Suspension type wafer carrier for semiconductor wafer production

Abstract

The utility model discloses a wafer carrier for suspension type semiconductor wafer production, which comprises a first fixing seat and a second fixing seat, one side of the first fixing seat is provided with the second fixing seat, and one side of the first fixing seat and one side of the second fixing seat are provided with placing grooves. And first movable grooves are formed in the top ends of the first fixed seat and the second fixed seat. According to the wafer carrier for suspension type semiconductor wafer production, by arranging parts such as a first connecting seat and screwing a handle, an adjusting shaft can be driven to rotate, when the adjusting shaft rotates, movable blocks connected with the outer portion in a sleeving mode can move oppositely, and meanwhile a first sliding block and a second sliding block on one side can be in linkage to slide in a sliding groove of a second fixing seat; therefore, the distance between the first fixing seat and the second fixing seat can be adjusted, the placement width can be adjusted according to the diameter of the wafer, the wafer placement device is more stable and applicable during placement, and the problem that the placement width is inconvenient to adjust according to the diameter of the wafer is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer carriers, in particular to a wafer carrier for producing suspended semiconductor wafers. Background Art

[0002] Semiconductor wafers are basic materials in the semiconductor manufacturing process. They are mainly round silicon wafers made of high-purity polycrystalline silicon. The original form of this material is silicon crystal. Semiconductor wafers are the basis for manufacturing chips and have the function of carrying and connecting electronic components. During the production process, a carrier is needed to carry and place the wafer.

[0003] According to the design of the existing wafer carrier for suspended semiconductor wafer production, the width of the carrier cannot be adjusted due to the different diameters of the wafers, which makes it inconvenient to adjust the width when placing according to the diameter of the wafer, and is not flexible enough.

[0004] Now, a novel suspended wafer carrier for producing semiconductor wafers is proposed to solve the above-mentioned problem. Utility Model Content

[0005] The utility model aims to provide a cleaning device for sewage treatment pipelines to solve the problem in the above background technology that it is inconvenient to adjust the width of the wafer according to the diameter of the wafer when placing the wafer.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: A wafer carrier for suspended semiconductor wafer production comprises a first fixed seat and a second fixed seat, a second fixed seat is arranged on one side of the first fixed seat, a placement groove is arranged on one side of the first fixed seat and the second fixed seat, a first movable groove is arranged inside the top of the first fixed seat and the second fixed seat, a slide groove is arranged at the rear end of one side of the first fixed seat, a first slider and a second slider are arranged inside the slide groove, a second reserved groove is arranged at the rear end of one side of the first fixed seat, the top of the second reserved groove is fixedly connected with the second movable groove, the first reserved groove is arranged at the bottom end of the first fixed seat, an adjustment shaft is arranged longitudinally through the inside of the first reserved groove, a handle is fixedly connected to the bottom end of the adjustment shaft, a movable block is sleeved on the outside of the adjustment shaft, and the first connecting seat and the second connecting seat are respectively fixedly connected on one side of the movable block, a second connecting rod is movably hinged between the first connecting seats, and a first connecting rod is movably hinged between the second connecting seats.

[0007] Preferably, the first connecting rod and the second connecting rod are movably hinged, one side of the first connecting rod and the second slider are movably hinged, and one side of the second connecting rod and the first slider are movably hinged.

[0008] Preferably, at least ten groups of placement grooves are provided, and the placement grooves are evenly spaced and distributed inside one side of the first fixing seat and the second fixing seat, and the top end of the first reserved groove is rotatably embedded in the second movable groove.

[0009] Preferably, the first sliding block and the second sliding block are embedded in the sliding groove and can slide, and the outside of the adjusting shaft is provided with opposite external threads.

[0010] Preferably, a hinge seat is fixedly installed at the front end of the second fixing seat, a movable buckle is movably hinged between the hinge seats, a card slot is arranged inside the movable buckle, and a fixing block is fixedly connected to the front end of the first fixing seat.

