A device for multi-stage dynamic control of electroplating liquid flow by using Bernoulli principle
By designing a multi-stage dynamic flow control component based on Bernoulli's principle, combined with a variable-diameter branch and a solenoid valve, precise multi-stage adjustment of electroplating solution flow rate and energy consumption optimization are achieved. This solves the problems of limited adjustment range and high energy consumption in existing electroplating solution flow control devices, and improves the stability and response speed of electroplating solution flow control.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 正阳融合微电子技术(珠海)有限公司
- Filing Date
- 2025-04-19
- Publication Date
- 2026-06-26
AI Technical Summary
Existing electroplating solution flow control devices are difficult to achieve multi-level, high-precision dynamic adjustment and have high energy consumption. Traditional throttle valves have limited adjustment range, frequent start-stop of variable frequency pumps leads to large pressure fluctuations and lag in response, and lack systematic consideration of dynamic pressure balance and energy conversion efficiency.
Employing a multi-stage dynamic flow control component, this system utilizes Bernoulli's principle to design a variable-diameter branch unit and a small-diameter valve combination. By decreasing the diameter of the first variable-diameter branch and increasing the diameter of the second variable-diameter branch, combined with solenoid valve control, it achieves the matching of fluid pressure and flow rate and energy conversion. In conjunction with a closed-loop feedback system of a variable-frequency chemical pump and a pressure sensor, it enables precise multi-stage adjustment of electroplating solution flow and optimization of energy consumption.
It enables precise multi-level adjustment of electroplating solution flow rate, reduces energy loss, improves the stability and response speed of flow control, and solves the problems of limited adjustment range and high energy consumption in traditional methods.
Smart Images
Figure CN224411959U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of TGV electroplating process, and in particular to a device for dynamically controlling the flow rate of electroplating solution in multiple stages using Bernoulli's principle. Background Technology
[0002] With the rapid development of high-density electronic packaging technology, the TGV (Through Glass Via) electroplating process is becoming increasingly important in fields such as 3D integration and advanced packaging. The accuracy and dynamic adjustment capability of electroplating solution flow control directly affect the uniformity of the plating layer, the filling effect in the holes, and the stability of the process. Traditional electroplating solution flow control often uses a single throttle valve or direct pressure regulation by a variable frequency pump. However, these methods have significant limitations when dealing with complex operating conditions: the throttle valve has a limited adjustment range and is prone to energy loss, while frequent start-stop of the variable frequency pump leads to large pressure fluctuations and lag in response, making it difficult to meet the requirements of TGV process for multi-level, high-dynamic flow control.
[0003] In existing technologies, while parallel multi-branch schemes based on fixed pipe diameters can achieve segmented flow regulation, the flow coupling effect between branches is significant, the calculation of equivalent flow area is complex, and the actual regulation accuracy is difficult to guarantee. In addition, traditional variable diameter designs mostly focus on unidirectional flow channel optimization, lacking a systematic consideration of dynamic pressure balance and energy conversion efficiency, resulting in poor flow control linearity and high energy consumption. Bernoulli's principle reveals the dynamic balance relationship between fluid velocity and static pressure in variable diameter pipes, providing theoretical support for optimizing electroplating solution flow control. However, how to effectively apply it to multi-level dynamic regulation scenarios still requires solving key technical challenges such as branch collaborative control, pressure matching, and accurate flow measurement.
[0004] Therefore, the inventor has designed a device that uses Bernoulli's principle to dynamically control the flow rate of electroplating solution in multiple stages to solve the above problems. Utility Model Content
[0005] To address the shortcomings of the existing technology, this utility model provides a device for multi-level dynamic control of electroplating solution flow rate using Bernoulli's principle, aiming to solve the problems of existing electroplating solution flow control devices being unable to achieve multi-level, high-precision dynamic adjustment and having high energy consumption.
[0006] To achieve the above objectives, the technical solution adopted by this utility model is: a device for multi-level dynamic control of electroplating solution flow rate using Bernoulli's principle, comprising a multi-level dynamic flow control component. The multi-level dynamic flow control component includes a static pressure pipe, at least two sets of parallel variable diameter branch units, a manifold pipe with the same number of variable diameter branch units, and a flow meter. Each variable diameter branch unit includes multiple first variable diameter branches, multiple small-diameter valves, and multiple second variable diameter branches. The input end of the first variable diameter branch is connected to the static pressure pipe, and its output end is connected to the input end of the small-diameter valve. The output end of the small-diameter valve is connected to the input end of the second variable diameter branch, and the output end of the second variable diameter branch is connected to the input end of the manifold pipe. The output end of the manifold pipe is connected to the input end of the flow meter. The diameter of the first variable diameter branch decreases sequentially from the input end to the output end, and the diameter of the second variable diameter branch increases sequentially from the input end to the output end.
