Exposure scanning axis drive mechanism of a vertical exposure apparatus

Abstract

The utility model discloses an exposure scanning shaft drive mechanism, exposure scanning shaft drive mechanism adopts the mode of linear motor module drive, eliminates mechanical transmission gap, improves the scanning speed of exposure scanning shaft, improves the positioning accuracy of vertical exposure equipment, satisfies the high accuracy requirement of exposure machine field. The counterweight of the present application is connected with the mounting base, and the counterweight offsets the weight of the lens module, which can reduce the driving force when the linear motor module is driven, so that the exposure scanning shaft drive mechanism is suitable for heavy load occasions. At the same time, the problem of the lens module falling due to its own weight after the linear motor module is powered off can be avoided, and the adaptability of the exposure scanning shaft drive mechanism is improved. In addition, the exposure scanning shaft drive mechanism of the present application has simple and reliable structure, low noise and low wear, which greatly reduces the maintenance cost in the later period.

Description

Technical Field

[0001] This utility model relates to the field of exposure scanning axis drive, and in particular to an exposure scanning axis drive mechanism for a vertical exposure device. Background Technology

[0002] The vertical exposure scanning axis of most existing vertical screen exposure machines is driven by KK modules. The KK module consists of a ball screw and a U-shaped linear guide rail. The slide in the KK module is also the driving nut of the ball screw and the guide slider of the linear rail.

[0003] However, KK modules have the following drawbacks: 1. Precision limitations: Although KK modules offer high precision, their accuracy still cannot fully meet customer needs in high-precision applications such as exposure machines. 2. Limited load capacity: Compared to other transmission components, KK modules may have a lower load capacity, making them unsuitable for heavy-duty applications. 3. Higher price and maintenance costs: Due to the relatively complex structure of KK modules, their manufacturing and maintenance costs are relatively high. Utility Model Content

[0004] To address the aforementioned issues, this invention provides an exposure scanning axis drive mechanism for a vertical exposure device. By incorporating a linear motor module to eliminate mechanical transmission backlash, it improves both the scanning speed of the exposure scanning axis and the positioning accuracy of the vertical exposure device, thus meeting the high-precision requirements of the exposure machine field.

[0005] To achieve the above-mentioned utility model objectives, this utility model provides an exposure scanning axis drive mechanism for a vertical exposure device, the vertical exposure device including a lens module, and the exposure scanning axis drive mechanism including:

[0006] Base;

[0007] The first guide rail pair includes a first guide rail fixed to one side of the base and a first slider slidably connected to the first guide rail;

[0008] The second guide rail pair is disposed opposite to the first guide rail pair and includes a second guide rail fixed to the other side of the base and a second slider slidably connected to the second guide rail;

[0009] The mounting base plate is fixedly connected to the first slider, and the lens module is mounted on the mounting base plate;

[0010] The counterweight is fixedly connected to the second slider;

[0011] At least one set of transmission components, the transmission components including a transmission belt whose two ends are fixedly connected to the mounting base plate and the counterweight respectively, and a steering pulley disposed on the top of the base and used for steering the transmission belt;

[0012] A linear motor module is used to drive the mounting base plate to reciprocate along the extension direction of the first guide rail.

[0013] Furthermore, the linear motor module includes a linear motor stator and a linear motor mover, the linear motor stator being mounted on the base and the linear motor mover being mounted on the mounting base plate.

[0014] Furthermore, the counterweight includes multiple detachable counterweight blocks.

[0015] Furthermore, the top of the base is provided with multiple pairs of pulley fixing seats at intervals, and each pair of pulley fixing seats is rotatably connected to a pulley shaft, and the steering pulley is fixed to the pulley shaft.

[0016] Furthermore, the exposure scanning axis drive mechanism also includes a parking motor for controlling the steering pulley to stop. The parking motor is mounted on the base, and the output shaft of the parking motor is connected to the pulley shaft via a coupling.

[0017] Furthermore, an adjusting pulley is provided between the two pairs of steering pulleys, and the drive belt is located below the adjusting pulley.

[0018] Furthermore, the lens module includes a DMD component, and the exposure scanning axis drive mechanism further includes a mounting base connected to the mounting base plate, the mounting base being used to accommodate an image control component for controlling the image of the DMD component.

[0019] Furthermore, the weight of the counterweight is equal to the total weight of the lens module and the image control component.

[0020] Furthermore, the exposure scanning axis drive mechanism also includes a grating ruler disposed on the base and a reading head connected to the mounting base plate.

