SYSTEM AND METHOD FOR INSERTING A BAR INTO A SLOT IN A BASKET

Abstract

The invention relates to a system for inserting a bar (93) into a slot in a basket (9), such as a basket (9) for holding wafers of a semiconductor material, comprising the bar (93) for retaining the wafers in the basket (9), and / or for extracting this bar (93) when it is housed in the slot (94). The system (1) includes a drive device (3) for one end of the bar (93) and includes a support (4) defining a guide path (5) in a plane (P1) and a pin (6) guided in the plane along the guide path (5), a coupling means (7) for coupling to one end of the bar (93), and drive means (8) configured to move the pin (6) along the guide path (5) and simultaneously drive the coupling means (7) in rotation. Figure for the abstract: 1

Description

Title of the invention: SYSTEM AND METHOD FOR INSERTING A BAR INTO A SLOT OF A BASKET Technical field

[0001] The invention relates to a system for inserting a bar into a slot of a basket, such as a basket for housing wafers of a semiconductor material, comprising the bar for holding the wafers in the basket, and / or for extracting this bar when it is housed in the slot of the basket.

[0002] The invention applies in particular to any type of basket, but finds a preferred application in baskets for housing wafers of semiconductor material, also designated by the English term "wafers", such as wafers intended for the manufacture of photovoltaic cells. STATE OF THE ART

[0003] A wafer of semiconductor material generally receives several mechanical and chemical treatments for the manufacture of microelectronic components, such as photovoltaic cells. The wafer of semiconductor material is housed in a basket, which can receive several wafers, to hold it in position during the different treatments. A basket of known structure comprises a locking element, typically a bar, to hold the wafer of semiconductor material in the basket. The bar is removably housed in a slot of the basket; which slot requires, for the insertion and / or extraction of the bar, a simultaneous movement of this bar in translation and in rotation.

[0004] There is a need to automate the movement of the bar, in particular for its insertion into the slot and / or its extraction from the slot, while having a relatively simple, robust and efficient system. Statement of the invention

[0005] In this regard, the invention relates to a system for inserting a bar into a slot of a basket, such as a basket for housing wafers of a semiconductor material comprising the bar for holding the wafers in the basket, and / or for extracting this bar when it is housed in the slot. This slot requires, for the insertion and / or extraction of the bar, a displacement of the bar and a simultaneous movement of this bar, over at least part of the displacement, in rotation around an axis of rotation parallel to the bar, and preferably corresponding to the longitudinal central axis of this bar, and in translation along a path inscribed in a plane perpendicular to the axis of rotation. The system comprises a device for driving one end of the bar. The driving device comprises a support defining a guide path in a plane and a pin guided in the plane along the guide path. The drive device also comprises a coupling means intended to couple to one end of the bar. The coupling means is integral in translation with the pin and capable of rotating about an axis of rotation perpendicular to the plane. The drive device further comprises drive means configured to move the pin along the guide path and simultaneously drive, over at least part of the movement for the insertion and / or extraction of the bar, the coupling means in rotation.

[0006] Thanks to the invention, the bar can be moved in an automated manner according to an insertion and / or extraction movement on at least one part of which the bar performs a simultaneous rotational movement around an axis of rotation parallel to the bar and in translation along a path inscribed in a plane perpendicular to the axis of rotation.

[0007] In particular, the coupling means follows the movement of the pin along the guide path and moves the bar according to the insertion and / or extraction movement. When it is driven in rotation by the drive means, the coupling means also makes it possible to drive the bar in rotation around an axis of rotation perpendicular to the plane in which the path defining the insertion and / or extraction movement is inscribed.

[0008] The configuration of the drive means thus allows the coupling means - and therefore the bar when it is coupled to this coupling means - to carry out, over at least part of the movement for the insertion and / or extraction of the bar, a simultaneous translational and rotational movement in order to be able to insert or extract the bar.

[0009] Particularly simple, convenient and economical preferred features of the system according to the invention are presented below.

[0010] The coupling means may be integral in rotation with the pin. For example, the coupling means may be of the same piece as the pin.

