Device for mounting optical elements, system for semiconductor technology, tool and use of the tool

Abstract

The invention relates to a device (100) for mounting optical elements (25) of a system for semiconductor technology. The device (100) comprises a plurality of cantilever-like retaining elements (120) extending essentially parallel to each other and elastically deformable up to their elastic limit, which are designed and arranged such that an optical element (25) can be connected to the free ends (121) of the retaining elements (120) for mounting, wherein at least a part of the retaining elements (120) are plastically deformable when a defined lever force is applied such that the free ends (121) are removed from a previously mounted optical element (25). The invention further relates to a system comprising a device (100) according to the invention, a tool (200) for applying the defined leverage force and its use.

Description

[0001] The invention relates to a device for mounting optical elements of a system for semiconductor technology.

[0002] In the prior art, semiconductor technology equipment refers to equipment used for the production or testing of microstructured devices or the components required for their manufacture. An example of such equipment is a projection exposure system for photolithography.

[0003] Photolithography is used to manufacture microstructured components, such as integrated circuits. The projection exposure system used comprises an illumination system and a projection system. The image of a mask (also called a reticulum) illuminated by the illumination system is projected in a reduced size onto a substrate, such as a silicon wafer, coated with a photosensitive layer and positioned in the image plane of the projection system. This transfers the mask structure onto the photosensitive coating of the substrate.

[0004] In both illumination and projection systems, particularly in projection exposure systems designed for EUV applications (i.e., with exposure wavelengths from 5 nm to 30 nm), several optical elements, especially mirrors, are typically used to achieve the desired image of the mask onto the substrate. Due to the required accuracy, it is essential, especially in projection systems, to ensure that the position of the individual optical elements relative to each other, as well as to the mask and the substrate, changes only within a predefined range during operation of the projection exposure system, if at all. Furthermore, the shape of the optical elements, particularly the mirror surfaces, must not change, or only within a predefined range.Any change to the position and / or shape of one or more optical elements beyond the specified parameters can lead to a decrease in the image quality of the projection system.

[0005] Similar principles apply to other equipment used in semiconductor technology, such as mask inspection devices. These devices allow masks to be inspected before operation in a microlithographic projection exposure system or during downtime to detect potential defects or impurities that could lead to the rejection of semiconductors manufactured from the mask. This is achieved by generating one or more so-called aerial images of a section of the photomask, which can then be examined for defects and impurities. To generate these aerial images, the mask is illuminated by a system with radiation of a suitable wavelength, and the radiation transformed by the mask is imaged onto an image sensor suitable for the selected wavelength by an optical system with one or more optical elements.The same principle applies to the optics in mask inspection devices: any change in the position and / or shape of one or more optical elements beyond the specified limits can lead to a decrease in the image quality of the mask inspection devices, which must be avoided. To prevent undesirable deformation and / or positional changes due to differing thermal expansion of optical elements and their respective mounts, it is known to design the mount for an optical element in a semiconductor technology system to be suitably flexible. One variant of such a mount is the so-called feet mount.

[0006] The feet mount comprises a number of elastically deformable feet, which are distributed around the circumference and are typically bonded to the optical element by a material-bonded connection. The feet are designed similarly to a rigidly clamped spring on one side, so that they bend elastically outwards when the optical element expands. This prevents the optical element from being forced into such a state that it deforms, and also prevents its position from changing in such a way that, in particular, an optical axis of the optical element is displaced.

[0007] To ensure a secure mounting of an optical element in a foot socket, the individual feet are typically bonded to the optical element by adhesive. If the optical element needs to be removed from the socket, for example for correction purposes, this bond can be "unbonded," meaning the bond is broken. Depending on the adhesive used, unbonding can be achieved by sufficiently heating the adhesive or by using chemical agents that react appropriately with the adhesive. Along with the action on the adhesive, the respective foot is usually also pulled away from the optical element by applying force during unbonding.

[0008] After the adhesive has been removed, the feet of the mount, due to their spring-like design, remain in close contact with the optical element and are pressed against it by the spring force. Removing the optical element from the mount without damage remains difficult because of the feet's continued close contact with the optical element. DE 100 42 844 C1 discloses a radially adjustable lens mount.

[0009] DE 102 00 244 A1 discloses a mounting of an optical element in which the optical element can be fixed against a position-determining bearing device by means of holding devices. JP 2002 287 009 A relates to an optical component assembly structure and an optical scanner. JP 2008 287 126 A relates to a laser beam scanner arranged in the main body of an image generation device.

