A single crystal furnace
By setting an inclined gap between the crucible support rod and the support rod cover, the problem of corrugated pipe burn-through caused by silicon splashing and jumping of particulate silicon is solved, ensuring the stable operation of the single crystal furnace.
Patent Information
- Application Number
- CN202520814266.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-27
- Publication Date
- 2026-06-05
- Estimated Expiration
- 2035-04-27
AI Technical Summary
In the existing technology, hydrogen gas generated during the melting of granular silicon material causes silicon splashing and jumping. High-temperature molten silicon can seep through the gap between the crucible support rod and the support rod cover, scalding through the corrugated pipe and causing the furnace to leak and shut down.
A first conical surface with an outer diameter decreasing from top to bottom is provided at the lower end of the crucible support rod, and a second conical surface with an inner diameter decreasing from top to bottom is provided at the upper end of the support rod cover. This creates an inclined gap between the crucible support rod and the support rod cover, reducing the probability of high-temperature molten silicon passing through. Furthermore, the bellows is prevented from being burned through by properly setting the spacing and angle of the conical surfaces.
This effectively reduces the probability of high-temperature molten silicon passing through the gap between the crucible support rod and the support rod cover, avoids the corrugated pipe being scalded through, prevents the furnace from leaking and shutting down, and improves the stability and safety of the single crystal furnace.
Smart Images
Figure CN224325444U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of crystal pulling equipment technology, and in particular to a single crystal furnace. Background Technology
[0002] A single crystal furnace is a crystal pulling device that uses the Czochralski method to pull single crystal silicon rods, such as... Figure 1 As shown, a single crystal furnace may specifically include a furnace body 500 and a crucible 600 disposed within the furnace body 500. The crucible 600 may be mounted on a crucible support rod 100, and the lower end of the crucible support rod 100 may pass through the lower end of the furnace body 500. A support rod sleeve 400 and a support rod cover 200 may be provided in the furnace body 500 at the point where the crucible support rod 100 passes through. Both the support rod sleeve 400 and the support rod cover 200 may be fitted onto the outer side of the lower end of the crucible support rod 100. The support rod sleeve 400 is typically tubular, while the support rod cover 200 is typically conical, wider at the top and narrower at the bottom, and the support rod cover 200 may be located at the upper end of the support rod sleeve 400. The inner circumference of the support rod sleeve 400 and the support rod cover 200 are spaced apart from the outer circumference of the lower end of the crucible support rod 100. For example, the distance between the inner circumference of the support rod sleeve 400 and the outer circumference of the lower end of the crucible support rod 100 is 20mm, and the distance between the inner circumference of the support rod cover 200 and the outer circumference of the lower end of the crucible support rod 100 is 5mm. When pulling single-crystal silicon rods, silicon material is melted into molten silicon through a heating device. Silicon material can usually be in block form or granular form. To reduce costs, companies often significantly increase the proportion of granular silicon material. However, the production process of granular silicon material introduces impurities, resulting in hydrogen gas in the granular silicon material. During the melting process of granular silicon material, hydrogen gas release can easily lead to frequent silicon sputtering and jumping phenomena, especially during the silicon material re-feeding process, where these problems are more prominent. Figure 2 As shown, when silicon granules splash or jump, the high-temperature molten silicon splashed from outside the crucible 600, under the influence of the airflow inside the furnace body 500, first passes through the gap between the crucible support rod 100 and the support rod cover 200, then through the gap between the crucible support rod 100 and the support rod sleeve 400, and finally burns through the bellows 700 connected to the lower end of the support rod sleeve 400. Especially when the gas guide hood 300 of the single crystal furnace directs the airflow closer to the axis of the crucible support rod 100, it further intensifies the flow of high-temperature molten silicon, increasing the risk of the bellows 700 being burned through. Once the bellows 700 is burned through, the furnace body 500 will experience a furnace slump due to air leakage. Utility Model Content
[0003] Based on this, this application provides a single crystal furnace to improve the problem in the prior art where silicon granules splash or jump through the corrugated pipe at the lower end of the support rod sleeve, causing the furnace to leak and become blocked.
