Detection device for actuator

Abstract

The utility model discloses a detection device for an actuator. The detection device comprises a base; the limiting assembly is arranged on the base and used for fixing the actuator; the moving assembly is arranged on the base, is connected with the output end of the actuator and transmits the movement of the actuator; the load assembly is arranged in association with the moving assembly and is used for applying an adjustable load to the moving assembly; the measuring assembly is used for acquiring motion parameters and force parameters of the output end of the actuator; wherein the measuring assembly comprises a force sensor and a displacement measuring unit, the force sensor is arranged on the moving assembly and used for being connected with the output end of the actuator and measuring the output force of the actuator, and the displacement measuring unit comprises a laser interferometer, an interference mirror and a reflecting mirror. The method has the effect of solving the defects of the existing detection technology in the aspects of measurement accuracy, load simulation authenticity and system integration.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of actuator detection technology, and particularly relates to a detection device for an actuator. BACKGROUND

[0002] As a core driving component in the fields of automation equipment, precision instruments and robots, the output force, displacement accuracy, motion speed and dynamic response characteristics of a linear actuator directly determine the performance and reliability of a system. Therefore, accurate detection of the linear actuator is a key link in the research and development, production and maintenance of the linear actuator.

[0003] At present, the detection methods of the linear actuator mainly have the following deficiencies:

[0004] Limited measurement accuracy: conventional detection usually adopts a grating ruler, a magnetic grating ruler or a pull rope encoder to measure displacement, and cooperates with a force sensor to measure output force. The accuracy of such displacement measurement methods is usually in the micron level, which is difficult to meet the sub-micron or even nanometer level precision detection requirements of the actuator in the fields of semiconductor equipment and optical adjustment.

[0005] Unreal load simulation: the existing devices mainly focus on no-load or static parameter measurement. Although some devices attempt to simulate the load through an electromagnetic brake, a magnetic powder brake or a weight, there are obvious limitations: the electromagnetic / magnetic powder brake has a complex structure, high cost and may introduce additional interference; the weight loading cannot realize dynamic and programmed adjustment of the load, and is difficult to simulate the scene of load change in actual working conditions.

[0006] Low system integration: most detection devices have single functions, and there is lack of integrated design among measurement, load and fixing mechanism. This easily leads to non-uniform measurement reference, introduces errors in the test due to structural deformation or vibration, and also reduces the detection efficiency and the convenience of operation.

[0007] In summary, the existing technology fails to provide an actuator comprehensive performance detection scheme capable of simultaneously realizing high-precision displacement measurement, dynamic adjustable load simulation and high-rigidity integrated integration. CONTENT OF THE INVENTION

[0008] The present application provides a detection device for an actuator, which aims to solve the deficiencies of the existing detection technology in measurement accuracy, load simulation authenticity and system integration.

[0009] Specifically, the actuator detection device is integrated with a high-precision laser interferometer displacement measurement unit and a controllable dynamic friction load system, and is integrally arranged on a rigid base with an actuator fixing mechanism and a motion transmission mechanism, so that the output displacement, speed and force parameters of the actuator under adjustable load simulating real working conditions can be synchronously and accurately measured and recorded, thereby realizing comprehensive and reliable evaluation of the positioning accuracy, dynamic response and load carrying performance of the actuator, meeting the increasingly stringent testing requirements of high-end equipment for actuators, and significantly improving the accuracy, applicability and automation of detection.

[0010] The actuator detection device provided in the application adopts the following technical solution:

[0011] An actuator detection device comprises:

[0012] a base;

[0013] a limiting assembly arranged on the base and used for fixing the actuator;

[0014] a moving assembly arranged on the base and connected with the output end of the actuator and transmitting the motion thereof;

[0015] a load assembly arranged in association with the moving assembly and used for applying adjustable load to the moving assembly;

[0016] a measurement assembly used for acquiring the motion parameters and force parameters of the output end of the actuator;

[0017] The measurement assembly comprises a force sensor and a displacement measurement unit, the force sensor is arranged on the moving assembly and used for connecting the output end of the actuator and measuring the output force thereof, and the displacement measurement unit comprises a laser interferometer, an interference mirror and a reflecting mirror, the laser interferometer and the interference mirror are arranged on the base, and the reflecting mirror is arranged on the moving assembly and used for measuring the displacement of the moving assembly.

