Casing pipe of carrier, carrier and coating equipment

Abstract

The utility model relates to a carrier sleeve, a carrier and coating equipment, the carrier sleeve comprises an insulating cylinder, the outer wall portion of the insulating cylinder is provided with a groove structure in the circumferential direction, the axial section of the groove structure comprises at least two groove sections, and the groove sections are arranged side by side in the radial direction of the insulating cylinder and are sequentially communicated end to end. Through the arrangement of the groove structure, the probability that a continuous polycrystalline silicon layer is formed on the surface of the sleeve along a creepage path can be effectively reduced, the situation of short circuit between two adjacent boat pieces is further reduced, the service life of the sleeve and the boat pieces is prolonged, and the product yield of the substrate is improved.

Description

Technical Field

[0001] The present application belongs to the field of photovoltaic cell technology, and specifically relates to a sleeve of a carrier, a carrier, and a coating device. Background Art

[0002] The carrier is used as a carrier when PECVD (Plasma Enhanced Chemical Vapor Deposition) is used to coat the solar substrate. During the coating process, the carrier with the uncoated substrate is sent to the coating equipment to deposit amorphous silicon on the substrate using the PECVD process to form a film layer.

[0003] The carrier includes a sleeve and a boat, wherein the boat is used to place the substrate, and a sleeve is sandwiched between two adjacent boats. The sleeve can provide physical support for the boats, and the sleeve insulates and isolates two boats connected to different electrodes, so that an electric field is formed between the two boats, thereby completing the deposition of the coating on the substrate, such as amorphous silicon.

[0004] However, during the deposition of amorphous silicon, amorphous silicon will also be deposited on the outer wall of the sleeve located in the electric field. As the number of times the sleeve is used increases and the usage time increases, the amorphous silicon deposited on the surface of the sleeve will become thicker and thicker. As a semiconductor, the conductivity of amorphous silicon also increases with the increase in thickness, causing the sleeve that originally served as an insulator to isolate the boat slices to be transformed into a conductor, connecting two boat slices that serve as different electrodes, causing a short circuit between adjacent boat slices, causing damage to the boat slice, and affecting the deposition of the amorphous silicon layer on the substrate. Utility Model Content

[0005] The purpose of the present application is to provide a carrier sleeve, a carrier, and a coating device. Through the setting of the groove structure, the probability of forming a continuous polysilicon layer along the creepage path on the surface of the sleeve can be effectively reduced, thereby reducing the short circuit between two adjacent boat pieces, thereby increasing the service life of the sleeve and the boat piece, and improving the product yield of the substrate.

[0006] In order to solve the above technical problems, the present application provides a sleeve of a carrier, including an insulating cylinder, an outer wall portion of the insulating cylinder is provided with a groove structure along the circumferential direction, the axial cross-section of the groove structure includes at least two groove segments, and each of the groove segments is arranged in parallel along the radial direction of the insulating cylinder and connected end to end in sequence.

[0007] Optionally, the insulating cylinder is an integrally formed structure.

[0008] Optionally, the insulating cylinder includes a first cylinder portion and a second cylinder portion, the outer wall portion of the first cylinder portion is provided with a first protrusion, the outer wall portion of the second cylinder portion is provided with a second protrusion and a second groove, and when the first cylinder portion and the second cylinder portion are in an installed state, the first protrusion is loosely fitted in the second groove, and the gap between the side wall of the first protrusion and the groove wall of the second groove can form the groove section.

[0009] Optionally, the outer wall of the first barrel portion is further provided with a first groove, and the first groove is located on the inner side of the first protrusion. When the first barrel portion and the second barrel portion are in the installed state, the groove section formed between the inner side wall of the first protrusion and the inner groove wall of the second groove is connected to the first groove.

[0010] Optionally, the outer wall of the first barrel portion is further provided with a third groove, and the third groove is located on the outside of the first protrusion. When the first barrel portion and the second barrel portion are in the installed state, the second protrusion is loosely fitted in the third groove, and the gap between the side wall of the second protrusion and the groove wall of the third groove can form the groove section.