[0004] This application provides a single crystal furnace, the single crystal furnace comprising:
[0005] Crucible support rod;
[0006] A support rod cover is fitted over the lower end of the crucible support rod;
[0007] The crucible support rod has a first conical surface at its lower end, with the outer diameter of the first conical surface decreasing from top to bottom. The support rod cover has a second conical surface at its upper end, with the inner diameter of the second conical surface decreasing from top to bottom. The first conical surface is spaced above the second conical surface.
[0008] In one embodiment, the maximum distance between the first conical surface and the second conical surface is 1.5mm-2.5mm.
[0009] In one embodiment, the crucible support rod includes a crucible support body, a first rod body, a second rod body, and a connecting rod body. The lower end of the crucible support body is connected to the upper end of the first rod body, and the upper end of the second rod body is connected to the lower end of the first rod body through the connecting rod body. The first conical surface is set as the outer peripheral side of the connecting rod body. The support rod cover includes a cover base and a cover sleeve. The cover sleeve is disposed on the cover base, and the second conical surface is set as the inner peripheral side of the cover sleeve.
[0010] In one embodiment, the minimum distance between the second conical surface and the outer periphery of the second rod is greater than 2.5 mm.
[0011] In one embodiment, the tilt angle of the first conical surface relative to the axis of the crucible support rod is equal to the tilt angle of the second conical surface relative to the axis of the crucible support rod.
[0012] In one embodiment, the inclination angle of the first conical surface relative to the axis of the crucible support rod and the inclination angle of the second conical surface relative to the axis of the crucible support rod are 30°-75°.
[0013] In one embodiment, the height H of the vertically overlapping portion of the first conical surface and the second conical surface is not less than 5 mm.
[0014] In one embodiment, the single crystal furnace further includes a gas guide hood, which is arranged radially along the crucible support rod. The gas guide hood includes a gas inlet, and the opening direction of the gas inlet is away from the axis of the crucible support rod.
[0015] In one embodiment, the single crystal furnace further includes a support rod sleeve, which is fitted over the lower end of the crucible support rod, and a support rod cover is disposed above the support rod sleeve.
[0016] In one embodiment, the distance between the inner circumference of the support rod sleeve and the outer circumference of the lower end of the crucible support rod is 18-22 mm.
[0017] This application provides a first conical surface with an outer diameter decreasing from top to bottom at the lower end of the crucible support rod, and a second conical surface with an inner diameter decreasing from top to bottom at the upper end of the support rod cover. When the lower end of the crucible support rod passes through the support rod cover, the first conical surface is positioned above the second conical surface at intervals. This allows the relationship between the crucible support rod and the support rod cover to be adjusted from the existing vertical direction to an inclined direction. This reduces the probability of high-temperature molten silicon passing through the gap between the crucible support rod and the support rod cover when silicon splashing or jumping occurs in the granular material. In this way, it improves the problem of the bellows connected to the lower end of the support rod cover being burned through, which leads to furnace leakage and blockage. Attached Figure Description
[0018] Figure 1 A cross-sectional view of a single crystal furnace in the prior art;
[0019] Figure 2 This is a diagram showing the path of molten silicone burning through a corrugated pipe in existing technology.
[0020] Figure 3 A cross-sectional view of a single crystal furnace provided in an embodiment of this application;
[0021] Figure 4 A partial cross-sectional view of the support rod cover of a single crystal furnace provided in an embodiment of this application;
[0022] Figure 5 This is a schematic diagram of the gas guide shroud of a single crystal furnace provided in an embodiment of this application;
[0023] Figure 6 This is a schematic diagram of the gas guide shroud of a single crystal furnace in the prior art.
[0024] Reference numerals: 100, crucible support rod; 110, first conical surface; 120, crucible support body; 130, first rod body; 140, second rod body; 150, connecting rod body; 200, support rod cover; 210, second conical surface; 220, cover base; 230, cover sleeve; 300, gas guide hood; 310, gas inlet; 320, gas outlet; 400, support rod sleeve; 500, furnace body; 600, crucible; 700, corrugated pipe. Detailed Implementation
[0025] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.
