A type of storage rack

Abstract

This utility model provides a storage rack, including a frame, multiple support plates, a drainage baffle, and a collector. The frame has a storage space and includes a drainage column. The drainage column is provided with a drainage trough, which has a first opening facing the storage space. Multiple support plates are disposed in the storage space and arranged at intervals along the vertical direction, and are connected to the frame. Each support plate has two target edges, which intersect to form a target apex angle facing the first opening. The upper surface of the support plate is a support surface, which is inclined relative to the horizontal plane. The lowest point of the support surface is located at the target apex angle, forming an outlet area. The drainage baffle is disposed at the target edge and outside the outlet area, protruding from the support surface. The collector is disposed below the drainage trough and communicates with it. The storage rack temporarily stores waste consumables from chemical mechanical grinding processes in a cleanroom, increasing the amount of consumables stored and reducing the possibility of residual grinding fluid on the consumables contaminating the cleanroom.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment, and specifically relates to a storage rack. Background Technology

[0002] Chemical mechanical polishing (CMP) is a common process in wafer fabrication. Consumables used in CMP, such as polishing pads and diamond grinding discs, are temporarily stored on pallets on the cleanroom floor after they reach a certain level, and then cleaned out. This is because the stacking height of consumables should not be too high, otherwise they are prone to tipping over.

[0003] When a wafer fab has a large production capacity, it is necessary to frequently clean the discarded polishing pads and / or diamond grinding discs temporarily stored on the pallets, increasing cleaning time or requiring more pallets. This results in discarded polishing pads and / or diamond grinding discs occupying a significant amount of space in the cleanroom. Furthermore, when discarded polishing pads or diamonds are temporarily stacked on pallets, the residual polishing slurry on the pads or diamonds solidifies into powder, which can easily scatter into the cleanroom, causing contamination. Utility Model Content

[0004] The purpose of this utility model is to provide a storage rack that allows for the temporary storage of a large number of discarded grinding pads and / or diamond grinding discs in a cleanroom, while also reducing the contamination of the cleanroom by residual grinding fluid on the discarded grinding pads and / or diamond grinding discs.

[0005] To achieve the above objectives, this utility model provides a storage rack, comprising:

[0006] The frame has a storage space and includes a drainage column; the drainage column is provided with a drainage trough extending in a vertical direction, the drainage trough having a first opening, the first opening being arranged facing the storage space;

[0007] Multiple support plates are disposed within the storage space and arranged at intervals along the vertical direction; each support plate is connected to the frame and has two target edges, which define a target apex angle, which faces the first opening; the upper surface of each support plate forms a support surface, which is inclined relative to the horizontal plane, and the lowest point of the support surface is located at the target apex angle, forming an exit area;

[0008] A drainage baffle extends along the target edge and is disposed at the target edge, and is located outside the outlet area; the drainage baffle protrudes from the bearing surface; and,

[0009] A collector is located below the drain trough and is in communication with the drain trough.

[0010] Optionally, the bearing surface is parallel to the lower surface of the bearing plate, and the bearing plate is inclined relative to the horizontal plane.

[0011] Optionally, the acute angle formed by the bearing surface and the horizontal plane is 2.5° to 4°.

[0012] Optionally, the surface of the drainage tank is mirrored; and / or,

[0013] The surface of the drainage baffle that protrudes from the bearing surface and faces the storage space is a mirror.

[0014] Optionally, the collector is detachably mounted on the frame.

[0015] Optionally, the support plate is a polygon with n edges connected end to end in sequence, where n is an integer greater than or equal to 3, two of the n edges are the target edges; one of the n edges is the first edge, and the remaining n-1 edges are the second edges;

[0016] The frame further includes side plates, a top plate, and a cover. The top plate is positioned above all the support plates and spaced apart from the uppermost support plate. The upper end of each side plate is not lower than the lower surface of the top plate, and the lower end of each side plate is not higher than the support surface of the lowermost support plate. There are n-1 side plates, which are connected sequentially and correspond one-to-one with n-1 second edges, such that the frame forms a second opening on the side corresponding to the first edge. The cover is closable at the second opening.

[0017] Optionally, the cover is a transparent structure.

[0018] Optionally, the first edge constitutes one target edge, one second edge constitutes another target edge, and the remaining n-2 second edges are different from the target edges;

[0019] The side plate corresponding to the second edge constituting the target edge forms the drainage baffle; or,

[0020] The drainage baffle is provided between the side plate and the support plate corresponding to the second edge that constitutes the target edge.

[0021] Optionally, the first edge is different from the target edge, two adjacent second edges respectively constitute two target edges, and the remaining n-3 second edges are different from the target edge;

[0022] The side plate corresponding to the second edge constituting the target edge forms the drainage baffle; or,

[0023] The drainage baffle is provided between the side plate and the support plate corresponding to the second edge that constitutes the target edge.