[0011] Optionally, the depth directions of the first groove and the third groove are parallel to the axial direction of the insulating cylinder.

[0012] Optionally, the insulating cylinder is a ceramic cylinder.

[0013] Optionally, at least one of the two axial ends of the insulating cylinder is provided with a protruding structure along the circumferential direction, and the outer diameter of the protruding structure is smaller than the outer diameter of the outer wall portion.

[0014] The present application also provides a carrier, comprising a plurality of boat plates and the sleeve as described above, wherein the sleeve is sandwiched between two adjacent boat plates and is fixed by a connecting rod that passes through each of the boat plates and the sleeve in sequence.

[0015] The present application also provides a coating device, including the carrier as described above.

[0016] The present application provides a carrier sleeve, a carrier, and a coating device. A groove structure is provided on the outer wall of the insulating cylinder of the sleeve. The groove structure includes at least two groove sections. Each groove section is arranged in parallel along the radial direction of the insulating cylinder and is connected end to end in sequence. The total length of the groove structure can be effectively increased, thereby enabling the groove structure to have a larger aspect ratio. In addition, the groove structure also includes a bending structure.

[0017] The overall length of the slot structure is relatively long, so that the overall creepage path of the sleeve is relatively long, which increases the difficulty of forming a continuous polysilicon layer in the entire creepage path. Since the slot structure can have a larger aspect ratio, the amount of gas entering the slot structure is effectively reduced, and since the slot structure is also provided with a bending structure, the airflow entering the slot structure from the open end needs to pass through a bending structure after passing through the first slot section before flowing in the opposite direction to enter the second slot section, which increases the difficulty of the airflow reaching the inner end of the slot structure, reduces the probability of depositing a continuous polysilicon layer on the slot wall of the slot structure, and thus reduces the probability of short circuit caused by conduction between the two boat sheets, reduces the impact of the short circuit on the coating, increases the service life of the sleeve and the boat sheet, and improves the product yield of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a cross-sectional view of an insulating cylinder of an integrated structure provided in an embodiment of the present application;

[0019] Figure 2 is a partial cross-sectional view of the insulating cylinder;

[0020] Figure 3 is a cross-sectional view of an insulating cylinder of a split structure provided in an embodiment of the present application;

[0021] Figure 4 yes Figure 3 A cross-sectional view of the first barrel portion;

[0022] Figure 5 yes Figure 3 A cross-sectional view of the second barrel portion.

[0023] Attached Figure 1-Figure 5 In the figure, the reference numerals are described as follows:

[0024] 10 insulating cylinder;

[0025] 1 slot structure, 11 slot section, 12 connecting section, 13 bending structure, 14 open end, 15 inner end;

[0026] 2 first barrel portion, 21 first protrusion, 22 first groove, 23 third groove;

[0027] 3 second barrel portion, 31 second protrusion, 32 second groove;

[0028] 4 Raised structure;

[0029] 5. Circular step structure. DETAILED DESCRIPTION

[0030] In order to enable those skilled in the art to better understand the technical solution of the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0031] The embodiment of the present application provides a sleeve of a carrier and a carrier, wherein the carrier can be used as a carrier of a coating device, the carrier includes a plurality of boats, each boat is arranged side by side in sequence, a sleeve is sandwiched between two adjacent boats, and a connecting rod passes through each boat and the sleeve in sequence to fix, and the sleeve provides physical support for the boat. The boat is made of conductive material, and a substrate is fixed on the surface of the boat. The sleeve is made of insulating material, and insulates and isolates the boats connected to two different electrodes, so that an electric field is formed between the two boats. During the coating process of the coating device, the process gas flows through the cavity to react and deposit amorphous silicon on the surface of the substrate, thereby completing the amorphous silicon deposition on the substrate.

[0032] like Figure 1-Figure 3 As shown, the sleeve includes an insulating cylinder 10, which is a hollow structure. The outer wall of the insulating cylinder 10 is provided with a groove structure 1 along the circumferential direction. The axial cross-section of the groove structure 1 includes at least two groove segments 11, wherein each groove segment 11 is arranged in parallel along the radial direction of the insulating cylinder 10, and each groove segment 11 is connected end to end in sequence.