[0026] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model.
[0027] The structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this utility model can be implemented. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and purposes that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.
[0028] The orientations or positional relationships indicated by terms such as "upper," "lower," "left," "right," "middle," "longitudinal," "lateral," "horizontal," "inner," "outer," "radial," and "circumferential" used in this specification are based on the orientations or positional relationships shown in the accompanying drawings and are only for the purpose of simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0029] This application provides a single crystal furnace, such as... Figures 1 to 6 As shown, the single crystal furnace includes:
[0030] Crucible support rod 100;
[0031] The support rod cover 200 is sleeved on the outer side of the lower end of the crucible support rod 100;
[0032] The crucible support rod 100 has a first conical surface 110 at its lower end, the outer diameter of which decreases from top to bottom. The support rod cover 200 has a second conical surface 210 at its upper end, the inner diameter of which decreases from top to bottom. The first conical surface 110 is spaced above the second conical surface 210.
[0033] like Figure 3 As shown in this embodiment, the single crystal furnace may further include a furnace body 500 and a crucible 600. A crucible support rod 100 may be disposed within the furnace body 500, and the crucible 600 may be disposed at the upper end of the crucible support rod 100. The lower end of the crucible support rod 100 may pass through the lower end of the furnace body 500. The lower end of the crucible support rod 100 can be driven to move up and down within the furnace body 500 to position the crucible 600 at a specified height. A support rod cover 200 may be disposed on the inner side of the lower end of the furnace body 500, and the support rod cover 200 may be fitted over the outer side of the lower end of the crucible support rod 100. Both the crucible support rod 100 and the support rod cover 200 may be made of graphite material to withstand the high temperatures within the furnace body 500.
[0034] like Figure 3 and Figure 4 As shown, in this embodiment, the support rod cover 200 is spaced apart from the lower end of the crucible support rod 100 to prevent wear between the crucible support rod 100 and the support rod cover 200 during movement. The lower end of the crucible support rod 100 may have a first conical surface 110, the outer diameter of which decreases sequentially from top to bottom. The upper end of the support rod cover 200 may have a second conical surface 210, the inner diameter of which also decreases sequentially from top to bottom. During the preparation process before pulling the single-crystal silicon rod, the lower end of the crucible support rod 100 is first passed through the support rod cover 200 and through the lower end of the furnace body 500. Then, the crucible support rod 100 is moved vertically downwards so that the first conical surface 110 and the second conical surface 210 approach each other. When the crucible support rod 100 moves to a set position, the first conical surface 110 is spaced above the second conical surface 210. At this time, there is an inclined gap between the crucible support rod 100 and the support rod cover 200. When the granular material splashes or jumps silicon, the probability of the high-temperature silicon liquid passing through the gap between the crucible support rod 100 and the support rod cover 200 is small. The corrugated pipe 700 connected to the lower end of the support rod cover 400 is not easily burned through by the high-temperature silicon liquid.
[0035] It is understandable that this application provides a first conical surface 110 with an outer diameter decreasing from top to bottom at the lower end of the crucible support rod 100, and a second conical surface 210 with an inner diameter decreasing from top to bottom at the upper end of the support rod cover 200. When the lower end of the crucible support rod 100 passes through the support rod cover 200, the first conical surface 110 is spaced above the second conical surface 210. This allows the relationship between the crucible support rod 100 and the support rod cover 200 to be adjusted from the existing vertical direction to an inclined direction. This reduces the probability of high-temperature molten silicon passing through the gap between the crucible support rod 100 and the support rod cover 200 when silicon splashing or jumping occurs in the granular material. This improves the problem of the bellows 700 connected to the lower end of the support rod cover 400 being burned through, causing the furnace body 500 to leak and shut down.
[0036] Furthermore, the maximum distance between the first conical surface 110 and the second conical surface 210 is 1.5mm-2.5mm.