[0010] The object of the present invention is to create a device for mounting optical elements of a system for semiconductor technology and a system for semiconductor technology in which these disadvantages no longer occur or only occur to a reduced extent.

[0011] This problem is solved by a device according to claim 1 and a system for semiconductor technology according to claim 14. A tool designed for certain embodiments of the device is the subject of claim 16, the use of which is the subject of claim 19. Advantageous further developments are the subject of the dependent claims.

[0012] Accordingly, the invention relates to a device for mounting optical elements of a semiconductor technology system with a foot-type mounting, comprising a plurality of essentially parallel, cantilever-like, elastically deformable retaining elements up to their elastic limit, which are designed and arranged such that an optical element can be connected to the free ends of the retaining elements for mounting, wherein at least a part of the retaining elements can be plastically deformed when a defined lever force is applied such that the free ends are removed from a previously mounted optical element.

[0013] The invention also relates to a system for semiconductor technology comprising at least one optical element, wherein at least one optical element is enclosed by a device according to the invention.

[0014] The invention further relates to a tool for applying a defined leverage force to a holding element of a device or system according to the invention for semiconductor technology, wherein the tool is designed to form a positive connection with the free end of the holding element and to further attach to the holding element at a distance from the free end of the holding element.

[0015] The invention also relates to the use of a tool according to the invention on a device or system according to the invention, wherein a defined lever force is exerted on a holding element of a device for holding optical elements of a system for semiconductor technology by means of the tool in such a way that the holding element is plastically deformed in such a way that its free end is removed from a previously held optical element.

[0016] Finally, the invention relates to a holding element for a cantilever-like clamping, which is elastically deformable up to its elastic limit and whose free end is designed for connection with a superior component, wherein the holding element is plastically deformable when a defined lever force is applied such that its free end is removed from a previously connected superior component.

[0017] First, some terms used in connection with the invention will be explained.

[0018] An element is considered "elastically deformable" if it deforms under load and returns to its original shape after the load is removed. For elastic deformation to occur, the load must be below the elastic limit, as plastic deformation also occurs when the load exceeds the elastic limit.

[0019] An element is considered "cantilever-like" if it is fixed on one side and otherwise free, so that under load it behaves similarly to a cantilever known from technical mechanics.

[0020] The invention recognizes that known and proven foot sockets for optical elements in semiconductor technology systems can be significantly improved with regard to the removal of an optical element held in them if the retaining elements, which are inherently spring-elastic and thus essential for achieving the advantages of such a foot socket, can at least partially be plastically deformed by applying a defined leverage force, so that after this plastic deformation they no longer bear against the optical element. Removing the optical element from the device or socket is then much easier. This is particularly true if all retaining elements can be and are plastically deformed accordingly.

[0021] The elastic limit, or the defined lever force with which a retaining element can be plastically deformed, must be selected such that it is not reached during normal handling of the optical element and / or the device. This ensures that the retaining element behaves fundamentally as is known from the prior art regarding foot sockets, thus preserving the known advantages of such a socket.

[0022] To achieve the desired plastic deformability of a retaining element, it can be designed with a notch. The notch reduces the area moment of inertia of the retaining element, making it easier to bend in that area and thus more readily achieving the desired plastic deformation. The design of the notch allows the lever force required for plastic deformation to be defined. Furthermore, the presence of a notch essentially determines the position at which the plastic deformation of the retaining element occurs.

[0023] To exert the required defined leverage force on a retaining element, the free end of the retaining element may be designed for a positive-locking connection with a lever tool. When a lever tool is positively locked to the free end of a retaining element, it can bear against the retaining element at a distance from its free end to apply the required leverage force. The retaining element may be designed to accommodate this. If a notch is provided, the lever tool may preferably rest in the area of ​​the notch, which may also include at least partial engagement within the notch. Again, the retaining element may be designed to accommodate this.

[0024] Alternatively, at least one holding element can have two projecting gripping elements spaced apart from each other such that applying essentially opposing forces to the gripping elements exerts the defined leverage force on the holding element. If the two holding elements are "pressed together," for example, using pliers, a bending load is introduced into the area of ​​the holding element between the two gripping elements. With a sufficiently large resulting leverage force, this results in plastic deformation in this area. It is preferred that the two projecting gripping elements are arranged on both sides of a notch; in other words, that a notch is provided between the two gripping elements.