[0033] like Figure 2 As shown, the slot structure 1 includes at least two slot segments 11 arranged roughly along the axial direction of the insulating cylinder 10. The length, width and other parameters of each slot segment 11 can be the same or different. The number of slot segments 11 and the parameters of each slot segment 11 can be specifically set according to actual conditions, and no specific restrictions are made here.

[0034] In this embodiment, each slot segment 11 is connected end to end in sequence. Compared with the scheme of arranging the grooves along the radial direction of the insulating cylinder 10, such an arrangement can effectively increase the total length of the slot structure 1, thereby enabling the slot structure 1 to have a larger aspect ratio. In addition, since each slot segment 11 is arranged in parallel, a bending structure 13 is provided at the connection between two slot segments 11, so that the slot structure 1 presents a maze-shaped structure.

[0035] The insulating cylinder 10 is an insulating structure, and its two ends are respectively in contact with two conductive boats. If a certain thickness of polysilicon layers are deposited on the outer surface of the outer wall of the insulating cylinder 10 and are continuous in the axial direction, the polysilicon layer can achieve conductivity between the two boats, causing a short circuit. Since the outer wall of the insulating cylinder 10 is provided with a groove structure 1 along the circumferential direction, the creepage path of the sleeve is as follows: Figure 2 As shown by the thick line in the middle, from one axial end A of the insulating cylinder 10 through the outer surface to one side B of the open end of the slot structure 1, and along the inner wall of the slot structure 1 through the inner end 15C of the slot structure 1 to the other side D of the open end 14 of the slot structure 1, and then along the surface of the insulating cylinder 10 to the other axial end E of the insulating cylinder 10, only when a certain thickness of polysilicon layer is continuously deposited on the creepage path ABCDE, can electrical conduction be achieved between the two boat sheets.

[0036] In this embodiment, since each slot segment 11 of the slot structure 1 is arranged along the axial direction of the insulating cylinder 10, and each slot segment 11 is connected in sequence to form a slot structure 1, the overall length of the slot structure 1 is relatively long, resulting in a relatively long overall creepage path of the sleeve, which increases the difficulty of forming a continuous polysilicon layer in the entire creepage path. In addition, since the slot structure 1 can have a relatively large aspect ratio, the amount of gas entering the slot structure 1 is effectively reduced, and since the slot structure 1 is also provided with a bending structure 13, the gas flow entering the slot structure 1 from the open end 14 needs to pass through a section of the bending structure 13 after passing through the first slot segment 11 and then flow in the opposite direction to enter the second slot segment 11, thereby increasing the difficulty of the gas flow reaching the inner end 15 of the slot structure 1, reducing the probability of depositing a continuous polysilicon layer on the slot wall of the slot structure 1, thereby reducing the probability of a short circuit caused by conduction between two boat sheets, reducing the impact of the short circuit on the coating, and increasing the service life of the sleeve and boat sheet, and improving the product yield of the substrate.

[0037] In this embodiment, the insulating cylinder 10 can be as follows Figure 1 The result of the one-piece molding shown is that the insulating cylinder 10 is one-piece molded by a processing method such as mold opening or a 3D printing method, which can simplify the processing technology of the insulating cylinder 10.

[0038] Alternatively, in this embodiment, the insulating cylinder 10 may also be configured as follows: Figure 3 The split structure shown in the figure, specifically, the insulating cylinder 10 includes a first cylinder portion 2 and a second cylinder portion 3, wherein the outer wall of the first cylinder portion 2 is provided with a first protrusion 21 (such as Figure 4 The outer wall of the second barrel 3 is provided with a second protrusion 31 and a second groove 32 (as shown in FIG. Figure 5 As shown), it is not difficult to understand that the opening of the second groove 32 faces the first barrel portion 2. During the installation process, the end of the first barrel portion 2 away from the second barrel portion 3 abuts against a boat piece, and the end of the second barrel portion 3 away from the first barrel portion 2 abuts against a boat piece. The first barrel portion 2 and the second barrel portion 3 can be clamped by these two adjacent boat pieces, so that the inner wall portions of the first barrel portion 2 and the second barrel portion 3 cooperate. Since the connecting rod passes through the first barrel portion 2 and the second barrel portion 3 in sequence, the first barrel portion 2 and the second barrel portion 3 are coaxially arranged.