[0007] Based on the above, the beneficial effect of a device for multi-level dynamic control of electroplating solution flow rate using Bernoulli's principle is that it solves the problems of existing electroplating solution flow rate control devices, such as difficulty in achieving multi-level, high-precision dynamic adjustment and high energy consumption; mainly reflected in:
[0008] 1. This utility model uses the variable diameter branch unit of the multi-stage dynamic flow control component to realize multi-stage precise adjustment of the electroplating solution flow rate by utilizing the Bernoulli principle, thus solving the problems of limited adjustment range and insufficient precision of traditional single valves or frequency converters.
[0009] 2. This utility model optimizes the matching of fluid pressure and flow velocity by using the pipe diameter gradient structure of the first and second variable diameter branches, thereby reducing energy loss and solving the problem of high energy consumption in the traditional throttle valve regulation method.
[0010] 3. This utility model achieves rapid response and flexible flow switching by using solenoid valve control of small-diameter valves and multi-branch combination adjustment, thus solving the problems of lag and poor stability in dynamic adjustment of traditional methods.
[0011] Furthermore, the device also includes an electroplating solution storage component, which includes an electroplating solution tank and a variable frequency chemical pump. The input end of the variable frequency chemical pump is connected to the electroplating solution tank, and the output end of the variable frequency chemical pump is connected to the input end of the static pressure pipe.
[0012] Based on the above, the beneficial effects of the electroplating solution storage tank are to provide a stable supply of electroplating solution; the beneficial effects of the variable frequency chemical pump are to flexibly adjust the output pressure and flow rate according to system requirements, solving the problems of high energy consumption and slow adjustment response of traditional fixed speed pumps; and the beneficial effects of the static pressure pipe are to stabilize the fluid pressure and distribute it to each variable diameter branch, solving the problem of fluid pressure fluctuations affecting the accuracy of flow control.
[0013] Furthermore, a pressure sensor and a filter are sequentially installed between the variable frequency drug pump and the static pressure pipe, and a pressure sensor is installed on the static pressure pipe. The pressure difference data between the pressure sensor and the pressure sensor is used to control the output pressure of the variable frequency drug pump.
[0014] Based on the above, the beneficial effect of pressure sensor one is to monitor the pressure after the pump in real time, which solves the problem of lack of real-time feedback of the output pressure of the variable frequency chemical pump; the beneficial effect of the filter is to remove impurity particles in the electroplating solution; the beneficial effect of pressure sensor two is to detect the inlet pressure of the static pressure pipe, which solves the problem of inaccurate monitoring of the system pressure balance state.
[0015] Furthermore, the device also includes an electroplating assembly, which includes an upper spray plate and a lower spray plate, with the output terminals of the two flow meters respectively connected to the upper spray plate and the lower spray plate.
[0016] Based on the above, the beneficial effect of the dual flow meter configuration is that it allows for independent monitoring of the flow rates of the upper and lower spray plates.
[0017] Furthermore, the diameter of the first variable-diameter branch decreases sequentially from the input end to the output end to 1 / 2, 1 / 4, and 1 / 8 of the diameter of the static pressure pipe, while the diameter of the second variable-diameter branch increases sequentially from the input end to the output end to 1 / 8, 1 / 4, and 1 / 2 of the diameter of the merging pipe, and the diameters of the static pressure pipe and the merging pipe are equal.
[0018] Based on the above, the beneficial effect of the pipe diameter decreasing design of the first variable diameter branch is to gradually increase the fluid flow rate and reduce the static pressure; the beneficial effect of the pipe diameter increasing design of the second variable diameter branch is to smoothly restore the fluid pressure and reduce the flow rate, thus solving the problem of unstable flow caused by fluid impact; the beneficial effect of the equal diameter design of the static pressure pipe and the confluence pipe is to maintain the consistency of the system pressure benchmark.
[0019] Furthermore, the small-diameter valve is a solenoid valve, and its diameter matches the diameter of the connecting variable-diameter branch.