[0025] It is preferred if adhesive surfaces for a material-bonded connection with an optical element to be held are formed at the free end of at least some of the retaining elements. The device can then be used analogously to known foot sockets. If a retaining element that is material-bonded to an optical element at the adhesive surface is to be detached, the application of a tensile force to the adhesive, which is regularly helpful for detachment, can be achieved by applying the defined leverage force.

[0026] It is preferred if at least part of the retaining elements are made of metal, preferably stainless steel. With suitable design of the retaining elements, this allows both the desired elasticity of the retaining elements and the plastic deformation upon application of the defined leverage force to be achieved.

[0027] At least some of the retaining elements can have a length of 15 to 25 mm, preferably 18 to 22 mm, and more preferably approximately 20 mm.

[0028] The device can, for example, comprise 12, 16, or 20 retaining elements. As already indicated, it is preferred if all retaining elements of the device are designed as described.

[0029] For an explanation of the inventive system for semiconductor technology, reference is made to the preceding explanations.

[0030] The tool according to the invention is a lever tool, as already mentioned in connection with the special design of the device in which at least one retaining element is formed at the free end for a positive locking connection with a tool.

[0031] To apply the necessary leverage to a suitably designed retaining element, enabling its plastic deformation as required, the tool is designed to form a positive connection with the free end of the retaining element and to maintain contact with it at a distance from the free end. Through this positive connection with the free end of the retaining element, while simultaneously maintaining contact with it at a distance, the tool acts as a lever to bend the retaining element, typically in the area where it contacts the element. With sufficient force corresponding to the defined leverage, this bending is plastic.

[0032] The tool can preferably be designed to engage a notch in the retaining element in the area intended for contact with the retaining element. For example, the tool can have a projection adapted to the position and shape of the notch. If such engagement is provided, proper use of the tool can be particularly well ensured, since proper positioning of the tool on a retaining element requires not only a positive locking connection at the free end, but also engagement in the notch of the retaining element, which is easily verifiable by a user.

[0033] The tool may preferably include a heating cartridge for delaminating the adhesive surface of a retaining element. If the tool is appropriately equipped, the heating cartridge can, when used, heat and thus delaminate any existing adhesive bond between the retaining element to be detached and the optical element, while simultaneously enabling the tool to peel the retaining element away from the optical element, thus facilitating delamination.

[0034] For an explanation of the use of the tool according to the invention, reference is made to the preceding statements.

[0035] The invention also extends to the retaining element itself, as described above in connection with the device for mounting optical elements. The free end of the retaining element, provided the retaining element is clamped rigidly on one side, corresponding to a cantilever-like clamping, can be designed for connection to any superior component. However, by the plastic deformation of the retaining element upon application of a defined leverage force, this connection can not only be released, but it can also be ensured that the free end is removed from the superior component previously connected to it.

[0036] The retaining element can be further developed in accordance with the retaining elements of the device according to the invention for holding optical elements, so that the preferred embodiments of at least part of the retaining elements of the device according to the invention described above also apply analogously to the retaining element as such, whereby possible references to the device or the optical elements to be held by the device are to be read as superior components on which the retaining element can either be clamped or with which the free end of the retaining element can be connected.

[0037] The invention will now be described by way of example with reference to advantageous embodiments and the accompanying drawings. These show: Fig. 1: a schematic representation of a projection exposure system for photolithography; Fig. 2: a schematic representation of a mask inspection device; Fig. 3: a schematic representation of a first embodiment of a device according to the invention; Fig. 4: a schematic representation of the use of a tool according to the invention on the device according to the invention Fig. 3; and Fig. 5: a schematic representation of a second embodiment of a device according to the invention.

[0038] In Fig. Figure 1 shows a projection exposure system 1 for photolithography as an example of a system for semiconductor technology in a schematic meridional section. The projection exposure system 1 comprises an illumination system 10 and a projection system 20.

[0039] The illumination system 10 illuminates an object field 11 in an object plane or reticulum plane 12. The illumination system 10 comprises an illumination radiation source 13, which, in the illustrated embodiment, emits illumination radiation comprising at least useful light in the EUV range, i.e., in particular with a wavelength between 5 nm and 30 nm. The illumination radiation source 13 can be a plasma source, for example, an LPP source (laser-produced plasma) or a DPP source (gas-discharge-produced plasma). It can also be a synchrotron-based radiation source. The illumination radiation source 13 can also be a free-electron laser (FEL).