[0039] In the installed state, the first protrusion 21 is located in the second groove 32, and there is a clearance fit between the first protrusion 21 and the second groove 32. The gap between the side wall of the first protrusion 21 and the groove wall of the second groove 32 can form a groove section 11. The two side walls of the first protrusion 21 correspond to the two groove walls of the second groove 32 and form two groove sections 11. There is a gap between the end of the first protrusion 21 and the groove bottom of the second groove 32 to form a connecting section 13 connecting the two groove sections 11, and a bending structure 13 is formed between the connecting section 12 and the groove section 11.

[0040] In detail, the gap between the inner side wall of the first protrusion 21 and the inner side wall of the second groove 32 forms a groove section 11, and the gap between the outer side wall and the side wall of the first protrusion 21 forms another groove section 11. The two groove sections 11 are connected by a connecting section 13.

[0041] Arranging the insulating cylinder 10 to have a structure including two cylinder parts can facilitate the processing operation of the slot segment 11 and reduce the processing difficulty.

[0042] like Figure 4 As shown, the outer wall of the first barrel portion 2 is further provided with a first groove 22, the opening of the first groove 22 faces the second barrel portion 3, and the first groove 22 is located on the inner side of the first protrusion 21. When the first barrel portion 2 and the second barrel portion 3 are installed, the groove section 11 enclosed by the inner side wall of the first protrusion 21 and the inner side wall of the second groove 32 is connected to the first groove 22 to extend the length of the groove section 11 here. It is not difficult to understand that the groove bottom of the first groove 22 forms the inner end 15 of the groove structure 1.

[0043] It should be noted that the “inner side” in “inner side of the first protrusion” and “inner side of the second groove 32” refers to the side facing inward along the radial direction of the insulating cylinder 10, and the “outer side” in “outer side of the first protrusion” and “outer side of the second groove 32” refers to the side facing outward along the radial direction of the insulating cylinder 10.

[0044] Of course, in this embodiment, the first groove 22 may not be provided, and the provision of the first groove 22 can extend the length of the innermost groove section 11, thereby extending the total length of the groove structure 1 and further extending the creepage path.

[0045] like Figure 4As shown, the outer wall of the first barrel portion 2 is also provided with a third groove 23, and the third groove 23 is located on the outside of the first protrusion 21. When the first barrel portion 2 and the second barrel portion 3 are installed, the second protrusion 31 is located in the third groove 23, and the side wall of the second protrusion 31 is gap-matched with the side wall of the third groove 23. The gap between the side wall of the second protrusion 31 and the groove wall of the third groove 23 can also form a groove section 11, and a gap is left between the end of the second protrusion 31 and the groove bottom wall of the third groove 23 to form a connecting section 12.

[0046] The provision of the third groove 23 can increase the number of the slot segments 11, thereby further extending the total length of the slot structure 1 and further extending the creepage path.

[0047] Of course, in this embodiment, the slot segments 11 can be further extended outward along the radial direction of the insulating cylinder 10, that is, the number of slot segments 11 is increased to increase the total length of the slot structure 1, thereby extending the creepage path. Specifically, the slot segments 11 can be set according to actual conditions. At the same time, the number of the first protrusion 21, the second protrusion 31, the second groove 32 and the third groove 23 can be set according to the number of slot segments 11, and no specific restrictions are made here. In addition, by adjusting the parameters of each protrusion and each groove, the parameters of each slot segment 11 and the connecting end 13 can be adjusted, and can be set according to actual conditions.

