Workpiece rotating positioning device of vacuum coating machine

Abstract

The utility model discloses a kind of vacuum coating machine workpiece rotation positioning devices, including rotating lever and the disc of fixed in the outer wall of rotating lever, the upper surface of the disc is provided with several groups of base that can autorotate, the top of the base is provided with the expansion body that can be inserted into workpiece, the lower of the disc is provided with bottom plate, the lower of the bottom plate is provided with lifting structure that drives bottom plate lift, the top of the bottom plate is provided with expansion structure that can drive expansion body expansion, the outer wall of the rotating lever is provided with rotating structure that drives base rotation;The setting of the utility model expansion structure, so that only one lifting drive operation is needed, all jack can be driven to insert inside corresponding expansion body simultaneously, jack is synchronous to open all expansion body's arc plate in ascending process, to complete the internal expansion positioning of all workpiece on expansion body in one time. Compared with the conventional workpiece fixed mode one by one, can shorten clamping time.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating machine technology, specifically to a workpiece rotation positioning device for a vacuum coating machine. Background Technology

[0002] A vacuum coating machine is a specialized device that deposits a material in atomic or molecular form onto the surface of a solid material in a vacuum environment, forming a dense and uniform thin film. It mainly includes a vacuum chamber, a vacuum system, a coating source, an electrode holder, a heating system, and a gas system. The electrode holder is used to fix the workpiece to be coated and can typically rotate or revolve to ensure coating uniformity.

[0003] Currently, when positioning cylindrical workpieces, substrate holders typically set up a fixing frame at the waist of the workpiece, which obstructs the area on the outer wall of the workpiece to be coated, easily causing uneven coating; moreover, the workpieces need to be fixed one by one, which is not quick enough for positioning. Utility Model Content

[0004] The purpose of this utility model is to provide a workpiece rotation positioning device for a vacuum coating machine. By setting an expansion body to be inserted into the center of the workpiece, the workpiece is positioned from the inside out, avoiding the positioning structure covering the workpiece surface and affecting the uniformity of the coating. The expansion structure is set so that multiple push rods can be inserted into the expansion body at the same time through a single drive, realizing the one-time drive expansion of multiple expansion bodies, so that the workpieces fitted on the outside of the expansion body can be positioned at the same time, improving the positioning efficiency.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a workpiece rotation and positioning device for a vacuum coating machine, comprising a rotating rod and a disc fixed to the outer wall of the rotating rod. The upper surface of the disc is provided with several sets of self-rotating bases. Above the bases is an expansion body that can be inserted into the workpiece. Below the disc is a base plate. Below the base plate is a lifting structure that drives the base plate to rise and fall. Above the base plate is an expansion structure that drives the expansion body to expand. The outer wall of the rotating rod is provided with a rotation structure that drives the bases to rotate.

[0006] Preferably, the expansion body includes two sets of mirror-symmetrical arc-shaped plates, the outer wall of the arc-shaped plates is fixed with guide rods, and the inner wall of the base is provided with guide grooves for inserting the guide rods. Each arc-shaped plate has at least two sets of guide rods on one side, one upper and one lower.

[0007] Preferably, the lifting structure includes a sleeve, the top of which is rotatably connected to the base plate, and the outer wall of the rotating rod is provided with a threaded portion.

[0008] Preferably, the sleeve is threaded to the threaded portion, the outer wall of the sleeve is welded with a handle to facilitate rotating the sleeve, and a locking structure is provided between the disc and the base plate to prevent the sleeve from loosening.

[0009] Preferably, the locking structure includes bolts that pass through the disc and the base plate respectively, and nuts are threaded to both ends of the bolts.

[0010] Preferably, the expansion structure includes a top rod with a flattened circular cross-section and a frustum-shaped longitudinal section. A rotating shaft is fixed to the bottom end of the top rod, and the rotating shaft is rotatably connected to the base plate.