[0020] Furthermore, the pipe diameter change ratio of the first and second variable diameter branches is determined based on Bernoulli's principle, and the equivalent flow area is adjusted by controlling the opening and closing combinations of several small-diameter valves in each group of variable diameter branch units.
[0021] Based on the above, the beneficial effects achieved based on Bernoulli's principle (P + 1 / 2ρv² + ρgh = C) can be explained in detail using the principles of fluid mechanics as follows:
[0022] 1. By designing the pipe diameter of the first variable-diameter branch in a decreasing manner, according to the continuity equation (Q=A·v), it can be known that as the flow cross-sectional area (A) decreases step by step, the fluid velocity (v) will inevitably increase. According to Bernoulli's principle, the increase in velocity will lead to a decrease in static pressure (P) at that location, forming a local low-pressure zone. This solves the problem that traditional equal-diameter pipes cannot achieve fine flow control through pressure difference changes.
[0023] 2. By gradually increasing the pipe diameter of the second variable diameter branch, the flow cross-sectional area (A) gradually increases, the flow velocity (v) decreases accordingly, and the static pressure (P) recovers. This design avoids the fluid kinetic energy (1 / 2ρv2) from being converted into turbulent loss at the outlet due to sudden expansion.
[0024] 3. By adjusting the equivalent flow area through the opening and closing combination of small-diameter valves, and utilizing the property of the conservation of total mechanical energy in Bernoulli's principle, the flow velocity and pressure distribution of different branches can be dynamically adjusted. Multiple valve combinations can form a discrete equivalent cross-sectional area (Ae), thereby accurately controlling the flow rate (Qe=Ae·ve), which solves the problem of poor linearity of single valve adjustment and inability to achieve multi-level flow output.
[0025] In summary, the synergistic effect of the variable diameter structure and valve combination enables the system to achieve graded flow control by converting static pressure (P) and dynamic pressure (1 / 2ρv2) while maintaining the conservation of total energy (C). At the same time, it avoids the mechanical energy loss of traditional throttle valves, thus comprehensively solving the problem of high-precision and low-energy dynamic flow control.
[0026] Furthermore, the opening and closing combinations of the small-diameter valves include any combination of opening one or more valves to form multi-level flow control.
[0027] Furthermore, the device also includes a circulation return pipe, the input end of which is connected to the output end of the electroplating operation component, and the output end of which is connected to the electroplating solution storage tank.
[0028] To more clearly illustrate the above-mentioned features of this utility model and the objectives it aims to achieve, the present utility model will be further described below in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description
[0029] Figure 1 : This is a perspective view of the present invention;
[0030] Figure 2 : This is a connection diagram of the present invention.
[0031] Reference numerals: 1-Electroplating solution storage component, 11-Electroplating solution storage tank, 12-Variable frequency chemical pump, 13-Pressure sensor one, 14-Filter, 15-Circulation return pipe, 2-Multi-stage dynamic flow control component, 21-Static pressure pipe, 211-Pressure sensor two, 22-Variable diameter branch unit, 221-First variable diameter branch, 222-Small diameter valve, 223-Second variable diameter branch, 23-Combination pipe, 24-Flow meter, 3-Electroplating operation component, 31-Upper spray plate, 32-Lower spray plate. Detailed Implementation
[0032] like Figures 1-2 As shown, a device for dynamically controlling the flow rate of electroplating solution using Bernoulli's principle includes a multi-stage dynamic flow control component 2. The multi-stage dynamic flow control component 2 includes a static pressure pipe 21, at least two sets of parallel variable diameter branch units 22, a manifold 23 equal in number to the variable diameter branch units 22, and a flow meter 24. Each variable diameter branch unit 22 includes multiple first variable diameter branches 221, multiple small-diameter valves 222, and multiple second variable diameter branches 223. The input end of the first variable diameter branch 221... The first variable diameter branch 221 is connected to the static pressure pipe 21, and its output end is connected to the input end of the small diameter valve 222. The output end of the small diameter valve 222 is connected to the input end of the second variable diameter branch 223, and its output end is connected to the input end of the manifold 23. The output end of the manifold 23 is connected to the input end of the flow meter 24. The diameter of the first variable diameter branch 221 decreases sequentially from the input end to the output end, and the diameter of the second variable diameter branch 223 increases sequentially from the input end to the output end.
