Conveying device and reaction furnace system

Abstract

The utility model relates to the technical field of photovoltaics and semiconductors, in particular to a conveying device and a reaction furnace system, and solves the problem of low conveying efficiency of the conveying device. The conveying device comprises a telescopic fork mechanism, a lifting mechanism, a conveying mechanism and a boat pushing mechanism. The telescopic fork mechanism can stretch out and draw back and is used for bearing and conveying the boat structure. The lifting mechanism is connected with the telescopic fork mechanism and used for lifting the telescopic fork mechanism. The conveying mechanism is connected with the lifting mechanism and used for conveying the lifting mechanism between the first station and the second station. And the boat pushing mechanism is adjacent to the second station. The telescopic fork mechanism can bear and stretch out the boat structure, the boat structure is placed on the boat pushing mechanism, the boat pushing mechanism can send the boat structure into the furnace body, or the boat pushing mechanism can convey the boat structure out of the furnace body, and the telescopic fork mechanism can stretch out and take away the boat structure borne by the boat pushing mechanism. According to the conveying device, all the mechanisms are integrated together, the boat structure is automatically conveyed, and the conveying efficiency of the conveying device is improved.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the field of photovoltaic and semiconductor technology, and in particular to a conveying device and a reaction furnace system. BACKGROUND

[0002] Semiconductor or photovoltaic materials are widely used in electronic, new energy and other industries, and semiconductor and photovoltaic materials usually need to be chemically treated before being applied to products. At present, when processing semiconductor or photovoltaic materials, a boat structure is usually used to load products, and the boat structure and the products are sent into a reaction furnace together.

[0003] At present, the conveying device is usually used to convey the boat structure in the industry, but the conveying efficiency of the conveying device in the related art is low. UTILITY MODEL CONTENT

[0004] Therefore, the embodiments of the present disclosure provide a conveying device and a reaction furnace system, which solve the problem of low conveying efficiency of the conveying device.

[0005] In a first aspect, the embodiments of the present disclosure provide a conveying device, comprising: a telescopic fork mechanism capable of telescoping and configured to carry and convey a boat structure; a lifting mechanism connected with the telescopic fork mechanism and configured to lift the telescopic fork mechanism; a conveying mechanism connected with the lifting mechanism and extending along a first direction, and having a first station and a second station, and configured to convey the lifting mechanism between the first station and the second station; a boat pushing mechanism arranged adjacent to the second station; wherein the telescopic fork mechanism is configured to carry the boat structure and extend to place the boat structure on the boat pushing mechanism, and the boat pushing mechanism is configured to send the boat structure into a furnace body; or the boat pushing mechanism is configured to carry the boat structure out of the furnace body, and the telescopic fork mechanism is configured to extend and take away the boat structure carried by the boat pushing mechanism.

[0006] In some embodiments, the lifting mechanism comprises: a first driving assembly arranged vertically and connected with the conveying mechanism; and at least one first supporting assembly arranged below the telescopic fork mechanism and connected with the telescopic fork mechanism and the first driving assembly, so that the first driving assembly can drive the first supporting assembly to lift, and the first supporting assembly drives the telescopic fork mechanism to lift.

[0007] In some embodiments, the number of the first supporting assemblies is two, and the two first supporting assemblies are respectively arranged on both sides of the first driving assembly and connected with both sides of the telescopic fork mechanism.

[0008] In some embodiments, the delivery device further comprises a slide rail extending along the first direction; and a slide block slidably connected with the slide rail; wherein the lifting mechanism further comprises a connecting assembly, a first end of the connecting assembly being connected with the first driving assembly, and a second end of the connecting assembly being connected with the slide block.

[0009] In some embodiments, the first support assembly comprises a first connecting member horizontally arranged and connected with the first driving assembly; a first support member horizontally arranged above the first connecting member and connected with the telescopic fork mechanism; a second connecting member vertically arranged and connecting the first connecting member and the first support member; and a reinforcing member arranged below the first connecting member and connected with the first connecting member and the first driving assembly respectively.

[0010] In some embodiments, the telescopic fork mechanism comprises a second support assembly connected with the first support assembly; a second driving assembly connected with the second support assembly; and at least two telescopic fork arm assemblies arranged in parallel and spaced apart and connected with the second driving assembly and configured to carry the boat structure; wherein the second driving assembly is capable of driving the telescopic fork arm assemblies to extend and retract along a second direction, wherein the second direction intersects the first direction.