[0011] Preferably, the positions of the movable buckles and the fixed blocks are consistent, and three groups of the movable buckles and the fixed blocks are respectively provided.

[0012] Preferably, a connecting shaft is provided inside the first movable groove, and bumps are fixedly connected to the top ends of both sides inside the first movable groove, and the connecting shaft is retractable inside the first movable groove.

[0013] Preferably, the top end of the connecting shaft is fixedly connected to a fixing rod, and the bottom end of the connecting shaft is fixedly connected to a limiting block.

[0014] Compared with the prior art, the utility model has the following beneficial effects: the wafer carrier for the production of suspended semiconductor wafers not only realizes the convenience of adjusting the width of the wafer when placed according to the diameter of the wafer, realizes the convenience of storage and placement when not in use, but also facilitates hanging;

[0015] (1) A first connecting seat, a second connecting seat, a first connecting rod, a first reserved groove, an adjusting shaft, a handle, a second connecting rod, a first slider, a sliding groove, a second fixed seat, and a second slider are provided. By turning the handle, the adjusting shaft can be driven to rotate. When the adjusting shaft rotates, the movable blocks sleeved on the outside will move toward each other, and at the same time, the first slider and the second slider on one side can be linked to slide inside the sliding groove of the second fixed seat, so that the distance between the first fixed seat and the second fixed seat can be adjusted. In this way, the placement width can be adjusted according to the diameter of the wafer, which is more stable and applicable during placement;

[0016] (2) By providing a placement slot, a fixed block, a hinged seat, a movable buckle, and a slot, when not in use, the first fixed seat and the second fixed seat can be combined through the movable hinge relationship of the two sets of connecting rods, and then the movable buckle is clamped on the outside of the fixed block, so that it is easy to store and reduce the occupied space;

[0017] (3) By providing the first movable groove, the connecting shaft, the fixing rod, the protrusion and the limit block, the fixing rod can be lifted upward when hanging, and the connecting shaft will move in the first movable groove. The protrusion and the limit block can prevent the fixing rod from falling off when being pulled out, and the fixing rod can be retracted back to its original position when not in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a front view cross-sectional structural schematic diagram of the utility model;

[0019] Figure 2 This is a side structural diagram of the connection method between the movable block and the adjustment shaft of the utility model;

[0020] Figure 3 It is a side view structural diagram of the connection mode between the connecting shaft and the fixing rod of the utility model;

[0021] Figure 4 It is a front view structural schematic diagram of the second fixing seat and the movable buckle connection method of the utility model.

[0022] In the figure: 1. first fixed seat; 2. placement groove; 3. fixed block; 4. first connecting seat; 5. second connecting seat; 6. first connecting rod; 7. first reserved groove; 8. adjustment shaft; 9. handle; 10. second connecting rod; 11. first slider; 12. slide groove; 13. second fixed seat; 14. hinge seat; 15. movable buckle; 16. slot; 17. second slider; 18. first movable groove; 19. connecting shaft; 20. fixed rod; 21. protrusion; 22. limit block; 23. second reserved groove; 24. second movable groove; 25. movable block. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Example 1: Please refer to Figure 1-4, a wafer carrier for suspended semiconductor wafer production, comprising a first fixed seat 1 and a second fixed seat 13, a second fixed seat 13 is arranged on one side of the first fixed seat 1, a placement groove 2 is arranged on one side of the first fixed seat 1 and the second fixed seat 13, a first movable groove 18 is arranged inside the top of the first fixed seat 1 and the second fixed seat 13, a slide groove 12 is arranged at the rear end of one side of the first fixed seat 1, a first slider 11 and a second slider 17 are arranged inside the slide groove 12, a second reserved groove 23 is arranged at the rear end of one side of the first fixed seat 1, a second movable groove 24 is fixedly connected to the top of the second reserved groove 23, a first reserved groove 7 is arranged at the bottom end of the first fixed seat 1, an adjustment shaft 8 is longitudinally penetrated inside the first reserved groove 7, a handle 9 is fixedly connected to the bottom end of the adjustment shaft 8, a movable block 25 is sleeved on the outside of the adjustment shaft 8, a first connecting seat 4 and a second connecting seat 5 are respectively fixedly connected on one side of the movable block 25, a second connecting rod 10 is movably hinged between the first connecting seats 4, and a first connecting rod 6 is movably hinged between the second connecting seats 5;