[0033] The device also includes an electroplating solution storage component 1, which includes an electroplating solution storage tank 11 and a variable frequency chemical pump 12. The input end of the variable frequency chemical pump 12 is connected to the electroplating solution storage tank 11, and the output end of the variable frequency chemical pump 12 is connected to the input end of the static pressure pipe 21.
[0034] A pressure sensor 13 and a filter 14 are sequentially arranged between the variable frequency drug pump 12 and the static pressure pipe 21. A pressure sensor 211 is arranged on the static pressure pipe 21. The pressure difference data between the pressure sensor 13 and the pressure sensor 211 is used to control the output pressure of the variable frequency drug pump 12.
[0035] The device also includes an electroplating operation component 3, which includes an upper spray plate 31 and a lower spray plate 32. The output terminals of the two flow meters 24 are respectively connected to the upper spray plate 31 and the lower spray plate 32.
[0036] The diameter of the first variable diameter branch 221 decreases sequentially from the input end to the output end to 1 / 2, 1 / 4, and 1 / 8 of the diameter of the static pressure pipe 21. The diameter of the second variable diameter branch 223 increases sequentially from the input end to the output end to 1 / 8, 1 / 4, and 1 / 2 of the diameter of the confluence pipe 23. The diameters of the static pressure pipe 21 and the confluence pipe 23 are equal. Each group of variable diameter branch units 22 includes three first variable diameter branches 221, three small diameter valves 222, and three second variable diameter branches 223.
[0037] The small-diameter valve 222 is a solenoid valve, and its diameter is matched with the diameter of the variable-diameter branch it is connected to.
[0038] The pipe diameter change ratio of the first variable diameter branch 221 and the second variable diameter branch 223 is determined based on Bernoulli's principle, and the equivalent flow area is adjusted by controlling the opening and closing combination of several small diameter valves 222 in each group of variable diameter branch units 22.
[0039] The opening and closing combinations of the small-diameter valve 222 include any combination of opening one or more valves to form multi-level flow control.
[0040] The device also includes a circulation return pipe 15, the input end of which is connected to the output end of the electroplating operation component 3, and the output end of which is connected to the electroplating solution storage tank 11.
[0041] In summary, the specific implementation of this utility model is as follows: the electroplating solution in the electroplating solution storage tank 11 is pressurized and transported by the variable frequency chemical solution pump 12. The pumping pressure is monitored in real time by the pressure sensor 13 and purified by the filter 14 before entering the static pressure pipe 21. The pressure sensor 211 installed on the static pressure pipe 21 forms a pressure differential closed loop with the pressure sensor 13, and dynamically adjusts the output of the variable frequency chemical solution pump 12 to ensure that the system pressure is stable at the set value.
[0042] After the electroplating solution enters the multi-stage dynamic flow control component 2, it is diverted to the parallel variable diameter branch unit 22. The first variable diameter branch 221 adopts a pipe diameter decreasing design, so that the flow velocity increases step by step and forms a stepped static pressure drop. The small diameter valve 222 selectively opens different pipe diameter branches according to the control command, and forms a variety of equivalent flow areas through valve combination. The second variable diameter branch 223 adopts a pipe diameter increasing design, so that the fluid kinetic energy is gradually converted into static pressure energy. After the fluid of each branch completes pressure balance in the confluence pipe 23, it is detected in real time by the flow meter 24. By adjusting the opening and closing combination of different branch valves, a geometric series multi-stage adjustment can be achieved.
[0043] The regulated electroplating solution is delivered to the upper spray plate 31 and the lower spray plate 32 in two separate channels to form a stable bidirectional spray flow field. By independently monitoring the data of the two flow meters 24, the valve combination of the corresponding branch can be adjusted in real time to ensure that the workpiece surface obtains uniform electroplating deposition. The used electroplating solution is returned to the electroplating solution storage tank 11 through the circulation return pipe 15 to complete the closed loop circulation.
[0044] This device achieves efficient conversion and precise distribution of pressure energy and kinetic energy through Bernoulli's principle. Combined with intelligent valve control, it achieves flow control while maintaining the conservation of total mechanical energy. The variable diameter branch unit 22 realizes the directional conversion of energy form, and the combination of several small-diameter valves 222 provides digital adjustment means. The closed-loop feedback system composed of pressure sensor 13 and pressure sensor 211 ensures the stability of dynamic adjustment, thereby solving the problems of insufficient adjustment accuracy and high energy consumption of traditional electroplating solution flow control devices.