[0011] In some embodiments, the telescopic fork arm assembly comprises a fixed arm connected with the second support assembly and extending along the second direction; and a movable arm connected with the second driving assembly and slidably connected with the fixed arm and extending along the second direction, so that the second driving assembly is capable of driving the movable arm to move relative to the fixed arm along the second direction; wherein the telescopic fork mechanism further comprises at least two buffer assemblies respectively connected with the at least two movable arms and arranged above the movable arms, the buffer assemblies being elastic in the vertical direction to provide upward buffer force for the boat structure during contact between the buffer assemblies and the boat structure.

[0012] In some embodiments, the buffer assembly comprises a second support member configured to support the boat structure; and a plurality of elastic members arranged between the second support member and the movable arm, the elastic members being elastic in the vertical direction, a first end of the elastic members being in abutment with or connected with the second support member, and a second end of the elastic members being in abutment with or connected with the movable arm.

[0013] In some embodiments, the telescopic fork mechanism further comprises at least two limiting assemblies respectively connected with the at least two movable arms and extending along the vertical direction, the at least two limiting assemblies being respectively configured to limit both sides of the boat structure.

[0014] In a second aspect, embodiments of the present disclosure provide a reaction furnace system, comprising: a furnace body configured to accommodate a boat structure, wherein the furnace body has a furnace opening facing downward; the conveying device as described in the first aspect, configured to send the boat structure into the furnace body or carry the boat structure out of the furnace body; a furnace door assembly configured to support the boat structure and open or close the furnace opening; wherein the boat pushing mechanism of the conveying device is configured to carry the furnace door assembly and drive the furnace door assembly to ascend or descend, so that the furnace door assembly drives the boat structure to ascend to send the boat structure into the furnace body or drives the boat structure to descend to carry the boat structure out of the furnace body.

[0015] The conveying device provided by the embodiments of the present disclosure integrates the telescopic fork mechanism, the lifting mechanism, the conveying mechanism and the boat pushing mechanism, realizes the automatic conveying of the boat structure, and improves the conveying efficiency of the conveying device on the boat structure. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 Fig. 1 shows a structural schematic diagram of a reaction furnace system and a boat structure provided by an embodiment of the present disclosure.

[0017] Figure 2 Fig. 2 shows a structural schematic diagram of a reaction furnace system and a boat structure provided by an embodiment of the present disclosure. Figure 1 Fig. 3 shows a partial enlarged view of the reaction furnace system and the boat structure in area A.

[0018] Figure 3 Fig. 4 shows a structural schematic diagram of a telescopic fork mechanism, a lifting mechanism and a boat structure provided by an embodiment of the present disclosure.

[0019] Figure 4 Fig. 5 shows a structural schematic diagram of a lifting mechanism provided by an embodiment of the present disclosure.

[0020] Figure 5 Fig. 6 shows a structural schematic diagram of a telescopic fork mechanism and a boat structure provided by an embodiment of the present disclosure.

[0021] Figure 6 Fig. 7 shows a structural schematic diagram of a telescopic fork mechanism and a boat structure provided by an embodiment of the present disclosure. Figure 5 Fig. 8 shows a partial enlarged view of the telescopic fork mechanism and the boat structure in area B.

[0022] REFERENCE SIGNS:

[0023] 1, reaction furnace system; 10, conveying device; 100, telescopic fork mechanism; 110, second support assembly; 120, second driving assembly; 130, telescopic fork arm assembly; 140, buffer assembly; 1410, second support piece; 1420, elastic piece; 1421, first end of elastic piece; 1422, second end of elastic piece; 150, limiting assembly; 1510, first limiting piece; 1520, fifth connecting piece; 1530, second limiting piece; 200, lifting mechanism; 210, first driving assembly; 220, first support assembly; 2210, first connecting piece; 2220, first support piece; 2230, second connecting piece; 2240, reinforcing piece; 230, connecting assembly; 2301, first end of connecting assembly; 2302, second end of connecting assembly; 2310, third connecting piece; 2311, first end of third connecting piece; 2312, second end of third connecting piece; 2320, fourth connecting piece; 2321, first end of fourth connecting piece; 2322, second end of fourth connecting piece; 300, conveying mechanism; 301, first station; 302, second station; 400, boat pushing mechanism; 410, driving source assembly; 420, bearing assembly; 500, sliding rail; 600, sliding block; 20, furnace body; 2001, furnace mouth; 30, furnace door assembly; 2, boat structure; 21, boat holder; 22, boat; X1, first direction; X2, second direction. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative labor are within the scope of protection of the present disclosure.