[0018] By adopting the above technical solution, the output end of the actuator to be tested is connected to the force sensor on the moving assembly after being fixed by the limiting assembly; when the actuator is extended or retracted, the moving assembly is pushed to move, at the same time, the load assembly applies simulated resistance to the motion, and at the same time, the displacement measurement unit measures the high-precision displacement of the moving assembly in real time, and the force sensor synchronously measures the output force, so that synchronous and integrated measurement of the output force and displacement of the actuator is realized, and the high-precision laser measurement and adjustable load function are integrated through modular design (limiting, moving, load and measurement), thereby providing a basic framework for solving the problems of insufficient measurement accuracy and unrealistic load simulation in the prior art.

[0019] Preferably, the moving assembly comprises a slide fixed to the base, and a slide table slidably arranged on the slide; the force sensor is mounted on the slide table.

[0020] Preferably, the load assembly comprises a driver arranged on the slide table, and a friction loading part connected with the output end of the driver and capable of being controlled to press against the side wall of the slide to apply a friction resistance to the sliding of the slide table.

[0021] Preferably, the driver is an electric cylinder, and the friction loading part is a friction roller.

[0022] Preferably, the limiting assembly comprises a first fixing part and a second fixing part arranged along the sliding direction of the slide table, the first fixing part is used for fixing the cylinder body of the actuator, and the second fixing part is used for fixing the tail part of the actuator.

[0023] Preferably, one end of the force sensor is connected with the slide table, and the other end is provided with an adapter used for matching the output end of the actuator.

[0024] Preferably, the laser interferometer, the interferometer mirror and the reflecting mirror are all mounted through adjustable supports; the laser interferometer and the interferometer mirror are mounted on the base through supports, and the reflecting mirror is mounted on the slide table through a support.

[0025] Preferably, the control panel is further provided, which is signal connected with the force sensor, the laser interferometer of the displacement measuring unit and the load assembly, and is used for controlling the load application, recording the displacement and force data and generating a detection report.

[0026] Preferably, the base is provided with heat dissipation holes corresponding to the area of the load assembly.

[0027] Preferably, the protective cover arranged on the base is further provided, the protective cover is provided with an operation window, and the limiting assembly, the moving assembly, the load assembly and the measuring assembly are all located in the protective cover.

[0028] In summary, the present application has at least one of the following beneficial technical effects:

[0029] 1. High-precision, multi-parameter synchronous dynamic measurement is realized: by integrating the high-precision displacement measuring unit of the laser interferometer and the force sensor, and unifying the reference and the movement axis of the actuator, the displacement (up to sub-micron / nanometer level) and output force of the actuator under dynamic load can be measured synchronously and in real time, the problems of insufficient measurement accuracy and asynchronous parameter measurement in the traditional method are solved, and reliable data basis is provided for evaluating the dynamic performance of the actuator;

[0030] 2. It provides a compact and fast-response dynamic load simulation capability: The load is applied by using friction rollers driven by an electric cylinder to press against the side wall of the moving parts, realizing stepless, linear, programmable, and precise adjustment of the load force. Compared with weight loads, this method can achieve dynamic changes, and compared with solutions such as electromagnetic brakes, it has the advantages of simple and compact structure, low cost, fast response, and no introduction of additional electromagnetic interference, thus more realistically simulating complex actual working conditions;

[0031] 3. An integrated, high-rigidity, and easy-to-operate testing platform was constructed: By integrating functional modules such as limit fixing, motion transmission, load application, high-precision measurement, and intelligent control onto a unified base equipped with a protective cover, the uniformity and high rigidity of the mechanical reference of the entire testing system are ensured, effectively reducing errors caused by structural deformation or vibration. Simultaneously, the modular design combined with the operation window and control panel significantly improves the equipment's versatility, operational safety, and the degree of automation in testing. Attached Figure Description

[0032] Fig. 1 This is a schematic diagram of the detection device and actuator in this embodiment;

[0033] Fig. 2 This is a schematic diagram of the detection device and actuator in this embodiment;

[0034] Fig. 3 This is a schematic diagram of the structure of the load component and some moving components in this embodiment.