[0024] Optionally, the frame includes n columns, each column extending vertically and positioned at the intersection of two adjacent edges of the support plate; the upper end of each column is connected to the top plate, a side plate is provided between two adjacent columns, and the lower end of each column is lower than the lower end of the side plate; one of the n columns is the drainage column.

[0025] The shelf also includes a base and a load-bearing plate. The base is connected to the lower end of the upright, and the load-bearing plate is connected to the lower end of the base. The area of ​​the load-bearing plate is larger than the area of ​​the lower end of the base.

[0026] Compared with the prior art, the storage rack of this utility model has the following advantages:

[0027] The aforementioned shelf includes a frame, a support plate, a drainage baffle, and a collector. The frame has a storage space and also includes a drainage column. The drainage column has a drainage trough extending vertically, and the drainage trough has a first opening facing the storage space. Multiple support plates are arranged within the storage space at vertical intervals, and each support plate is connected to the frame. Each support plate has two target edges that intersect to form a target apex, which faces the first opening. The upper surface of the support plate forms a support surface, which is inclined relative to the horizontal plane. The lowest point of the support surface is located at the target apex, forming an outlet area. The drainage baffle extends along the target edge and is located at the target edge, outside the outlet area, and protrudes from the support surface. The collector is located below the drainage trough and communicates with it. The rack can be placed in the cleanroom of a wafer fab for temporary storage of consumables discarded during the chemical mechanical polishing (CMP) process. One advantage of using the rack for temporary storage of these consumables is that the consumables can be stacked on each layer of the support plate, increasing the amount of consumables that can be stored without increasing the horizontal footprint, thus reducing the frequency of cleaning. Another advantage is that residual polishing slurry on the consumables can flow from the outlet area into the drainage channel along the support surface and the drainage baffle, and then into the collector, reducing the possibility of polishing slurry solidifying on the consumables and forming powder, thereby contaminating the cleanroom. A further advantage is that the consumables can be temporarily stored by category using each layer of the support plate, eliminating the need to re-categorize the consumables when cleaning up discarded consumables, thus shortening cleaning time. Attached Figure Description

[0028] The accompanying drawings are provided to better understand this utility model and do not constitute an undue limitation thereof. Wherein:

[0029] Figure 1 This is a schematic diagram of the structure of a storage rack according to an embodiment of the present invention, wherein the cover is closed;

[0030] Figure 2 This is a top view of the shelf provided according to an embodiment of the present invention after removing the top plate;

[0031] Figure 3 This is a front view of the storage rack provided according to an embodiment of the present invention after removing the cover;

[0032] Figure 4 This is an axial view of the shelf provided according to an embodiment of the present invention after removing the cover;

[0033] Figure 5 This is a rear view of the storage rack provided according to one embodiment of the present invention;

[0034] Figure 6 This is a partial sectional view of a storage rack provided according to an embodiment of the present invention.

[0035] [The following are explanations of the reference numerals in the attached drawings]: 101-Storage space, 102-Second opening, 110-Column, 110a-Drainage column, 111-Drainage trough, 120-Top plate, 130-Side plate, 140-Cover, 200-Bearing plate, 201-Outlet area, 300-Drainage baffle, 400-Collector, 500-Foot, 600-Bearing plate, 700-Antistatic structure. Detailed Implementation

[0036] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show components related to this utility model and are not drawn according to the actual number, shape, and size of the components in implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.

[0037] Furthermore, while each embodiment described below possesses one or more technical features, this does not imply that users of this utility model must simultaneously implement all technical features in any embodiment, or can only separately implement some or all technical features in different embodiments. In other words, provided it is feasible, those skilled in the art can selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, based on the disclosure of this utility model and depending on design specifications or implementation requirements, thereby increasing the flexibility in implementing this utility model.

[0038] As used herein, the singular forms “a,” “an,” and “the” include plural objects, and the plural form “multiple” includes two or more objects, unless otherwise expressly indicated. As used herein, the term “or” is generally used to include the meaning of “and / or,” unless otherwise expressly indicated, and the terms “installed,” “connected,” and “linked” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection. Connections can be mechanical or electrical. Connections can be direct or indirect through an intermediate medium, and can be internal communication between two elements or an interaction between two elements. Relational terms such as “first,” “second,” etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate or imply relative importance or implicitly specify the number of indicated technical features. It should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0039] To make the objectives, advantages, and features of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to conveniently and clearly illustrate the objectives of the embodiments of this utility model. The same or similar reference numerals in the drawings represent the same or similar parts.