[0025] Figure 1 The structure schematic diagram of the reaction furnace system and the boat structure provided by an embodiment of the present disclosure is shown. As shown in the figure, Figure 1As shown, the conveying device 10 comprises a telescopic fork mechanism 100, a lifting mechanism 200, a conveying mechanism 300 and a boat pushing mechanism 400. The telescopic fork mechanism 100 is telescopic and is configured to carry and convey the boat structure 2. The lifting mechanism 200 is connected with the telescopic fork mechanism 100 and is configured to lift the telescopic fork mechanism 100. The conveying mechanism 300 is connected with the lifting mechanism 200 and extends along the first direction X1 and has a first station 301 and a second station 302 and is configured to convey the lifting mechanism 200 between the first station 301 and the second station 302. The boat pushing mechanism 400 is arranged adjacent to the second station 302. The telescopic fork mechanism 100 is configured to carry the boat structure 2 and extend to place the boat structure 2 on the boat pushing mechanism 400, and the boat pushing mechanism 400 is configured to send the boat structure 2 into the furnace body 20, or the boat pushing mechanism 400 is configured to take the boat structure 2 out of the furnace body 20, and the telescopic fork mechanism 100 is configured to extend and take away the boat structure 2 carried by the boat pushing mechanism 400.

[0026] The conveying device 10 integrates the telescopic fork mechanism 100, the lifting mechanism 200, the conveying mechanism 300 and the boat pushing mechanism 400 together to realize the automatic conveying of the boat structure 2 and improve the conveying efficiency of the conveying device 10 on the boat structure 2.

[0027] Exemplarily, the conveying mechanism 300 can comprise a motor, a screw rod, a nut seat, can comprise a motor, a gear and a rack, or can comprise a motor, a conveying belt or other structures.

[0028] Exemplarily, the boat pushing mechanism 400 comprises a driving source assembly 410 and a carrying assembly 420. The carrying assembly 420 is capable of carrying the boat structure 2. The driving source assembly 410 is connected with the carrying assembly 420 and drives the carrying assembly 420 to move. Exemplarily, the driving source assembly 410 can be a mechanical arm, a linear module, a screw rod module or the like.

[0029] In some embodiments, as shown, Figures 1 to 4 The lifting mechanism 200 comprises a first driving assembly 210 and at least one first supporting assembly 220. The first driving assembly 210 is vertically arranged and connected with the conveying mechanism 300. The first supporting assembly 220 is located below the telescopic fork mechanism 100 and is connected with the telescopic fork mechanism 100 and the first driving assembly 210, so that the first driving assembly 210 can drive the first supporting assembly 220 to lift, and the first supporting assembly 220 drives the telescopic fork mechanism 100 to lift. The structure of the lifting mechanism 200 is simple and reliable.

[0030] Exemplarily, the first driving assembly 210 can be a screw rod module, a cylinder or the like. Figures 2 to 4 The first driving assembly 210 shown is a screw rod module.

[0031] In some embodiments, as shown in Figure 3 and Figure 4 The number of the first support assemblies 220 is two, and the two first support assemblies 220 are respectively arranged on the two sides of the first driving assembly 210 and connected with the two sides of the telescopic fork mechanism 100.

[0032] The telescopic fork mechanism 100 is supported by the two first support assemblies 220, which further improves the support stability and lifting stability of the lifting mechanism 200 on the telescopic fork mechanism 100.

[0033] In some embodiments, as shown in Figure 1 , Figure 2 and Figure 4 The conveying device 10 further comprises slide rails 500 and slide blocks 600. The slide rails 500 extend along the first direction X1, and the slide blocks 600 are slidably connected with the slide rails 500. The lifting mechanism 200 further comprises connecting assemblies 230, the first ends 2301 of the connecting assemblies are connected with the first driving assembly 210, and the second ends 2302 of the connecting assemblies are connected with the slide blocks 600.

