Electrode uranium layer thickness detection device

Abstract

The utility model discloses an electrode uranium layer thickness detection device, and relates to the detection device technology field, the electrode uranium layer thickness detection device comprises a clamping mechanism, an optical film thickness gauge, a microscope and a sliding platform, the clamping mechanism comprises a clamping claw and a support frame, the support frame comprises a first support plate and a second support plate, the clamping claw is rotatably connected to the first support plate around a rotation axis, and the second support plate is rotatably connected to the optical film thickness gauge. The clamping jaw is used for clamping the first end of the electrode, the second supporting plate can bear the second end of the electrode, and the clamping jaw is rotationally connected to the first supporting plate around the axis of the electrode; the optical film thickness gauge is provided with a probe; an objective lens of the microscope is arranged above the electrode, and a lens barrel of the microscope is connected with the probe; the sliding platform comprises an X moving platform, the supporting frame is connected to the upper portion of the X moving platform, and the X moving platform can drive the supporting frame to move in the direction parallel to the axis of the electrode so as to drive the electrode to move in the direction parallel to the axis of the electrode. According to the utility model, the uranium layer thickness of the cylindrical or cylindrical electrode can be detected, and the detection precision is high.

Description

TECHNICAL FIELD

[0001] The utility model relates to detection device technical field, especially to a kind of electrode uranium layer thickness detection device. BACKGROUND

[0002] During the operation of nuclear reactor, various detectors are arranged in its core and outside to monitor the neutron flux of reactor core and outside, to ensure the safe operation of nuclear reactor. Fission ionization chamber is one of them, which is usually composed of electrode and shell. The neutron sensitive material (including uranium or uranium compound, i.e. uranium layer) plated on the surface of the electrode captures neutrons to produce fission fragments to ionize the working gas and generate signals, thereby realizing the measurement of neutron flux. Since the mass of uranium fission fragments is large, the self-absorption effect in the uranium layer is significant, and the mass, thickness and thickness of the uranium layer have a great influence on the neutron sensitivity, which is a key indicator of fission ionization chamber.

[0003] Currently, the mass of uranium layer can be accurately measured by precise weighing before and after plating, and the thickness and thickness of uranium layer can be evaluated by the appearance of uranium layer, such as plating color, morphology, etc., combined with the plating area. This method not only relies heavily on personnel experience, but also has low detection accuracy because there is no specific value of thickness in the evaluation process. On the one hand, it is difficult to accurately evaluate the plating effect, and on the other hand, it also causes the situation that the uranium layer mass is the same but the sensitivity deviation is large in the subsequent neutron sensitivity verification process, which is not conducive to the development, manufacturing process and yield improvement of fission ionization chamber, and also causes waste of uranium material.

[0004] In the prior art, a nuclear fuel plate uranium uniformity detection device is disclosed in utility model patent CN216668631U, which sets up a detector assembly, and the detector assembly is provided with a gamma ray source and a receiver. The detector assembly is first calibrated, and gamma rays are emitted to the nuclear fuel plate with known uranium density. The detector receives the number of transmitted gamma rays transmitted to the lower side of the nuclear fuel plate, and obtains the corresponding relationship between the nuclear fuel plate with different uranium density values and the number of transmitted gamma rays. Then, the calibrated detector assembly is used to detect the unknown uranium uniformity of the nuclear fuel plate conveyed by the conveying device and passing through the detector assembly, thereby realizing the detection of the uranium uniformity of the nuclear fuel plate with unknown uranium uniformity. However, this uranium uniformity detection device uses gamma rays to detect the density of uranium material with a certain thickness (millimeter level or higher) in the plane nuclear fuel plate, and evaluates the density uniformity of uranium material by the change of density instead of directly measuring the thickness of uranium material. It cannot detect the thickness of uranium layer on the surface of electrode or other components, and does not have the ability to detect the thickness of uranium layer on the surface of cylindrical electrode, nor can it detect the thickness of micron to sub-micron plating layer. UTILITY MODEL CONTENTS

[0005] The utility model discloses an electrode uranium layer thickness detection device, including: clamping mechanism, the clamping mechanism includes clamping claw and support frame, the support frame includes first support plate and second support plate, the clamping claw rotates and is connected on the first support plate around the rotation axis, the clamping claw is used for clamping the first end of electrode and can drive the electrode rotates around the axis of the electrode, the second support plate can support the second end of electrode, optical film thickness appearance has probe, microscope, the objective lens of microscope is used to place above the electrode, the lens barrel of microscope is connected with the probe, the probe can emit light beam to the electrode through the objective lens, and receives the light signal of reflection on the electrode, and sliding platform, the sliding platform includes X mobile platform, the support frame is connected above the X mobile platform, the X mobile platform can drive the support frame moves along the direction parallel to the axis of the electrode, and then drives the electrode moves along the direction parallel to the axis of the electrode.