[0035] Reference numerals: 1. Base; 11. Heat dissipation hole; 12. Protective cover; 13. Operation window; 2. Limiting component; 21. First fixing part; 22. Second fixing part; 23. Mounting seat; 3. Moving component; 31. Slide rail; 32. Slide table; 33. Mounting plate; 34. Slider; 35. Mounting block; 4. Load component; 41. Driver; 42. Friction loading part; 5. Measuring component; 51. Force sensor; 52. Displacement measuring unit; 521. Laser interferometer; 522. Interferometer; 523. Reflector; 6. Adapter; 7. Bracket; 8. Control panel; 9. Dustproof component. Detailed Implementation

[0036] The following is in conjunction with the appendix Figs. 1-3 This application will be described in further detail.

[0037] This application discloses a detection device for actuators.

[0038] Reference Figs. 1-3It includes a base 1, a limiting component 2, a moving component 3, a load component 4, a measuring component 5, and a control panel 8. The limiting component 2, the moving component 3, and the measuring component 5 are arranged linearly from right to left on the base 1, and the load component 4 is set on the moving component 3.

[0039] The lower end of the base 1 is bolted with a roller, and the upper side of the base 1 is bolted with a protective cover 12. An operation window 13 is provided in front of the protective cover 12. The limit component 2, the moving component 3, the load component 4, and the measuring component 5 are all located inside the protective cover 12. The protective cover 12 covers the internal moving parts and precision optical components to prevent dust, oil stains, and accidental contact. The operation window 13 allows users to easily install, disassemble, connect, and visually inspect the actuator during the test.

[0040] The limiting component 2 is used to fix the actuator. A mounting base 23 for raising the limiting component 2 is bolted to the right end of the base 1. The limiting component 2, from right to left, includes a second fixing part 22 and a first fixing part 21. The second fixing part 22 and the first fixing part 21 are bolted to the mounting base 23. The first fixing part 21 consists of a "U"-shaped component and an inverted "U"-shaped component, used to fix the actuator's cylinder. The second fixing part 22 consists of a horizontal "Y"-shaped component, used to pass through and fix the annular structure at the tail of the actuator. The first fixing part 21 and the second fixing part 22 form a two-point positioning system, ensuring the actuator is securely installed and its axis is aligned with the movement direction of the slide table 32. This prevents measurement errors caused by the actuator's own shaking or deflection during testing. The double limiting structure significantly improves the rigidity and centering of the actuator installation, ensuring the uniformity of the test benchmark, thereby improving the accuracy and reliability of the measurement results.

[0041] The movable component 3 includes a slide rail 31 and a slide table 32. A square mounting plate 33 is bolted to the middle of the base 1. The slide rail 31 is bolted to the upper sides of both sides of the mounting plate 33 in the lateral direction. Two sets of sliders 34 slide on the two slide rails 31 respectively. The two sides of the slide table 32 are bolted to the upper sides of the two sets of sliders 34 respectively. A mounting block 35 is bolted to the upper side of the slide table 32 near the limit component 2. Dustproof parts 9 are bolted to both ends of the slide rail 31.