[0025] The first connecting rod 6 and the second connecting rod 10 are movably hinged, one side of the first connecting rod 6 and the second slider 17 are movably hinged, and one side of the second connecting rod 10 and the first slider 11 are movably hinged;

[0026] At least ten groups of placement grooves 2 are provided, and the placement grooves 2 are evenly spaced and distributed inside one side of the first fixing seat 1 and the second fixing seat 13, and the top end of the first reserved groove 7 is embedded in the second movable groove 24 and can rotate;

[0027] The first slider 11 and the second slider 17 are slidably embedded in the slide groove 12, and the outer side of the adjustment shaft 8 is provided with opposite external threads;

[0028] Specifically, Figure 1 and Figure 2 As shown, by turning the handle 9, the adjusting shaft 8 can be driven to rotate. When the adjusting shaft 8 rotates, the externally sleeved movable block 25 will move toward each other, and at the same time, the first slider 11 and the second slider 17 on one side can be linked to slide inside the slide groove 12 of the second fixed seat 13, so that the distance between the first fixed seat 1 and the second fixed seat 13 can be adjusted. In this way, the placement width can be adjusted according to the diameter of the wafer, which is more stable and applicable during placement.

[0029] Embodiment 2: A hinge seat 14 is fixedly installed at the front end of the second fixing seat 13, a movable buckle 15 is movably hinged between the hinge seats 14, a card slot 16 is arranged inside the movable buckle 15, and a fixing block 3 is fixedly connected to the front end of the first fixing seat 1;

[0030] The positions of the movable buckles 15 and the fixed blocks 3 are consistent, and the movable buckles 15 and the fixed blocks 3 are respectively provided with three groups;

[0031] Specifically, Figure 1and Figure 4 As shown, when not in use, the first fixing seat 1 and the second fixing seat 13 can be combined through the movable hinge relationship of the two sets of connecting rods, and then the movable buckle 15 can be clamped on the outside of the fixing block 3, so as to facilitate storage and reduce occupied space.

[0032] Embodiment 3: A connecting shaft 19 is disposed inside the first movable groove 18, and protrusions 21 are fixedly connected to the top ends of both sides inside the first movable groove 18, and the connecting shaft 19 is retractable inside the first movable groove 18;

[0033] The top end of the connecting shaft 19 is fixedly connected to a fixing rod 20, and the bottom end of the connecting shaft 19 is fixedly connected to a limiting block 22;

[0034] Specifically, Figure 1 and Figure 3 As shown, when hanging, the fixing rod 20 can be lifted upward, and the connecting shaft 19 will move in the first movable groove 18. Because the protrusion 21 and the limit block 22 are provided, it can be prevented from falling off when the fixing rod 20 is pulled out, and it can be retracted back to its original position when not in use.

[0035] Working principle: When the utility model is in use, first, when hanging, the fixing rod 20 can be lifted upward, and at this time the connecting shaft 19 will move in the first movable groove 18. Because the protrusion 21 and the limit block 22 are provided, it can prevent the fixing rod 20 from falling off when being pulled out, and it can be retracted back to its original position when not in use. Afterwards, the handle 9 can be screwed to drive the adjusting shaft 8 to rotate. When the adjusting shaft 8 rotates, the movable block 25 sleeved on the outside will move towards each other, and at the same time, the first slider 11 and the second slider 17 on one side can be linked to slide inside the slide groove 12 of the second fixing seat 13, so that the distance between the first fixing seat 1 and the second fixing seat 13 can be adjusted. In this way, the placement width can be adjusted according to the diameter of the wafer, which is more stable and applicable when placed. Finally, when not in use, the first fixing seat 1 and the second fixing seat 13 can be merged through the relationship between the movable hinges of the two sets of connecting rods, and then the movable buckle 15 is clamped on the outside of the fixing block 3, so that it is easy to store and reduce the occupied space.