[0006] To achieve the above object, the utility model provides the following scheme:

[0007] The utility model provides an electrode uranium layer thickness detection device, including: clamping mechanism, the clamping mechanism includes clamping claw and support frame, the support frame includes first support plate and second support plate, the clamping claw rotates and is connected on the first support plate around the rotation axis, the clamping claw is used for clamping the first end of electrode and can drive the electrode rotates around the axis of the electrode, the second support plate can support the second end of electrode, optical film thickness appearance has probe, microscope, the objective lens of microscope is used to place above the electrode, the lens barrel of microscope is connected with the probe, the probe can emit light beam to the electrode through the objective lens, and receives the light signal of reflection on the electrode, and sliding platform, the sliding platform includes X mobile platform, the support frame is connected above the X mobile platform, the X mobile platform can drive the support frame moves along the direction parallel to the axis of the electrode, and then drives the electrode moves along the direction parallel to the axis of the electrode.

[0008] In some embodiments, the electrode uranium layer thickness detection device further comprises a rotating drive assembly, a first through hole is formed in the first support plate, an output member of the rotating drive assembly is connected with the first support plate through the first through hole, one end of the output member of the rotating drive assembly protruding from the first support plate is fixedly connected with the clamping claw, and the rotating drive assembly can drive the clamping claw to rotate the electrode around the rotation axis by any angle.

[0009] In some embodiments, the electrode uranium layer thickness detection device further comprises a lifting mechanism, the lifting mechanism is connected with the second support plate, an output member of the lifting mechanism is connected with the second end of the electrode and can drive the second end of the electrode to move vertically, so that the second end of the electrode is close to or away from the objective lens.

[0010] In some embodiments, the second support plate is arranged opposite to the first support plate, a second through hole is formed in the second support plate, a supporting block is movably arranged in the second through hole, the supporting block is provided with a supporting hole, the second end of the electrode can pass through the supporting hole to be supported by the supporting block, and the lifting mechanism is connected with the supporting block and can drive the supporting block to move vertically in the second through hole.

[0011] In some embodiments, the electrode uranium layer thickness detection device further comprises an X-direction driving device, an output of the X-direction driving device is connected with the X-moving platform, and the X-direction driving device can drive the X-moving platform to move along a direction parallel to an axis of the electrode.

[0012] In some embodiments, the sliding platform further comprises a horizontal rotary arc swing table, a connecting shaft and a swing driving device, the support frame is connected to a top of the horizontal rotary arc swing table, the connecting shaft is rotatably connected to a top of the X-moving platform around an axis of the connecting shaft, the horizontal rotary arc swing table is fixedly connected to the connecting shaft, and the axis of the connecting shaft is perpendicular to a moving direction of the X-moving platform; an output of the swing driving device is connected with the connecting shaft, and the swing driving device can drive the connecting shaft to rotate, so as to drive the horizontal rotary arc swing table to rotate around the axis of the connecting shaft.

[0013] In some embodiments, the sliding platform further comprises a Y-moving platform and a Y-direction driving device, the X-moving platform is connected to the Y-moving platform along a direction parallel to an axis of the electrode, the Y-moving platform can move in a direction perpendicular to the axis of the electrode, so as to drive the electrode to move along a direction perpendicular to the axis of the electrode, and an output of the Y-direction driving device is connected with the Y-moving platform, and the Y-direction driving device can drive the Y-moving platform to move in the direction perpendicular to the axis of the electrode.

[0014] In some embodiments, the sliding platform further comprises a lifting platform and a vertical driving device, the Y-moving platform is connected to the lifting platform along a direction perpendicular to the axis of the electrode, and a moving direction of the lifting platform is perpendicular to moving directions of the X-moving platform and the Y-moving platform; an output of the vertical driving device is connected with the lifting platform, and the vertical driving device can drive the lifting platform to move vertically, so as to enable the electrode to approach or move away from the objective lens.

[0015] In some embodiments, the electrode uranium layer thickness detection device further comprises a base, the base is connected to a bottom of the lifting platform, and the lifting platform and the base form a vertical moving connection.

[0016] In some embodiments, the electrode uranium layer thickness detection device further comprises an auxiliary light source, the auxiliary light source is arranged in parallel to and at the same height as the electrode axis, the auxiliary light source can illuminate the electrode and form a bright-dark boundary line in the electrode axis direction, and any position on the bright-dark boundary line can be adjusted to the center of a field of view of the microscope and be in a focal plane.