[0040] The illumination radiation emanating from the light source 13 is first focused in a collector 14. The collector 14 can be a collector with one or more ellipsoidal and / or hyperboloid reflective surfaces. The at least one reflective surface of the collector 14 can be illuminated at grazing incidence (GI), i.e., with angles of incidence greater than 45°, or at normal incidence (NI), i.e., with angles of incidence less than 45°. The collector 14 can be structured and / or coated to optimize its reflectivity for the useful radiation and to suppress stray light.

[0041] After the collector 14, the illumination radiation propagates through an intermediate focus in an intermediate focal plane 15. If the illumination system 10 is to be constructed in a modular manner, the intermediate focal plane 15 can, in principle, be used for the separation – including structural separation – of the illumination system 10 into a radiation source module, comprising the exposure radiation source 13 and the collector 14, and the illumination optics 16 described below. With such a separation, the radiation source module and the illumination optics 16 then together form a modularly constructed illumination system 10.

[0042] The illumination optics 16 include a deflecting mirror 17. The deflecting mirror 17 can be a flat deflecting mirror or, alternatively, a mirror with an effect that influences the beam shape beyond the mere deflection effect. Alternatively or additionally, the deflecting mirror 17 can be designed as a spectral filter that separates a useful wavelength of the illumination radiation from stray light of a different wavelength.

[0043] The deflecting mirror 17 deflects the radiation from the illumination radiation source 13 onto a first faceted mirror 18. If the first faceted mirror 18 is arranged – as in the present case – in a plane of the illumination optics 16 that is optically conjugate to the reticular plane 12 as a field plane, it is also referred to as a field faceted mirror.

[0044] The first faceted mirror 18 comprises a plurality of micromirrors that can be individually pivoted about two mutually perpendicular axes for the controllable formation of facets, each preferably equipped with an orientation sensor (not shown) for determining the orientation of the micromirror. The first faceted mirror 18 is thus a microelectromechanical system (MEMS system), as described, for example, in DE 10 2008 009 600 A1.

[0045] In the beam path of the illumination optics 16, a second faceted mirror 19 is arranged downstream of the first faceted mirror 18, resulting in a double-faceted system, the basic principle of which is also known as a honeycomb condenser (fly's eye integrator). If the second faceted mirror 19 is arranged in a pupil plane of the illumination optics 16 – as in the illustrated embodiment – ​​it is also referred to as a pupil faceted mirror. However, the second faceted mirror 19 can also be arranged at a distance from a pupil plane of the illumination optics 16, in which case the combination of the first and second faceted mirrors 18, 19 results in a specular reflector, as described, for example, in US 2006 / 0132747 A1, EP 1 614 008 B1, and US 6,573,978 B1.

[0046] The second faceted mirror 19 need not be constructed from pivotable micromirrors, but can instead comprise individual facets formed from one or a manageable number of mirrors that are significantly larger than micromirrors, and which are either fixed or tiltable only between two defined end positions. However, as shown, it is also possible to provide the second faceted mirror 19 with a microelectromechanical system comprising a plurality of micromirrors, each pivotable about two axes perpendicular to each other, and each preferably including an orientation sensor.

[0047] With the aid of the second faceted mirror 19, the individual facets of the first faceted mirror 18 are projected onto the object field 11, although this is regularly only an approximate projection. The second faceted mirror 19 can be the last beam-shaping or even the last mirror for the illumination radiation in the beam path before the object field 11.

[0048] Each of the facets of the second faceted mirror 19 is assigned to exactly one of the facets of the first faceted mirror 18 to form an illumination channel for illuminating the object field 11. This can result in illumination according to Köhler's principle.

[0049] The facets of the first faceted mirror 18 are each superimposed by a corresponding facet of the second faceted mirror 19 to illuminate the object field 11. The illumination of the object field 11 is as homogeneous as possible. It preferably exhibits a uniformity error of less than 2%. Field uniformity can be achieved by superimposing different illumination channels.

