A double-layered pad plate isolation jig for sintering silicon nitride substrate

Abstract

The utility model discloses a nitrogenized silicon substrate sintering double -deck backing plate isolation jig in the backing plate technical field, including the first backing plate, both sides of first backing plate top all are fixedly installed with the square, the number of square is four, four the top of square all are fixedly connected with the vertical pole, the outer surface between four vertical pole is movably connected with the second backing plate, the surface of second backing plate is equipped with the through -hole, still be connected through the limiting assembly between second backing plate and first backing plate. The utility model discloses through setting second backing plate, through -hole and adjusting assembly, when using, the staff can place the nitrogenized silicon substrate on second backing plate, then through adjusting assembly to nitrogenized silicon substrate is surrounded and is blocked, avoids to access to the nitrogenized silicon substrate falling in sintering furnace, according to the size of nitrogenized silicon substrate and is surrounded, also can avoid the collision, and the hot air in sintering furnace can be blown to the nitrogenized silicon substrate bottom through the through -hole, thereby can improve the sintering effect.

Description

Technical Field

[0001] This utility model relates to the field of pad technology, and in particular to a silicon nitride substrate sintered double-layer pad isolation fixture. Background Technology

[0002] Silicon nitride materials have excellent thermal, electrical and mechanical properties. Porous silicon nitride ceramics have the characteristics of high temperature resistance, corrosion resistance, high strength and good thermal shock resistance. They are widely used in petrochemical, metallurgical machinery, aerospace and other fields. In the sintering process of silicon nitride substrates, pads and isolation fixtures are required to stably support the silicon nitride substrates.

[0003] However, existing technologies have some problems: existing pad isolation fixtures are usually single-layered. When using them, the operator places the silicon nitride substrate directly on top of the fixture. As a result, during sintering, the bottom surface of the silicon nitride substrate is difficult to be blown by hot air, and the fixture is difficult to keep silicon nitride substrates of different sizes stably on the surface of the fixture. The silicon nitride substrate may slip or be damaged by collision during the transfer process. Therefore, we propose a double-layer pad isolation fixture for silicon nitride substrate sintering. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a double-layer pad isolation fixture for sintering silicon nitride substrates. By setting up double-layer pads and adjustment components, the sintering effect can be improved and silicon nitride substrates of different sizes can be protected.

[0005] The purpose of this utility model is achieved as follows: A double-layer pad isolation fixture for sintering silicon nitride substrates includes a first pad, on both sides of the top of the first pad, four blocks are fixedly installed, and vertical rods are fixedly connected to the top of each of the four blocks. A second pad is movably sleeved between the outer surfaces of the four vertical rods. The surface of the second pad has through holes. The second pad and the first pad are also connected by a limiting component to fix the second pad on the first pad. An adjustment component is provided on the surface of the second pad to protect silicon nitride substrates of different sizes.

[0006] Optionally, the adjustment component includes a retaining ring, which is fixedly mounted on the second pad. The retaining ring has a slot, and a first baffle is movably inserted into the slot.

[0007] Optionally, a square groove is provided on the first baffle, and a second baffle is movably inserted into the square groove.

[0008] Optionally, the limiting component includes two square frames, both of which are fixedly installed on the bottom of the second pad, and a connecting rod is fixedly connected between the two square frames. A bolt is threadedly connected to the first pad, and the connecting rod is threadedly sleeved on the outer surface of the bolt.

[0009] Optionally, the through holes are circular in appearance and are evenly distributed on the top of the second pad.

[0010] Optionally, support legs are fixedly installed on both sides of the bottom of the first pad, and the bottom of the support legs is provided with a bottom groove, the size of which is adapted to the size of the vertical rod.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows: This invention, by setting a second pad, through holes, and adjustment components, allows workers to place the silicon nitride substrate on the second pad during use. The adjustment components then surround the silicon nitride substrate to prevent it from falling during storage and handling in the sintering furnace. The surrounding mechanism, tailored to the size of the silicon nitride substrate, also prevents collisions. Hot air in the sintering furnace can be blown to the bottom of the silicon nitride substrate through the through holes, thereby improving the sintering effect. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0013] Figure 1 This is a structural schematic diagram provided by this utility model.

[0014] Figure 2 This is a schematic diagram of the bottom structure provided by this utility model.

[0015] Figure 3 This is a side view of the structure provided by this utility model.

[0016] Figure 4 This is a structural schematic diagram of the retaining ring, the first baffle, and the second baffle provided by this utility model.

[0017] In the diagram: 1. First pad; 2. Block; 3. Vertical rod; 4. Second pad; 5. Through hole; 6. Retaining ring; 7. Groove; 8. First baffle; 9. Square groove; 10. Second baffle; 11. Square frame; 12. Connecting rod; 13. Bolt; 14. Support leg; 15. Bottom groove. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] like Figures 1 to 4 As shown in the figure, the present invention provides a silicon nitride substrate sintering double-layer pad isolation fixture, including a first pad 1, with four blocks 2 fixedly installed on both sides of the top of the first pad 1, and vertical rods 3 fixedly connected to the top of each of the four blocks 2. A second pad 4 is movably sleeved between the outer surfaces of the four vertical rods 3. The surface of the second pad 4 is provided with through holes 5. The second pad 4 is also connected to the first pad 1 by a limiting component for fixing the second pad 4 on the first pad 1. The surface of the second pad 4 is provided with an adjustment component for protecting silicon nitride substrates of different sizes.