[0037] like Figure 4As shown in this embodiment, it is exemplarily illustrated that when the first conical surface 110 is spaced above the second conical surface 210, the maximum distance between the first conical surface 110 and the second conical surface 210 is preferably 1.5mm-2.5mm, such as 1.5mm, 1.7mm, 1.9mm, 2mm, 2.1mm, 2.3mm, or 2.5mm, etc.; this embodiment takes a maximum distance of 2mm between the first conical surface 110 and the second conical surface 210 as an example. If the maximum distance between the first conical surface 110 and the second conical surface 210 is too large, the probability of high-temperature silicon liquid passing through the gap between the crucible support rod 100 and the support rod cover 200 will increase, thereby increasing the risk of the corrugated pipe 700 connected to the lower end of the support rod cover 400 being burned through. If the maximum distance between the first conical surface 110 and the second conical surface 210 is too small, it will be difficult to move the crucible support rod 100 to the set position accurately when driving the crucible support rod 100 to move downward, and it will easily cause the crucible support rod 100 to abut against the support rod cover 200 and cause pressure on the support rod cover 200.
[0038] It is understood that by reasonably setting the maximum distance between the first conical surface 110 and the second conical surface 210, this embodiment can reduce the probability of high-temperature silicon liquid passing through the gap between the crucible support rod 100 and the support rod cover 200 while ensuring that the first conical surface 110 and the second conical surface 210 are spaced apart, so as to further prevent the corrugated pipe 700 connected to the lower end of the support rod cover 400 from being burned through.
[0039] In this embodiment, as Figure 4 As shown, the crucible support rod 100 includes a crucible support body 120, a first rod body 130, a second rod body 140, and a connecting rod body 150. The lower end of the crucible support body 120 is connected to the upper end of the first rod body 130, and the upper end of the second rod body 140 is connected to the lower end of the first rod body 130 through the connecting rod body 150. The first conical surface 110 is set as the outer peripheral side of the connecting rod body 150. The support rod cover 200 includes a cover base 220 and a cover sleeve 230. The cover sleeve 230 is disposed on the cover base 220, and the second conical surface 210 is set as the inner peripheral side of the cover sleeve 230.
[0040] In this embodiment, the crucible support rod 100 may include a crucible support body 120, a first rod body 130, a second rod body 140, and a connecting rod body 150, which may be integrally formed. The crucible support body 120 may be disc-shaped, and the crucible 600 may be mounted on the support rod body. The upper end of the first rod body 130 may be connected to the lower end of the crucible 600 support body 120. The first rod body 130 may be cylindrical, and its outer diameter may be smaller than that of the crucible support body 120. The second rod body 140 may be located below the first rod body 130, and it may also be cylindrical, with an outer diameter smaller than that of the first rod body 130. The connecting rod 150 can be positioned between the first rod 130 and the second rod 140, with its upper end connected to the lower end of the first rod 130 and its lower end connected to the upper end of the second rod 140. The connecting rod 150 can be tapered, with its upper outer diameter equal to the outer diameter of the first rod 130 and its lower outer diameter equal to the outer diameter of the second rod 140, allowing for a smooth transition between the first rod 130 and the second rod 140. The crucible support body 120, the first rod 130, the second rod 140, and the connecting rod 150 can all be coaxially arranged; the first conical surface 110 can be formed from the outer periphery of the connecting rod 150, and it is inclined relative to the axis of the crucible support rod 100, with its outer diameter decreasing sequentially from top to bottom.
[0041] In this embodiment, the support rod cover 200 may include a cover base 220 and a cover sleeve 230, which may be integrally formed. The cover base 220 may be annular, used to fix the support rod cover 200 to the furnace body 500. The cover sleeve 230 may be disposed on the cover base 220, and may also be annular, with its inner circumference facing the connecting rod body 150 instead of the second rod body 140. The cover base 220 and the cover sleeve 230 may also be coaxial; the second conical surface 210 may be formed by the inner circumference of the cover sleeve 230, inclined relative to the axis of the crucible support rod 100, and its inner diameter decreasing from top to bottom.
[0042] In this embodiment, when the crucible support rod 100 passes through the support rod cover 200, the second rod body 140 passes through the support rod cover 200 from top to bottom. As the crucible support rod 100 moves downward, the length of the second rod body 140 passing through the support rod cover 200 increases. At the same time, the connecting rod body 150 also moves downward closer to the support rod cover 200 to move the first conical surface 110 closer to the second conical surface 210, thereby reasonably controlling the distance between the first conical surface 110 and the second conical surface 210.
