Focused ion beam microscope ion source

Abstract

The utility model discloses a focused ion beam microscope ion source, which comprises an installation frame, two ion source pins are fixedly connected on the installation frame through openings, one side of each ion source pin is fixedly connected with an emission part, one end among a plurality of emission parts is fixedly connected with a Taylor cone, and the other end among the emission parts is fixedly connected with a focusing lens. A sliding shaft is slidably inserted into the bottom of the mounting frame, a rotating disc is fixedly connected to the bottom end of the sliding shaft, a sealing cover is clamped to the outer side of the rotating disc, a storage pipe sleeves the bottom end of the sealing cover in a threaded mode, a heating wire sleeves the outer wall of the circumference of the storage pipe, a gallium source body is stored in the storage pipe, and a discharging port is formed in the bottom end of the storage pipe. The top end of the Taylor cone penetrates through the discharging opening and is inserted into the storage pipe. The storage tube is stably mounted through the sliding shaft and the sealing cover, so that the storage tube is prevented from falling off, and the stability of the ion source is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to ion source technical field especially relates to a kind of focused ion beam microscopes ion source. BACKGROUND

[0002] The ion source structure of focused ion beam microscope (FIB) mainly includes liquid metal ion source and related electric field configuration. Typical ion source uses gallium as metal material, because gallium has low melting point, low vapor pressure and good oxidation resistance liquid metal ion source, by additional electric field to make liquid gallium form small tip, then through negative electric field to drag the gallium of tip, export gallium ion beam.

[0003] Through retrieval, the China patent with the announcement number CN215008134U discloses a kind of focused ion beam microscopes ion source, the ion source reservoir of the above-mentioned patent is welded in a welding fixed point by tungsten, so that the welding fixed point can not be melted into liquid state at 30 degrees Celsius normal temperature environment, to prevent the ion source reservoir from falling off from welding fixed point, but the above-mentioned patent installation stability is poor, leading to poor ion source stability, still there is the danger of un-welding, to affect the use effect of focused ion beam microscope. UTILITY MODEL CONTENT

[0004] The utility model aims at solving the problems that existing ion source reservoir is welded in a welding fixed point by tungsten, so that the welding fixed point can not be melted into liquid state at 30 degrees Celsius normal temperature environment, to prevent the ion source reservoir from falling off from welding fixed point, but the above-mentioned patent installation stability is poor, leading to poor ion source stability, still there is the danger of un-welding, to affect the use effect of focused ion beam microscope, and proposes a kind of focused ion beam microscopes ion source.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0006] A kind of focused ion beam microscopes ion source, including installation frame, the installation frame is fixedly connected with two ion source pins by opening, the side of ion source pin is fixedly connected with emission part, one end between multiple emission parts is fixedly connected with Taylor cone, the bottom of installation frame is slidably inserted with sliding shaft, the bottom of sliding shaft is fixedly connected with rotating disc, the outer side of rotating disc is clamped with sealing cover, the bottom of sealing cover is threadedly sleeved with storage tube, the circumferential outer wall of storage tube is sleeved with heating wire, gallium source body is stored in storage tube, the bottom of storage tube is equipped with discharge port, the top of Taylor cone is inserted into storage tube through discharge port.

[0007] Further, the Taylor cone is tungsten tip.

[0008] Further, the top end of the sliding shaft is fixedly connected with a limiting disc, and the limiting disc is located at the top of the mounting frame.

[0009] Further, the top of the sealing cover is provided with a plurality of air holes.

[0010] The utility model discloses beneficial effect is:

[0011] 1. Through the stable installation of the sliding shaft and the sealing cover to the storage tube, the falling of the storage tube is prevented, and the stability of the ion source is improved.

[0012] 2. Through the heating wire, the gallium source body in the storage tube is heated, the solid gallium source body is melted into liquid state, then, the liquid gallium source body flows along the Taylor cone downward, so that the liquid gallium source body flows to the tip of the Taylor cone, and the gallium ion beam in the liquid gallium source body of the tip of the Taylor cone is exported by the ion source pin and the emission part, which is convenient and fast. BRIEF DESCRIPTION OF DRAWINGS

[0013] Fig. 1 A three-dimensional structure schematic diagram of the ion source of the focused ion beam microscope is provided for the utility model;

[0014] Fig. 2 A bottom view structure schematic diagram of the ion source of the focused ion beam microscope is provided for the utility model;

[0015] Fig. 3 A partial cross-sectional structure schematic diagram of the ion source of the focused ion beam microscope is provided for the utility model.

