Electronics grade hydrofluoric acid impurity removal tubing
Patent Information
- Application Number
- CN202522013473.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-17
- Publication Date
- 2026-09-08
- Estimated Expiration
- 2035-09-17
AI Technical Summary
[0004]但是,高纯度氢氟酸提纯用过滤装置仍存在一些不足,该装置由刮板对滤网进行清理,在清理过程中因为刮板的挤压容易导致滤网上的滤孔因此而堵塞,并且该过滤装置体积较大,增加了过滤成本,并且过滤质量和品质较低
[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: This electronic-grade hydrofluoric acid impurity removal pipe fitting is composed of a first pipe body, a second pipe body, a third pipe body, and a fourth pipe body. Furthermore, the fitting contains multiple stages of filters, which improves the quality and grade of the electronic-grade hydrofluoric acid. Since the first, second, third, and fourth pipe bodies can be disassembled, the filters can be removed and cleaned, solving the problem of filter clogging during cleaning. Additionally, the impurity removal pipe fitting is small in size, reducing filtration costs.
Smart Images

Figure CN224723821U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of filtration device technology, specifically to an electronic-grade hydrofluoric acid impurity removal pipe fitting. Background Technology
[0002] Currently, the production process of electronic-grade hydrofluoric acid is generally as follows: after chemical pretreatment, industrial anhydrous hydrofluoric acid enters a distillation column for distillation. The purified hydrogen fluoride gas exiting the distillation column is filtered in a filtration device. The resulting hydrogen fluoride gas is then cooled and enters an absorption tower, where it is absorbed by ultrapure water. The hydrofluoric acid is further purified by controlling the spray density and gas-liquid ratio.
[0003] A search revealed a high-purity hydrofluoric acid purification filter device disclosed in Chinese Patent Publication No. CN219764803U. This device uses a scraper to scrape the top of the filter screen, thus cleaning the screen and facilitating subsequent filtration of calcium fluoride vapor.
[0004] However, the filtration device for high-purity hydrofluoric acid purification still has some shortcomings. The device uses a scraper to clean the filter screen, and the scraper's squeezing during the cleaning process can easily clog the filter pores on the screen. In addition, the filtration device is large in size, which increases the filtration cost, and the filtration quality and grade are relatively low. Utility Model Content
[0005] The purpose of this invention is to provide an electronic-grade hydrofluoric acid impurity removal pipe fitting to solve the problems mentioned in the background art.
[0006] To achieve the above objectives, this utility model provides the following technical solution: an electronic-grade hydrofluoric acid impurity removal pipe fitting, comprising a first pipe body: a first connector is disposed at the middle position inside the first pipe body, a first guide fan blade is rotatably disposed at the top of the first connector, a first filter screen is disposed at the bottom end of the first pipe body, a second pipe body is disposed at the bottom of the first pipe body, a second filter screen is disposed at the bottom end of the second pipe body, a third pipe body is disposed at the bottom end of the third pipe body, a second connector is disposed at the bottom end of the third pipe body, a second guide fan blade is rotatably disposed at the top of the second connector, a fourth pipe body is disposed at the bottom end of the third pipe body, a fourth filter screen is disposed at the bottom end of the fourth pipe body, and a sealing ring is disposed between the first pipe body, the second pipe body, the third pipe body and the fourth pipe body.
[0007] Preferably, retaining rings are provided at the top of the inner wall of the first tube and the bottom of the inner wall of the third tube, and the first tube and the third tube are respectively engaged with the first connector and the second connector through retaining rings.
[0008] Preferably, annular grooves are provided at the bottom of the inner wall of the first tube and the top of the inner wall of the third tube, and the first tube and the third tube are respectively engaged with the first filter screen and the third filter screen through the annular grooves.
[0009] Preferably, a flow-limiting ring is provided at the bottom of the inner wall of both the second and fourth tubes, and the second and fourth tubes are respectively connected to the second and fourth filter screens through the flow-limiting rings.
[0010] Preferably, the top and bottom of the first tube, the second tube, the third tube and the fourth tube are all provided with threads, and the first tube, the second tube, the third tube and the fourth tube are connected to each other in sequence by threads.
[0011] Preferably, the first filter screen, the second filter screen, the third filter screen and the fourth filter screen are all microporous filter membranes, and the filtration accuracy of the first filter screen, the second filter screen, the third filter screen and the fourth filter screen decreases sequentially and is controlled within 0.05μm-0.01μm.
