A dual-oxygen quartz lamp burner

Abstract

This utility model relates to a hydrogen peroxide quartz lamp burner, belonging to the field of quartz product manufacturing equipment. The burner consists of five parts: a lamp cover, a lamp holder, an oxygen pipe, a hydrogen pipe, and a feeding pipe. The main feeding pipe is divided into four branch feeding pipes, which are evenly distributed circumferentially through the lamp cover and extend into the central interlayer formed by the fusion of the lamp cover and the lamp holder, forming a feeding channel. Quartz powder can slide along the surface of the interlayer to the molten pool for easy melting. Three oxygen pipes and two hydrogen pipes are connected to the outside of the lamp cover, and the hydrogen and oxygen are separated by the lamp holder to prevent them from mixing and exploding inside the quartz lamp. The two hydrogen pipes are fused to the lamp cover and connect to the central interlayer; the three oxygen pipes penetrate the lamp cover and are fused to the lamp holder. A sieve plate is placed inside the lamp holder, and at its lower part, wick tubes of different levels, each with the same focal point, are obliquely welded in a ring array, guiding the flow of the mixed gas to ensure complete combustion, increasing the burner's operating temperature, and thus improving the quality of silicon dioxide melting.

Description

Technical Field

[0001] This utility model belongs to the field of quartz product manufacturing equipment, specifically relating to a hydrogen peroxide quartz lamp burner. Background Technology

[0002] Quartz product manufacturing equipment, belonging to the new equipment processing field, has become the cornerstone of production development in semiconductors, communications, photovoltaics, and military industries. In recent years, driven by the demand for high-end manufacturing, it has undergone significant technological upgrades and industrial transformation, with breakthroughs in applications in semiconductors and photovoltaics becoming a core driving force. Within the quartz product manufacturing equipment industry, gas refining quartz lamps are considered core equipment, primarily used in the gas refining process to produce quartz ingots.

[0003] Quartz ingots, as a raw material for quartz glass, possess advantages such as high transparency, few bubbles, low coefficient of expansion, excellent thermal shock resistance, and good machinability, making them widely used in the semiconductor and photovoltaic fields. In recent years, the country's vigorous development of semiconductors and photovoltaics has indirectly increased the demand for quartz ingots. Meeting market demand, numerous quartz ingot manufacturers have sprung up in the market. With the booming development of the quartz industry, gas refining ingot production has become the most widely used process for quartz ingot production by small and medium-sized enterprises due to its low-cost advantage. The gas refining quartz lamp is a key piece of equipment in the gas refining ingot production process, giving it a core competitive advantage in this area.

[0004] The hydrogen peroxide quartz lamp burner, as a type of gas-fired quartz lamp, is mainly developed to improve the heat-concentrating ability of quartz lamps, enhance the melting effect of quartz sand, and improve the production quality of quartz ingots.

[0005] The original gas-fired quartz ingot burner was designed with a single oxygen pipe supplying oxygen, while hydrogen was supplied by two symmetrical hydrogen pipes. Oxygen from the single oxygen pipe entered the gas chamber within the quartz lamp holder and flowed out through the wick tube below the sieve plate. Because of the single-sided oxygen pipe, pressurized oxygen rushed out from one side of the lamp holder, causing a significant difference in pressurized oxygen concentration on both sides of the internal oxygen chamber within a short period. Furthermore, due to the continuous outflow of pressurized oxygen, the concentration difference within the oxygen chamber could not be balanced. Consequently, under the same conditions, different concentrations of pressurized oxygen entered different wick tubes, ultimately mixing with hydrogen and igniting, resulting in uneven flame temperature within the furnace and affecting the quality of quartz sand melting.

[0006] The wicks in the early gas-fired quartz burner were arranged in a tiered, circumferentially evenly distributed pattern and obliquely welded to the bottom of the sieve plate. The wicks in each tier were welded at equal angles, with their focal points evenly spaced along the center line of the circumference, not converging at a single point. This method resulted in a temperature transition layer formed when the oxygen and hydrogen in the wicks on different circumferences ignited, leading to insufficient heat output and low hydrogen and oxygen utilization. Utility Model Content

[0007] In order to solve the above-mentioned technical problems, the purpose of this utility model is to provide a hydrogen peroxide quartz lamp burner to solve the problem of insufficient firepower of quartz lamps.

