Scanning electron microscope sample stage and scanning electron microscope sample stage mounting structure

Abstract

The utility model discloses a scanning electron microscope sample table and a scanning electron microscope sample table mounting structure. The scanning electron microscope sample table comprises a table base, a driving module, a transmission module and a belt rotating module, the driving module and the transmission module are both mounted on the pedestal; the driving module is arranged on one side of the pedestal and comprises a driving part for driving the annular sample to rotate; one end of the transmission module is connected with the driving module, and the other end extends out of the pedestal and is connected with the rotating part. According to the utility model, the annular sample is hung on the driving module, and the driving module and the transmission module are matched to drive the driving module to rotate, so that the annular sample is driven to rotate, and repeated sampling and sample loading are not needed when the scanning electron microscope observes the surface of the annular sample, and the observation efficiency is greatly improved; and the annular sample layout can be prevented from being damaged due to repeated sampling and loading. In addition, the driving and rotating module is arranged on one side of the pedestal, so that the annular sample hung on the driving and rotating module cannot be interfered and influenced by the pedestal in the rotating process.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of annular sample detection equipment, especially to a scanning electron microscope sample stage and scanning electron microscope sample stage mounting structure. BACKGROUND

[0002] Scanning electron microscope (SEM, for short scanning electron microscope) is widely used in current scientific research and engineering field because of high resolution, large depth of field and strong sample compatibility. Scanning electron microscope can realize fine characterization of surface morphology of complex structure, fracture and the like by using electron imaging, and can also realize acquisition of composition information, element contrast information and transmission electron imaging of specified area on the basis of original surface morphology observation by means of a probe such as backscattering, energy spectrometer and projection kit. The sample type, size, conductivity, surface state, sensitivity to electron beam and vacuum and sensitivity to temperature will all limit the observation effect of the sample, so the sample stage of the scanning electron microscope is crucial to the observation result.

[0003] The structure of solid samples is various, including bar, wire, plate, powder, block, semispherical ball and ring, etc. When the current scanning electron microscope observes the surface of the annular sample with circumferential curvature, it is necessary to continuously tilt and focus the sample stage to observe the local surface, and the sample needs to be repeatedly taken and loaded, which is time-consuming and laborious, and the annular sample layout is severely damaged, which greatly limits the surface morphology observation of the annular sample (various pipe fittings, ring welds, corrugated joints, springs, bolt embedded metal sleeves and bearing sleeves) with circumferential curvature in scientific research and engineering application.

[0004] In addition, since the sample stage of the current scanning electron microscope is installed on the fixed gantry of the scanning electron microscope by screws, it needs to be slowly aligned, and the installation efficiency is low. SUMMARY

[0005] The utility model aims at overcoming the defects of prior art, and provides a scanning electron microscope sample stage.

[0006] To achieve the above-mentioned purpose, the technical scheme provided by the utility model is as follows:

[0007] A scanning electron microscope sample stage, comprising a pedestal, a driving module, a transmission module, a belt rotating module;

[0008] The driving module and the transmission module are both installed on the pedestal.

[0009] The belt rotating module is arranged on one side of the pedestal and comprises a belt rotating member for rotating the annular sample.

[0010] One end of the transmission module is connected with the driving module, and the other end extends out of the pedestal and is connected with the belt rotating member.

[0011] In the technical solution, the annular sample is hung on the belt rotating module, and the belt rotating module is driven to rotate by the driving module and the transmission module, so as to drive the annular sample to rotate, so that the scanning electron microscope does not need to repeatedly take and load the sample when observing the surface of the annular sample, greatly improving the observation efficiency, and avoiding damage to the layout of the annular sample due to repeated taking and loading.

[0012] In addition, the belt rotating module is arranged on one side of the pedestal (i.e. outside the pedestal), so that the annular sample hung on the belt rotating module will not be affected by the pedestal during rotation.

[0013] Further, the belt rotating member is a driving wheel;

[0014] The side of the driving wheel close to the driving module is provided with an inner stopper;

[0015] The end of the transmission module extending out of the pedestal passes through the driving wheel, and the end is connected with an outer stopper;

[0016] The inner stopper and the outer stopper cooperate to limit the annular sample, so as to avoid deviation of the annular sample during rotation, affecting the observation of the surface of the annular sample by the scanning electron microscope.