[0034] The movement of the lifting mechanism 200 along the first direction X1 is guided by the slide rails 500 and the slide blocks 600, which further improves the accuracy and stability of the movement of the lifting mechanism 200 along the first direction X1.

[0035] Exemplarily, the number of the slide rails 500 is two, the number of the slide blocks 600 is two, and the number of the connecting assemblies 230 is two. The two connecting assemblies 230 are respectively arranged on the two sides of the first driving assembly 210, and the connecting assemblies 230 are arranged adjacent to the two first support assemblies 220. The two connecting assemblies 230 are respectively connected with the two slide blocks 600, and the two slide blocks 600 are slidably connected with the two slide rails 500.

[0036] In some embodiments, as shown in Figure 3 and Figure 4 The first support assembly 220 comprises a first connecting piece 2210, a first support piece 2220, a second connecting piece 2230, and a reinforcing piece 2240. The first connecting piece 2210 is horizontally arranged and connected with the first driving assembly 210. The first support piece 2220 is horizontally arranged above the first connecting piece 2210 and connected with the telescopic fork mechanism 100. The second connecting piece 2230 is vertically arranged and connected with the first connecting piece 2210 and the first support piece 2220. The reinforcing piece 2240 is arranged below the first connecting piece 2210 and connected with the first connecting piece 2210 and the first driving assembly 210, respectively. The structure of the first support assembly 220 is simple and reliable.

[0037] Exemplarily, the number of the second connecting members 2230 is two or more, and the number of the reinforcing members 2240 is two or more, further improving the mechanical strength of the first support assembly 220, thereby further improving the support stability and lifting stability of the lifting mechanism 200 to the telescopic fork mechanism 100.

[0038] Exemplarily, the horizontal cross-section of the first connecting member 2210 can be rectangular, circular, polygonal, or other irregular shape. Exemplarily, the horizontal cross-section of the first support member 2220 can be rectangular, circular, polygonal, or other irregular shape. Exemplarily, the vertical cross-section of the second connecting member 2230 can be rectangular, circular, polygonal, or other irregular shape. Exemplarily, the vertical cross-section of the reinforcing member 2240 can be rectangular, circular, polygonal, or other irregular shape. Figure 4 Exemplarily, the horizontal cross-section of the first connecting member 2210 and the first support member 2220 are both rectangular, the vertical cross-section of the second connecting member 2230 is rectangular, and the vertical cross-section of the reinforcing member 2240 is triangular.

[0039] Exemplarily, as shown in Figure 2 and Figure 4 , the connecting assembly 230 includes a third connecting member 2310 and a fourth connecting member 2320, the first end 2311 of the third connecting member is connected with the first driving assembly 210, the second end 2312 of the third connecting member is connected with the first end 2321 of the fourth connecting member, and the second end 2322 of the fourth connecting member is connected with the sliding block 600.

[0040] Exemplarily, the shape of the third connecting member 2310 can be L-shaped, T-shaped, etc. Exemplarily, the shape of the fourth connecting member 2320 can be L-shaped, T-shaped, etc. Figure 4 Exemplarily, the shape of the third connecting member 2310 and the fourth connecting member 2320 are both L-shaped.

[0041] In some embodiments, as shown in Figure 3 , the telescopic fork mechanism 100 includes a second support assembly 110, a second driving assembly 120, and at least two telescopic fork arm assemblies 130. The second support assembly 110 is connected with the first support assembly 220. The second driving assembly 120 is connected with the second support assembly 110. The at least two telescopic fork arm assemblies 130 are arranged in parallel and at intervals, and are each connected with the second driving assembly 120 and configured to carry the boat structure 2. The second driving assembly 120 is capable of driving the telescopic fork arm assemblies 130 to telescope in a second direction X2, and the second direction X2 is transverse to the first direction X1.

[0042] Exemplarily, the second support assembly 110 is located above the first support 2220 and connected with the first support 2220. Exemplarily, the number of the telescopic fork arm assemblies 130 is two, and the two telescopic fork arm assemblies 130 are arranged in parallel and spaced apart, and the two telescopic fork arm assemblies 130 respectively carry two sides of the boat structure 2, so that the telescopic fork arm assemblies 130 can stably carry the boat structure 2.

