Apparatus heating device and system
CN224697903UActive Publication Date: 2026-08-28MICROPOLARIS EQUIPMENT TECHNOLOGY CO LTD
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Patent Information
- Application Number
- CN202521882181.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-02
- Publication Date
- 2026-08-28
- Estimated Expiration
- 2035-09-02
AI Technical Summary
Benefits of technology
[0011]可以看出，本实用新型实施例提供的设备加热装置中，通过使用对半装夹的第一导热半体和第二导热半体，装夹待装夹部件(例如加热棒)；由于第一导热半体的内侧装夹面开设有至少一个第一凹槽，且在第二导热半体的内侧装夹面上开设有与第一凹槽位置对应的至少一个第二凹槽，从而在拼合第一导热半体和第二导热半体时，第一凹槽和第二凹槽可以相对设置，进而第一凹槽和第二凹槽可以形成容纳空间(即所述空腔)，以便于容纳并装夹所述待装夹部件，即装夹加热棒和半导体设备，最终利用加热棒加热所述第一导热半体和第二导热半体，以便于通过第一导热半体和第二导热半体传导加热棒的温度实现半导体设备的加热。可见本实用新型实施例提供的技术方案中，一方面，通过拼合连接的第一导热半体和第二导热半体即可实现加热棒的装夹，从而可以避免加热棒因为自身存在的加工误差，或者加热棒工作后发生变形，导致加热棒卡死在导热块中，出现插拔困难的问题。因此，可以提高设备加热装置的维护便利性；另一方面，采用分体加工第一导热半体和第二导热半体的方式可以降低加工难度。同时，还可以避免由于原始一体成型的导热块(例如铝块)存在的加工误差，而导致的在安装和加热过程中使得加热棒卡死的问题，从而可以减少设备加热装置以及加热棒的报废。因此，本实用新型实施例提供的技术方案可提高设备加热装置的易用性和可靠性。
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Figure CN224697903U_ABST
Abstract
The utility model discloses an equipment heating device and system, wherein the equipment heating device is applied to a semiconductor equipment, and the device comprises a first heat conduction half body and a second heat conduction half body, the inner side clamping surface of the first heat conduction half body is provided with at least one first recess, the inner side clamping surface of the second heat conduction half body is provided with at least one second recess corresponding to the position of the first recess, the first heat conduction half body and the second heat conduction half body can be connected by splicing, when the two are spliced, the first recess and the second recess are oppositely arranged to form a cavity accommodating and clamping a to-be-clamped component, and the clamping state is maintained through the locking structure after splicing, and the to-be-clamped component comprises a heating rod and the semiconductor equipment. The technical scheme provided by the utility model embodiment can improve the usability and reliability of the equipment heating device.
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