[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: This electronic-grade hydrofluoric acid impurity removal pipe fitting is composed of a first pipe body, a second pipe body, a third pipe body, and a fourth pipe body. Furthermore, the fitting contains multiple stages of filters, which improves the quality and grade of the electronic-grade hydrofluoric acid. Since the first, second, third, and fourth pipe bodies can be disassembled, the filters can be removed and cleaned, solving the problem of filter clogging during cleaning. Additionally, the impurity removal pipe fitting is small in size, reducing filtration costs. Attached Figure Description
[0013] Figure 1 This is the front view of the present utility model;
[0014] Figure 2 This is a front view structural cross-section of the present invention.
[0015] In the diagram: 1. First tube body; 2. First connector; 3. First guide vane; 4. First filter screen; 5. Second tube body; 6. Second filter screen; 7. Third tube body; 8. Third filter screen; 9. Second connector; 10. Second guide vane; 11. Fourth tube body; 12. Fourth filter screen; 13. Sealing ring. Detailed Implementation
[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present utility model, and not all of them. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.
[0017] Please see Figure 1-2 This utility model provides an embodiment of an electronic-grade hydrofluoric acid impurity removal pipe fitting, comprising a first pipe body 1; a first connector 2 is disposed in the middle position inside the first pipe body 1; a first guide fan blade 3 is rotatably disposed on the top of the first connector 2; a first filter screen 4 is disposed at the bottom end inside the first pipe body 1; a second pipe body 5 is disposed at the bottom end inside the first pipe body 1; a second filter screen 6 is disposed at the bottom end inside the second pipe body 5; a third pipe body 7 is disposed at the bottom end inside the third pipe body 7; a second connector 9 is disposed at the bottom end inside the third pipe body 7; a second guide fan blade 10 is rotatably disposed on the top of the second connector 9; a fourth pipe body 11 is disposed at the bottom end inside the third pipe body 7; a fourth filter screen 12 is disposed at the bottom end inside the fourth pipe body 11. A sealing ring 13 is provided between the second pipe body 5, the third pipe body 7, and the fourth pipe body 11. The user installs the impurity removal fitting in the hydrofluoric acid delivery pipeline. During the flow of hydrofluoric acid, the first guide fan blade 3 and the second guide fan blade 10 work together to reduce the impact of hydrofluoric acid and prevent damage to the filter screen. At the same time, the hydrofluoric acid forms a vortex in the impurity removal fitting as it passes through the guide fan blades, allowing impurities in the hydrofluoric acid to concentrate on the periphery of the filter screen, preventing the filter screen from becoming clogged after long-term use. If the user needs to clean or replace the filter screen, the user can disassemble and replace the filter screen in the impurity removal fitting by disconnecting the connection between the first pipe body 1, the second pipe body 5, the third pipe body 7, and the fourth pipe body 11. The operation is convenient.
[0018] In this embodiment, retaining rings are provided at the top of the inner wall of the first tube 1 and the bottom of the inner wall of the third tube 7. The first tube 1 and the third tube 7 are respectively engaged with the first connector 2 and the second connector 9 through retaining rings. The first connector 2 and the second connector 9 can be stably and firmly installed in the first tube 1 and the third tube 7 through retaining rings, which can prevent the first connector 2 and the second connector 9 from falling out of the tube.
[0019] In this embodiment, annular grooves are provided at the bottom of the inner wall of the first tube 1 and the top of the inner wall of the third tube 7. The first tube 1 and the third tube 7 are respectively engaged with the first filter screen 4 and the third filter screen 8 through the annular grooves. The first filter screen 4 and the third filter screen 8 can be stably and firmly installed in the first tube 1 and the third tube 7 through the annular grooves, which can prevent the filter screens from sliding due to the impact of hydrofluoric acid.
[0020] In this embodiment, flow-limiting rings are provided at the bottom of the inner walls of the second tube 5 and the fourth tube 11. The second tube 5 and the fourth tube 11 are respectively connected to the second filter screen 6 and the fourth filter screen 12 through the flow-limiting rings. The second filter screen 6 and the fourth filter screen 12 can be stably and firmly installed in the second tube 5 and the fourth tube 11 through the flow-limiting rings, which can prevent the filter screen from sliding due to the impact of hydrofluoric acid.
[0021] In this embodiment, the top and bottom of the first tube 1, the second tube 5, the third tube 7 and the fourth tube 11 are all provided with threads, and the first tube 1, the second tube 5, the third tube 7 and the fourth tube 11 are connected to each other in sequence by threads; the first tube 1, the second tube 5, the third tube 7 and the fourth tube 11 can be spliced together in sequence by threads to form a cleaning pipe fitting, which makes it convenient for users to clean or replace the filter screens in different positions.
