Metal target material casting device

Abstract

The utility model relates to the technical field of casting, and discloses a metal target casting device which comprises a supporting seat, the top of the supporting seat is fixedly connected with a first bottom plate, the top of the first bottom plate is fixedly connected with an electric push rod, and the driving end of the electric push rod is fixedly connected with a push column. Two connecting rods are rotatably connected to the outer portion of the pushing column, connecting rods are rotatably connected to the left sides of the two connecting rods, fixing rods are fixedly connected to the sides, close to each other, of the two connecting rods, fixing columns are rotatably connected to the interiors of the two fixing rods, and a dust scraping assembly used for cleaning is fixedly connected to the top of the supporting seat. According to the casting device, molten metal can still be evenly filled in the mold, the size deviation of the target material caused by shaking of the casting device is reduced, the reliability and the stability of the whole casting device can be improved, and therefore the casting quality of the metal target material can be improved.

Description

Technical Field

[0001] This utility model relates to the field of casting technology, and in particular to a casting apparatus for metal targets. Background Technology

[0002] Metal sputtering targets play an important role in modern industry, especially in high-tech fields such as semiconductors, display technology, and photovoltaic cells. Metal sputtering targets are used to prepare thin film materials through techniques such as physical vapor deposition (PVD), and these thin film materials are crucial for improving the performance of electronic devices.

[0003] In existing technologies, the casting process of some metal targets often involves high-temperature molten metal, which causes the temperature of the casting device and its surrounding environment to rise sharply. High temperatures can cause fasteners to loosen or lose their original fixing effect. Metal bolts expand at high temperatures, making the originally tight connection loose. The casting device that is not firmly fixed will shake or move during the casting process, which will directly affect the flow and solidification process of the molten metal, resulting in deviations in the size of the metal target, uneven thickness, inconsistent diameter, etc. To address these issues, a metal target casting device is proposed. Utility Model Content

[0004] To overcome the above deficiencies, this utility model provides a metal target casting device, which aims to improve the problem in the prior art where the high temperature of the molten metal causes the device and ambient temperature to rise rapidly during the metal target casting process, resulting in loosening of the fixing parts, shaking and movement of the casting device affecting the flow and solidification of the molten metal, and causing deviations in the size of the target.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A metal target casting device includes a support base, a base plate fixedly connected to the top of the support base, an electric push rod fixedly connected to the top of the base plate, a push column fixedly connected to the drive end of the electric push rod, two connecting rods rotatably connected to the outside of the push column, connecting rods rotatably connected to the left side of each of the two connecting rods, fixing rods fixedly connected to the adjacent sides of each of the two connecting rods, fixing columns rotatably connected to the inside of each of the two fixing rods, and a dust scraping assembly for cleaning fixedly connected to the top of the support base.

[0007] As a further description of the above technical solution:

[0008] The scraping assembly includes a base plate two, the bottom of which is fixedly connected to the top of the support base. A motor one is fixedly connected inside the base plate two. A rotating disk is fixedly connected to the drive end of the motor one. A rotating ring is fixedly connected to the right side of the rotating disk. A sliding assembly is fixedly connected to the right side of the rotating ring. A sliding rod is fixedly connected to the left side of the rotating ring. One of the fixed blocks is slidably connected to the outside of the sliding rod.

[0009] As a further description of the above technical solution:

[0010] The bottoms of the two fixed columns are fixedly connected to the top of the base plate, and the mold is in contact with the adjacent sides of the two connecting rods;

[0011] As a further description of the above technical solution:

[0012] The bottom of the two connecting rods is slidably connected to the top of the base plate, and the top of the mold is provided with a mold groove;

[0013] As a further description of the above technical solution:

[0014] The top of the mold is provided with a collection groove, and the bottoms of the plurality of scrapers are slidably connected to the top of the mold;

[0015] As a further description of the above technical solution:

[0016] The sliding assembly includes a slide rod, the left side of which is fixedly connected to the right side of the rotating ring, and the left side of which is slidably connected to the inside of another fixed block;

[0017] As a further description of the above technical solution:

[0018] The bottoms of the two fixed blocks are fixedly connected to the top of the second base plate, the bottom of the sliding rod is slidably connected to the top of the second base plate, and the top of the support base is fixedly connected to two support frames, with a container rotatably connected to the adjacent side of the two support frames.