[0017] Compared with the prior art, the electrode uranium layer thickness detection device has the following technical effects:

[0018] The utility model provides a kind of electrode uranium layer thickness detection device, optical film thickness gauge can measure the thickness of micron grade to submicron grade plating layer, the probe of optical film thickness gauge is connected with the lens barrel of microscope, the position of electrode in microscope field of view is adjusted by the clamping jaw of being able to rotate and X moving platform, and the tiny area needing measurement on electrode uranium layer is found out using microscope, the light source emitted by optical film thickness gauge is irradiated to the tiny area needing measurement on electrode uranium layer by lens barrel and the objective lens of microscope, and the light signal reflected on this area is received, the electrode uranium layer thickness of this area is obtained by analyzing reflected light signal, the tiny area measurement on electrode surface by microscope can reduce the influence of electrode curvature on test result, the result of measurement is more accurate, and detection precision is high. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or prior art, the drawings needed to be used in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained by those skilled in the art without creative labor on the premise of these drawings.

[0020] Figure 1 It is a structure schematic view of electrode uranium layer thickness detection device of an embodiment of the utility model;

[0021] Figure 2 It is a side view of electrode uranium layer thickness detection device of an embodiment of the utility model;

[0022] Figure 3 It is another angle structure schematic view of electrode uranium layer thickness detection device of an embodiment of the utility model;

[0023] Figure 4 It is a top view of electrode uranium layer thickness detection device of an embodiment of the utility model;

[0024] In the drawing: 1-optical film thickness gauge, 2-probe, 3-microscope, 4-objective lens, 5-clamping jaw, 6-second support plate, 7-horizontal rotation arc swing table, 8-X moving platform, 9-Y moving platform, 10-lifting platform, 11-base, 12-first support plate, 13-rotation drive assembly, 14-chock, 15-lifting mechanism, 16-supporting hole. DETAILED DESCRIPTION

[0025] Clearly, the described embodiments are merely a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0026] The utility model discloses an electrode uranium layer thickness detection device, to solve the prior art problem, make electrode uranium layer thickness detection device can detect cylindrical or cylindrical electrode uranium layer thickness, and detection precision is high.

[0027] In order to make the above-mentioned purpose, features and advantages of the utility model more apparent and easy to understand, the utility model will be further described in detail below with the drawings and specific embodiments.

[0028] The utility model provides a kind of electrode uranium layer thickness detection device, as shown in Figure 1 It includes clamping mechanism, optical film thickness meter 1, microscope 3 and sliding platform, clamping mechanism includes clamping jaw 5 and support frame, support frame includes first support plate 12 and second support plate 6, clamping jaw 5 is rotationally connected on first support plate 12, clamping jaw 5 is used to clamp the first end of electrode and can drive electrode rotation around the axis of electrode, and second support plate 6 can support the second end of electrode;Optical film thickness meter 1 has probe 2;The objective lens 4 of microscope 3 is used to be placed above electrode, the lens barrel of microscope 3 is connected with probe 2, probe 2 can emit light beam to electrode through objective lens 4, and receive the light signal reflected on electrode;And sliding platform includes X moving platform 8, support frame is connected above X moving platform 8, X moving platform 8 can drive support frame to move along the direction parallel to the axis of electrode, in turn drive electrode to move along the direction parallel to the axis of electrode.

[0029] Optical film thickness meter 1 can measure the thickness of micron level to submicron level coating, connect the probe 2 of optical film thickness meter 1 with the lens barrel of microscope 3, the light source emitted by optical film thickness meter 1 is irradiated to electrode through the lens barrel and the objective lens 4 of microscope 3, the light source is vertically irradiated on the electrode to be measured, part of light is reflected on the surface of electrode uranium layer, another part is transmitted through uranium layer, and is reflected between uranium layer and electrode surface, the light reflected on the surface of uranium layer and the light reflected between uranium layer and electrode surface generates interference phenomenon, and the thickness of uranium layer will cause the change of optical path difference, thereby affecting the light and dark distribution of interference fringes, and optical film thickness meter 1 can calculate the thickness of uranium layer by measuring the position and spacing of these interference fringes.