[0008] To achieve the above objectives, this utility model provides the following technical solution: a hydrogen peroxide quartz lamp burner, comprising five parts: a lamp cover, a lamp holder, an oxygen pipe, a hydrogen pipe, and a feeding pipe. The main feeding pipe is divided into four sub-feeding pipes, which are evenly distributed around the circumference and penetrate the lamp cover, extending into the central interlayer formed by the fusion of the lamp cover and the lamp holder, forming a feeding channel. Quartz powder can slide along the surface of the interlayer to the molten pool, facilitating melting. Three oxygen pipes and two hydrogen pipes are connected to the outside of the lamp cover, and the hydrogen and oxygen are separated by the lamp holder to prevent them from mixing and exploding inside the quartz lamp. The two hydrogen pipes are fused to the lamp cover and connect to the central interlayer; the three oxygen pipes penetrate the lamp cover and are fused to the lamp holder. A sieve plate is placed inside the lamp holder, and at its lower part, wick tubes of different levels, all with the same focal point and distributed in a ring array, are obliquely welded to guide the flow of the mixed gas, ensuring complete combustion, increasing the operating temperature of the burner, and thus improving the melting quality of silica.

[0009] As a further technical solution of the aforementioned hydrogen peroxide quartz lamp burner, the lamp cover and the lamp holder are fused together to form a middle sandwich layer. The hydrogen pipe is fused to the outer shell of the lamp cover, and the oxygen pipe penetrates the lamp cover and is fused to the outer shell of the lamp holder. The outer shell of the lamp holder isolates the hydrogen and oxygen in the quartz lamp to prevent them from mixing inside the lamp and causing an explosion.

[0010] As a further technical solution of the aforementioned hydrogen peroxide quartz lamp burner, the lamp cover is divided into four parts: upper, middle, lower, and main body, all of which have a cylindrical structure, and the diameter of the cylinder increases sequentially from top to bottom; the upper and middle parts are oxygen pipe arrangement areas, the lower part is hydrogen pipe arrangement area, and the main body, together with the lamp holder shell, forms a middle sandwich.

[0011] As a further technical solution of the aforementioned hydrogen peroxide quartz lamp burner, the feeding pipe is designed as a main feeding pipe with four branch feeding pipes, which are evenly distributed around the circumference and penetrate the lamp cover, extending into the middle interlayer formed by the welding of the lamp cover and the lamp holder; the diameter of the branch feeding pipes is smaller than that of the main feeding pipe, and the bottom height of the branch feeding pipes is higher than the bottom height of the lamp holder screen plate.

[0012] As a further technical solution of the aforementioned hydrogen peroxide quartz lamp burner, the two hydrogen pipes are grouped together and symmetrical about the top of the lamp holder as the central axis. They are fused to the lower outer shell of the lamp cover but not connected to the lamp holder, and extend directly to the middle interlayer.

[0013] As a further technical solution of the aforementioned hydrogen peroxide quartz lamp burner, there are a total of three oxygen tubes, which are arranged on the outer circumference of the lamp cover. Their height is slightly lower than the top height of the hydrogen tube, and they all penetrate the outer shell of the lamp cover and are fused to the outer shell of the lamp holder. They are arranged in a 90° spatial arrangement with the hydrogen tube in the horizontal direction.

[0014] As a further technical solution of the aforementioned hydrogen peroxide quartz lamp burner, the three oxygen tubes are distributed on the left and right sides of the quartz lamp, two of which penetrate the middle outer shell of the lamp cover, and their penetration positions are symmetrical about the top of the lamp holder as the central axis; the remaining one is arranged on the upper left side of the lamp cover and penetrates, and its penetration position is parallel to the oxygen tube penetrating the middle of the lamp cover on the same side; in terms of spatial distribution, the oxygen tube in the middle of the lamp cover is staggered from the oxygen tube on the same side of the upper part of the lamp cover in a spiral manner.