[0021] Furthermore, the first guide rail includes a track one and a track two arranged at intervals, and the first slider includes at least one slider one slidably connected to the track one and at least one slider two slidably connected to the track two; the second guide rail includes a track three and a track four arranged at intervals, and the second slider includes at least one slider three slidably connected to the track three and at least one slider four slidably connected to the track four.

[0022] The exposure scanning axis drive mechanism of this invention adopts a linear motor module drive, eliminating mechanical transmission backlash. This improves both the scanning speed of the exposure scanning axis and the positioning accuracy of the vertical exposure equipment, meeting the high-precision requirements of the exposure machine field. By incorporating a counterweight connected to the mounting base, the weight of the lens module is offset, reducing the driving force of the linear motor module and making the exposure scanning axis drive mechanism suitable for heavy-duty applications. Simultaneously, it prevents the lens module from falling due to its own weight after power failure of the linear motor module, enhancing the adaptability of the exposure scanning axis drive mechanism. Furthermore, the exposure scanning axis drive mechanism of this application has a simple and reliable structure, low noise, and low wear, significantly reducing subsequent maintenance costs. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the exposure scanning axis drive mechanism in a specific embodiment of the present invention;

[0024] Figure 2 A schematic diagram of the exposure scanning axis drive mechanism from another perspective;

[0025] Figure 3 for Figure 1 A front view of the exposure scanning axis drive mechanism. Detailed Implementation

[0026] To facilitate understanding of this utility model, a more comprehensive description of it will be provided below in conjunction with specific embodiments. Preferred embodiments of this utility model are given in the specific embodiments. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model.

[0027] The terms "optional" and similar expressions used in this invention refer to embodiments of the invention that may provide certain beneficial effects under certain circumstances. However, other embodiments may also be optional in the same or other circumstances. Furthermore, the description of one or more optional embodiments does not imply that other embodiments are unavailable, nor is it intended to exclude other embodiments from the scope of this invention.

[0028] See Figures 1 to 3 As shown, this application provides an exposure scanning axis drive mechanism for a vertical exposure device, which includes a lens module 100. The vertical exposure device can be a vertical exposure machine used in the PCB industry or a vertical screen printing machine used in the screen printing industry. The lens module 100 is an exposure lens module 100, used to project patterned light onto the surface of a substrate with photosensitive material.

[0029] Specifically, the exposure scanning axis drive mechanism includes a base 1, which is connected to the body of the vertical exposure device. The mechanism also includes a first guide rail pair 2 and a second guide rail pair 3 disposed opposite to each other on both sides of the base 1. Specifically, the first guide rail pair 2 includes a first guide rail 21 fixed to one side of the base 1 and a first slider 22 slidably connected to the first guide rail 21. The second guide rail pair 3 includes a second guide rail 31 fixed to the other side of the base 1 and a second slider 32 slidably connected to the second guide rail 31. The first guide rail 21 and the second guide rail 31 extend in the same direction; specifically, the extension direction can be set to a vertical direction.

[0030] Furthermore, the exposure scanning axis drive mechanism also includes a mounting base plate 4 fixedly connected to the first slider 22, and a counterweight 5 fixedly connected to the second slider 32. The lens module 100 of the vertical exposure equipment is mounted on the mounting base plate 4 and slides together with the mounting base plate 4. The exposure scanning axis drive mechanism is also provided with at least one set of transmission components, which include a transmission belt 6 fixedly connected at both ends to the mounting base plate 4 and the counterweight 5 respectively, and a steering pulley 7 located on the top of the base 1 for turning the transmission belt 6. The transmission belt 6 is located above the steering pulley 7, and the steering pulley 7 turns the transmission belt 6 from one side of the base 1 to the other side of the base 1, thereby realizing the turning of the transmission belt 6, so that when the mounting base plate 4 moves, the transmission belt 6 drives the counterweight 5 to move synchronously in the opposite direction. The number of transmission belts 6 can be adjusted according to actual needs. The exposure scanning axis drive mechanism also includes a linear motor module for driving the mounting base plate 4 to reciprocate along the extension direction of the first guide rail 21. In a specific embodiment, the extension direction of the first guide rail 21 can be vertical.