[0030] The first end of the electrode is clamped by the clamping jaw 5, the second end of the electrode is supported by the second support plate 6, the clamping jaw 5 can drive the electrode to rotate, so that the thickness of the uranium layer of each region selected in the circumferential direction of the cylindrical or cylindrical electrode can be detected, when the clamping jaw 5 drives the electrode to rotate around the axis of the electrode, the rotation axis of the clamping jaw 5 coincides with the axis of the electrode; the support frame is detachably connected to the top of the X moving platform 8, the X moving platform 8 can drive the support frame to move along the direction parallel to the axis of the electrode, and then drive the electrode to move along the direction parallel to the axis of the electrode, so that the electrode moves relative to the objective lens 4 along the direction parallel to the axis of the electrode, thereby the thickness of the uranium layer in the axial direction of the cylindrical or cylindrical electrode can be detected.

[0031] The probe of the optical film thickness meter is connected with the lens barrel of the microscope, the position of the electrode in the field of view of the microscope is adjusted by the clamping jaw and the X moving platform, and the microscope is used to find the small area of the uranium layer of the electrode which needs to be measured, the light source emitted by the optical film thickness meter is irradiated to the small area of the uranium layer of the electrode which needs to be measured through the lens barrel and the objective lens 4 of the microscope 3, and the reflected light signal of the area is received, the thickness of the uranium layer of the electrode in the area is obtained by analyzing the reflected light signal, the small area of the electrode surface is measured, the influence of the curvature of the electrode on the test result is reduced, the measured result is more accurate, and the detection accuracy is high.

[0032] In another embodiment of the present embodiment, the sliding platform further comprises a first scale disc, the first scale disc is arranged along the axial direction of the electrode, and the first scale disc can display the distance of the X moving platform 8 moving along the axial direction of the electrode. The value displayed by the first scale disc can calibrate the position of the measurement area in the axial direction of the electrode, so as to obtain the thickness of the specific position in the axial direction of the electrode.

[0033] In another embodiment of the present embodiment, the electrode uranium layer thickness detection device further comprises a rotating driving assembly 13, a first through hole is formed in the first support plate 12, the output member of the rotating driving assembly 13 passes through the first through hole and is rotatably connected with the first support plate 12, one end of the output member of the rotating driving assembly 13 extending out of the first support plate 12 is fixedly connected with the clamping jaw 5, and the rotating driving assembly can drive the clamping jaw 5 to drive the electrode to rotate around the rotation axis by any angle. The clamping jaw 5 is detachably connected with the rotating driving assembly 13, the clamping jaw 5 with a corresponding size can be selected according to the diameter of the electrode, so that the clamping jaw 5 can clamp the electrode more firmly; when the electrode needs to be rotated, the clamping jaw 5 is driven to rotate by the rotating driving assembly 13, so as to drive the electrode to rotate by any angle.

[0034] In another embodiment of the present embodiment, the first support plate 12 is provided with a second scale dial, the second scale dial is arranged circumferentially along the rotating driving device, and the second scale dial can display the angle of the rotating driving device driving the rotating of the clamping jaw 5. The value displayed by the second scale dial can calibrate the position of the measurement area in the circumferential direction of the electrode, so as to obtain the thickness of the specific position in the circumferential direction of the electrode. Preferably, the rotating driving assembly 13 is a rotary damper device.

[0035] In another embodiment of the present embodiment, the rotating driving assembly 13 comprises a rotating shaft and a knob, the rotating shaft is rotatably connected with the first support plate 12 through the first through hole, one end of the rotating shaft is fixedly connected with the clamping jaw 5, and the other end of the rotating shaft is fixedly connected with the knob. Rotating the knob can drive the rotating shaft to rotate, so as to drive the clamping jaw 5 to rotate. By rotating the knob, the rotating angle of the electrode can be manually adjusted, which is convenient for fine adjustment of the rotating angle of the electrode, so that the objective lens 4 can be positioned at the selected measurement position on the electrode.

[0036] It should be noted that the electrode uranium layer thickness detection device provided by the present application is not limited to the structure in the above embodiment, and the rotating driving assembly 13 can also be a driving motor to drive the clamping jaw 5 to rotate.

[0037] In another embodiment of the present embodiment, as shown in Figures 2-3 The electrode uranium layer thickness detection device further comprises a lifting mechanism 15, the lifting mechanism 15 is connected to the second support plate 6, the output member of the lifting mechanism 15 is connected with the second end of the electrode and can drive the second end of the electrode to move vertically, so that the second end of the electrode is close to or away from the objective lens 4. By driving the end of the electrode not clamped by the clamping jaw 5 to move vertically through the lifting mechanism 15, the height of the end of the electrode not clamped by the clamping jaw 5 is adjusted, so that the electrode can be horizontally arranged below the objective lens 4, and the light source can be vertically irradiated on the electrode.