[0015] As a further technical solution of the aforementioned hydrogen peroxide quartz lamp burner, the three oxygen tubes are divided into two groups: one group is a single oxygen tube penetrating the upper part of the lamp cover, and the other group is two oxygen tubes penetrating the middle part of the lamp cover. The supply pressure and flow rate of the two groups of oxygen tubes are the same under the same conditions.

[0016] As a further technical solution of the aforementioned hydrogen peroxide quartz lamp burner, the lamp cover contains a nested oxygen tube, which is fused to a single oxygen tube to isolate the internal and external oxygen, so that the two sets of oxygen do not affect each other.

[0017] As a further technical solution of the aforementioned hydrogen peroxide quartz lamp burner, the bottom of the lamp holder is provided with a sieve plate, and several lamp wick tubes are connected below the sieve plate.

[0018] As a further technical solution of the aforementioned hydrogen peroxide quartz lamp burner, the bottom outlet end faces of the plurality of lamp wick tubes are located inside the lamp cover, and the extension lines of all the lamp wick tubes converge at a single point.

[0019] Compared to the first generation, the hydrogen peroxide quartz lamp burner provided by this utility model has the following beneficial effects:

[0020] 1. The oxygen tubes were changed to three. The two oxygen tubes in the center of the lamp cover, which are symmetrical, mainly serve to disperse the gas in opposite directions and provide an oxygen-rich environment. The third oxygen tube at the top of the lamp cover mainly serves to guide the flow. Because the oxygen chamber is small, it is quickly filled with pressurized oxygen from the three oxygen tubes. The direction of the pressurized oxygen flow in the third oxygen tube serves as a guide, causing the oxygen in the entire oxygen chamber to enter each wick tube almost evenly. Finally, it mixes with hydrogen at the quartz lamp outlet and is ignited to produce a high-temperature flame to melt the quartz sand. Because the oxygen entering each wick tube is almost uniform, the temperature on both sides of the furnace is uniform.

[0021] 2. Based on the initial design, an improved quartz lamp with two opposing oxygen tubes was created. However, subsequent testing revealed that the oxygen delivery hoses were prone to collapsing, potentially leading to flame backfire and a quartz lamp explosion. After a period of experimentation, the hydrogen-oxygen quartz lamp burner was ultimately designed with three oxygen tubes. The third oxygen tube's guiding and pressure-maintaining functions prevented the safety hazard of collapsing oxygen delivery hoses. Furthermore, the oxygen-rich environment provided by the three oxygen tubes improved hydrogen utilization and the quartz burner's lamp inlet temperature.

[0022] 3. By designing different levels of lamp wick tubes with the same focal point, pressurized oxygen is guided to flow to the same place in the lamp wick tube, mixes with hydrogen, ignites, and burns completely, forming a single temperature range. This avoids the multiple temperature ranges produced in the first generation, increases the limit temperature of the quartz burner, enhances the melting efficiency of quartz sand by the quartz burner, further improves the melting quality of quartz sand, and also improves the utilization rate of hydrogen and oxygen. Attached Figure Description

[0023] In order to clearly describe the technical solution of this utility model patent, the accompanying drawings are now described as necessary;

[0024] Figure 1 A schematic diagram of melting quartz ingots for hydrogen peroxide quartz lamp burners;

[0025] Figure 2 This is a schematic diagram of the structure of the hydrogen peroxide quartz lamp burner of this utility model;

[0026] Figure 3 for Figure 2 Internal cross-sectional structural diagram;

[0027] Attached reference numerals: 1-Main feed pipe, 2-Hydrogen pipe, 3-Oxygen pipe, 4-Sub-feed pipe, 5-Quartz lampshade, 6-Quartz lamp holder, 7-Sieve plate, 8-Wick tube, 9-Wick tube theoretical focus. Detailed Implementation

[0028] To make the purpose, technical solution and advantages of this utility model clearer, the utility model will now be described in further detail with reference to the accompanying drawings and examples.