[0011] Preferably, the rotating structure includes a drive gear, which is sleeved on the outside of the rotating rod and rotatably connected to the rotating rod through a bearing. A toothed ring is fixed to the outer wall of the base, and the toothed ring meshes with the drive gear.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. This utility model uses an expansion body inserted into the center of the workpiece for internal expansion positioning, avoiding the obstruction of the outer wall of the workpiece by the traditional external waist hoop fixing frame. The outer surface of the workpiece to be coated is exposed without obstruction, ensuring that the coating material can be uniformly deposited on the entire outer surface of the workpiece in a vacuum environment, thereby improving the uniformity of the coating layer.

[0014] 2. The expansion structure of this utility model allows all push rods to be inserted into the corresponding expansion bodies simultaneously with a single lifting and lowering operation. During the upward movement, the push rods synchronously expand the arc-shaped plates of all expansion bodies, thus completing the internal expansion positioning of all workpieces fitted onto the expansion bodies in one go. Compared to the traditional method of fixing workpieces one by one, this shortens the clamping time and improves coating efficiency. Attached Figure Description

[0015] Figure 1 This is an isometric drawing of this utility model;

[0016] Figure 2 This is a schematic diagram of the bottom structure of the base plate of this utility model;

[0017] Figure 3 This is a schematic diagram of the expansion structure of this utility model;

[0018] Figure 4 This is a schematic diagram of the rotating structure of this utility model.

[0019] In the diagram: 1. Rotating rod; 2. Disc; 3. Base; 4. Expansion body; 5. Base plate; 6. Lifting structure; 7. Expansion structure; 8. Rotating structure; 9. Drive source;

[0020] 401. Curved plate; 402. Guide rod; 403. Guide groove;

[0021] 601. Sleeve; 602. Threaded part; 603. Handle; 604. Locking structure;

[0022] 6041, Bolt; 6042, Nut;

[0023] 701. Push rod; 702. Rotary shaft;

[0024] 801. Drive gear; 802. Gear ring. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Please see Figure 1-4 This utility model provides a technical solution: a workpiece rotation and positioning device for a vacuum coating machine, including a rotating rod 1 and a disc 2 fixed on the outer wall of the rotating rod 1. By fixing the disc 2 to the rotating rod 1, when the rotating rod 1 rotates, the disc 2 rotates synchronously, driving the workpiece fixed on the disc 2 to perform circumferential motion and achieve revolution. The upper surface of the disc 2 is provided with several sets of self-rotating bases 3. By setting the bases 3, after the workpiece is placed on the base 3, if the base 3 rotates, the workpiece will rotate. Thus, the workpiece can rotate while revolving, and uniform coating can be performed.

[0027] An expansion body 4 capable of being inserted into a workpiece is provided above the base 3, such as... Figure 1 As shown, when the workpiece is loaded, the cylindrical workpiece is placed on the outside of the expansion body 4. The expansion body 4 is driven to expand by the subsequent lifting structure 6 and expansion structure 7, thereby tightening the workpiece from the inside to the outside and achieving positioning.

[0028] A base plate 5 is provided below the disc 2, and a lifting structure 6 is provided below the base plate 5 to drive the base plate 5 to rise and fall. An expansion structure 7 is provided above the base plate 5 to drive the expansion body 4 to expand. A rotation structure 8 is provided on the outer wall of the rotating rod 1 to drive the base 3 to rotate.

[0029] The expansion body 4 includes two sets of mirror-symmetrical arc-shaped plates 401, such as... Figure 3 As shown, when the push rod 701 is inserted between the two sets of arc plates 401, the large diameter of the push rod 701 causes the two sets of arc plates 401 to expand to both sides.

[0030] A guide rod 402 is fixed to the outer wall of the arc-shaped plate 401, and a guide groove 403 is provided on the inner wall of the base 3 for the guide rod 402 to be inserted. Each arc-shaped plate 401 has at least two sets of guide rods 402 on one side, one upper and one lower. By setting the guide rods 402 and the guide grooves 403, when the two sets of arc-shaped plates 401 are opened to both sides, the guide rods 402 are inserted into the guide grooves 403, so that the two sets of arc-shaped plates 401 open smoothly to both sides.