[0019] As a further description of the above technical solution:

[0020] A second motor is fixedly connected to the top of the support base, and the drive end of the second motor is fixedly connected to the left side of the container. Multiple openings are fixedly connected to the front side of the container.

[0021] This utility model has the following beneficial effects:

[0022] 1. In this utility model, the electric push rod is activated when it is in the initial position. The swing of the connecting rod will cause the connecting rod connected to it to perform a compound motion, including rotational motion around the connection point with the connecting rod. The fixed column inside the fixed rod rotates under the drive of the fixed rod. The molten metal can still fill the mold relatively evenly, reducing the target material size deviation caused by the shaking of the casting device. This can improve the reliability and stability of the entire casting device, thereby improving the casting quality of the metal target material and making the flow and solidification process of the molten metal more stable. This helps to improve the accuracy of the metal target material size.

[0023] 2. In this utility model, when the motor is started, the drive shaft of the motor begins to rotate, driving the rotating disk fixedly connected to it to rotate. The rotation of the rotating disk drives the rotating ring fixedly connected to its right side to rotate synchronously. The sliding rod reciprocates, and multiple scrapers fixedly connected to the rear side of the sliding rod move together with the sliding rod. These impurities and oxide layers will affect the quality and performance of the target material, so it is necessary to scrape off the surface. During the casting process, due to factors such as the fluidity of the molten metal and the precision of the mold, the surface of the target material will be uneven. The uneven surface will affect the subsequent processing and use of the target material, so it is necessary to scrape off the surface to make it smooth. Attached Figure Description

[0024] Figure 1 This is a perspective view of a metal target casting apparatus proposed in this utility model;

[0025] Figure 2 for Figure 1 Enlarged view of point A in the middle

[0026] Figure 3 This is a schematic diagram of the scraper structure of a metal target casting device proposed in this utility model;

[0027] Figure 4 This is a schematic diagram of the sliding rod of a metal target casting device proposed in this utility model.

[0028] Legend:

[0029] 1. Support base; 2. Base plate one; 3. Electric push rod; 4. Connecting rod; 5. Connecting rod; 6. Fixing rod; 7. Fixing column; 8. Pushing column; 9. Mold; 10. Base plate two; 11. Motor one; 12. Rotating disk; 13. Rotating ring; 14. Sliding rod; 15. Sliding rod; 16. Fixing block; 17. Scraper; 18. Collection trough; 19. Support frame; 20. Motor two; 21. Container; 22. Mold groove; 23. Opening. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Reference Figures 1 to 3 This utility model provides an embodiment of a metal target casting device, including a support base 1, which is the basic component of the entire metal target casting device. A base plate 2 is fixedly connected to the top of the support base 1. The base plate 2 is fixedly connected to the top of the support base 1. Its main function is to provide an installation base for an electric push rod 3. An electric push rod 3 is fixedly connected to the top of the base plate 2, and the electric push rod 3 is one of the power sources in the device. A push column 8 is fixedly connected to the drive end of the electric push rod 3. When the electric push rod 3 is working, the push column 8 moves along with the linear motion of the push rod. Two connecting rods 4 are rotatably connected to the outside of the push column 8, allowing the connecting rods 4 to swing flexibly under the push of the push column 8. A connecting rod 5 is rotatably connected to the left side of each of the two connecting rods 4, and a fixed rod 6 is fixedly connected to the adjacent side of each of the two connecting rods 5. This connection method allows the connecting rods 5 to transmit motion to the fixed rods 6 under the drive of the connecting rods 4. Both fixing rods 6 are internally connected to fixing columns 7, and the rotation of the fixing columns 7 achieves the fixing and positioning of the target component. A cleaning scraper assembly is fixedly connected to the top of the support base 1.

