017] In the figure: 1. Main body mounting bracket 2. Lens fixing bracket 3. Column 4. Camera

[0018] 5. Lens 6. Connecting bracket 7. Ring light source 8. Semicircular groove

[0019] 9. Adjustment cylindrical pin 10. Nitrogen inlet 11. Nitrogen pipeline DETAILED DESCRIPTION

[0020] The following is a further description of the specific implementation of the present invention in conjunction with the accompanying drawings and embodiments. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention.

[0021] like Figure 1 As shown, the utility model is a dicing machine machine vision instrument bracket, which is mainly used for fixing the machine vision lens and providing necessary installation and adjustment functions for it, including a main mounting bracket 1, a lens fixing bracket 2, a column 3, a camera 4, a lens 5, a connecting fixing bracket 6 and a ring light source 7. The main mounting bracket 1 is provided with a lens fixing bracket 2, the lens fixing bracket 2 is provided with a column 3, the column 3 is provided with a camera 4 and a lens 5, the column 3 is connected to the connecting fixing bracket 6, the connecting fixing bracket 6 is connected to the ring light source 7, and the column 3 and the lens 5 constitute a lens system.

[0022] The lens fixing bracket 2 is composed of two brackets in the front and rear, and an adjustment mechanism is provided in the lens fixing bracket. The adjustment mechanism includes a semicircular groove 8 and an adjustment cylindrical pin 9. A semicircular groove 8 is opened in the middle of the two brackets. The two brackets can accommodate the passage of the column 3 after being combined. The lens fixing bracket 2 is connected to the main mounting bracket 1 through the adjustment cylindrical pin 9. There is a set screw in the horizontal direction on the front of the bracket, which can fix the lens and rotate the lens axially. There is an adjustment cylindrical pin 9 connected to the contact position of the back of the bracket and the main mounting bracket. The horizontal angle of the lens can be adjusted before the screw is tightened. The best shooting angle of the lens can be adjusted through two adjustment mechanisms.

[0023] Structurally, the bracket is usually of adjustable design to ensure that it is flexible enough to fine-tune the lens so that it is accurately aligned with the cutting head of the dicing machine.

[0024] An annular light source 7 and a connecting and fixing bracket 6 are installed below the lens. The main function of the annular light source 7 is to provide uniform and stable illumination for the lens to ensure that a clear image can be obtained under any working conditions. The connecting and fixing bracket 6 plays the role of connecting the lens and the annular light source 7.

[0025] like Figure 2 As shown, a lens air blowing self-cleaning mechanism is provided in the column, and the lens air blowing self-cleaning mechanism includes a nitrogen inlet 10 and a nitrogen pipeline 11. The lens is a low-power lens or a high-power lens. This structure uses airflow to blow away dirt and dust on the surface of the lens, thereby maintaining its cleanliness and clarity. At the same time, the fixed bracket is also provided with a quick-plug connector and an opening for lens air blowing, and a quick-plug connector and an air jet tube for workpiece air blowing. The lens air blowing is connected to the air source through the quick-plug connector, and nitrogen is sprayed toward the inner wall of the opening through the opening inside the fixed bracket to achieve the purpose of cleaning the lens. The workpiece air blowing is connected to the air source through the quick-plug connector, and the workpiece surface below the lens is blown and cleaned through the air jet tube.

[0026] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A machine vision instrument support for a dicing machine, characterized in that: It includes a main body mounting bracket, a lens fixing bracket, a column, a camera, a lens, a connecting fixing bracket and an annular light source. The main body mounting bracket is provided with a lens fixing bracket, the lens fixing bracket is provided with a column, the column is provided with a camera and a lens, the column is connected to the connecting fixing bracket, the connecting fixing bracket is connected to the annular light source, and the column and the lens constitute a lens system.

2. A dicing machine machine vision instrument bracket according to claim 1, characterized in that: The lens fixing bracket is composed of two front and rear brackets, and an adjusting mechanism is arranged inside the lens fixing bracket.

3. A dicing machine machine vision instrument support according to claim 2, characterized in that: The adjustment mechanism includes a semicircular groove and an adjusting cylindrical pin. A semicircular groove is opened in the middle of the two brackets. The two brackets can accommodate the passage of a column after being combined. The lens fixing bracket is connected to the main body mounting bracket through the adjusting cylindrical pin.

4. A dicing machine machine vision instrument support according to claim 1, characterized in that: A lens air blowing self-cleaning mechanism is arranged in the column, and the lens air blowing self-cleaning mechanism comprises a nitrogen air inlet and a nitrogen pipeline.

5. A dicing machine machine vision instrument support according to claim 1, characterized in that: The lens is a low-magnification lens.

6. A dicing machine machine vision instrument support according to claim 1, characterized in that: The lens is a high-power lens.

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