[0042] The measuring component 5 includes a force sensor 51 and a displacement measuring unit 52. The force sensor 51 is a tension / compression sensor, which is hinged to the mounting block 35 near the limiting component 2. The other end of the tension / compression sensor is bolted to a horizontal "U"-shaped adapter 6, which is used to cooperate with the actuator output end and pass through the annular structure that fixes the actuator head, realizing a convenient, fast and reliable connection between the actuator and the detection device. The displacement measuring unit 52 includes a laser interferometer 521, an interferometer 522 and a reflector 523. The reflector 523 is bolted to the end of the slide table 32 away from the limiting component 2. The interferometer 522 and the laser interferometer 521 are bolted to the base 1 in sequence at intervals, and the laser interferometer 521, the interferometer 522 and the reflector 523 are aligned.

[0043] The load assembly 4 includes a driver 41 and a friction loading part 42. The driver 41 is an electric cylinder, which is bolted to the lower side of the slide 32 and is arranged perpendicular to the moving direction of the slide 32. The friction loading part 42 is a set of four friction rollers. The friction loading part 42 is connected to the output end of the driver 41, so that when the electric cylinder extends or retracts, the friction loading part 42 can controllably adjust the pressure between itself and the mounting plate 33 at the installation position of the slide 31 to apply frictional resistance to the sliding of the slide 32. The electric cylinder, acting as the driver 41, provides precise linear thrust, pushing the friction rollers to contact the side wall of the slide 31 with a set pressure, generating stable rolling friction, and realizing stepless, linear, and precise adjustment of the load force. Furthermore, the base 1 has heat dissipation holes 11 in the area corresponding to the load component 4. During the test, the driver 41 (such as an electric cylinder) in the load component 4 will generate heat through continuous operation. The heat dissipation holes 11 utilize natural convection or auxiliary airflow to dissipate the heat from the inside of the protective cover 12 in a timely manner, effectively controlling the temperature rise inside the device, especially around the load driver 41, preventing the driver 41 from degrading in performance, drifting in control accuracy, or shortening its lifespan due to overheating, thus ensuring the stability and reliability of the load system during long-term, high-frequency testing.

[0044] The control panel 8 is bolted to the operation window 13. The control panel 8 is electrically connected to the force sensor 51, the laser interferometer 521 of the displacement measurement unit 52, and the load component 4. The operator sets the load through the control panel 8, so that the system automatically controls the load component 4 to perform the operation. At the same time, the panel synchronously collects, displays and stores the data from the force sensor 51 and the laser interferometer 521, and automatically calculates the speed, generates test curves, error and other reports.

[0045] Specifically, after the actuator under test is securely clamped and fixed by the limiting component 2, its power output end is directly connected to the high-sensitivity force sensor 51 on the moving component 3 via a dedicated adapter 6. When the actuator starts and begins its telescopic movement, its output end transmits precise thrust or pull force to the force sensor 51, which in turn drives the slide 32, which is rigidly connected to the sensor, to perform smooth linear reciprocating motion along the precision slide 31. During this process, the load component 4 integrated on the slide 32 works synchronously. Its driver 41 (such as an electric cylinder) precisely drives the friction loading part 42 (such as a roller) according to the control command, causing it to press against the side wall of the slide 31 with a set pressure, thereby generating controllable and dynamically changing frictional resistance on the sliding of the slide 32, thus simulating the various loads that the actuator bears in actual working conditions. Simultaneously, a high-precision laser interferometric displacement measurement system operates synchronously. The laser beam emitted by the laser interferometer 521, fixed on the base 1, is adjusted by the interferometer 522 and directed towards the reflector 523 mounted on the moving slide 32, receiving the returned interference light signal. This allows for real-time and precise measurement of the displacement changes of the slide 32 at the sub-micron and even nanometer scales. Throughout the process, the force sensor 51 continuously measures the real-time output force of the actuator. Through the coordinated operation of the above components on the unified rigid base 1, this device achieves synchronous, integrated, and high-precision measurement and recording of the actuator's output force, displacement, and even velocity parameters under simulated real loads. This modular design, integrating high-rigidity limiting, precise linear guidance, dynamically adjustable load simulation, and ultra-high-precision optical measurement, fundamentally constructs a unified and fully functional testing platform, providing an effective technical solution to address the prominent problems of limited measurement accuracy, unrealistic load simulation, and low system integration in existing technologies.