[0043] It is understood that this embodiment, by reasonably setting the structure of the crucible support rod 100 and the support rod cover 200, and setting the first conical surface 110 as the outer peripheral side of the connecting rod body 150 and the second conical surface 210 as the inner peripheral side of the cover sleeve 230, facilitates the placement of the first conical surface 110 at intervals above the second conical surface 210 when the lower end of the crucible support rod 100 passes through the support rod cover 200. At the same time, when driving the crucible support rod 100 downward to move the first conical surface 110 closer to the second conical surface 210, it is easy to reasonably control the distance between the first conical surface 110 and the second conical surface 210, so as to make it difficult for the silicon liquid to pass through the gap between the first conical surface 110 and the second conical surface 210.
[0044] More specifically, the minimum distance between the second cone surface 210 and the outer periphery of the second shaft 140 is greater than 2.5 mm.
[0045] like Figure 4 As shown in this embodiment, the minimum distance between the second conical surface 210 and the outer periphery of the second rod 140 is exemplarily illustrated as the distance between the lowest point of the second conical surface 210 and the outer periphery of the second rod 140. The minimum distance between the second conical surface 210 and the outer periphery of the second rod 140 is preferably greater than 2.5 mm, such as 2.6 mm, 2.7 mm, 2.8 mm, or 2.9 mm. This embodiment uses a minimum distance of 2.6 mm between the outer periphery of the second conical surface 210 and the second rod 140 as an example. If the minimum distance between the second conical surface 210 and the outer periphery of the second rod 140 is too small, friction will easily occur between the second rod 140 and the rod cover 200 during the movement of the crucible support rod 100, causing wear on both the second rod 140 and the rod cover 200.
[0046] It is understood that by reasonably setting the minimum distance between the second conical surface 210 and the outer periphery of the second rod body 140, this embodiment can make it less likely for the second rod body 140 and the support rod cover 200 to wear out, thereby ensuring the durability of the crucible support rod 100 and the support rod cover 200, and at the same time avoiding the generation of carbon powder by friction, which would affect the quality of the pulled single crystal silicon rod.
[0047] In this embodiment, the inclination angle of the first conical surface 110 relative to the axis of the crucible support rod 100 is equal to the inclination angle of the second conical surface 210 relative to the axis of the crucible support rod 100.
[0048] like Figure 4As shown, in this embodiment, the inclination angle of the first conical surface 110 relative to the axis of the crucible support rod 100 and the inclination angle of the second conical surface 210 relative to the axis of the crucible support rod 100 are preferably equal. When the first conical surface 110 is spaced above the second conical surface 210, the first conical surface 110 and the second conical surface 210 are parallel. In any axial section of the crucible support rod 100 and the support rod cover 200, the left side of the first conical surface 110 is parallel to the left side of the second conical surface 210, and the right side of the first conical surface 110 is also parallel to the right side of the second conical surface 210; wherein the axial section of the crucible support rod 100 and the support rod cover 200 is a section passing through the axis of the crucible support rod 100 and the support rod cover 200.
[0049] It is understood that by setting the inclination angle of the first conical surface 110 relative to the axis of the crucible support rod 100 and the inclination angle of the second conical surface 210 relative to the axis of the crucible support rod 100 to be equal in this embodiment, when the first conical surface 110 is spaced above the second conical surface 210, the distance between the first conical surface 110 and the second conical surface 210 at each position is equal, so as to accurately control the distance between the first conical surface 110 and the second conical surface 210 and reduce the probability of high-temperature silicon liquid passing through the gap between the first conical surface 110 and the second conical surface 210.
[0050] Specifically, the inclination angle of the first conical surface 110 relative to the axis of the crucible support rod 100 and the inclination angle of the second conical surface 210 relative to the axis of the crucible support rod 100 are 30°-75°.