[0031] The exposure scanning axis drive mechanism of this application drives the mounting base plate 4 and the first slider 22 to slide up and down along the first guide rail 21 via a linear motor module, enabling the lens module 100 to move up and down on one side of the base 1, thus meeting the needs of the lens module 100 for exposure in a vertical exposure device. Simultaneously with the lens module 100's up and down movement, the counterweight 5 and the second slider 32 are driven to slide up and down along the second guide rail 31 on the other side of the base 1 via a transmission belt 6. The counterweight 5 offsets all or part of the weight of the lens module 100. Compared with the KK module drive structure, the exposure scanning axis drive mechanism of this utility model uses a linear motor module drive, eliminating mechanical transmission backlash. This improves both the scanning speed of the exposure scanning axis and the positioning accuracy of the vertical exposure device, meeting the high-precision requirements of the exposure machine field. This application incorporates a counterweight 5 connected to the mounting base 4. This counterweight 5 offsets the weight of the lens module 100, reducing the driving force of the linear motor module and making the exposure scanning axis drive mechanism suitable for heavy-duty applications. Simultaneously, it prevents the lens module 100 from falling due to its own weight after power failure of the linear motor module, improving the adaptability of the exposure scanning axis drive mechanism. Furthermore, the exposure scanning axis drive mechanism of this application features a simple and reliable structure, low noise, and low wear, significantly reducing subsequent maintenance costs.

[0032] In one specific embodiment, the first guide rail 21 includes a track 1 211 and a track 212 spaced apart, and the first slider 22 includes at least one slider 1 slidably connected to track 1 211 and at least one slider 2 slidably connected to track 2 212; the second guide rail 31 includes a track 3 311 and a track 4 312 spaced apart, and the second slider 32 includes at least one slider 3 slidably connected to track 3 311 and at least one slider 4 slidably connected to track 4 312. By setting both the first guide rail 21 and the second guide rail 31 as dual tracks, the overall stability and reliability of the exposure scanning axis drive mechanism are improved, while the movement of the lens module 100 and the counterweight 5 is made smoother.

[0033] Furthermore, the linear motor module includes a linear motor stator and a linear motor mover. The linear motor stator is mounted on the base 1, and the linear motor mover is mounted on the mounting plate 4. After the linear motor module is started, the linear motor mover drives the mounting plate 4 to move relative to the base 1, thereby controlling the up and down movement of the lens module 100.

[0034] Furthermore, the counterweight 5 includes multiple detachable counterweight blocks. The material, quantity, and weight of the counterweight blocks can be matched according to the weight of the lens module 100, so that the exposure scanning axis drive mechanism can be adapted to different models of lens modules 100.

[0035] Preferably, the transmission belt 6 can be a thicker belt, so that the exposure scanning drive mechanism can be adapted to application scenarios where the linear motor module needs to decelerate when running at high speed.

[0036] Specifically, the drive belt 6 is connected to the counterweight 5 and / or the mounting base plate 4 via a fastener. The fastener can be a bolt, screw, or a connector with a toothed surface, which engages with the drive belt 6 through the toothed surface.

[0037] In one specific embodiment, two drive belts 6 and two pairs of guide pulleys 7 are provided, with the drive belts 6 located above the corresponding guide pulleys 7. The exposure scanning axis drive mechanism of this application is also provided with a parking motor for controlling the parking of the guide pulleys 7, and the parking motor 7 is mounted on the base 1. When the linear motor module is powered off, the parking motor causes the guide pulleys 7 to drive the drive belts 6 to stop, preventing the lens module 100 from falling due to its own weight. This application forms a double self-locking structure through the parking motor 7 and the counterweight 5, further improving the safety performance of the exposure scanning axis drive mechanism.

[0038] In a specific embodiment, multiple pairs of pulley fixing seats 8 are spaced apart on the top of the base 1, and the pulley fixing seats 8 are fixed to the top of the base 1 by bolts. Each pair of pulley fixing seats 8 is rotatably connected to a pulley shaft 9, and the steering pulley 7 is fixed to the pulley shaft 9. The parking motor can be a stepper motor or a permanent magnet motor, and the output shaft of the parking motor is connected to the pulley shaft 9 through a coupling. The coupling can be fixed by means of screw locking or metal shaft key locking.

[0039] Furthermore, an adjusting pulley is provided between the two pairs of steering pulleys 7. The adjusting pulley can be installed in the same way as the steering pulleys 7 on the base 1. Specifically, the drive belt 6 extends from the upper side of the steering pulley 7 near the mounting base 4, wraps around the lower side of the adjusting pulley, and then wraps around the upper side of the steering pulley 7 away from the mounting base. By wrapping the rotating belt 6 around the upper side of the steering pulley 7 and the lower side of the adjusting pulley, the drive belt 6 is always kept taut, thereby avoiding deformation of the drive belt 6 when it stops under high acceleration conditions, which would affect the positioning accuracy of the motion device.