[0016] In the drawing: 1, mounting frame;2, ion source pin;3, emission part;4, Taylor cone;5, sliding shaft;6, limiting disc;7, rotating disc;8, sealing cover;9, storage tube;10, gallium source body;11, discharge port;12, heating wire;13, air hole. DETAILED DESCRIPTION

[0017] The technical scheme in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model, and obviously, the described embodiments only are a part of the embodiments of the utility model, not all the embodiments.

[0018] REFERENCE Figs. 1-3The utility model provides a kind of focused ion beam microscope ion source, including mounting frame 1, two ion source pins 2 are welded on mounting frame 1 by opening, one side of ion source pin 2 is welded with emission part 3, one end between multiple emission parts 3 is welded with Taylor cone 4, the bottom of mounting frame 1 is slidably inserted with sliding shaft 5, the bottom end of sliding shaft 5 is welded with rotating disc 7, the outer side of rotating disc 7 is clamped with sealing cover 8, the bottom end of sealing cover 8 is threadedly sleeved with storage tube 9, sliding shaft 5 and sealing cover 8 are fixed to storage tube 9, the circumferential outer wall of storage tube 9 is sleeved with heating wire 12, gallium source body 10 is stored in storage tube 9, gallium source body 10 in storage tube 9 is heated using heating wire 12, the bottom end of storage tube 9 is provided with discharge port 11, the top end of Taylor cone 4 is inserted into storage tube 9 through discharge port 11, so as to facilitate the downward flow of liquid gallium source body 10.

[0019] Taylor cone 4 is tungsten tip, the top end of sliding shaft 5 is welded with limit disc 6, limit disc 6 is located at the top of mounting frame 1, so as to prevent the falling of sliding shaft 5, the top of sealing cover 8 is provided with multiple gas-permeable holes 13, and the gas formed by heating is discharged from gas-permeable hole 13.

[0020] The working principle of the embodiment is as follows: in use, first, store solid gallium source body 10 in storage tube 9, then, screw storage tube 9 on the bottom end of sealing cover 8, and make the top end of Taylor cone 4 inserted into gallium source body 10 in storage tube 9, so as to suspend and install storage tube 9 by sliding shaft 5 and sealing cover 8, then, heat gallium source body 10 in storage tube 9 using heating wire 12, melt solid gallium source body 10 into liquid, the gas formed by heating is discharged from gas-permeable hole 13, then, liquid gallium source body 10 flows downward along Taylor cone 4, so that liquid gallium source body 10 flows to the tip of Taylor cone 4, and then use ion source pin 2 and emission part 3 to guide gallium ion beam in liquid gallium source body 10 at the tip of Taylor cone 4 out.

[0021] The above is only the preferred specific implementation of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art, according to the technical scheme and the utility model concept of the utility model, within the technical range disclosed by the utility model, makes equivalent replacement or change, should be covered in the protection scope of the utility model.

Claims

1. A focused ion beam microscope ion source comprising a mounting frame (1), characterised in that, Two ion source pins (2) are fixedly connected on the mounting frame (1) through an opening, one side of the ion source pin (2) is fixedly connected with an emission part (3), one end between a plurality of emission parts (3) is fixedly connected with a Taylor cone (4), the bottom of the mounting frame (1) is slidably inserted with a sliding shaft (5), the bottom end of the sliding shaft (5) is fixedly connected with a rotating disc (7), the outer side of the rotating disc (7) is clamped with a sealing cover (8), the bottom end of the sealing cover (8) is threadedly sleeved with a storage tube (9), the circumferential outer wall of the storage tube (9) is sleeved with a heating wire (12), the storage tube (9) stores a gallium source body (10) therein, the bottom end of the storage tube (9) is provided with a discharge port (11), the top end of the Taylor cone (4) is inserted into the storage tube (9) through the discharge port (11).

2. A focused ion beam microscope ion source as claimed in claim 1, wherein, The Taylor cone (4) is a tungsten tip.

3. A focused ion beam microscope ion source as claimed in claim 1, wherein, The top end of the sliding shaft (5) is fixedly connected with a limiting disc (6), and the limiting disc (6) is located at the top of the mounting frame (1).

4. A focused ion beam microscope ion source as claimed in claim 1, wherein, A plurality of air holes (13) are arranged on the top of the sealing cover (8).

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