[0048] In this embodiment, the depth directions of the first groove 22 , the second groove 32 and the third groove 23 are all parallel to the axial direction of the insulating cylinder 10 , so that the processing operation is convenient.

[0049] The material of the first barrel portion 2 and the second barrel portion 3 is not limited, and high temperature resistant conductors such as ceramics can be selected, which have a long service life.

[0050] Furthermore, in the present embodiment, the first barrel portion 2 and the second barrel portion 3 are respectively integrally formed structures, which can simplify the installation process. Of course, at least one of the first barrel portion 2 and the second barrel portion 3 can also be set as a split structure.

[0051] like Figure 1 and Figure 3 As shown, at least one of the two axial ends of the insulating cylinder 10 is provided with a protruding structure 4 along the circumferential direction, and the outer diameter of the protruding structure 4 is smaller than the outer diameter of the outer wall portion, so that the protruding structure 4 can form an annular step structure 5 with the outer wall portion. In the installed state, the end face of the protruding structure 4 abuts against the boat sheet to ensure the abutment stability. Specifically, the protruding structure 4 can be provided at one end or at both ends.

[0052] The above are only preferred implementations of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. A sleeve of a carrier, characterized in that: The invention comprises an insulating cylinder (10), wherein the outer wall of the insulating cylinder (10) is provided with a groove structure (1) along the circumferential direction, the axial cross section of the groove structure (1) comprises at least two groove segments (11), and each of the groove segments (11) is arranged in parallel along the radial direction of the insulating cylinder (10) and is connected end to end in sequence.

2. The sleeve of the carrier according to claim 1, characterized in that: The insulating cylinder (10) is an integrally formed structure.

3. The sleeve of the carrier according to claim 1, characterized in that: The insulating cylinder (10) comprises a first cylinder portion (2) and a second cylinder portion (3); the outer wall portion of the first cylinder portion (2) is provided with a first protrusion (21); the outer wall portion of the second cylinder portion (3) is provided with a second protrusion (31) and a second groove (32); when the first cylinder portion (2) and the second cylinder portion (3) are in an installed state, the first protrusion (21) is loosely fitted in the second groove (32); and the gap between the side wall of the first protrusion (21) and the groove wall of the second groove (32) can form the groove section (11).

4. The sleeve of the carrier according to claim 3, characterized in that: The outer wall of the first barrel portion (2) is further provided with a first groove (22), the first groove (22) being located on the inner side of the first protrusion (21), and when the first barrel portion (2) and the second barrel portion (3) are in an installed state, a groove section (11) formed between the inner side wall of the first protrusion (21) and the inner side groove wall of the second groove (32) is connected to the first groove (22).

5. The sleeve of the carrier according to claim 4, characterized in that: The outer wall of the first barrel portion (2) is further provided with a third groove (23), the third groove (23) being located on the outer side of the first protrusion (21); when the first barrel portion (2) and the second barrel portion (3) are in an installed state, the second protrusion (31) is loosely fitted in the third groove (23), and the gap between the side wall of the second protrusion (31) and the groove wall of the third groove (23) can form the groove section (11).

6. The sleeve of the carrier according to claim 5, characterized in that: The depth directions of the first groove (22) and the third groove (23) are parallel to the axial direction of the insulating cylinder (10).

7. The sleeve of the carrier according to any one of claims 1 to 6, characterized in that: The insulating cylinder (10) is a ceramic cylinder.

8. The sleeve of a carrier according to any one of claims 1 to 6, characterized in that: At least one of the two axial ends of the insulating cylinder (10) is provided with a protruding structure (4) along the circumferential direction, and the outer diameter of the protruding structure (4) is smaller than the outer diameter of the outer wall portion.

9. A carrier, characterized in that: It comprises a plurality of boat plates and a sleeve as claimed in any one of claims 1 to 8, wherein the sleeve is sandwiched between two adjacent boat plates and is fixed by a connecting rod which passes through each of the boat plates and the sleeve in sequence.

10. A coating device, characterized in that: Comprising the carrier as claimed in claim 9.

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