Structure of funnel cap bearing plate of hydrogenation furnace
By adopting a combination structure of angle steel sealing plate and sealing strip in the polycrystalline silicon hydrogenation furnace equipment, and optimizing the pore angle and guide pipe, the problems of thermal expansion of the wind cap bearing plate and silicon powder erosion were solved, thereby improving the stability and lifespan of the equipment.
Patent Information
- Application Number
- CN202520498116.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-20
- Publication Date
- 2026-03-20
- Estimated Expiration
- 2035-03-20
AI Technical Summary
In existing polycrystalline silicon hydrogenation furnace equipment, the joint area of the air cap support plate is easily damaged due to thermal expansion and silicon powder erosion, resulting in air leakage and equipment instability, which affects the service life.
The system employs a combination of angle steel sealing plates and sealing strips embedded at the joints, along with a sliding rail design, optimized vent angles and guide tubes, and utilizes tungsten inert gas welding and high-strength alloy support beams to ensure sealing and uniform airflow distribution.
It improves the operational stability and service life of the reactor, reduces the depth of silicon powder erosion pits, reduces the risk of gas leakage, and extends the life of key components.
Smart Images

Figure CN224018832U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of chemical production equipment, and in particular to the structure of a bearing plate for a hydrogenation furnace vent cap. Background Technology
[0002] In current polycrystalline silicon hydrogenation furnace equipment, the seam area of the vent cap support plate is prone to penetrating damage due to long-term erosion by silicon powder-containing gas flow, resulting in irregular pits (approximately 50mm in diameter). Specifically, the parallel pad between the support beam and the support plate develops fillet weld cracks due to thermal expansion, causing air leakage and silicon powder deposition, exacerbating gas flow erosion, and ultimately causing perforation of the support plate. In addition, the synergistic effect of silicon powder deposition at the vent cap nozzle and gas flow erosion leads to localized pits (approximately 20mm deep) in the support plate, and the flat steel seals, due to insufficient material ductility, are prone to cracking and failure under thermal stress, causing the upper and lower gas chambers of the equipment to be unable to operate independently, seriously affecting the stability and service life of the reactor.
[0003] Existing technologies mostly employ parallel gasket seals and flat steel welded structures, but these are insufficient to effectively address the dual challenges of thermal expansion stress and silicon powder erosion. Conventional sealing solutions are prone to leakage due to weld cracks, and uneven airflow distribution exacerbates localized erosion, resulting in frequent and costly maintenance. Therefore, there is an urgent need for an innovative solution that optimizes the sealing structure, improves airflow distribution, and enhances material corrosion resistance to overcome these technical bottlenecks. Summary of the Invention
[0004] The technical problem to be solved by this utility model is to provide a structure for the air cap support plate of a hydrogenation furnace, which can effectively improve the operating stability and service life of the reactor, and solve the problem of erosion penetration in the nozzle area of the joint between the air cap support plate and the distribution plate in the prior art.
[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:
[0006] A structure for a hydrogenation furnace vent cap support plate includes a vent cap, a sealing plate, and a support plate. An air inlet pipe is vertically installed on the support plate, and a vent cap is fitted at the air outlet of the air inlet pipe. The bottom end face of the vent cap is fixedly welded to the support plate, and air holes are provided on the side wall of the vent cap. The support plate has a spliced structure, and a supporting beam is provided below the splice seam of the support plate. A sealing plate is welded between the supporting beam and the support plate.
[0007] In a preferred embodiment, the bearing plate and the supporting beam are welded together by an angle steel sealing plate, and a sealing plate is provided between the bearing plate and the supporting beam. The sealing plate is embedded with a sealing strip and is located at the joint between the sealing plate and the bearing plate.
[0008] In a preferred embodiment, the bearing plate and the supporting beam are provided with sliding grooves, and the upper and lower end faces of the sealing strip are provided with retaining rails that engage with the sliding grooves.
[0009] In a preferred embodiment, a powder accumulation groove is provided inside the sealing strip, and the opening of the powder accumulation groove is directly opposite the splice seam of the bearing plate.
[0010] In the preferred embodiment, the opening angle of the air vents is 15° to 45° deviated from the horizontal upward direction, and the air vents are evenly distributed along the circumference of the wind cap.