[0032] Reference Figure 3 , Figure 4 The dust removal assembly includes a base plate 10, which provides a stable mounting foundation for the assembly. The bottom of the base plate 10 is fixedly connected to the top of the support base 1. A motor 11 is fixedly connected inside the base plate 10, and a rotating disk 12 is fixedly connected to the drive end of the motor 11 to prevent displacement during operation. This helps ensure the accurate connection between the drive shaft of the motor 11 and the rotating disk 12. A rotating ring 13, a hollow annular structure, is fixedly connected to the right side of the rotating disk 12 to reduce weight while maintaining structural strength. A sliding assembly is fixedly connected to the right side of the rotating ring 13, and a sliding rod 14 is fixedly connected to the left side. The connection of the rotating ring 13 is rigid to ensure that the sliding rod 14 moves synchronously when the rotating ring 13 rotates. One of the fixing blocks 16 is slidably connected to the outside of the sliding rod 14. Multiple scraper blades 17 are fixedly connected to the rear side of the sliding rod 14. The size of the scraper blades 17 needs to match the area and shape to be scraped to ensure the efficiency and effectiveness of dust removal.

[0033] Reference Figures 2 to 4 The bottoms of the two fixed columns 7 are fixedly connected to the top of the base plate 2. This fixed connection ensures the stability of the fixed columns 7. The adjacent sides of the two connecting rods 5 are in contact with the mold 9, providing reliable support for the mold 9 to be fixed in conjunction with the connecting rods 5. The bottoms of the two connecting rods 5 are slidably connected to the top of the base plate 2. This slidable connection allows the connecting rods 5 to move within a certain range. The top of the mold 9 has a mold groove 22 and a collection groove 18. The bottoms of multiple scrapers 17 are slidably connected to the top of the mold 9. The function of the collection groove 18 is to collect excess molten metal, impurities, or dust scraped off during the casting process. The sliding assembly includes a slide rod 15. The left side of the slide rod 15 is fixedly connected to the right side of the rotating ring 13. The slide rod 15 is a key component of the sliding assembly, and its shape is cylindrical or prismatic. The left side of the slide rod 15 is slidably connected to the inside of another fixed block 16. The bottoms of the two fixed blocks 16 are fixedly connected to the top of the base plate 10, and the bottom of the slide rod 14 is slidably connected to the top of the base plate 10 to ensure the stability of the fixed blocks 16. The stable fixed blocks 16 play an important supporting and guiding role for the movement of the slide rod 15 and the slide rod 14, ensuring that the slagging assembly can work normally. The top of the support base 1 is fixedly connected to two support frames 19, and the container 21 is rotatably connected to the adjacent side of the two support frames 19. The support frames 19 are important components supporting the container 21. The top of the support base 1 is fixedly connected to the motor 20, and the drive end of the motor 20 is fixedly connected to the left side of the container 21. This direct connection method ensures that the power of the motor 20 can be effectively transmitted to the container 21. The drive end of motor 20 is fixedly connected to the left side of container 21. Multiple openings 23 are fixedly connected to the front side of container 21. When it is necessary to pour the molten metal in container 21 into mold 9, motor 20 can be started to make container 21 rotate slowly and pour the molten metal smoothly into mold trough 22. Multiple openings 23 can increase the uniformity and controllability of the molten metal flow.

[0034] Working principle: When the electric push rod 3 is in its initial position, it drives the linear motion of the push column 8, which in turn causes the connecting rod 4, which is rotatably connected to it, to swing. The swing of the connecting rod 4 causes the connecting rod 5, which is rotatably connected to it, to undergo a compound motion, including both translational motion and rotational motion around the connection point with the connecting rod 4. The motion of the connecting rod 5 is transmitted to the fixed rod 6. The fixed column 7 inside the fixed rod 6 rotates under the drive of the fixed rod 6. In the casting process of metal targets, high-temperature molten metal is usually involved. Even when the state of the fixed parts is relatively unstable, the molten metal can still fill the mold relatively evenly, reducing the target size deviation caused by the shaking of the casting device. This can improve the reliability and stability of the entire casting device, thereby improving the casting quality of the metal target and making the flow and solidification process of the molten metal more stable, which helps to improve the accuracy of the metal target size.