[0036] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A wafer carrier for suspended semiconductor wafer production, comprising a first fixing seat (1) and a second fixing seat (13), characterized in that: A second fixing seat (13) is arranged on one side of the first fixing seat (1), a placement groove (2) is arranged on one side of the first fixing seat (1) and the second fixing seat (13), a first movable groove (18) is arranged inside the top of the first fixing seat (1) and the second fixing seat (13), a sliding groove (12) is arranged at the rear end of one side of the first fixing seat (1), a first sliding block (11) and a second sliding block (17) are arranged inside the sliding groove (12), a second reserved groove (23) is arranged at the rear end of one side of the first fixing seat (1), and a top fixed groove (23) is arranged inside the second reserved groove (23). A second movable groove (24) is fixedly connected to the first fixed seat (1), a first reserved groove (7) is arranged at the bottom end of the first reserved groove (7), an adjusting shaft (8) is longitudinally penetrated inside the first reserved groove (7), a handle (9) is fixedly connected to the bottom end of the adjusting shaft (8), a movable block (25) is sleeved on the outside of the adjusting shaft (8), one side of the movable block (25) is respectively fixedly connected to the first connecting seat (4) and the second connecting seat (5), a second connecting rod (10) is movably hinged between the first connecting seats (4), and a first connecting rod (6) is movably hinged between the second connecting seats (5).

2. The wafer carrier for suspended semiconductor wafer production according to claim 1, characterized in that: The first connecting rod (6) and the second connecting rod (10) are movably hinged, one side of the first connecting rod (6) and the second slider (17) are movably hinged, and one side of the second connecting rod (10) and the first slider (11) are movably hinged.

3. The wafer carrier for suspended semiconductor wafer production according to claim 1, characterized in that: At least ten groups of placement grooves (2) are provided. The placement grooves (2) are evenly spaced and distributed inside one side of the first fixed seat (1) and the second fixed seat (13). The top end of the first reserved groove (7) is rotatably embedded in the second movable groove (24).

4. The wafer carrier for suspended semiconductor wafer production according to claim 1, characterized in that: The first sliding block (11) and the second sliding block (17) are embedded in the sliding groove (12) and can slide, and the outside of the adjusting shaft (8) is provided with opposite external threads.

5. The wafer carrier for suspended semiconductor wafer production according to claim 1, characterized in that: A hinge seat (14) is fixedly mounted at the front end of the second fixing seat (13); a movable buckle (15) is movably hinged between the hinge seats (14); a clamping slot (16) is arranged inside the movable buckle (15); and a fixing block (3) is fixedly connected to the front end of the first fixing seat (1).

6. The wafer carrier for suspended semiconductor wafer production according to claim 5, characterized in that: The positions of the movable buckles (15) and the fixed blocks (3) are consistent with each other, and three groups of the movable buckles (15) and the fixed blocks (3) are respectively provided.

7. The wafer carrier for suspended semiconductor wafer production according to claim 1, characterized in that: A connecting shaft (19) is arranged inside the first movable groove (18), and protrusions (21) are fixedly connected to the top ends of both sides inside the first movable groove (18), and the connecting shaft (19) is retractable inside the first movable groove (18).

8. The wafer carrier for suspended semiconductor wafer production according to claim 7, characterized in that: The top end of the connecting shaft (19) is fixedly connected to a fixing rod (20), and the bottom end of the connecting shaft (19) is fixedly connected to a limiting block (22).

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