[0020] In use, the operator can place the silicon nitride substrate on the second pad 4 and then use the adjustment component to surround the silicon nitride substrate to prevent it from falling during storage and handling in the sintering furnace. The surrounding component is designed according to the size of the silicon nitride substrate to prevent collisions. Hot air in the sintering furnace can be blown to the bottom of the silicon nitride substrate through the through hole 5, thereby improving the sintering effect. If the second pad 4 is damaged after long-term use, the operator can also remove the second pad 4 and replace it separately using the limiting component, which reduces production costs.

[0021] Furthermore, the adjustment component includes a retaining ring 6, which is fixedly mounted on the second pad 4. The retaining ring 6 has a slot 7, and a first baffle 8 is movably inserted into the slot 7.

[0022] After the staff places the silicon nitride substrate on the second pad 4, they can insert the two first baffles 8 into the appropriate positions according to the size of the silicon nitride substrate to protect the silicon nitride substrate and prevent it from sliding and colliding and damaging the substrate blank.

[0023] Furthermore, a square groove 9 is provided on the first baffle 8, and a second baffle 10 is movably inserted into the square groove 9.

[0024] After the staff uses the first baffle 8 to enclose the silicon nitride substrate, they can use the second baffle 10 to enclose the silicon nitride substrate in another direction, thereby further limiting the silicon nitride substrate and keeping it stably on the second pad 4 to avoid sliding and collision damage.

[0025] Furthermore, the limiting component includes two square frames 11, both of which are fixedly installed on the bottom of the second pad 4. A connecting rod 12 is fixedly connected between the two square frames 11. A bolt 13 is threadedly connected to the first pad 1, and the connecting rod 12 is threadedly sleeved on the outer surface of the bolt 13.

[0026] When the second pad 4 is damaged after long-term use, the operator can unscrew the bolt 13 to release the limiting effect on the second pad 4, so that the second pad 4 can be replaced separately without replacing the whole pad, thus reducing production costs.

[0027] Furthermore, the through holes 5 are circular in appearance and are evenly distributed on the top of the second pad 4.

[0028] Furthermore, support legs 14 are fixedly installed on both sides of the bottom of the first pad 1. The bottom of the support legs 14 is provided with a bottom groove 15, and the size of the bottom groove 15 is adapted to the size of the vertical rod 3.

[0029] Workers can attach the support leg 14 to the vertical rod 3 through the bottom groove 15, thereby enabling the stable stacking of multiple fixtures and facilitating their batch storage and retrieval to the sintering furnace for sintering.

[0030] Working principle and usage process of this utility model: In use, the operator can place the silicon nitride substrate on the second pad 4. Depending on the size of the silicon nitride substrate, the two first baffles 8 can be inserted into appropriate positions to protect the substrate and prevent it from sliding and colliding, thus avoiding damage. After the first baffles 8 enclose the silicon nitride substrate, the operator can use the second baffle 10 to enclose it from another direction, further limiting the substrate and keeping it stably on the second pad 4 to prevent sliding and collision damage. The operator can use the bottom groove 15 to attach the support leg 14 to the vertical rod 3, enabling the stable stacking of multiple fixtures and facilitating batch storage and retrieval to the sintering furnace for sintering. During sintering, hot air in the sintering furnace can be blown to the bottom of the silicon nitride substrate through the through hole 5, thereby improving the sintering effect. If the second pad 4 is damaged after prolonged use, the operator can unscrew the bolt 13 to release the limiting effect on the second pad 4, allowing for individual replacement of the second pad 4 instead of the entire substrate, reducing production costs.

[0031] The above description of the embodiments is only for the purpose of helping to understand the method and core idea of ​​this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principle of this utility model, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A sintering double-layered pad plate isolation jig for a silicon nitride substrate, comprising a first pad plate (1), characterized in that: The first pad (1) has four blocks (2) fixedly installed on both sides of its top. The top of each of the four blocks (2) is fixedly connected to a vertical rod (3). The outer surfaces of the four vertical rods (3) are movably sleeved together with a second pad (4). The surface of the second pad (4) is provided with a through hole (5). The second pad (4) is also connected to the first pad (1) by a limiting component, which is used to fix the second pad (4) on the first pad (1). The surface of the second pad (4) is provided with an adjustment component, which is used to protect silicon nitride substrates of different sizes.

2. The sintered double-layered silicon nitride substrate spacer jig according to claim 1, wherein: The adjustment component includes a retaining ring (6), which is fixedly installed on the second pad (4). The retaining ring (6) has a slot (7), and a first baffle (8) is movably inserted into the slot (7).

3. The sintered double-layered silicon nitride substrate spacer jig according to claim 2, wherein: The first baffle (8) has a square groove (9), and a second baffle (10) is movably inserted into the square groove (9).

4. The sintered double-layered silicon nitride substrate spacer jig according to claim 1, wherein: The limiting component includes two square frames (11), both of which are fixedly installed on the bottom of the second pad (4). A connecting rod (12) is fixedly connected between the two square frames (11). A bolt (13) is threadedly connected to the first pad (1), and the connecting rod (12) is threadedly sleeved on the outer surface of the bolt (13).

5. The sintered double-layered silicon nitride substrate spacer jig according to claim 1, wherein: The through holes (5) are circular in appearance and are evenly distributed on the top of the second pad (4).

6. The sintered silicon nitride substrate double-layered pad plate isolation jig according to claim 1, wherein: Both sides of the bottom of the first pad (1) are fixedly installed with support legs (14), and the bottom of the support legs (14) is provided with a bottom groove (15), the size of the bottom groove (15) is adapted to the size of the vertical rod (3).

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