[0031] The lifting structure 6 includes a sleeve 601, the top of which is rotatably connected to the base plate 5. The outer wall of the rotating rod 1 is provided with a threaded portion 602. The sleeve 601 is rotatably connected to the base plate 5. When the sleeve 601 rotates, the base plate 5 is axially limited because the push rod 701 is inserted into the expansion body 4, preventing the base plate 5 from rotating. At this time, the sleeve 601 rotates at the threaded portion 602, causing the sleeve 601 to rise, which in turn drives the base plate 5 to rise, causing multiple sets of push rods 701 to rise together.

[0032] The sleeve 601 is threaded to the threaded part 602. The outer wall of the sleeve 601 is welded with a handle 603 to facilitate the rotation of the sleeve 601. A locking structure 604 is provided between the disc 2 and the base plate 5 to prevent the sleeve 601 from loosening.

[0033] By setting the locking structure 604, the push rod 701 is prevented from detaching from the expansion body 4 due to the loosening of the sleeve 601 when the workpiece is coated in the coating machine, thus avoiding the failure of workpiece clamping.

[0034] The locking structure 604 includes bolts 6041, which pass through the disc 2 and the base plate 5 respectively, and nuts 6042 are threaded to both ends of the bolts 6041. Figure 1 As shown, the base plate 5 and the disc 2 are fixed with bolts 6041, and neither the base plate 5 nor the disc 2 rotates relative to the rotating rod 1.

[0035] The expansion structure 7 includes a top rod 701. The top rod 701 has a flattened circular cross-section and a frustum-shaped longitudinal section. As the top rod 701 is gradually inserted upwards, the expansion body 4 is pushed open to both sides. A rotating shaft 702 is fixed to the bottom end of the top rod 701, and the rotating shaft 702 is rotatably connected inside the base plate 5. By setting the rotating shaft 702, when the base 3 rotates, the top rod 701 presses against the inner side of the arc plate 401, making the top rod 701, the arc plate 401, and the base 3 relatively stationary. When the base 3 rotates, the top rod 701 rotates synchronously. The setting of the rotating shaft 702 enables the top rod 701 to rotate.

[0036] The rotating structure 8 includes a drive gear 801, which is connected to an external drive source 9, such as... Figure 4As shown, the drive source 9 can be a motor driving a gear transmission to achieve the rotation of the drive gear 801. The motor is fixed below the disc 2 and the circuit is connected through the hollow rotating rod 1, which will not be described in detail here. The drive gear 801 is sleeved on the outside of the rotating rod 1 and is rotatably connected to the rotating rod 1 through a bearing. A gear ring 802 is fixed on the outer wall of the base 3, and the gear ring 802 meshes with the drive gear 801. The drive gear 801 is rotatably connected to the rotating rod 1. When the rotating rod 1 rotates, it does not affect the external drive source 9's drive on the speed and direction of the drive gear 801. After the drive gear 801 rotates, it will drive the base 3 to rotate through the gear ring 802, thus achieving the rotation of the base 3.

[0037] When in use, the cylindrical workpiece is placed on the expanded body 4, which is in a contracted state;

[0038] Turning the handle 603 converts the rotational motion into the upward motion of the base plate 5 through the sleeve 601 and the threaded part 602;

[0039] Specifically, when the sleeve 601 rotates, the push rod 701 is inserted into the expansion body 4, which limits the bottom plate 5 in the axial direction, so that the bottom plate 5 cannot rotate. At this time, the sleeve 601 rotates on the threaded part 602, and the sleeve 601 rises, which will drive the bottom plate 5 to rise, so that multiple sets of push rods 701 rise together.

[0040] The rising top rod 701 is inserted into and expands the corresponding expansion body 4. The arc plate 401 of the expansion body 4 expands radially along the guide rod 402 and the guide groove 403, tightening the workpiece from the inside out to achieve workpiece positioning.