[0022] In this embodiment, the first filter screen 4, the second filter screen 6, the third filter screen 8, and the fourth filter screen 12 are all microporous filter membranes, and the filtration accuracy of the first filter screen 4, the second filter screen 6, the third filter screen 8, and the fourth filter screen 12 is successively reduced and controlled within 0.05μm-0.01μm; when hydrofluoric acid flows in the impurity removal pipe, the first filter screen 4, the second filter screen 6, the third filter screen 8, and the fourth filter screen 12 can sequentially perform multi-stage filtration of hydrofluoric acid, thereby improving the quality and grade of hydrofluoric acid.
[0023] Working principle: The user connects the first pipe body 1, the second pipe body 5, the third pipe body 7, and the fourth pipe body 11 with threads to form a purification fitting. The user then installs the purification fitting on the hydrofluoric acid delivery pipeline using the threads on the first pipe body 1 and the fourth pipe body 11. During the flow of hydrofluoric acid, the first guide vane 3 and the second guide vane 10 work together to reduce the impact of the hydrofluoric acid, preventing damage to the filter screen. Simultaneously, as the hydrofluoric acid passes through the guide vanes, it forms a vortex within the purification fitting, causing impurities in the hydrofluoric acid to concentrate around the filter screen, preventing clogging after prolonged use. If the user needs to clean or replace the filter screen, they can easily disassemble and replace it by disconnecting the connections between the first pipe body 1, the second pipe body 5, the third pipe body 7, and the fourth pipe body 11.
[0024] For those skilled in the art, this invention is not limited to the details of the exemplary embodiments described above, and can be implemented in other specific forms without departing from the spirit or scope of this invention. Therefore, the embodiments of this invention are exemplary and not restrictive. The scope of this invention is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.
Claims
1. An electronic-grade hydrofluoric acid impurity removal pipe fitting, comprising a first pipe body (1), characterized in that: A first connector (2) is provided in the middle of the first tube (1). A first guide fan blade (3) is rotatably provided on the top of the first connector (2). A first filter screen (4) is provided at the bottom of the first tube (1). A second tube (5) is provided at the bottom of the first tube (1). A second filter screen (6) is provided at the bottom of the second tube (5). A third tube (7) is provided at the bottom of the second tube (7). A second connector (9) is provided at the bottom of the third tube (7). A second guide fan blade (10) is rotatably provided on the top of the second connector (9). A fourth tube (11) is provided at the bottom of the third tube (7). A fourth filter screen (12) is provided at the bottom of the fourth tube (11). A sealing ring (13) is provided between the first tube (1), the second tube (5), the third tube (7), and the fourth tube (11).
2. The electronic-grade hydrofluoric acid impurity removal pipe fitting according to claim 1, characterized in that: The top of the inner wall of the first tube (1) and the bottom of the inner wall of the third tube (7) are provided with retaining rings. The first tube (1) and the third tube (7) are respectively connected to the first connector (2) and the second connector (9) through retaining rings.
3. The electronic-grade hydrofluoric acid impurity removal pipe fitting according to claim 1, characterized in that: The bottom of the inner wall of the first tube (1) and the top of the inner wall of the third tube (7) are provided with annular grooves. The first tube (1) and the third tube (7) are respectively connected to the first filter screen (4) and the third filter screen (8) through the annular grooves.
4. The electronic-grade hydrofluoric acid impurity removal pipe fitting according to claim 1, characterized in that: The bottom of the inner wall of the second tube (5) and the fourth tube (11) are provided with flow-limiting rings. The second tube (5) and the fourth tube (11) are respectively connected to the second filter screen (6) and the fourth filter screen (12) through the flow-limiting rings.
5. The electronic-grade hydrofluoric acid impurity removal pipe fitting according to claim 1, characterized in that: The top and bottom of the first tube (1), the second tube (5), the third tube (7) and the fourth tube (11) are all provided with threads, and the first tube (1), the second tube (5), the third tube (7) and the fourth tube (11) are connected to each other in sequence by threads.
6. The electronic-grade hydrofluoric acid impurity removal pipe fitting according to claim 1, characterized in that: The first filter (4), the second filter (6), the third filter (8) and the fourth filter (12) are all microporous filter membranes, and the filtration accuracy of the first filter (4), the second filter (6), the third filter (8) and the fourth filter (12) is successively reduced and controlled between 0.05μm and 0.01μm.
Citation Information
Patent Citations
Filtering device for purifying high-purity hydrofluoric acid
CN219764803U