[0050] By selecting the illumination channels ultimately used, which is easily achieved by appropriately adjusting the micromirrors of the first faceted mirror 18, the intensity distribution in the entrance pupil of the projection system 20 described below can also be adjusted. This intensity distribution is also referred to as the illumination setting. Furthermore, it can be advantageous not to position the second faceted mirror 19 exactly in a plane that is optically conjugate to a pupil plane of the projection system 20. In particular, the pupil faceted mirror 19 can be tilted relative to a pupil plane of the projection system 20, as described, for example, in DE 10 2017 220 586 A1.

[0051] During the Fig. In the arrangement of the components of the illumination optics 16 shown in Figure 1, the second faceted mirror 19 is arranged in a surface conjugate to the entrance pupil of the projection system 20. Deflection mirror 17 and the two faceted mirrors 18, 19 are arranged at an angle both to the object plane 12 and to each other.

[0052] In an alternative embodiment of the illumination optics 16, not shown, a transmission optic comprising one or more mirrors can be provided in the beam path between the second faceted mirror 19 and the object field 11. The transmission optic can, in particular, comprise one or two mirrors for normal incidence (NI mirrors) and / or one or two mirrors for grazing incidence (GI mirrors). With an additional transmission optic, different positions of the entrance pupil for the tangential and sagittal beam paths of the projection system 20 described below can be accommodated.

[0053] Alternatively, it is possible that on the in Fig. The deflecting mirror 17 shown in Figure 1 is dispensed with, for which the faceted mirrors 18, 19 are then to be arranged appropriately opposite the radiation source 13 and the collector 14.

[0054] Using the projection system 20, the object field 11 in the reticulum plane 12 is transferred to the image field 21 in the image plane 22.

[0055] The projection system 20 comprises a plurality of mirrors M. i , which are numbered according to their arrangement in the beam path of the projection exposure system 1. Regarding the mirrors M i These are optical elements 25.

[0056] In the Fig. In the example shown, the projection system 20 comprises six mirrors M1 to M6 as optical elements 25. Alternatives with four, eight, ten, twelve or another number of mirrors M iare also possible. The penultimate mirror M5 and the last mirror M6 each have a passage for the illumination radiation, making the depicted projection system 20 a doubly obscured optic. The projection system 20 has an image-side numerical aperture that is greater than 0.3 and can also be greater than 0.6, for example, 0.7 or 0.75.

[0057] The reflective surfaces of the mirrors M i can be designed as freeform surfaces without an axis of rotational symmetry. Alternatively, the reflective surfaces of the mirrors M can be i but can also be designed as aspherical surfaces with exactly one axis of rotational symmetry of the reflecting surface shape. The mirrors M iLike the mirrors of the lighting optics 16, they can have highly reflective coatings for the illumination radiation. These reflective coatings can be designed as multilayer coatings, in particular with alternating layers of molybdenum and silicon.

[0058] The projection system 20 has a large object-image offset in the y-direction between a y-coordinate of the center of the object field 11 and a y-coordinate of the center of the image field 21. This object-image offset in the y-direction can be approximately as large as a z-distance between the object plane 12 and the image plane 22.

[0059] The projection system 20 can in particular be anamorphic, i.e. it has in particular different image scales β x , β y in the x and y directions. The two image scales β x , β y of the projection system 20 are preferably located at (β x , βy ) = (+ / - 0.25, / +- 0.125). A magnification β of 0.25 corresponds to a reduction in the ratio of 4:1, while a magnification β of 0.125 results in a reduction in the ratio of 8:1. A positive sign for the magnification β indicates a magnification without image inversion, a negative sign indicates a magnification with image inversion.

[0060] Other magnification ratios are also possible. Magnification ratios with the same sign and those with the same absolute value β are also possible. x, β y In the x and y directions, adjustments are possible.

[0061] The number of intermediate image planes in the x- and y-directions in the beam path between the object field 11 and the image field 21 can be the same or different, depending on the design of the projection system 20. Examples of projection systems 20 with different numbers of such intermediate images in the x- and y-directions are known from US 2018 / 0074303 A1.

[0062] Projection system 20 can, in particular, have a homocentric entrance pupil. This may be accessible. However, it may also be inaccessible.

[0063] A reticle 30 (also called a mask) arranged in the object field 11 is exposed by the lighting system 10 and transferred to the image plane 21 by the projection system 20. The reticle 30 is held by a reticle holder 31. The reticle holder 31 can be moved, particularly in a scanning direction, by means of a reticle displacement drive 32. In the illustrated embodiment, the scanning direction is in the y-direction.