[0011] In the preferred embodiment, a guide tube is inserted into the vent.
[0012] In a preferred embodiment, the end of the guide tube is provided with a threaded connector, and the air hole is provided with an internal thread that is threadedly connected to the threaded connector.
[0013] A structure for a hydrogenation furnace vent cap support plate, the device having the following beneficial effects:
[0014] 1. The system employs a combination of angle steel sealing plates and sealing strips embedded at the joints, along with a sliding rail design, to achieve modular, rapid installation and high-precision sealing. Thermal expansion stress is dispersed through angle steel bending and double-sided welding processes. The welds undergo 100% penetrant testing to completely eliminate the risk of fillet weld cracks, preventing air leakage and silica powder deposition, and ensuring independent operation of the upper and lower air chambers.
[0015] 2. The opening angle of the air vents is optimized to deviate from the horizontal upward by 15° to 45° and is evenly distributed along the circumference of the wind cap, so that the airflow is guided upward and evenly distributed, reducing the direct impact of silicon powder on the support plate and wind cap, and reducing the depth of erosion pits by more than 60%; the introduction of the guide tube further standardizes the airflow path, reduces local turbulent impact, and extends the life of key components.
[0016] 3. The use of tungsten inert gas welding (TIG) technology and welding wire, combined with a high-strength alloy support beam, enhances weld strength and resistance to thermal stress cracking (by more than 50%). The sealing strip incorporates a powder collection groove with its opening directly facing the joint, actively collecting deposited silicon powder to prevent secondary erosion and ensure long-term sealing stability.
[0017] 4. The design of the guide tube can further adjust the airflow direction, thereby reducing the impact of silica powder-containing airflow on the splice seam of the receiving plate. Attached Figure Description
[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments:
[0019] Figure 1 This is a planar sectional view of the overall structure of this utility model;
[0020] Figure 2 This is an enlarged schematic diagram of the connection method between the sealing plate and the receiving plate of this utility model;
[0021] Figure 3This is a further enlarged schematic diagram of the sealing plate of this utility model;
[0022] Figure 4 This is a schematic diagram of the air hole and guide tube structure of this utility model.
[0023] In the diagram: 1. Inlet pipe; 2. Air cap; 3. Air hole; 4. Support plate; 5. Angle steel sealing plate; 6. Sealing plate; 7. Sealing strip; 8. Rail; 9. Powder trough; 10. Guide pipe; 11. Threaded connector; 12. Detailed Implementation
[0024] like Figure 1 and Figure 2 As shown, a structure of a hydrogenation furnace vent cap support plate includes a vent cap 2, a sealing plate 7, and a support plate 4. An air inlet pipe 1 is vertically installed on the support plate 4, and a vent cap 2 is fitted at the air outlet of the air inlet pipe 1. The bottom end face of the vent cap 2 is fixedly welded to the support plate 4, and air holes 3 are opened on the side wall of the vent cap 2. The support plate 4 has a spliced structure, and a supporting beam 5 is provided below the splice seam of the support plate 4. A sealing plate 7 is welded between the supporting beam 5 and the support plate 4.
[0025] The bearing plate 4 is made of N08810 δ6mm sheet material. The internal airflow is ejected from the air hole 3 through the air inlet pipe 1. The airflow is upward, which does not erode the wind cap bearing plate 7 and optimizes the fluidization effect of the equipment.
[0026] Preferred solutions include Figure 2 As shown, the bearing plate 4 and the supporting beam 5 are welded together by an angle steel sealing plate 6, and a sealing plate 7 is provided between the bearing plate 4 and the supporting beam 5. The sealing plate 7 is embedded with a sealing strip 8 and is set at the joint between the sealing plate 7 and the bearing plate 4.
[0027] The angle steel sealing plate 6 is made of N08810 δ6mm sheet metal, pressed and bent using an R10 rounded corner cutter. After pressing, the angle steel sealing plate 6 needs to be solution treated. An appropriate allowance is made in the length direction, and it is cut according to the actual size. The splicing in the length direction is completed before welding with the bearing plate 4. Welding is performed on both sides. This structure aims to reduce stress cracks in the fillet welds caused by thermal expansion, and further prevent erosion caused by air leakage and silicon powder deposition. By setting the sealing plate 7 and sealing strip 8, the sealing performance at the splice of the bearing plate 4 is further improved, ensuring that the airflow mixed with silicon powder will not seep into the lower air chamber of the equipment through the splice and cause corrosion and burnout of the nozzle.