[0051] like Figure 4 As shown in this embodiment, by way of example, the inclination angle of the first conical surface 110 relative to the axis of the crucible support rod 100 and the inclination angle of the second conical surface 210 relative to the axis of the crucible support rod 100 can preferably be 30°-75°, such as 30°, 45°, 60° or 75°. This embodiment takes an example where both the inclination angle of the first conical surface 110 and the inclination angle of the second conical surface 210 relative to the axis of the crucible support rod 100 are 45°. If the inclination angle of the first conical surface 110 and the second conical surface 210 relative to the axis of the crucible support rod 100 is too small, the gap between the first conical surface 110 and the second conical surface 210 will tend to be vertical, and the probability of high-temperature silicon liquid passing through the gap between the first conical surface 110 and the second conical surface 210 will increase. If the inclination angle of the first conical surface 110 relative to the axis of the crucible support rod 100 and the inclination angle of the second conical surface 210 relative to the axis of the crucible support rod 100 are too large, the gap between the first conical surface 110 and the second conical surface 210 will tend to be horizontal, and the crucible support rod 100 and the support rod cover 200 will be easily interfered with by devices such as the auxiliary heater located at the lower end of the furnace body 500.
[0052] It is understood that by reasonably setting the inclination angle of the first conical surface 110 relative to the axis of the crucible support rod 100 and the inclination angle of the second conical surface 210 relative to the axis of the crucible support rod 100, this embodiment can reduce the probability of high-temperature silicon liquid passing through the gap between the first conical surface 110 and the second conical surface 210, and at the same time avoid interference between the crucible support rod 100 and the support rod cover 200 and the auxiliary heater or other devices located at the lower end of the furnace body 500.
[0053] In this embodiment, the height of the overlapping portion of the first conical surface 110 and the second conical surface 210 in the vertical direction is not less than 5mm.
[0054] like Figure 4 As shown in this embodiment, by way of example, when the first conical surface 110 is inclined relative to the axis of the crucible support rod 100, and the second conical surface 210 is also inclined relative to the axis of the crucible support rod 100, and the first conical surface 110 is spaced above the second conical surface 210, the height of the vertical overlap between the first conical surface 110 and the second conical surface 210 is preferably not less than 5mm, such as 5mm, 6mm, 7mm, 8mm, or 9mm. This embodiment takes a height of 5mm for the vertical overlap between the first conical surface 110 and the second conical surface 210 as an example. If the height of the vertical overlap between the first conical surface 110 and the second conical surface 210 is too small, the path of the molten silicon through the gap between the first conical surface 110 and the second conical surface 210 will be too short, and the molten silicon will easily burn through the corrugated pipe 700 connected to the lower end of the support rod sleeve 400.
[0055] It is understood that by reasonably setting the height of the vertically overlapping portion of the first conical surface 110 and the second conical surface 210, this embodiment can ensure that the path of the molten silicon through the gap between the first conical surface 110 and the second conical surface 210 is relatively long, thereby reducing the risk of the molten silicon burning through the corrugated pipe 700.
[0056] In this example, such as Figure 3 As shown, the single crystal furnace also includes a gas guide shroud 300, which is arranged radially along the crucible support rod 100. The gas guide shroud 300 includes a gas inlet 310, and the opening direction of the gas inlet 310 is away from the axis of the crucible support rod 100.
[0057] like Figure 3 and Figure 5As shown in this embodiment, by way of example, the single crystal furnace may further include a gas guide hood 300. The gas guide hood 300 can be used for gas passage, and its upper side can be closed. The gas inlet 310 can be opened on its periphery, and its gas outlet 320 can be opened on its lower side. The gas guide hood 300 can be located at the lower end of the furnace body 500, and the lower end of the gas guide hood 300 can pass through the lower end of the furnace body 500. At the same time, the gas guide hood 300 can be arranged radially along the crucible support rod 100, and there can be a plurality of gas guide hoods 300, which can be arranged at equal intervals along the circumference of the crucible support rod 100. When drawing single crystal silicon rods, gases such as argon can enter the furnace body 500 from the upper end of the furnace body 500 and exit the furnace body 500 through the gas guide hood 300.