[0064] The reticle 30 can have an aspect ratio between 1:1 and 1:3, preferably between 1:1 and 1:2, and particularly preferably 1:1 or 1:2. The reticle 30 can be substantially rectangular and is preferably 5 to 7 inches (12.70 to 17.78 cm) long and wide, more preferably 6 inches (15.24 cm) long and wide. Alternatively, the reticle 30 can be 5 to 7 inches (12.70 to 17.78 cm) long and 10 to 14 inches (25.40 to 35.56 cm) wide, and is preferably 6 inches (15.24 cm) long and 12 inches (30.48 cm) wide.

[0065] A structure on the reticulum 30 is imaged onto a photosensitive layer of a wafer 35 located in the image plane 22 within the image field 21. The wafer 35 is held by a wafer holder 36. The wafer holder 36 can be displaced, particularly along the y-direction, via a wafer transfer drive 37. The displacement of the reticulum 30 via the reticulum transfer drive 32 and of the wafer 35 via the wafer transfer drive 37 can be synchronized.

[0066] The in Fig. The projection exposure system 1 shown in Figure 1, or its projection system 20, the above description of which essentially reflects known prior art, is characterized in that at least one of the optical elements 25 is enclosed by a device 100 according to the invention.

[0067] In Fig. Figure 2 shows a mask inspection device 50 as a further example of a system for semiconductor technology. The mask inspection device 50 can inspect a reticle 30, as is also the case with the projection exposure system 1 according to Figure 2. Fig. 1. It is used and should be inspected for defects and contamination.

[0068] The mask inspection device 50 comprises a radiation source 51 for radiation with a wavelength tuned to the reticle 30. In the present embodiment, the wavelength of the radiation source 51 is 13.5 nm, since the reticle 30 to be inspected is an EUV reticle. The radiation source 51 can, in particular, be a plasma radiation source whose plasma is tin-based.

[0069] The radiation emanating from the radiation source 51 is shaped in an illumination system 52, which includes various optical elements (mirrors, apertures, etc.; not shown), in order to illuminate a section of the reticulum 30 as optimally as possible.

[0070] The illuminated section can, for example, have a size of 0.5 mm x 0.8 mm, while the edge length of the reticulum 30 is regularly between 100 mm and 200 mm. In order to be able to inspect all areas of the reticulum 30, the reticulum 30 is arranged on a stage 53, which allows the reticulum 30 to be moved so that a desired area of ​​the reticulum 30 is located in the section illuminated by the radiation source 51 and the lighting system 52.

[0071] The radiation reflected from the reticulum 30 is magnified by a projection lens 54 comprising optical elements (not shown) and projected onto an image sensor 55, which thus provides a digital image of the illuminated section of the reticulum 30. The projection lens 54, or rather its optical elements, such as mirrors, and the image sensor 55 are adapted to the wavelength of the radiation source 51.

[0072] The illustrated mask inspection device 50 is characterized in that at least one optical element of the illumination system 52 and / or the projection lens 54 is enclosed by a device 100 according to the invention.

[0073] In Fig. Figure 3 is an exemplary device 100 according to the invention for mounting an optical element 25, as is the case with the projection exposure system 1 according to Fig. 1 or the mask inspection device 50 according to Fig. 2 can be used, as shown. Fig. Figure 3a shows a first embodiment of the device 100 with an optical element 25 enclosed therein, while Fig. 3b shows the device 100 by itself.

[0074] The device 100 serves to mount an optical element 25 of a semiconductor technology system according to the principle of a pin socket. For this purpose, a plurality (twelve in the illustrated embodiment) of retaining elements 120 extend from a mounting ring 101, extending essentially towards each other but also towards the axis of the mounting ring 101. Due to their integral construction with the mounting ring 101, the retaining elements 120 can be considered fixedly clamped on one side, so that they ultimately project from the mounting ring 101 in a manner similar to a cantilever beam.

[0075] At their free end 121, the retaining elements 120 each have a protruding adhesive surface 122 which - if present - is used to engage with a circumferential adhesive groove 26 of the optical element 25, or at least to form a material-bonded connection with it by means of adhesive 27 (cf. Fig. 4 and Fig. 5) is provided.

[0076] The overall height of each individual retaining element 120 is 20 mm. The mounting ring 101 and the retaining elements 120 formed in one piece with it are made of stainless steel. Consequently, the retaining elements 120 exhibit elastic deformability up to their elastic limit, making the device 100 fundamentally comparable to a foot-type mounting known from the prior art.