[0017] Further, the outer stopper is threadedly connected with the transmission module, and the distance between the inner stopper and the outer stopper is adjusted by threads, so as to adapt to annular samples of different widths.

[0018] Further, the outer stopper includes a stud and a baffle;

[0019] One end of the stud is connected with the center of the side surface of the baffle;

[0020] The side surface of the baffle connected with the stud is provided with an inclined structure, which can limit the annular sample hung on the driving wheel without affecting the rotation of the annular sample driven by the driving wheel.

[0021] Further, the cross section of the inclined structure is trapezoidal.

[0022] Further, the surface of the driving wheel is provided with a pattern for increasing the friction between the driving wheel and the annular sample.

[0023] Further, the driving module is a driving motor;

[0024] The transmission module includes a bearing, a bearing seat, and a transmission shaft;

[0025] The bearing seat is installed on the pedestal;

[0026] The transmission shaft is rotatably connected with the bearing seat through a bearing, and one end of the transmission shaft extending out of the pedestal is connected with the outer blocking piece through the driving wheel, and the other end is connected with the output end of the driving motor through the gear assembly.

[0027] Further, the utility model provides a scanning electron microscope sample table mounting structure, it includes fixed platform and scanning electron microscope sample table above-mentioned,

[0028] The top of the fixed platform is provided with a buckle protrusion and a limiting column;

[0029] The pedestal comprises a base;

[0030] The base is provided with a buckle groove and a limiting groove, which are limitedly matched through the limiting groove and the limiting column, and are buckled matched with the buckle protrusion and the buckle groove, so as to be limitedly buckled connected with the fixed platform.

[0031] In the technical scheme, the scanning electron microscope sample can be quickly mounted by only moving the scanning electron microscope sample table transversely, inserting the buckle protrusion of the fixed platform into the buckle groove of the base, and inserting the limiting column into the limiting groove.

[0032] Further, the buckle groove and the limiting groove are continuously narrowed from the groove opening to the groove interior, and the groove bottom of the buckle groove is provided with a stepped structure.

[0033] Through the respective widened groove openings, the buckle protrusion of the fixed platform can be quickly inserted into the buckle groove of the base, and the limiting column of the fixed platform can be quickly inserted into the limiting groove; the respective grooves are continuously narrowed, which plays a quick insertion guiding role.

[0034] Further, the pedestal further comprises a support seat mounted on the top of the base, the bottom of the support seat is provided with supporting legs, and a hollow structure is formed between adjacent supporting legs, so that the installation personnel can observe the alignment and installation condition of the base and the fixed platform through the hollow structure.

[0035] Compared with the prior art, the technical scheme has the following principles and advantages:

[0036] 1. The annular sample is hung on the belt rotating module, and the belt rotating module is driven to rotate through the cooperation of the driving module and the transmission module, so as to drive the annular sample to rotate, so that the scanning electron microscope does not need to repeatedly take and mount samples when observing the surface of the annular sample, greatly improves the observation efficiency, and avoids damaging the layout of the annular sample due to repeated sampling and mounting. In addition, the belt rotating module is arranged on one side of the pedestal (i.e. outside the pedestal), so that the annular sample hung on the belt rotating module will not be affected by the interference of the pedestal during rotation.

[0037] 2、The inner stop and the outer stop cooperate to limit the annular sample, which can avoid deviation of the annular sample during rotation, and affect observation of the surface of the annular sample by the scanning electron microscope.

[0038] 3、The side surface of the baffle connected with the stud is provided with an inclined structure, which can limit the annular sample hung on the driving wheel and will not affect rotation of the annular sample driven by the driving wheel.

[0039] 4、The base is provided with a buckle groove and a limiting groove, which are limited and cooperated through the limiting groove and the limiting column, and are buckled and cooperated through the buckle groove and the buckle convex part, so that the scanning electron microscope sample stage can be quickly installed by only horizontally moving the scanning electron microscope sample stage, inserting the buckle convex part of the fixed rack into the buckle groove of the base, and inserting the limiting column into the limiting groove.

[0040] 5、The bottom of the holder is provided with supporting feet, and a hollow structure is formed between adjacent supporting feet, so that an installation personnel can observe the alignment and installation condition of the base and the fixed rack through the hollow structure. SUMMARY

[0041] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the following will briefly introduce the services required in the embodiment or the prior art description, and obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of the drawings.