[0040] In one specific embodiment, the lens module 100 is a direct-write lens module 100, which includes a DMD component. The vertical exposure device also includes an image control component for controlling the image of the DMD component. The exposure scanning axis drive mechanism also includes a mounting base 10 connected to the mounting base 4. The mounting base 10 is used to accommodate the image control component for controlling the image of the DMD component. While the linear motor module drives the lens module 100 to move, the mounting base 10 drives the image control component to move synchronously with the lens module 100, improving the stability of the DMD component image signal transmission. In addition, the mounting base 10 and the mounting base 4 are located on two adjacent sides of the base 1, making the structure of the exposure scanning axis drive mechanism compact. In this embodiment, the weight of the counterweight 5 is equal to the total weight of the lens module 100 and the image control component. When the linear motor module is powered off, the weights on both sides of the transmission belt are equal, and the counterweight 5 forms a self-locking structure to prevent the lens module 100 and the image control component from being damaged by their own weight.

[0041] Furthermore, the exposure scanning axis drive mechanism also includes a grating ruler 11 mounted on the base 1 and a reading head 12 connected to the mounting base 4. The grating ruler 11 may be an incremental grating ruler, for example. When the linear motor module drives the lens module 100 to move, the real-time position feedback from the reading head 12 and the grating ruler 11 is used for positioning, further ensuring the positioning accuracy of the exposure scanning axis drive mechanism, thereby achieving high-precision exposure scanning for the vertical exposure equipment.

[0042] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. An exposure scanning axis drive mechanism for a vertical exposure apparatus, the vertical exposure apparatus comprising a lens module, characterized in that, The exposure scanning axis drive mechanism includes: Base; The first guide rail pair includes a first guide rail fixed to one side of the base and a first slider slidably connected to the first guide rail; The second guide rail pair is disposed opposite to the first guide rail pair and includes a second guide rail fixed to the other side of the base and a second slider slidably connected to the second guide rail. The mounting base plate is fixedly connected to the first slider, and the lens module is mounted on the mounting base plate; The counterweight is fixedly connected to the second slider; At least one set of transmission components, the transmission components including a transmission belt whose two ends are fixedly connected to the mounting base plate and the counterweight respectively, and a steering pulley disposed on the top of the base and used for steering the transmission belt; A linear motor module is used to drive the mounting base plate to reciprocate along the extension direction of the first guide rail.

2. The exposure scanning axis drive mechanism of the vertical exposure apparatus according to claim 1, characterized in that, The linear motor module includes a linear motor stator and a linear motor mover. The linear motor stator is mounted on the base, and the linear motor mover is mounted on the mounting plate.

3. The exposure scanning axis drive mechanism of the vertical exposure apparatus according to claim 1, characterized in that, The counterweights include multiple detachable counterweight blocks.

4. The exposure scanning axis drive mechanism of the vertical exposure apparatus according to claim 1, characterized in that, The top of the base is provided with multiple pairs of pulley fixing seats at intervals, and each pair of pulley fixing seats is rotatably connected to a pulley shaft, and the steering pulley is fixed to the pulley shaft.

5. The exposure scanning axis drive mechanism of the vertical exposure apparatus according to claim 4, characterized in that, The exposure scanning axis drive mechanism also includes a parking motor for controlling the steering pulley to stop. The parking motor is mounted on the base, and the output shaft of the parking motor is connected to the pulley shaft via a coupling.

6. The exposure scanning axis drive mechanism of the vertical exposure apparatus according to claim 1, characterized in that, An adjusting pulley is provided between the two pairs of steering pulleys, and the drive belt is located below the adjusting pulley.

7. The exposure scanning axis drive mechanism of the vertical exposure apparatus according to claim 1, characterized in that, The lens module includes a DMD component, and the exposure scanning axis drive mechanism further includes a mounting base connected to the mounting plate, the mounting base being used to accommodate an image control component for controlling the image of the DMD component.

8. The exposure scanning axis drive mechanism of the vertical exposure apparatus according to claim 7, characterized in that, The weight of the counterweight is equal to the total weight of the lens module and the image control assembly.

9. The exposure scanning axis drive mechanism of the vertical exposure apparatus according to claim 1, characterized in that, The exposure scanning axis drive mechanism also includes a grating ruler disposed on the base and a reading head connected to the mounting base plate.

10. The exposure scanning axis drive mechanism of the vertical exposure apparatus according to claim 1, characterized in that, The first guide rail includes a track one and a track two spaced apart, and the first slider includes at least one slider one slidably connected to the track one and at least one slider two slidably connected to the track two; the second guide rail includes a track three and a track four spaced apart, and the second slider includes at least one slider three slidably connected to the track three and at least one slider four slidably connected to the track four.

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