[0058] like Figure 6 As shown, the existing gas guide shroud 300 typically has several air inlets 310, and these air inlets 310 are evenly spaced along the circumference of the gas guide shroud 300. When the gas guide shroud 300 is arranged radially along the crucible support rod 100, at least one air inlet 310 has its opening direction close to the axis of the crucible support rod 100. In this case, when the airflow passes through the gas guide shroud 300, there may be a portion of the airflow flowing from the air inlet 310 close to the axis of the crucible support rod 100 to the lower end of the crucible support rod 100. If silicon splashing or jumping occurs at this time, the molten silicon can easily pass through the gap between the lower end of the crucible support rod 100 and the support rod cover 200 under the action of this portion of the airflow.
[0059] In this embodiment, the air inlet 310 can be located only on the side of the air guide shroud 300 away from the axis of the crucible support rod 100, and its opening direction is away from the axis of the crucible support rod 100. The air inlet 310 can be set as one, or it can be set as several at intervals; this embodiment takes the former as an example. In this case, when the airflow passes through the air guide shroud 300, the airflow is not easy to flow to the lower end of the crucible support rod 100.
[0060] It is understandable that by reasonably setting the opening direction of the air inlet 310 on the air guide shroud 300, this embodiment can prevent the airflow from flowing to the lower end of the crucible support rod 100 when passing through the air guide shroud 300. This prevents the molten silicon from passing through the gap between the lower end of the crucible support rod 100 and the support rod cover 200 under the action of the airflow when silicon splashing or jumping occurs. This further improves the problem of the bellows 700 connected to the lower end of the support rod cover 400 being burned through, which would cause the furnace body 500 to leak and become blocked.
[0061] In this embodiment, the single crystal furnace also includes a support rod sleeve 400, which is sleeved on the lower end of the crucible support rod 100, and a support rod cover 200 is disposed above the support rod sleeve 400.
[0062] like Figure 3 and Figure 4 As shown in this embodiment, by way of example, the support rod sleeve 400 can be disposed at the lower end of the furnace body 500, and its lower end can pass through the lower end of the furnace body 500 for easy connection with the bellows 700. The support rod sleeve 400 can also be fitted over the lower outer side of the crucible support rod 100 and can be disposed below the support rod cover 200. The support rod sleeve 400 can also be made of graphite material. When the crucible support rod 100 moves up and down, it can also be slidably disposed within the support rod sleeve 400.
[0063] It is understood that by providing a support rod sleeve 400 to the lower end of the crucible support rod 100 in this embodiment, the crucible support rod 100 can slide within the support rod sleeve 400 when it moves, and the support rod sleeve 400 can protect the lower end of the crucible support rod 100 to prevent it from wearing against the lower end of the furnace body 500.
[0064] Specifically, the distance between the inner circumference of the support rod sleeve 400 and the outer circumference of the lower end of the crucible support rod 100 is 18-22 mm.
[0065] like Figure 4 As shown in this embodiment, the distance between the inner circumference of the support rod sleeve 400 and the outer circumference of the lower end of the crucible support rod 100 is preferably 18-22 mm, such as 18 mm, 19 mm, 20 mm, 21 mm, or 22 mm. This embodiment uses a distance of 20 mm as an example. If the distance between the inner circumference of the support rod sleeve 400 and the outer circumference of the lower end of the crucible support rod 100 is too small, wear may easily occur between the support rod sleeve 400 and the lower end of the crucible support rod 100 during the up-and-down movement of the crucible support rod 100. If the distance between the inner circumference of the support rod sleeve 400 and the outer circumference of the lower end of the crucible support rod 100 is too large, the support rod sleeve 400 may occupy too much space at the lower end of the furnace body 500.
[0066] It is understood that by reasonably setting the distance between the inner circumference of the support rod sleeve 400 and the outer circumference of the lower end of the crucible support rod 100, this embodiment can avoid the support rod sleeve 400 occupying too much space at the lower end of the furnace body 500, and at the same time make it less likely for wear to occur between the support rod sleeve 400 and the lower end of the crucible support rod 100.