[0043] In some embodiments, as shown in Figure 3 、 Figure 5 and Figure 6 , the telescopic fork arm assembly 130 comprises a fixed arm 1310 and a movable arm 1320. The fixed arm 1310 is connected with the second support assembly 110 and extends along the second direction X2. The movable arm 1320 is connected with the second driving assembly 120 and is slidably connected with the fixed arm 1310 and extends along the second direction X2, so that the second driving assembly 120 can drive the movable arm 1320 to move along the second direction X2 relative to the fixed arm 1310. The telescopic fork mechanism 100 further comprises at least two buffer assemblies 140, which are respectively connected with the at least two movable arms 1320 and located above the movable arms 1320. The buffer assembly 140 is elastic in the vertical direction to provide an upward buffer force for the boat structure 2 during the contact between the buffer assembly 140 and the boat structure 2.

[0044] By providing an upward buffer force for the boat structure 2 during the contact between the buffer assembly 140 and the boat structure 2, the boat structure 2 can slowly fall to the movable arm 1320, thereby reducing the risk of the boat structure 2 tilting when the boat structure 2 contacts the movable arm 1320.

[0045] Exemplarily, the number of the buffer assemblies 140 is two, and the two buffer assemblies 140 are respectively connected with the two movable arms 1320. Exemplarily, the number of the buffer assemblies 140 is multiple, and at least two buffer assemblies 140 are connected with one movable arm 1320.

[0046] In some embodiments, as shown in Figure 5 and Figure 6As shown, the buffer assembly 140 includes a second support 1410 and a plurality of elastic members 1420. The second support 1410 is configured to support the boat structure 2. The elastic members 1420 are located between the second support 1410 and the movable arms 1320, and the elastic members 1420 have elasticity in the vertical direction. A first end 1421 of the elastic member is in abutment with the second support 1410, and a second end 1422 of the elastic member is in abutment with the movable arm 1320. Alternatively, the first end 1421 of the elastic member is connected with the second support 1410, and the second end 1422 of the elastic member is in abutment with the movable arm 1320. Alternatively, the first end 1421 of the elastic member is in abutment with the second support 1410, and the second end 1422 of the elastic member is connected with the movable arm 1320. Alternatively, the first end 1421 of the elastic member is connected with the second support 1410, and the second end 1422 of the elastic member is connected with the movable arm 1320. The structure of the buffer assembly 140 is simple.

[0047] Exemplarily, the elastic members 1420 can be springs, rubber pads, etc. Figure 6 As shown, the elastic members 1420 are springs.

[0048] In some embodiments, as shown in Figure 3 and Figure 5 As shown, the telescopic fork mechanism 100 further includes at least two limiting assemblies 150, the at least two limiting assemblies 150 are respectively connected with the at least two movable arms 1320 and extend in the vertical direction, and the at least two limiting assemblies 150 are respectively configured to limit the two sides of the boat structure 2.

[0049] The limiting assemblies 150 are used to limit the boat structure 2, so as to avoid the boat structure 2 from tilting or falling from the telescopic fork mechanism 100 during the lifting process or the movement in the first direction X1 or the telescopic movement in the second direction X2.

[0050] Exemplarily, the number of the limiting assemblies 150 is two, and the two limiting assemblies 150 are respectively connected with the two movable arms 1320.

[0051] Exemplarily, the boat structure 2 includes a boat holder 21 and a boat 22, the boat 22 extends in the vertical direction, the boat holder 21 is configured to hold the boat 22, and the movable arm 1320 carries the boat holder 21. Exemplarily, the boat holder 21 can hold one, two or more boats 22.

[0052] Illustratively, the limiting assembly 150 includes a first limiting member 1510, a fifth connecting member 1520, and a second limiting member 1530. The first limiting member 1510 is connected to the movable arm 1320, the second limiting member 1530 is located above the first limiting member 1510, and the fifth connecting member 1520 extends vertically and connects the first limiting member 1510 and the second limiting member 1530. The first limiting member 1510 is configured to limit the side end of the boat support 21, and the second limiting member 1530 is configured to limit the side end of the boat 22.