[0041] Tighten the nut 6042 of the locking bolt 6041 to lock the disc 2 and the base plate 5, preventing the sleeve 601 from loosening;

[0042] When the equipment is started, the rotating rod 1 drives the disc 2, the base 3, the expansion body 4 and the workpiece to revolve together. At the same time, the drive source 9 causes the drive gear 801 to rotate, which drives each base 3 and its expansion body 4 and workpiece to rotate on their own axis through the gear ring 802.

[0043] Specifically: the drive gear 801 is connected to the external drive source 9, such as... Figure 4 As shown, the drive source 9 can be a motor that drives gear transmission to drive the gear 801 to rotate. The motor is fixed below the disc 2 and the circuit is connected through the hollow rotating rod 1. This will not be described in detail here. After the drive gear 801 rotates, it will drive the gear ring 802 to rotate, which will cause the base 3 to rotate, thus realizing the rotation of the base 3.

[0044] Under the combined motion of revolution and rotation, the outer surface of the workpiece is uniformly exposed for vacuum coating. After coating is completed, the locking bolt 6041 is loosened by reversing the operation, the base plate 5 is lowered, the push rod 701 moves down and exits the expansion body 4, the expansion body 4 contracts, and the coated workpiece can be removed.

[0045] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A workpiece rotation positioning device for a vacuum coating machine, characterized in that: The device includes a rotating rod (1) and a disc (2) fixed to the outer wall of the rotating rod (1). The upper surface of the disc (2) is provided with several sets of self-rotating bases (3). Above the bases (3) is an expansion body (4) that can be inserted into the workpiece. Below the disc (2) is a base plate (5). Below the base plate (5) is a lifting structure (6) that drives the base plate (5) to rise and fall. Above the base plate (5) is an expansion structure (7) that drives the expansion body (4) to expand. The outer wall of the rotating rod (1) is provided with a rotating structure (8) that drives the base (3) to rotate.

2. The workpiece rotation positioning device for a vacuum coating machine according to claim 1, characterized in that: The expansion body (4) includes two sets of mirror-symmetrical arc plates (401). The outer wall of the arc plate (401) is fixed with a guide rod (402). The inner wall of the base (3) is provided with a guide groove (403) for inserting the guide rod (402). Each arc plate (401) has at least two sets of guide rods (402) on one side, one upper and one lower.

3. The workpiece rotation positioning device for a vacuum coating machine according to claim 2, characterized in that: The lifting structure (6) includes a sleeve (601), the top of which is rotatably connected to the base plate (5), and the outer wall of the rotating rod (1) is provided with a threaded part (602).

4. The workpiece rotation positioning device for a vacuum coating machine according to claim 3, characterized in that: The sleeve (601) is threaded to the threaded part (602), and the outer wall of the sleeve (601) is welded with a handle (603) to facilitate the rotation of the sleeve (601). A locking structure (604) is provided between the disc (2) and the base plate (5) to prevent the sleeve (601) from loosening.

5. The workpiece rotation positioning device for a vacuum coating machine according to claim 4, characterized in that: The locking structure (604) includes a bolt (6041), which passes through the disc (2) and the base plate (5) respectively, and the two ends of the bolt (6041) are threaded with nuts (6042).

6. The workpiece rotation positioning device for a vacuum coating machine according to claim 5, characterized in that: The expansion structure (7) includes a top rod (701), the cross-section of the top rod (701) is flat and round, the longitudinal section of the top rod (701) is frustum-shaped, and a rotating shaft (702) is fixed at the bottom end of the top rod (701), the rotating shaft (702) is rotatably connected to the bottom plate (5).

7. The workpiece rotation positioning device for a vacuum coating machine according to claim 1, characterized in that: The rotating structure (8) includes a drive gear (801), which is sleeved on the outside of the rotating rod (1) and rotatably connected to the rotating rod (1) through a bearing. A toothed ring (802) is fixed on the outer wall of the base (3), and the toothed ring (802) meshes with the drive gear (801).

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