[0067] The implementation principle of the single crystal furnace provided in Embodiment 1 of this application is as follows:
[0068] During installation, first, place the support rod sleeve 400 and support rod cover 200 sequentially at the lower end of the furnace body 500. Then, pass the second rod body 140 sequentially through the support rod cover 200 and support rod sleeve 400. Next, move the crucible support rod 100 downward to move the first conical surface 110 closer to the second conical surface 210. When the crucible support rod 100 moves to the set position, the first conical surface 110 is positioned above the second conical surface 210 at intervals.
[0069] This application provides a first conical surface 110 with an outer diameter decreasing from top to bottom at the lower end of the crucible support rod 100, and a second conical surface 210 with an inner diameter decreasing from top to bottom at the upper end of the support rod cover 200. When the lower end of the crucible support rod 100 passes through the support rod cover 200, the first conical surface 110 is spaced above the second conical surface 210. This allows the relationship between the crucible support rod 100 and the support rod cover 200 to be adjusted from the existing vertical direction to an inclined direction. This reduces the probability of high-temperature molten silicon passing through the gap between the crucible support rod 100 and the support rod cover 200 when particle splashing or jumping silicon occurs. This improves the problem of the bellows 700 connected to the lower end of the support rod cover 400 being burned through, causing the furnace body 500 to leak and shut down.
[0070] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0071] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.
Claims
1. A single crystal furnace, characterized in that, The single crystal furnace includes: Crucible support rod (100); A rod cover (200) is fitted over the lower end of the crucible rod (100); The crucible support rod (100) has a first conical surface (110) at its lower end, the outer diameter of which decreases from top to bottom. The support rod cover (200) has a second conical surface (210) at its upper end, the inner diameter of which decreases from top to bottom. The first conical surface (110) is spaced above the second conical surface (210).
2. The single crystal furnace according to claim 1, characterized in that, The maximum distance between the first conical surface (110) and the second conical surface (210) is 1.5mm-2.5mm.
3. The single crystal furnace according to claim 1, characterized in that, The crucible support rod (100) includes a crucible support body (120), a first rod body (130), a second rod body (140), and a connecting rod body (150). The lower end of the crucible support body (120) is connected to the upper end of the first rod body (130), and the upper end of the second rod body (140) is connected to the lower end of the first rod body (130) through the connecting rod body (150). The first conical surface (110) is set as the outer peripheral side of the connecting rod body (150). The support rod cover (200) includes a cover base (220) and a cover sleeve (230). The cover sleeve (230) is disposed on the cover base (220), and the second conical surface (210) is set as the inner peripheral side of the cover sleeve (230).
4. The single crystal furnace according to claim 3, characterized in that, The minimum distance between the second conical surface (210) and the outer periphery of the second rod (140) is greater than 2.5 mm.
5. The single crystal furnace according to claim 1, characterized in that, The inclination angle of the first conical surface (110) relative to the axis of the crucible support rod (100) is equal to the inclination angle of the second conical surface (210) relative to the axis of the crucible support rod (100).
6. The single crystal furnace according to claim 5, characterized in that, The inclination angle of the first conical surface (110) relative to the axis of the crucible support rod (100) and the inclination angle of the second conical surface (210) relative to the axis of the crucible support rod (100) are 30°-75°.
7. The single crystal furnace according to claim 1, characterized in that, The height H of the overlapping portion of the first conical surface (110) and the second conical surface (210) in the vertical direction is not less than 5mm.
8. The single crystal furnace according to claim 1, characterized in that, The single crystal furnace also includes a gas guide hood (300), which is arranged radially along the crucible support rod (100). The gas guide hood (300) includes an air inlet (310), and the opening direction of the air inlet (310) is away from the axis of the crucible support rod (100).
9. The single crystal furnace according to claim 1, characterized in that, The single crystal furnace also includes a support rod sleeve (400), which is sleeved on the lower end of the crucible support rod (100), and the support rod cover (200) is disposed above the support rod sleeve (400).
10. The single crystal furnace according to claim 9, characterized in that, The distance between the inner circumference of the support rod sleeve (400) and the outer circumference of the lower end of the crucible support rod (100) is 18-22 mm.