[0040] like Figures 1 to 6 As shown, the shelf provided in this embodiment of the present invention includes a frame 100, a support plate 200, a drainage baffle 300, and a collector 400. The frame 100 has a storage space 101 and includes a drainage column 110a. The drainage column 110a has a vertically extending drainage channel 111, which has a first opening (not shown in the figure) facing the storage space 101. Multiple support plates 200 are arranged within the storage space 101 at intervals along the vertical direction, and each support plate 200 is connected to the frame 100. Each support plate 200 includes two target edges (not shown in the figure), which intersect to form a target apex angle (not shown in the figure), which faces the first opening. The upper surface of the support plate 200 forms a bearing surface, which is inclined relative to the horizontal plane, and the lowest point of the bearing surface is at the target apex angle. The lowest point of the bearing surface forms an outlet region 201. The drainage baffle 300 extends along the target edge and is located at the target edge, outside the outlet region 201. The drainage baffle 300 also protrudes from the bearing surface. The collector 400 is located below the drain trough 111 and communicates with the drain trough 111.

[0041] The storage rack can be installed in the cleanroom of the wafer fab for temporary storage of consumables discarded in the chemical mechanical polishing process, including but not limited to at least one of polishing discs and diamond grinding discs.

[0042] When the consumables are temporarily stored using the shelf, the consumables are stacked on the bearing surfaces of each of the bearing plates 200. The application of the storage rack has several advantages. One advantage is that, given the stacking height of consumables on each layer of the support plate 200 is comparable to the stacking height of consumables temporarily stored on pallets in the prior art, more consumables can be stored using multiple support plates 200 spaced vertically. This reduces the horizontal area occupied by discarded consumables in the cleanroom and also reduces the frequency of cleaning. Another advantage is that residual polishing fluid on the consumables can flow along the support surface and the drainage baffle 300 to the outlet area 201 under gravity, and then flow from the first opening to the drain trough 111, and then into the collector 300, reducing the amount of residual polishing fluid on the consumables and thus reducing the pollution to the cleanroom caused by the solidification of powder from the residual polishing fluid. Yet another advantage is that multiple support plates 200 can be used to classify and store consumables, eliminating the need for re-classification during cleaning and shortening cleaning time.

[0043] In practice, the acute angle α formed by the bearing surface and the horizontal plane can be greater than or equal to 2.5° and less than or equal to 4°. Furthermore, the target apex angle can be a sharp corner, a chamfer, or a rounded corner.

[0044] In some optional examples, the bearing surface is parallel to the lower surface of the bearing plate 200, and the bearing plate 200 is inclined overall relative to the horizontal plane. In other optional examples, the lower surface of the bearing plate 200 is a horizontal plane.

[0045] Preferably, the surface of the drain trough 111 is mirrored to reduce the residue of grinding fluid on the surface of the drain trough 111. Similarly, the surface of the drain baffle 300 that protrudes from the bearing surface and faces the storage space 101 is also preferably mirrored to reduce the residue of grinding fluid on the drain baffle 300.

[0046] The collector 400 may have any suitable construction and is preferably detachably mounted on the frame 100, for example, on the drainage column 110a.

[0047] In an exemplary example, the support plate 200 is polygonal and has n edges connected end-to-end, where n is an integer greater than or equal to 3. One of the n edges is a first edge, and the remaining n-1 edges are second edges. Preferably, the frame 100 further includes a top plate 120, side plates 130, and a cover 140. The top plate 120 is disposed above all the support plates 200 and spaced apart from the uppermost support plate 200. The upper end of the side plate 130 is not lower than the lower surface of the top plate 120, and the lower end of the side plate 130 is not higher than the bearing surface of the lowermost support plate 200. There are n-1 side plates 130, which are connected sequentially and correspond one-to-one with the n-1 second edges, such that the side of the frame 100 corresponding to the first edge forms a second opening 102. The cover 140 is closable at the second opening 102. When the cover 140 is closed at the second opening 102, the upper end of the cover 140 is aligned with the top plate 120, and the lower end is aligned with the lower end of the side plate 130. The arrangement of the top plate 120, the side plate 130, and the cover 140 can effectively isolate the storage space 101 from the cleanroom, further reducing the contamination of the cleanroom caused by the solidification of powder formed from residual polishing fluid on the consumables.

[0048] In an exemplary embodiment, the support plate 200 is rectangular, so n is 4 and the number of side plates 130 is 3.

[0049] Preferably, the cover 140 is transparent, so that the operator can observe the remaining space in the storage space 101 without opening the cover, so that the operator can clean the consumables on the shelf in a timely manner.

[0050] It is easy to understand that two of the n edges are the target edges. For example, the first edge constitutes one target edge, one second edge constitutes another target edge, and the remaining n-2 second edges are different from the target edges. Alternatively, the first edge is different from the target edge, two second edges each constitute two target edges, and the remaining n-3 second edges are different from the target edges. In some embodiments, the drainage baffle 300 is additionally provided between the side plate 130 corresponding to the second edge constituting the target edge and the support plate 200. In other embodiments, the side plate corresponding to the second edge constituting the target edge constitutes the drainage baffle (not shown in the figure).