[0053] The embodiment of the present disclosure provides a reactor system 1, such as Figure 1 As shown, the reaction furnace system 1 includes the conveying device 10, the furnace body 20 and the furnace door assembly 30 as mentioned in the above embodiment. The furnace body 20 is configured to accommodate the boat structure 2, and the furnace body 20 has a furnace opening 2001 facing downward. The conveying device 10 is configured to convey the boat structure 2 into the furnace body 20, or to transport the boat structure 2 out of the furnace body 20. The furnace door assembly 30 is configured to support the boat structure 2 and open or close the furnace opening 2001. The boat pushing mechanism 400 of the conveying device 10 is configured to carry the furnace door assembly 30 and drive the furnace door assembly 30 to rise and fall, so that the furnace door assembly 30 drives the boat structure 2 to rise to convey the boat structure 2 into the furnace body 20, or to drive the furnace door assembly 30 to descend to transport the boat structure 2 out of the furnace body 20.

[0054] For example, the specific process of the conveying device 10 conveying the boat structure 2 into the furnace body 20 is as follows:

[0055] The telescopic fork mechanism 100 receives the boat structure 2 at the first station 301. The conveying mechanism 300 drives the lifting mechanism 200 to move along the first direction X1 from the first station 301 to the second station 302. The lifting mechanism 200 drives the telescopic fork mechanism 100 to move along the first direction X1 from the first station 301 to the second station 302. The telescopic fork mechanism 100 extends along the second direction X2, and the lifting mechanism 200 drives the telescopic fork mechanism 100 downward to place the boat structure 2 on the furnace door assembly 30 supported by the boat pushing mechanism 400. The telescopic fork mechanism 100 retracts along the second direction X2, and the boat pushing mechanism 400 drives the furnace door assembly 30 upward, causing the furnace door assembly 30 to move the boat structure 2 upward, thereby delivering the boat structure 2 into the furnace body 20. The furnace door assembly 30 closes the furnace opening 2001.

[0056] The specific process of the conveying device 10 transporting the boat structure 2 out of the furnace body 20 is as follows:

[0057] The boat pushing mechanism 400 drives the furnace door assembly 30 to descend, the furnace door assembly 30 opens the furnace mouth 2001, and the boat structure 2 is driven to descend by the furnace door assembly 30 to carry the boat structure 2 out of the furnace body 20. The telescopic fork mechanism 100 is extended, and the boat structure 2 carried by the boat pushing mechanism 400 is taken away. The conveying mechanism 300 drives the lifting mechanism 200 to move from the second station 302 to the first station 301 along the first direction X1, and the lifting mechanism 200 drives the telescopic fork mechanism 100 to move from the second station 302 to the first station 301 along the first direction X1.

[0058] In various embodiments of the present disclosure, if not specifically limited, the form of connection can be detachable connection through bolts and nuts, screws, buckles, magnetic attraction and the like. In some connections, if there is no special requirement for the form of detachable connection, it can be connected in a non-detachable manner through welding, bonding and the like.

[0059] In the specification, "one embodiment", "an embodiment", and the like indicate that the described embodiment can include a specific feature, structure or characteristic, but not necessarily every embodiment includes the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in connection with an embodiment, it is within the knowledge of those skilled in the art to realize such feature, structure or characteristic in connection with other embodiments that are explicitly or implicitly described.

[0060] It should be understood that "on", "above" and "over" in the present disclosure should be interpreted in the broadest way, so that "on" not only means "directly on", but also includes the meaning of "on" with intermediate features or layers therebetween, and "above" or "over" not only includes the meaning of "above" or "over", but also includes the meaning of "above" or "over" without intermediate features or layers therebetween (i.e. directly on).

[0061] In addition, spatial relative terms can be used herein for ease of description, such as "below", "under", "beneath", "above", "over", and the like, to describe a component or feature in relation to other components or features as shown in the drawings. The spatial relative terms are intended to include different orientations of the components in use or operation in addition to the orientations shown in the drawings. The device can have other orientations (rotated 90 degrees or in other orientations), and the spatial relative terms used herein can also be interpreted accordingly.

[0062] It should be noted that, in the present document, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by "comprises a", "comprising", or "comprises" does not, without further qualification, preclude the existence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0063] The preferred embodiments of the present disclosure have been described above with the intention of being illustrative rather than limiting, thus covering all modifications and equivalents within the scope of the disclosure.