[0029] See appendix Figure 2-3 As shown, a hydrogen peroxide quartz lamp burner according to an embodiment of this utility model includes a main feed pipe 1, a hydrogen pipe 2, an oxygen pipe 3, a branch feed pipe 4, a quartz lamp cover 5, a quartz lamp holder 6, a sieve plate 7, and a wick tube 8. The lamp holder 6 is disposed inside the lamp cover 5, which is divided into four parts: upper, middle, lower, and main body, all of which have a cylindrical structure, with the diameter of the cylinder increasing sequentially from top to bottom. The upper and middle parts are the areas where the oxygen pipes 3 are arranged, and the lower part is the area where the hydrogen pipes 2 are arranged. The main body, together with the outer shell of the lamp holder 6, forms a middle interlayer. The three oxygen pipes 3 are distributed... The tubes are arranged on the left and right sides of the quartz lamp. Two of them penetrate the middle outer shell of the lampshade 5, and their penetration positions are symmetrical with the top of the lamp holder 6 as the central axis. The remaining tube is arranged on the upper left side of the lampshade 5 and penetrates it, and its penetration position is parallel to the oxygen tube that penetrates the middle of the lampshade 5 on the same side. The hydrogen tubes 2 are in pairs and are symmetrical with the top of the lamp holder 6 as the central axis. They are fused to the lower outer shell of the lampshade 5, but are not connected to the lamp holder 6, and go straight to the middle interlayer. The hydrogen and oxygen are separated by the outer shell of the lamp holder 6, with oxygen inside and hydrogen outside, to prevent the two from mixing and exploding inside the quartz lamp.

[0030] In this embodiment of the invention, the feeding pipe is designed as a main feeding pipe 1, branching into four sub-feeding pipes 4, which are evenly distributed around the circumference and penetrate the lampshade 5, extending into the central interlayer formed by the welding of the lampshade 5 and the lamp holder 6. The diameter of the sub-feeding pipes 4 is smaller than that of the main feeding pipe 1, and the bottom height of the sub-feeding pipes 4 is higher than the bottom height of the inner sieve plate 7 of the lamp holder.

[0031] In this embodiment of the invention, the quartz lamp holder 6 is divided into upper and lower parts by a sieve plate 7. The upper part is an oxygen chamber where oxygen can be temporarily stored. During normal production, it will flow out along the wick tube 8. The lower part consists of wick tubes 8 arranged in a ring array of different levels, which are obliquely welded below the sieve plate 7. The number of levels needs to be designed according to the specifications of the quartz weight. The focal point of the wick tubes 8 of different levels is the same point, which guides the flow of oxygen. This point is the theoretical focal point 9 of the wick tube.

[0032] When using a hydrogen peroxide quartz lamp burner as described above, quartz powder falls through the main feed pipe 1, is evenly distributed by four branch feed pipes 4, and then slides into the middle interlayer formed by the lamp cover 5 and the lamp holder 6. Under pressurized hydrogen purging in the hydrogen pipes 2 fused to both sides of the lower part of the lamp cover 5, it is evenly sprinkled onto the surface of the quartz ingot. Simultaneously, pressurized oxygen from the three oxygen pipes 3 penetrating the upper and middle parts of the lamp cover 5 enters the oxygen chamber within the quartz lamp holder 6, creating an oxygen-rich atmosphere, and then flows out along the wick tubes 8 below the sieve plate 7. Because all the wick tubes 8 share the same theoretical focal point 9, the pressurized oxygen is guided by the wick tubes 8 to the same location, where it is fully mixed with hydrogen and ignited, generating high temperatures to melt the quartz powder. This method improves hydrogen utilization and the extreme temperature limit of the quartz lamp burner, objectively improving the melting quality of the quartz ingot.

[0033] The foregoing has shown and described the basic principles of the present invention. The above are merely preferred examples of the present invention and are not intended to limit the present invention. The examples and descriptions in the specification are only for illustrating the principles of the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and scope of the present invention without departing from its scope should be included within the protection scope of the present invention.