[0028] Preferred solutions include Figure 3 As shown, the bearing plate 4 and the supporting beam 5 are provided with sliding grooves, and the upper and lower end faces of the sealing strip 8 are provided with retaining rails 9 that engage with the sliding grooves; the above structure allows for quick disassembly and assembly of the sealing strip 8, facilitating the replacement of damaged sealing strips 8 in the future to ensure sealing performance.
[0029] Preferred solutions include Figure 3 As shown, a powder accumulation groove 10 is provided inside the sealing strip 8, and the opening of the powder accumulation groove 10 is directly opposite the splice seam of the support plate 4. Silicon powder that leaks through the splice seam of the support plate 4 will be collected in the powder accumulation groove 10. Workers can further prevent silicon powder from leaking into the lower air chamber of the equipment by regularly replacing the sealing strip 8 and cleaning the silicon powder in the powder accumulation groove 10.
[0030] Preferred solutions include Figure 4 As shown, the opening angle of the pores 3 is 15° to 45° off from the horizontal upward, and the pores 3 are evenly distributed around the circumference of the wind cap 2; this ensures that the hydrogen chloride mixed gas (containing silicon powder) will not directly erode the wind cap support plate 4 and the splice seam of the support plate 4 during feeding, effectively reducing the damage of the airflow to the wind cap support plate 4 and the inner wall of the equipment, while ensuring the fluidization effect.
[0031] Preferred solutions include Figure 4 As shown, a guide tube 11 is inserted into the air hole 3; a threaded connector 12 is provided at the end of the guide tube 11, and an internal thread is provided in the air hole 3 and is threadedly connected to the threaded connector 12.
[0032] When the angle of the airflow blown out from the air hole 3 still does not meet the actual use requirements, the guide tube 11 can be installed in the air hole 3 by means of threaded connection to further change the position of the airflow when it is blown out and reduce the impact of the airflow on the support plate 4.
Claims
1. A structure for a hydrogenation furnace vent cap support plate, comprising a vent cap (2), a sealing plate (7), and a support plate (4), characterized in that: An air inlet pipe (1) is vertically installed on a support plate (4). A wind cap (2) is fitted at the air outlet of the air inlet pipe (1). The bottom end face of the wind cap (2) is fixedly welded to the support plate (4). An air hole (3) is opened on the side wall of the wind cap (2). The support plate (4) is a spliced structure. A support beam (5) is provided below the splice seam of the support plate (4). A sealing plate (7) is welded between the support beam (5) and the support plate (4).
2. The structure of the hydrogenation furnace vent cap support plate according to claim 1, characterized in that: The bearing plate (4) and the supporting beam (5) are welded together by an angle steel sealing plate (6). A sealing plate (7) is provided between the bearing plate (4) and the supporting beam (5). The sealing plate (7) is embedded with a sealing strip (8) and is located at the joint between the sealing plate (7) and the bearing plate (4).
3. The structure of the hydrogenation furnace vent cap support plate according to claim 2, characterized in that: The bearing plate (4) and the supporting beam (5) are provided with sliding grooves, and the upper and lower end faces of the sealing strip (8) are provided with locking rails (9) and are engaged with the sliding grooves.
4. The structure of the hydrogenation furnace air cap support plate according to claim 2, characterized in that: A powder accumulation groove (10) is provided inside the sealing strip (8), and the opening of the powder accumulation groove (10) is directly opposite the splice joint of the bearing plate (4).
5. The structure of the hydrogenation furnace vent cap support plate according to claim 1, characterized in that: The opening angle of the vent (3) is 15° to 45° off horizontally upward, and the vent (3) is evenly distributed along the circumference of the wind cap (2).
6. The structure of the hydrogenation furnace vent cap support plate according to claim 5, characterized in that: A guide tube (11) is inserted into the vent (3).
7. The structure of the hydrogenation furnace vent cap support plate according to claim 6, characterized in that: The end of the guide tube (11) is provided with a threaded connector (12), and the air hole (3) is provided with an internal thread and is threadedly connected to the threaded connector (12).