[0045] The above description is only the optimal solution embodiment of this utility model and is not intended to limit this utility model. Various modifications or substitutions made by those skilled in the art to this utility model without departing from the essence and protection scope of this utility model should also be within the protection scope of this utility model.
Claims
1. A device for dynamically controlling the flow rate of electroplating solution in multiple stages using Bernoulli's principle, characterized in that: The system includes a multi-stage dynamic flow control component (2), which comprises a static pressure pipe (21), at least two sets of parallel variable diameter branch units (22), a manifold (23) equal in number to the variable diameter branch units (22), and a flow meter (24). Each variable diameter branch unit (22) includes multiple first variable diameter branches (221), multiple small diameter valves (222), and multiple second variable diameter branches (223). The input end of the first variable diameter branch (221) is connected to the static pressure pipe (21). The output end is connected to the input end of the small-diameter valve (222), the output end of the small-diameter valve (222) is connected to the input end of the second variable diameter branch (223), the output end of the second variable diameter branch (223) is connected to the input end of the manifold (23), and the output end of the manifold (23) is connected to the input end of the flow meter (24); wherein, the pipe diameter of the first variable diameter branch (221) decreases sequentially from the input end to the output end, and the pipe diameter of the second variable diameter branch (223) increases sequentially from the input end to the output end.
2. The device for multi-level dynamic control of electroplating solution flow rate using Bernoulli's principle according to claim 1, characterized in that: The device also includes an electroplating solution storage component (1), which includes an electroplating solution storage tank (11) and a variable frequency chemical pump (12). The input end of the variable frequency chemical pump (12) is connected to the electroplating solution storage tank (11), and the output end of the variable frequency chemical pump (12) is connected to the input end of the static pressure pipe (21).
3. The device for multi-level dynamic control of electroplating solution flow rate using Bernoulli's principle according to claim 2, characterized in that: A pressure sensor (13) and a filter (14) are sequentially arranged between the variable frequency drug pump (12) and the static pressure pipe (21). A pressure sensor (211) is arranged on the static pressure pipe (21). The pressure difference data between the pressure sensor (13) and the pressure sensor (211) is used to control the output pressure of the variable frequency drug pump (12).
4. The device for multi-level dynamic control of electroplating solution flow rate using Bernoulli's principle according to claim 2, characterized in that: The device also includes an electroplating operation assembly (3), which includes an upper spray plate (31) and a lower spray plate (32), with the output ends of the two flow meters (24) respectively connected to the upper spray plate (31) and the lower spray plate (32).
5. The device for multi-level dynamic control of electroplating solution flow rate using Bernoulli's principle according to claim 1, characterized in that: The diameter of the first variable diameter branch (221) decreases sequentially from the input end to the output end to 1 / 2, 1 / 4, and 1 / 8 of the diameter of the static pressure pipe (21), and the diameter of the second variable diameter branch (223) increases sequentially from the input end to the output end to 1 / 8, 1 / 4, and 1 / 2 of the diameter of the confluence pipe (23). The diameters of the static pressure pipe (21) and the confluence pipe (23) are equal.
6. The device for multi-level dynamic control of electroplating solution flow rate using Bernoulli's principle according to claim 5, characterized in that: The small-diameter valve (222) is a solenoid valve, and its diameter is matched with the diameter of the variable-diameter branch connected to it.
7. The device for dynamically controlling the flow rate of electroplating solution in multiple stages using Bernoulli's principle according to claim 1, characterized in that: The pipe diameter change ratio of the first variable diameter branch (221) and the second variable diameter branch (223) is determined based on the Bernoulli principle. The equivalent flow area is adjusted by controlling the opening and closing combination of several small diameter valves (222) in each group of variable diameter branch units (22).
8. The device for multi-level dynamic control of electroplating solution flow rate using Bernoulli's principle according to claim 7, characterized in that: The opening and closing combinations of the small-diameter valve (222) include any combination of opening one or more valves to form multi-level flow control.
9. The device for multi-level dynamic control of electroplating solution flow rate using Bernoulli's principle according to claim 4, characterized in that: The device also includes a circulation return pipe (15), the input end of which is connected to the output end of the electroplating operation assembly (3), and the output end of which is connected to the electroplating solution storage tank (11).