[0051] Optionally, the frame 100 further includes n columns 110, each column 110 extending vertically, and each column 110 being disposed at the intersection of two adjacent edges of the support plate 200. One of the n columns 110 is the drainage column 110a.

[0052] The top plate 120 is connected to the upper ends of all the columns 110. A column 110 is provided between two adjacent side plates 130, so that two adjacent side plates 130 can be indirectly connected through a single column. The lower end of each side plate 130 is also higher than the lower end of the column 110.

[0053] Preferably, the shelf further includes a base 500 and a load-bearing plate 600. Each upright 110 has a base 500 at its lower end. Each base 500 has a load-bearing plate 600 at its lower end, and the area of ​​the load-bearing plate 600 is larger than the area of ​​the base 500. This increases the load-bearing capacity of the shelf, preventing it from collapsing due to excessive storage of consumables.

[0054] In addition, the shelf may also include an anti-static structure 700, which can be connected to the lowermost support plate 200 and is also grounded.

[0055] While the present invention has been disclosed above, it is not limited thereto. Those skilled in the art can make various modifications and variations to the present invention without departing from its spirit and scope. Therefore, if such modifications and variations fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and variations.

Claims

1. A storage rack, characterized in that, include: The frame has a storage space and includes a drainage column; the drainage column is provided with a drainage trough extending in a vertical direction, the drainage trough having a first opening, the first opening being arranged facing the storage space; Multiple support plates are disposed within the storage space and arranged at intervals along the vertical direction; each support plate is connected to the frame and has two target edges, which define a target apex angle, which faces the first opening; the upper surface of each support plate forms a support surface, which is inclined relative to the horizontal plane, and the lowest point of the support surface is located at the target apex angle, forming an exit area; A drainage baffle extends along the edge of the target and is disposed at the edge of the target, and is located outside the outlet area; the drainage baffle protrudes from the bearing surface. as well as, A collector is located below the drain trough and is in communication with the drain trough.

2. The storage rack according to claim 1, characterized in that, The bearing surface is parallel to the lower surface of the bearing plate, and the bearing plate is inclined relative to the horizontal plane.

3. The storage rack according to claim 1, characterized in that, The acute angle formed by the bearing surface and the horizontal plane is 2.5° to 4°.

4. The storage rack according to claim 1, characterized in that, The surface of the drainage tank is mirrored; and / or, The surface of the drainage baffle that protrudes from the bearing surface and faces the storage space is a mirror.

5. The storage rack according to claim 1, characterized in that, The collector is detachably mounted on the frame.

6. The storage rack according to claim 1, characterized in that, The support plate is polygonal and has n edges that are connected end to end in sequence, where n is an integer greater than or equal to 3. Two of the n edges are the target edges; one of the n edges is the first edge, and the remaining n-1 edges are the second edges. The frame further includes side plates, a top plate, and a cover. The top plate is positioned above all the support plates and spaced apart from the uppermost support plate. The upper end of each side plate is not lower than the lower surface of the top plate, and the lower end of each side plate is not higher than the support surface of the lowermost support plate. There are n-1 side plates, which are connected sequentially and correspond one-to-one with n-1 second edges, such that the frame forms a second opening on the side corresponding to the first edge. The cover is closable at the second opening.

7. The storage rack according to claim 6, characterized in that, The cover is a transparent structure.

8. The storage rack according to claim 6, characterized in that, The first edge constitutes one target edge, one second edge constitutes another target edge, and the remaining n-2 second edges are different from the target edges; The side plate corresponding to the second edge constituting the target edge forms the drainage baffle; or, The drainage baffle is provided between the side plate and the support plate corresponding to the second edge that constitutes the target edge.

9. The storage rack according to claim 6, characterized in that, The first edge is different from the target edge, two adjacent second edges respectively constitute two target edges, and the remaining n-3 second edges are different from the target edge; The side plate corresponding to the second edge constituting the target edge forms the drainage baffle; or, The drainage baffle is provided between the side plate and the support plate corresponding to the second edge that constitutes the target edge.

10. The storage rack according to claim 6, characterized in that, The frame includes n columns, each column extending vertically and positioned at the intersection of two adjacent edges of the support plate; the upper end of each column is connected to the top plate, a side plate is provided between two adjacent columns, and the lower end of each column is lower than the lower end of the side plate; one of the n columns is the drainage column. The shelf also includes a base and a load-bearing plate. The base is connected to the lower end of the upright, and the load-bearing plate is connected to the lower end of the base. The area of ​​the load-bearing plate is larger than the area of ​​the lower end of the base.

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