[0077] In contrast to the known foot socket, the retaining elements 120 are designed in such a way that when a defined lever force is applied, they deform plastically in such a way that their free ends 121 and in particular the adhesive surfaces 122 are removed from the optical element 25 and in particular no longer protrude into any circumferential adhesive groove 26.

[0078] In order to enable this deformation or to define the required lever force, the retaining elements 120 have a notch 123 with which the area moment of inertia of the retaining element 120 in this area is changed in such a way that a plastic deformation of the retaining element 120 can be achieved with a defined lever force that can be derived from the area moment of inertia.

[0079] In the Fig. In the embodiment of device 100 shown in Figure 3, the free end 121 of each retaining element 120 is designed for a positive-locking connection with a tool 200. For this purpose, each retaining element 120 has a projection 125 at its free end 121, which a tool 200 can engage behind in order to achieve a sufficient positive lock.

[0080] In the merely schematic Fig. 4 is a holding element 120 of the device 100 made of Fig. 3 shown in isolated section and in combination with a tool 200.

[0081] Fig. Figure 4a shows the retaining element 120 in its initial state, as it is also shown in Fig. Figure 3a shows the optical element 25 in a materially bonded state at its adhesive surface 122 by means of adhesive 27. The notch 123 and projection 125 at the free end of the retaining element 120 are also shown.

[0082] Fig. Figure 4b shows how a tool 200 is attached to apply the defined leverage force for plastic deformation of the retaining element 120.

[0083] The tool 200 is designed as an elongated lever, on which a hook element 201 is provided for gripping the projection 125 at the free end 121 of the retaining element 120 in order to achieve the required positive locking.

[0084] Furthermore, the tool 200 includes a projection 202 at one end, which is designed to engage in the notch 123 of the retaining element 120. The distance between the hook element 201 and the projection 202 is selected such that, when the tool 200 or hook element 201 and the retaining element 120 or projection 125 are positively engaged, the projection 202 on the tool 200 engages in the notch 123 of the retaining element 120.

[0085] The tool 200 further comprises a heating cartridge 203. The heating cartridge 203 is arranged and designed such that, after the initial "engagement" of the tool 200 with its hook element 201 onto the projection 125 at the free end 121 of the holding element 120 (see figure 1), it Fig. 4b) and the subsequent pivoting of the tool 200 so that its projection 202 engages in the notch 123, bearing against the retaining element 120 in such a way that it can heat the retaining element 120 in the area of ​​the adhesive surface 122. With the aid of the heating cartridge 203, the adhesive surface 122 and the adhesive 27 adhering to it can be heated in such a way that the material bond created by the adhesive 27 is at least weakened, i.e., the retaining element 120 is de-bonded. In Fig. 4c this is indicated by the changed hatching of the adhesive 27.

[0086] If the material bond created by the adhesive 27 is sufficiently weakened by the heat introduced by the heating cartridge 203, the retaining element 120 can be moved into the space formed by the transition of by applying a force to the tool 200. Fig. 4c to Fig. The optical element 25 is bent away from the optical element 25 in the direction indicated in 4d, resulting in plastic deformation of the retaining element 120 in the area of ​​the notch 123. The tool 200 exerts the leverage force required for the plastic deformation on the retaining element 120.

[0087] Are all retaining elements 120 of the device 100 (cf. Fig. 3) according to the Fig. As illustrated in Figure 4, the tool 200 is permanently bent away from the optical element 25, allowing the optical element 25 to be easily and damage-free removed from the device 100.

[0088] In Fig. 5 is an alternative embodiment of the retaining elements 120 of the device 100 according to Fig. Figure 2 shows the retaining element 120. This retaining element is largely identical to the retaining element 120 already described above, and reference is made to those descriptions. The following discussion focuses solely on the differences between the two versions of the retaining elements 120. Furthermore, it should be noted that in the embodiment shown in Figure 2, the retaining element 120 is... Fig. 5 the optical element 25 no groove 26 (cf. Fig. 3 and Fig. 4) has, but the adhesive bond between the retaining element 120 and the optical element 25 is made directly on the circumferential outer surface of the optical element 25.

[0089] Regarding the retaining element 120 according to Fig. 5 no projection 125 is provided at the free end 121 of the retaining element 120. Consequently, the in Fig. 3. Tool 200 shown is not for use with the holding element 120 according to Fig. 4 are planned.