[0035] When motor 11 starts, its drive shaft begins to rotate, driving the rotating disk 12, which is fixedly connected to it, to rotate. The rotation of the rotating disk 12 causes the rotating ring 13, which is fixedly connected to its right side, to rotate synchronously. The sliding rod 14 reciprocates. Since it is slidably connected to the fixed block 16, the fixed block 16 guides and constrains the movement of the sliding rod 14. At the same time, multiple scrapers 17, which are fixedly connected to the rear side of the sliding rod 14, move together with the sliding rod 14. Metal is prone to react with oxygen in the air at high temperatures to form an oxide layer. These impurities and oxide layers will affect the quality and performance of the target material. Therefore, the surface needs to be scraped off. During the casting process, due to factors such as the fluidity of the molten metal and the precision of the mold, the surface of the target material may become uneven. An uneven surface will affect the subsequent processing and use of the target material. Therefore, scraping treatment is required to make the surface smooth and flat.

[0036] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A metal target casting apparatus, comprising a support base (1), characterized in that: The top of the support base (1) is fixedly connected to a base plate (2), the top of the base plate (2) is fixedly connected to an electric push rod (3), the drive end of the electric push rod (3) is fixedly connected to a push column (8), the outside of the push column (8) is rotatably connected to two connecting rods (4), the left side of each of the two connecting rods (4) is rotatably connected to a connecting rod (5), the adjacent side of each of the two connecting rods (5) is fixedly connected to a fixing rod (6), the inside of each of the two fixing rods (6) is rotatably connected to a fixing column (7), and the top of the support base (1) is fixedly connected to a dust scraping assembly for cleaning.

2. The metal target casting apparatus according to claim 1, characterized in that: The scraping assembly includes a base plate two (10), the bottom of which is fixedly connected to the top of the support base (1). A motor one (11) is fixedly connected inside the base plate two (10). A rotating disk (12) is fixedly connected to the drive end of the motor one (11). A rotating ring (13) is fixedly connected to the right side of the rotating disk (12). A sliding assembly is fixedly connected to the right side of the rotating ring (13). A sliding rod (14) is fixedly connected to the left side of the rotating ring (13). One of the fixed blocks (16) is slidably connected to the outside of the sliding rod (14). Multiple scrapers (17) are fixedly connected to the rear side of the sliding rod (14).

3. The metal target casting apparatus according to claim 2, characterized in that: The bottoms of the two fixed columns (7) are fixedly connected to the top of the base plate (2), and the mold (9) is in contact with the adjacent side of the two connecting rods (5).

4. The metal target casting apparatus according to claim 3, characterized in that: The bottom of the two connecting rods (5) are slidably connected to the top of the base plate (2), and the top of the mold (9) is provided with a mold groove (22).

5. A metal target casting apparatus according to claim 3, characterized in that: The top of the mold (9) is provided with a collection groove (18), and the bottom of the plurality of scrapers (17) are slidably connected to the top of the mold (9).

6. The metal target casting apparatus according to claim 2, characterized in that: The sliding assembly includes a slide rod (15), the left side of which is fixedly connected to the right side of the rotating ring (13), and the left side of which is slidably connected to the inside of another fixed block (16).

7. A metal target casting apparatus according to claim 2, characterized in that: The bottom of the two fixed blocks (16) is fixedly connected to the top of the second base plate (10), the bottom of the sliding rod (14) is slidably connected to the top of the second base plate (10), and the top of the support base (1) is fixedly connected to two support frames (19), and a container (21) is rotatably connected to the adjacent side of the two support frames (19).

8. The metal target casting apparatus according to claim 7, characterized in that: The top of the support base (1) is fixedly connected to a motor (20), the drive end of the motor (20) is fixedly connected to the left side of the container (21), and multiple openings (23) are fixedly connected to the front side of the container (21).

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