[0038] In another embodiment of the present embodiment, the second support plate 6 is arranged opposite to the first support plate 12, the second support plate 6 is provided with a second through hole, a supporting block 14 is movably arranged in the second through hole, the supporting block 14 is provided with a supporting hole 16, and the second end of the electrode can pass through the supporting hole 16 to realize the support of the second end of the electrode by the supporting block 14. The lifting mechanism 15 is connected with the supporting block 14 and can drive the supporting block 14 to move vertically in the second through hole. The edge of the supporting hole 16 of the supporting block 14 can limit the electrode, so as to prevent the second end of the electrode from being deviated during the vertical movement driven by the lifting mechanism 15, and the placement position of the electrode needs to be adjusted again, which increases the workload.

[0039] In another embodiment of the present embodiment, the lifting mechanism 15 comprises a lifting screw and a lifting knob, the supporting block 14 is threadedly connected to the lifting screw, the lifting screw is fixedly connected to the lifting knob, a guide device is arranged in the second through hole and can guide the moving direction of the supporting block 14, and rotating the lifting knob can make the lifting shaft ascend or descend, thereby driving the supporting block 14 to ascend or descend. When it is necessary to adjust the height of the end of the electrode supported by the supporting block 14, the lifting knob is rotated to vertically move the lifting shaft, thereby driving the supporting block 14 to vertically move, so as to adjust the height of the end of the electrode supported by the supporting block 14.

[0040] It should be noted that the lifting mechanism 15 of the electrode uranium layer thickness detection device is not limited to the structure in the above embodiment, and the lifting mechanism 15 can also adopt a driving motor, an air cylinder or a hydraulic cylinder to drive the supporting block 14 to vertically move.

[0041] In another embodiment of the present embodiment, the electrode uranium layer thickness detection device further comprises an X-direction driving device, the output member of the X-direction driving device is connected to the X-moving platform 8 and can drive the X-moving platform 8 to move along the direction parallel to the axis of the electrode. When it is necessary to drive the electrode to move along the direction parallel to the axis of the electrode, the X-direction driving device is started to drive the X-moving platform 8 to move along the direction parallel to the axis of the electrode, thereby driving the electrode to move along the direction parallel to the axis of the electrode. The X-direction driving device is connected to the Y-moving platform 9, and preferably, the X-direction driving device is an electric screw.

[0042] It should be noted that the X-direction driving device of the electrode uranium layer thickness detection device is not limited to the structure in the above embodiment, and the X-direction driving device can also adopt an air cylinder or a hydraulic cylinder to drive the X-moving platform 8 to move along the direction parallel to the axis of the electrode.

[0043] In another embodiment of the present embodiment, the sliding platform further comprises a horizontal rotary arc swing table 7, a connecting shaft and a swing driving device, the supporting frame is connected to the top of the horizontal rotary arc swing table 7, the connecting shaft is rotationally connected to the top of the X-moving platform 8 about the axis of the connecting shaft, the horizontal rotary arc swing table 7 is fixedly connected to the connecting shaft, and the axis of the connecting shaft is perpendicular to the moving direction of the X-moving platform 8; the output member of the swing driving device is connected to the connecting shaft and can drive the connecting shaft to rotate, thereby driving the horizontal rotary arc swing table 7 to rotate about the axis of the connecting shaft. When the axis of the connecting shaft is located below the end of the first end of the electrode when the clamping jaw 5 clamps the electrode, the swing driving device drives the connecting shaft to rotate, thereby driving the horizontal rotary arc swing table 7 to rotate about the axis of the connecting shaft in the R direction, which can drive the second end of the electrode to swing relative to the first end of the electrode, thereby adjusting the to-be-measured region of the electrode in the field of view of the microscope 3. Preferably, the swing driving device is a stepping motor.

[0044] It should be noted that the carrying device provided by the utility model, the rotating swing driving device is not limited to the structure in the above embodiment, and the swing driving device can also adopt a servo driving motor to drive the horizontal rotating arc swing table 7 to rotate around the axis of the connecting shaft.

[0045] In another embodiment of the present embodiment, the horizontal rotating arc swing table 7 is provided with mounting holes, and the first support plate 12 and the second support plate 6 are connected to the mounting holes through bolts, and the mounting holes can be provided in multiple numbers.

[0046] In another embodiment of the present embodiment, as shown in Figure 4 The sliding platform further comprises a third scale disc, which is arranged along the swing direction of the horizontal rotating arc swing table 7, and the third scale disc can display the angle of the horizontal rotating arc swing table 7 swinging along the R direction. Through the value displayed by the third scale disc, the angle of the second end of the electrode tilting relative to the first end of the electrode can be obtained, so that the position of the second end of the electrode can be adjusted according to the test requirement.