[0090] For this purpose, the retaining element 120 has two projecting gripping elements 126, which are spaced apart from each other and arranged on both sides of the notch 123.

[0091] Is the adhesive bond between the retaining element 120 and the optical element 25 already broken or at least sufficiently weakened by an unspecified heat input or due to chemical processes (cf. Fig. 5a), by applying opposing forces to the gripping elements 126, e.g. using pliers, a sufficient leverage force can be exerted on the holding element 120 in the area of ​​the notch 123 such that the holding element 120 is plastically deformed and bent away from the optical element 25.

Claims

[1] Device (100) for mounting optical elements (25) of a semiconductor technology system with a foot socket comprising a plurality of essentially parallel, cantilever-like retaining elements (120) which are elastically deformable up to their elastic limit and which are designed and arranged such that an optical element (25) can be connected to the free ends (121) of the retaining elements (120) for mounting, characterized by , that at least part of the retaining elements (120) are plastically deformable when a defined lever force is applied, such that the free ends (121) are removed from a previously held optical element (25). [2] Device according to claim 1, characterized by , that at least part of the retaining elements (120) has a notch (123) about which the retaining element (120) is plastically deformed when the defined lever force is applied. [3] Device according to one of claims 1 or 2, characterized by , that the free end (121) of at least one retaining element (120) is designed for a positive locking connection with a tool (200). [4] Device according to claim 3, characterized by , that the retaining element (120) for further positioning of the tool (200) is designed to be located away from the free end (121) of the retaining element (120). [5] Device according to claim 4, if dependent on claim 2, characterized by , that the retaining element (120) is designed to further secure the tool (200) in the area of ​​the notch (123). [6] Device according to one of claims 1 or 2, characterized by , that on at least one holding element (120) two projecting gripping elements (126) are arranged spaced apart from each other in such a way that by applying essentially opposing forces to the gripping elements (126) the defined lever force is exerted on the holding element (120). [7] Device according to claim 6, if dependent on claim 2, characterized bythat the two protruding gripping elements (126) are arranged on both sides of the notch (123). [8] Device according to any one of the preceding claims, characterized by , that at the free end (121) at least part of the retaining elements (120) adhesive surfaces (122) are formed for a material-bonded connection with the optical element (25) to be grasped. [9] Device according to any one of the preceding claims, characterized by , that at least part of the retaining elements (120) is made of metal, preferably stainless steel. [10] Device according to claim 9, characterized by , that at least part of the retaining elements (120) are made of stainless steel. [11] Device according to any one of the preceding claims, characterized by , that at least some of the retaining elements (120) have a length of 15 to 25 mm. [12] Device according to claim 11, characterized by , that at least some of the retaining elements (120) have a length of 18 to 22 mm. [13] Device according to claim 12, characterized by , that at least some of the retaining elements (120) have a length of approximately 20 mm. [14] Semiconductor technology system comprising at least one optical element, characterized by , that at least one optical element (25) is enclosed by a device (100) according to one of claims 1 to 11. [15] Plant according to claim 14, characterized by that the system is a projection exposure system (1) for photolithography or a mask inspection device (50). [16] Tool (200) for applying a defined leverage force to a holding element of a device (100) according to one of claims 1 to 11 or of a system according to one of claims 14 or 15, characterized by, that the tool (200) is designed to form a positive connection with the free end (121) of the retaining element (120) and to further attach to the retaining element (120) at a distance from the free end (121) of the retaining element (120). [17] Tool according to claim 16, characterized by , that the tool (200) is designed as a further attachment to the holding element (120) for engagement in a notch (123) of the holding element (120). [18] Tool according to claim 16 or 17, characterized by , that the tool (200) includes a heating cartridge (202) for removing the adhesive surface (122) of a retaining element (120). [19] Use of a tool (200) according to one of claims 16 to 18 on a device (100) according to one of claims 1 to 11 or a system according to one of claims 14 or 15, characterized in that a defined lever force is exerted on a holding element (120) of a device (100) for holding optical elements (25) of a system for semiconductor technology by means of the tool (200) such that the holding element (120) is plastically deformed such that its free end (121) is removed from a previously held optical element (25). [20] Use according to claim 19, characterized by , that the retaining element (120) is unglued from the optical element (25) before the defined leverage force is applied.

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