[0042] Figure 1 It is a perspective view of the scanning electron microscope sample stage of the present application;

[0043] Figure 2 It is a perspective view of the base in the scanning electron microscope sample stage of the present application;

[0044] Figure 3 It is a perspective view of the holder in the scanning electron microscope sample stage of the present application;

[0045] Figure 4 It is a side view of the outer stop in the scanning electron microscope sample stage of the present application;

[0046] Figure 5 It is a schematic view when the annular sample is hung on the scanning electron microscope sample stage;

[0047] Figure 6 It is a perspective view of the fixed rack;

[0048] Figure 7 It is a perspective view of the scanning electron microscope sample stage installed on the fixed rack.

[0049] REFERENCE NUMERALS:

[0050] 1-base; 2-driving module; 3-transmission module; 4-belt rotating module; 5-ring sample; 6-belt rotating piece; 7-inner blocking piece; 8-outer blocking piece; 9-stud; 10-blocking plate; 11-driving motor; 12-bearing seat; 13-transmission shaft; 14-fixed rack; 15-buckling convex part; 16-limiting column; 17-base; 18-supporting seat; 19-buckling groove; 20-limiting groove; 21-supporting leg. DETAILED DESCRIPTION

[0051] The utility model will be further explained in connection with specific embodiments as follows:

[0052] As shown in the drawing, the utility model discloses a scanning electron microscope sample stage, including base 1, driving module 2, transmission module 3, belt rotating module 4. Figures 1 to 5

[0053] The base 1 includes a base 17 and a supporting seat 18; the base 17 is provided with a buckling groove 19 and a limiting groove 20, both of which are continuously narrowed from the slot opening to the slot interior, and the groove bottom of the buckling groove 19 is provided with a stepped structure. The bottom of the supporting seat 18 is provided with supporting legs 21, and a hollow structure is formed between adjacent supporting legs 21; the supporting seat 18 is connected with the base 17 through the supporting legs 21 and placed on the top of the base 17.

[0054] The belt rotating module 4 is arranged on one side of the base 1 and includes a belt rotating piece 6 (specifically a driving wheel) for driving the ring sample 5 to rotate; the driving module 2 is a driving motor 11; the transmission module 3 includes a bearing, a bearing seat 12 and a transmission shaft 13; the driving motor 11 and the bearing seat 12 are both mounted on the supporting seat 18; the transmission shaft 13 is rotationally connected with the bearing seat 12 through the bearing, and one end of the transmission shaft 13 is connected with the output end of the driving motor 11 through a gear assembly, and the other end extends out of the base 1 and penetrates through the driving wheel; the side of the driving wheel close to the driving module 2 is provided with an inner blocking piece 7, and one end of the transmission shaft 13 penetrating through the driving wheel is threadedly connected with an outer blocking piece 8; the inner blocking piece 7 and the outer blocking piece 8 cooperate to limit the ring sample 5.

[0055] Specifically, the outer blocking piece 8 includes a stud 9 and a blocking plate 10; one end of the stud 9 is connected with the center of the side surface of the blocking plate 10; the side surface of the blocking plate 10 connected with the stud 9 is provided with an inclined structure, and the cross section of the inclined structure is trapezoidal; the surface of the driving wheel is provided with a pattern for increasing friction.

[0056] The working principle of the embodiment is as follows:

[0057] ​When the lens located above the sample table is needed to observe the surface of the annular sample 5 from top to bottom, the annular sample 5 is hung on the driving wheel of the belt driving module 4, and the driving wheel is driven to rotate by the driving motor 11, the gear assembly, the transmission shaft 13 and the cooperation, so as to drive the annular sample 5 to rotate, so that the scanning electron microscope does not need to repeatedly take and load the sample when observing the surface of the annular sample 5, greatly improving the observation efficiency, and avoiding the damage of the layout of the annular sample 5 caused by repeatedly taking and loading the sample. In addition, the driving wheel is arranged on one side of the pedestal 1 (i.e. outside the pedestal 1), so that the annular sample 5 hung on the driving wheel will not be affected by the pedestal 1 during rotation.

[0058] The inner stop piece 7 and the outer stop piece 8 cooperate to limit the annular sample 5, so as to avoid the deviation of the annular sample 5 during rotation, and affect the observation of the surface of the annular sample 5 by the scanning electron microscope. The outer stop piece 8 is threadedly connected with the transmission module 3, the distance between the inner stop piece 7 and the outer stop piece 8 is adjusted through the thread, so as to adapt to annular samples 5 with different widths. The side surface of the baffle 10 connected with the stud 9 is provided with an inclined structure, which can limit the annular sample 5 hung on the driving wheel, and will not affect the rotation of the annular sample 5 driven by the driving wheel.