[0047] In another embodiment of the present embodiment, the sliding platform further comprises a Y moving platform 9 and a Y direction driving device, and the X moving platform 8 is movably connected to the Y moving platform 9 along the direction parallel to the axis of the electrode, the Y moving platform 9 can move in the direction perpendicular to the axis of the electrode, so as to drive the electrode to move along the direction perpendicular to the axis of the electrode; the output member of the Y direction driving device is connected to the Y moving platform 9 and can drive the Y moving platform 9 to move in the direction perpendicular to the axis of the electrode. When the electrode needs to be driven to move along the direction perpendicular to the axis of the electrode, the Y direction driving device is started, so that the Y direction driving device drives the Y moving platform 9 to move along the direction perpendicular to the axis of the electrode, and then drives the electrode to move along the direction perpendicular to the axis of the electrode. The Y direction driving device is connected to the lifting platform 10, and preferably, the Y direction driving device is an electric screw rod.

[0048] It should be noted that the electrode uranium layer thickness detection device provided by the utility model, the Y direction driving device is not limited to the structure in the above embodiment, and the Y direction driving device can also adopt a pneumatic cylinder or a hydraulic cylinder to drive the Y moving platform 9 to move along the direction perpendicular to the axis of the electrode.

[0049] In another embodiment of the present embodiment, the sliding platform further comprises a fourth scale disc, which is arranged along the moving direction of the Y moving platform 9, and the fourth scale disc can display the distance of the Y moving platform 9 moving along the direction perpendicular to the axis of the electrode. Through the value displayed by the fourth scale disc, the distance of the Y moving platform 9 moving along the direction perpendicular to the axis of the electrode can be obtained.

[0050] In another embodiment of the present embodiment, the sliding platform further comprises a lifting platform 10 and a vertical driving device, the Y moving platform 9 is connected to the lifting platform 10 in the vertical electrode axis direction, the moving direction of the lifting platform 10 is perpendicular to the moving direction of the X moving platform 8 and the Y moving platform 9; the output of the vertical driving device is connected with the lifting platform 10 and can drive the lifting platform 10 to move vertically, so that the electrode can be close to or away from the objective lens 4. When the electrode needs to be driven to move vertically, the vertical driving device is started, the vertical driving device drives the lifting platform 10 to move vertically, and then drives the electrode to move vertically, so that the electrode is close to or away from the objective lens 4.

[0051] In another embodiment of the present embodiment, the sliding platform further comprises a fifth scale disc, the fifth scale disc is arranged in the moving direction of the lifting platform 10, and the fifth scale disc can display the vertical moving distance of the lifting platform 10. The distance of the vertical movement of the lifting platform 10 can be obtained through the value displayed by the fifth scale disc. Preferably, the vertical driving device can adopt a lifting cylinder.

[0052] It should be noted that the vertical driving device of the electrode uranium layer thickness detection device provided by the present application is not limited to the structure in the above embodiment, and the vertical driving device can also be a hydraulic cylinder to drive the lifting platform 10 to move vertically.

[0053] In another embodiment of the present embodiment, the electrode uranium layer thickness detection device further comprises a base 11, the base 11 is connected to the bottom of the lifting platform 10, and the lifting platform 10 and the base 11 form a vertical moving connection. The base 11 can support the moving platform.

[0054] In another embodiment of the present embodiment, the electrode uranium layer thickness detection device further comprises an auxiliary light source, the auxiliary light source is arranged in parallel and at the same height with the electrode axis, the auxiliary light source can illuminate the electrode and form a bright-dark boundary line in the electrode axis direction, and any position on the bright-dark boundary line can be adjusted to the center of the field of view of the microscope 3 and in the focal plane. By adjusting the position of the electrode and the field of view of the microscope 3 with the aid of the auxiliary light source, the accuracy of positioning the small measurement area on the surface of the electrode can be improved; the auxiliary light source can be provided by a uniform light-emitting micro-CCFL (Cold Cathode Fluorescent Lamp) fluorescent lamp tube or an LED light strip with a length not shorter than the length of the electrode. In order to ensure that the bright-dark boundary line is clearly visible in the observation field of view of the microscope 3, the distance between the auxiliary light source and the electrode should not exceed 20 cm. At this time, there should be no other direct light sources towards the electrode in the environment, and the brightness of the auxiliary light source should not be lower than 200 lm when the ambient illuminance is 1000 lux.