Claims

1. A conveying device, characterized in that: include: a telescopic fork mechanism, capable of extension and retraction, configured to carry and transport the boat structure; a lifting mechanism connected to the telescopic fork mechanism and configured to lift and lower the telescopic fork mechanism; a conveying mechanism connected to the lifting mechanism, extending along a first direction, having a first station and a second station, and configured to convey the lifting mechanism between the first station and the second station; a boat pushing mechanism, disposed adjacent to the second workstation; The telescopic fork mechanism is configured to carry the boat structure and extend to place the boat structure on the boat pushing mechanism, and the boat pushing mechanism is configured to send the boat structure into the furnace body; Alternatively, the boat pushing mechanism is configured to transport the boat structure out of the furnace body, and the telescopic fork mechanism is configured to extend and take away the boat structure carried by the boat pushing mechanism.

2. The conveying device according to claim 1, characterized in that The lifting mechanism comprises: a first drive assembly, arranged vertically and connected to the conveying mechanism; At least one first support assembly is located below the telescopic fork mechanism and is connected to the telescopic fork mechanism and the first drive assembly, so that the first drive assembly can drive the first support assembly to rise and fall, and the first support assembly drives the telescopic fork mechanism to rise and fall.

3. The conveying device according to claim 2, characterized in that There are two first support assemblies, which are respectively arranged on both sides of the first driving assembly and respectively connected to both sides of the telescopic fork mechanism.

4. The conveying device according to claim 2, characterized in that Also includes: a slide rail extending along the first direction; a slider slidably connected to the slide rail; Wherein, the lifting mechanism further includes: A connecting component, wherein a first end of the connecting component is connected to the first driving component, and a second end of the connecting component is connected to the slider.

5. The conveying device according to any one of claims 2 to 4, characterized in that: The first support assembly comprises: a first connecting member, arranged horizontally and connected to the first driving assembly; a first support member, arranged horizontally, located above the first connecting member, and connected to the telescopic fork mechanism; a second connecting member, vertically arranged, connecting the first connecting member and the first supporting member; The reinforcement member is located below the first connecting member and is connected to the first connecting member and the first driving assembly respectively.

6. The conveying device according to claim 5, characterized in that The telescopic fork mechanism comprises: a second supporting assembly connected to the first supporting assembly; a second driving assembly connected to the second supporting assembly; at least two telescopic fork arm assemblies, arranged in parallel and spaced apart, both connected to the second drive assembly, and configured to support the boat structure; The second driving assembly is capable of driving the telescopic fork arm assembly to extend and retract along a second direction, wherein the second direction intersects with the first direction.

7. The conveying device according to claim 6, characterized in that The telescopic fork arm assembly comprises: a fixed arm connected to the second supporting assembly and extending along the second direction; a movable arm connected to the second drive assembly and slidably connected to the fixed arm, and extending along the second direction, so that the second drive assembly can drive the movable arm to move relative to the fixed arm along the second direction; Wherein, the telescopic fork mechanism further includes: At least two buffer components are respectively connected to at least two of the movable arms and are located above the movable arms. The buffer components are elastic in the vertical direction to provide an upward buffering force for the boat structure when the buffer components are in contact with the boat structure.

8. The conveying device according to claim 7, characterized in that The buffer assembly comprises: a second support member configured to support the boat structure; A plurality of elastic members are located between the second support member and the movable arm, the elastic members are elastic in the vertical direction, the first ends of the elastic members abut or connect with the second support member, and the second ends of the elastic members abut or connect with the movable arm.

9. The conveying device according to claim 7, characterized in that The telescopic fork mechanism also includes: At least two limiting assemblies are respectively connected to the at least two movable arms and both extend in a vertical direction. The at least two limiting assemblies are respectively configured to limit the two sides of the boat structure.

10. A reactor system, characterized in that: include: a furnace body configured to accommodate the boat structure, wherein the furnace body has a furnace opening facing downward; The conveying device according to any one of claims 1 to 9, configured to convey the boat structure into the furnace body, or to convey the boat structure out of the furnace body; a furnace door assembly configured to support the boat structure and open or close the furnace opening; in, The boat pushing mechanism of the conveying device is configured to carry the furnace door assembly and drive the furnace door assembly to rise and fall, so that the furnace door assembly drives the boat structure to rise to send the boat structure into the furnace body, or drives the furnace door assembly to lower the boat structure to transport the boat structure out of the furnace body.

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