[0059] As shown in Figures 6 to 7 The embodiment also includes a scanning electron microscope sample table installation structure, which comprises a fixed rack 14 and the above-mentioned scanning electron microscope sample table; the top of the fixed rack 14 is provided with a buckle protruding part 15 and a limiting column 16. The base 17 is limited and matched through the limiting groove 20 and the limiting column 16, and is buckled and matched through the buckle groove 19 and the buckle protruding part 15, so that only the above-mentioned scanning electron microscope sample table needs to be moved transversely, the buckle protruding part 15 of the fixed rack 14 is inserted into the buckle groove 19 of the base 17, and the limiting column 16 is inserted into the limiting groove 20, so that the quick installation of the scanning electron microscope sample table can be realized.

[0060] In addition, through the respective widened notches, the buckle protruding part 15 of the fixed rack 14 can be quickly inserted into the buckle groove 19 of the base 17, and the limiting column 16 of the fixed rack 14 can be quickly inserted into the limiting groove 20; the respective grooves are continuously narrowed, which plays a quick insertion guiding role.

[0061] The bottom of the support seat 18 is provided with supporting feet 21, and the adjacent supporting feet 21 form a hollow structure, so that the installation personnel can observe the alignment and installation condition of the base 17 and the fixed rack 14 through the hollow structure.

[0062] The above-mentioned embodiments are only the preferred embodiments of the utility model, and do not limit the implementation range of the utility model, so that any change made according to the shape and principle of the utility model should be covered in the protection range of the utility model.

Claims

1. A scanning electron microscope sample stage, characterized in that, Includes a base, drive module, transmission module, and belt drive module; Both the drive module and the transmission module are mounted on the pedestal; The rotating module is located on one side of the platform and includes a rotating component that drives the annular sample to rotate. One end of the transmission module is connected to the drive module, and the other end extends to the platform and is connected to the belt rotating component.

2. The scanning electron microscope sample stage according to claim 1, characterized in that, The rotating component is a drive wheel; The drive wheel is provided with an inner stop on the side near the drive module; The transmission module extends from one end of the platform, passes through the drive wheel, and is connected to an outer stop at that end; The inner and outer baffles work together to limit the position of the annular sample.

3. A scanning electron microscope sample stage according to claim 2, characterized in that, The outer stop is threadedly connected to the transmission module.

4. A scanning electron microscope sample stage according to claim 3, characterized in that, The outer stop includes a stud and a baffle; One end of the stud is connected to the center of the side of the baffle; The side where the baffle connects to the stud has an inclined structure.

5. A scanning electron microscope sample stage according to claim 4, characterized in that, The cross-section of the inclined structure is trapezoidal.

6. A scanning electron microscope sample stage according to claim 2, characterized in that, The surface of the drive wheel is provided with textures to increase friction.

7. A scanning electron microscope sample stage according to claim 2, characterized in that, The drive module is a drive motor; The transmission module includes bearings, bearing housings, and a transmission shaft; The bearing housing is mounted on the pedestal; The drive shaft is rotatably connected to the bearing housing via a bearing, and one end of the drive shaft extends out of the housing, passes through the drive wheel and connects to the outer stop, while the other end is connected to the output end of the drive motor via a gear assembly.

8. A scanning electron microscope sample stage mounting structure, characterized in that, Includes a fixed stage and a scanning electron microscope sample stage as described in any one of claims 1-7; The top of the fixed platform is provided with a buckle protrusion and a limiting post; The pedestal includes a base; The base is provided with a buckle groove and a limiting groove. It is limited by the limiting groove and the limiting post, and is buckled by the buckle groove and the buckle protrusion, thereby connecting with the limiting buckle of the fixed frame.

9. The scanning electron microscope sample stage mounting structure according to claim 8, characterized in that, Both the buckle groove and the limiting groove narrow from the opening into the groove, and the bottom of the buckle groove has a stepped structure.

10. A scanning electron microscope sample stage mounting structure according to claim 8, characterized in that, The pedestal also includes a support mounted on top of the base, the support having supporting legs at the bottom, and a hollow structure formed between adjacent supporting legs.

Images