[0055] The working process of the electrode uranium layer thickness detection device in the present application is as follows:

[0056] S1, select the light source and objective lens of the optical film thickness meter according to the color and size of the split electrode:

[0057] For thin uranium layer with yellow, green, red, blue, purple and gray-black electrode surface, visible light source and high magnification objective lens 4 within the specified range are used for measurement; for thick uranium layer with visually black electrode surface, near-infrared light source with maximum wavelength of 1100nm and low magnification objective lens 4 within the specified range are used for measurement.

[0058] For electrodes with a diameter of 1.5mm-8mm, 5x-10x objective lens 4 is used to find the test area, and 20x-50x objective lens 4 is used to detect the uranium layer thickness of the test points in the test area; for electrodes with a diameter of 8mm-20mm, 5x objective lens 4 is used to find the test area, and 10x-20x objective lens 4 is used to detect the uranium layer thickness of the test points in the test area; for electrodes with a diameter of 20mm-63mm, 2x-5x objective lens 4 is used to find the test area, and 5x-15x objective lens 4 is used to detect the uranium layer thickness of the test points in the test area.

[0059] S2, install the electrode;

[0060] Select the clamping jaw 5 corresponding to the diameter of the electrode, clamp the first end of the electrode with the clamping jaw 5, and pass the second end of the electrode through the support hole 16 opened on the support block 14.

[0061] S3, adjust the position of the electrode;

[0062] Turn on the auxiliary light source, use the low magnification objective lens 4 to find the starting point of the light-dark boundary line in the measurement area near the first end of the electrode, adjust the position to the center of the field of view of the microscope 3, and adjust the focus to make the position in the focal plane of the objective lens 4; adjust the position of the electrode through the lifting mechanism 15 and the sliding platform, until any position on the light-dark boundary line is located in the center of the field of view of the microscope and in the focal plane when adjusting the X moving platform 8 to move the electrode along the axis of the electrode, or adjusting the electrode to rotate around the axis of the electrode.

[0063] S4, adjust the position of the electrode again.

[0064] Turn off the auxiliary light source, use the low magnification objective lens, adjust the Y moving platform 9 to move along the axis perpendicular to the electrode, find the axis of the electrode combined with the reading of the fourth scale, and place it in the center of the field of view of the microscope, then adjust the focus to make it in the focal plane. Switch the low magnification objective lens to the high magnification objective lens, adjust the focus again to make the position in the focal plane of the high magnification objective lens, that is, complete the preparation work before measuring the thickness of the uranium layer.

[0065] S5, electrode measurement.

[0066] According to the requirements of the test, the electrode can be selected at several measurement positions in the electrode axial direction, respectively recorded as 0-x points, and several measurement positions in the electrode circumferential direction, respectively recorded as 0-y points, so as to obtain xy detection points, through the values on the first scale disc and the second scale disc, the specific positions of the xy detection points can be obtained, and through the X moving platform 8 and the rotating driving device, the adjustment, positioning and switching of the related detection points in the electrode axial direction and the circumferential direction are realized, and the thickness of the uranium layer of the xy detection points is detected.

[0067] S6, data processing.

[0068] The thickness of the uranium layer corresponding to each of the xy detection points is recorded to form a detection point matrix of 00-xy, that is, the distribution data of the thickness of the uranium layer on the electrode surface can be obtained.

[0069]

[0070] The thickness of the uranium layer on the electrode surface at the measurement position ij, 0≤i≤x, 0≤j≤y, is measured according to the uranium layer thickness deviation T ij That is, the deviation of the thickness of the electrode surface at the specific measurement position ij and the average thickness value of the uranium layer on the electrode surface can be obtained.

[0071] At the same time, combined with the unit area mass data obtained by the precise weighing of the uranium layer, the density of the uranium layer on the electrode surface can be evaluated, and under the condition of the same unit area mass, the greater the average thickness, the lower the density of the uranium layer, and the greater the negative impact on the firmness of the uranium layer.

[0072] The principle and implementation mode of the specific examples are described in the utility model, and the above embodiment is only used to help understand the method and core idea of the utility model; at the same time, for the general technical personnel in the field, according to the idea of the utility model, the specific implementation mode and application range will be changed. In conclusion, the content of the specification should not be understood as the limitation of the utility model.