Claims

1. A hydrogen peroxide quartz lamp burner, comprising five parts: a lamp cover, a lamp holder, an oxygen pipe, a hydrogen pipe, and a feed pipe, wherein the lamp holder is disposed inside the lamp cover, characterized in that: A main feed pipe is used, which branches into four sub-feed pipes. These pipes are evenly distributed around the circumference of the lamp cover and extend into the central interlayer formed by the fusion of the lamp cover and the lamp holder, forming a feed channel. Three oxygen pipes and two hydrogen pipes are connected to the outside of the lamp cover. The lamp holder separates the hydrogen and oxygen to prevent them from mixing and exploding inside the quartz lamp. The two hydrogen pipes are fused to the lamp cover and connect to the central interlayer. The three oxygen pipes penetrate the lamp cover and are fused to the lamp holder. A sieve plate is placed inside the lamp holder, and the lower part of the plate is obliquely welded with wick tubes of different levels, all with the same focal point and distributed in a ring array, to guide the flow of the mixed gas.

2. The hydrogen peroxide quartz lamp burner as described in claim 1, characterized in that: The lampshade and lamp holder are fused together to form a middle layer. The hydrogen pipe is fused to the outer shell of the lampshade, and the oxygen pipe penetrates the lampshade and is fused to the outer shell of the lamp holder. The outer shell of the lamp holder isolates the hydrogen and oxygen in the quartz lamp.

3. The hydrogen peroxide quartz lamp burner as described in claim 1, characterized in that: The lampshade is divided into four parts: upper, middle, lower, and main body, all of which are cylindrical in structure, with the diameter of the cylinder increasing from top to bottom. The upper and middle parts are the oxygen pipe arrangement area, the lower part is the hydrogen pipe arrangement area, and the main body, together with the lamp holder shell, forms a middle sandwich layer.

4. A hydrogen peroxide quartz lamp burner as described in claim 3, characterized in that: The feeding pipe is designed as a main feeding pipe with four branch feeding pipes, which are evenly distributed around the circumference and penetrate the lamp cover, extending into the middle interlayer formed by the welding of the lamp cover and the lamp holder; the diameter of the branch feeding pipes is smaller than that of the main feeding pipe, and the bottom height of the branch feeding pipes is higher than the bottom height of the screen plate inside the lamp holder.

5. A hydrogen peroxide quartz lamp burner as described in claim 3, characterized in that: The hydrogen tubes are arranged in pairs, symmetrical about the top of the lamp holder, and are fused to the lower outer shell of the lamp cover without being connected to the lamp holder, and extend directly to the middle interlayer.

6. A hydrogen peroxide quartz lamp burner as described in claim 3, characterized in that: There are a total of three oxygen tubes, which are set on the outer circumference of the lamp cover. Their height is slightly lower than the top height of the hydrogen tube, and they all penetrate the outer shell of the lamp cover and are fused to the outer shell of the lamp holder. They are arranged in a 90° spatial arrangement with the hydrogen tube in the horizontal direction.

7. A hydrogen peroxide quartz lamp burner as described in claim 3, characterized in that: The three oxygen tubes are distributed on the left and right sides of the quartz lamp. Two of them penetrate the middle outer shell of the lamp cover, and their penetration positions are symmetrical with the top of the lamp holder as the central axis. The remaining one is arranged on the upper left side of the lamp cover and penetrates it, and its penetration position is parallel to the oxygen tube that penetrates the middle of the lamp cover on the same side. In terms of spatial distribution, the oxygen tube in the middle of the lamp cover is staggered with the oxygen tube on the upper side of the lamp cover in a spiral manner.

8. A hydrogen peroxide quartz lamp burner as described in claim 3, characterized in that: The three oxygen tubes are divided into two groups: one group consists of a single oxygen tube penetrating the upper part of the lampshade, and the other group consists of two oxygen tubes penetrating the middle part of the lampshade. The supply pressure and flow rate of the two groups of oxygen tubes are the same under the same conditions.

9. A hydrogen peroxide quartz lamp burner as described in claim 3, characterized in that: The lampshade contains a nested oxygen tube, which is fused to a single oxygen tube to isolate the internal and external oxygen, so that the two sets of oxygen do not affect each other.

10. A hydrogen peroxide quartz lamp burner as described in any one of claims 2 or 3, characterized in that: The lamp holder has a sieve plate at the bottom, and several lamp wick tubes are connected below the sieve plate, with the extension lines of all the lamp wick tubes converging at a single point.

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