[0046] Furthermore, in this embodiment, the laser interferometer 521, the interferometer 522, and the reflector 523 are all bolted together by an adjustable-height bracket 7. By adjusting the height of each bracket 7, the optical path between the laser interferometer 521, the interferometer 522, and the reflector 523 can be precisely calibrated, ensuring that the laser beam is precisely parallel and aligned with the movement trajectory of the slide 32. This ensures that the laser interferometer 521 system reaches its nominal maximum measurement accuracy and adapts to actuator installations at different heights, ensuring the accuracy, reliability, and flexibility of submicron and even nanometer-level displacement measurement results.

[0047] It should be noted that the various embodiments of this application can be arbitrarily combined into new embodiments, provided that the solutions do not conflict and the technical solutions can coexist.

[0048] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A detection device for an actuator, characterized in that: include: Base (1); A limiting component (2) is disposed on the base (1) for fixing the actuator; The moving component (3) is disposed on the base (1), connected to the output end of the actuator and transmitting its motion; A load component (4), associated with the moving component (3), is configured to apply an adjustable load to the moving component (3); Measurement component (5) is used to acquire motion parameters and force parameters at the output of the actuator; The measuring component (5) includes a force sensor (51) and a displacement measuring unit (52). The force sensor (51) is mounted on the moving component (3) and is used to connect to the output end of the actuator and measure its output force. The displacement measuring unit (52) includes a laser interferometer (521), an interferometer (522), and a reflector (523). The laser interferometer (521) and the interferometer (522) are mounted on the base (1), and the reflector (523) is mounted on the moving component (3) and is used to measure the displacement of the moving component (3).

2. The detection device for actuators according to claim 1, characterized in that: The moving component (3) includes a slide rail (31) fixed on the base (1); a slide table (32) slidably disposed on the slide rail (31); and a force sensor (51) mounted on the slide table (32).

3. The actuator detection device according to claim 2, characterized in that: The load assembly (4) includes a driver (41) and a friction loading part (42). The driver (41) is disposed on the slide (32). The friction loading part (42) is connected to the output end of the driver (41) and can be controlled to press against the side wall of the slide (31) to apply frictional resistance to the sliding of the slide (32).

4. The actuator detection device according to claim 3, characterized in that: The driver (41) is an electric cylinder, and the friction loading part (42) is a friction roller.

5. The actuator detection device according to claim 2, characterized in that: The limiting component (2) includes a first fixing part (21) and a second fixing part (22) arranged at intervals along the sliding direction of the slide (32). The first fixing part (21) is used to fix the cylinder of the actuator, and the second fixing part (22) is used to fix the tail of the actuator.

6. The detection device for actuators according to claim 2, characterized in that: One end of the force sensor (51) is connected to the slide (32), and the other end is provided with an adapter (6) for cooperating with the output end of the actuator.

7. The detection device for actuators according to claim 2, characterized in that: The laser interferometer (521), the interferometer (522) and the reflector (523) are all mounted on an adjustable bracket (7); the laser interferometer (521) and the interferometer (522) are mounted on the base (1) on the bracket (7), and the reflector (523) is mounted on the slide (32) on the bracket (7).

8. The detection device for actuators according to claim 1, characterized in that: It also includes a control panel (8), which is connected to the force sensor (51), the laser interferometer (521) of the displacement measurement unit (52) and the load component (4) for controlling the application of load, recording displacement and force data and generating a test report.

9. The detection device for actuators according to claim 1, characterized in that: The base (1) has heat dissipation holes (11) in the area corresponding to the load component (4).

10. The detection device for actuators according to claim 1, characterized in that: It also includes a protective cover (12) set on the base (1), and an operation window (13) is provided on the protective cover (12). The limiting component (2), the moving component (3), the load component (4) and the measuring component (5) are all located inside the protective cover (12).

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