Claims

1. An electrode uranium layer thickness detection device, characterized by: The utility model relates to a kind of electrode rotating and lifting device, including: Clamping mechanism, the clamping mechanism includes clamping jaw (5) and support frame, the support frame includes first support plate (12) and second support plate (6), the clamping jaw (5) is rotatably connected on the first support plate (12), the clamping jaw (5) is used to clamp the first end of electrode and can drive the electrode rotates around the axis of the electrode, the second support plate (6) can support the second end of electrode; Optical film thickness gauge (1), the optical film thickness gauge (1) has probe (2); Microscope (3), the objective lens (4) of the microscope (3) is used to be placed above the electrode, the barrel of the microscope (3) is connected with the probe (2), the probe (2) can emit light beam through the objective lens (4) on the electrode, and receive the light signal reflected on the electrode; And Sliding platform, the support frame is connected above the X moving platform (8), the X moving platform (8) can drive the support frame moves along the direction parallel to the axis of the electrode, in turn drive the electrode moves along the direction parallel to the axis of the electrode.

2. The electrode uranium layer thickness detection device according to claim 1, characterized by: Also include rotating drive assembly (13), the first through hole is opened in the first support plate (12), the output of the rotating drive assembly (13) passes through the first through hole and forms rotatable connection with the first support plate (12), the output of the rotating drive assembly (13) is fixedly connected with the clamping jaw (5) at one end of the first support plate (12), the rotating drive device can drive the clamping jaw (5) drive the electrode rotates around the rotation axis any angle.

3. The electrode uranium layer thickness detection device according to claim 1, characterized by: Also include lifting mechanism (15), the lifting mechanism (15) is connected with the second support plate (6), the output of the lifting mechanism (15) is connected with the second end of electrode and can drive the second end of electrode vertically moves, so that the second end of electrode is close to or away from the objective lens (4).

4. The electrode uranium layer thickness detection device according to claim 3, characterized by: The second support plate (6) is oppositely arranged with the first support plate (12), the second support plate (6) is opened with the second through hole, the supporting block (14) is vertically movably connected in the second through hole, the supporting block (14) is opened with support hole (16), the second end of electrode can pass through the support hole (16), to realize the support of the second end of electrode by the supporting block (14), the lifting mechanism (15) is connected with the supporting block (14) and can drive the supporting block (14) vertically moves in the second through hole.

5. The electrode uranium layer thickness detection apparatus according to claim 1, characterized by: Also include X direction drive device, the output of the X direction drive device is connected with the X moving platform (8), and can drive the X moving platform (8) moves along the direction parallel to the axis of the electrode.

6. The electrode uranium layer thickness detection apparatus according to claim 1, characterized by: The sliding platform further comprises a horizontal rotation arc swing table (7), a connecting shaft and a swing driving device, the support frame is connected to the top of the horizontal rotation arc swing table (7), the connecting shaft is rotationally connected to the top of the X moving platform (8) around the axis of the connecting shaft, the horizontal rotation arc swing table (7) is fixedly connected to the connecting shaft, and the axis of the connecting shaft is perpendicular to the moving direction of the X moving platform (8); the output of the swing driving device is connected with the connecting shaft and can drive the connecting shaft to rotate, thereby driving the horizontal rotation arc swing table (7) to rotate around the axis of the connecting shaft.

7. The electrode uranium layer thickness detection apparatus according to claim 6, characterized by: The sliding platform further comprises a Y moving platform (9) and a Y direction driving device, the X moving platform (8) is movably connected to the Y moving platform (9) along the axial direction of the electrode, the Y moving platform (9) can move in the direction perpendicular to the axial direction of the electrode, thereby driving the electrode to move along the direction perpendicular to the axial direction of the electrode; the output of the Y direction driving device is connected with the Y moving platform (9) and can drive the Y moving platform (9) to move in the direction perpendicular to the axial direction of the electrode.

8. The electrode uranium layer thickness detection apparatus according to claim 7, characterized by: The sliding platform further comprises a lifting platform (10) and a vertical driving device, the Y moving platform (9) is movably connected to the lifting platform (10) along the direction perpendicular to the axial direction of the electrode, and the moving direction of the lifting platform (10) is perpendicular to the moving directions of the X moving platform (8) and the Y moving platform (9); the output of the vertical driving device is connected with the lifting platform (10) and can drive the lifting platform (10) to move vertically, thereby enabling the electrode to approach or move away from the objective lens (4).

9. The electrode uranium layer thickness detection apparatus according to claim 8, characterized by: The sliding platform further comprises a base (11), the base (11) is connected to the bottom of the lifting platform (10), and the lifting platform (10) and the base (11) form a vertical moving connection.

10. The electrode uranium layer thickness detection apparatus according to claim 1, characterized by: The sliding platform further comprises an auxiliary light source, the auxiliary light source is arranged in parallel with and at the same height as the axial direction of the electrode, the auxiliary light source can illuminate the electrode and form a bright-dark boundary line in the axial direction of the electrode, and any position on the bright-dark boundary line can be adjusted to the center of the field of view of the microscope (3) and be in a focal plane.

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