[0011] The drive means may comprise a motor element configured to perform a rotation about an axis of rotation fixed relative to the support, a follower element carrying the pin and having a peripheral surface of which at least one portion is configured to cooperate with at least one portion of a peripheral surface of the motor element so that when the motor element rotates, the follower element is driven in rotation about another axis of rotation by cooperation of the at least one portion of its peripheral surface with the at least one portion of the peripheral surface of the motor element, the follower element or the motor element being configured so that, when the motor element rotates, the distance between the axis of rotation of the driving element and the axis of rotation of the follower element varies.

[0012] For example, the driving element may have a constant distance between its axis of rotation and at least one portion of its peripheral surface, the follower element having a variable distance between its axis of rotation and at least one portion of its peripheral surface, the at least one portion of the peripheral surface of the follower element being convex. Conversely, the follower element may have a constant distance between its axis of rotation and at least one portion of its peripheral surface while the driving element has a variable distance between its axis of rotation and at least one portion of its peripheral surface, the at least one portion of the peripheral surface of the follower element being convex.

[0013] The follower element, or the driving element, may have a generally elliptical shape, the pin being arranged in its center.

[0014] The driving element, or the follower element, may have a generally circular cross-section.

[0015] The drive element can be rotated by an electric motor.

[0016] Alternatively, the drive assembly may comprise a first motor element driving a follower element in rotation via a belt, the first motor element and the follower element being respectively configured to rotate around an axis of rotation fixed relative to the support, and a motor assembly secured to the belt and configured to drive the pin in rotation.

[0017] The first motor element can be driven in rotation by a first electric motor, the motor assembly comprising a second electric motor configured to drive the pin in rotation.

[0018] The motor assembly may comprise a conveyor element fixed to the belt and an electric motor configured to drive the pin in rotation via a transmission shaft of the electric motor, the pin being mechanically connected to the transmission shaft, the transmission shaft being supported by the conveyor element and mounted to be able to rotate relative to this conveyor element.

[0019] The guide path may have a generally curvilinear shape.

[0020] The coupling means may comprise a housing of non-circular shape, intended to receive a tenon of the bar of a shape complementary to the housing.

[0021] The insertion and / or extraction system may comprise a frame on which two driving devices for one end of the bar are mounted so as to be able to move in translation so that the coupling means of the driving devices are opposite each other, and intended to cooperate respectively with the two opposite ends of the bar, the driving devices being able to move towards or away from each other in a direction parallel to the axis of rotation of the means coupling.

[0022] The invention also relates to a method for inserting or extracting a bar using an insertion and / or extraction system as described above. The method comprises a step of coupling the coupling means with one end of the bar, a step of moving the pin along the guide path by the drive means, and a step of driving the coupling means in rotation by the drive means. The driving of the coupling means in rotation is implemented simultaneously with the movement of the pin, over at least part of the movement for the insertion and / or extraction of the bar. Brief description of the drawings

[0023] The present invention will be better understood on reading the description of exemplary embodiments, with reference to the appended drawings in which:

[0024] [Fig.l] is a schematic perspective representation of a system for inserting and / or extracting a bar according to an embodiment of the invention and of a basket comprising the bar to be inserted and / or extracted.

[0025] [Fig.2] is a side view of the basket of [Fig.l], with the bar which is housed in a slot of the basket.

[0026] [Fig. 3] represents the bar, taken in isolation, according to a side view showing an end section of this bar.

[0027] [Fig.4] represents a slot of the basket, taken in isolation, according to a view schematic in perspective.

[0028] [Fig.5] is a detail view showing one end of the bar coupled with a coupling means of the insertion and / or extraction system of [Fig.l].

[0029] [Fig.6a] is a partial schematic perspective representation of a drive device of the insertion and / or extraction system according to the first embodiment of the invention.

[0030] [Fig.6b] is similar to that of [Fig.6a], from another angle of view.

[0031] [Fig.7a] is a partial schematic perspective representation of a device driving the insertion and / or extraction system according to a second embodiment of the invention.

[0032] [Fig.7b] is similar to that of [Fig.5], from another angle of view; and

[0033] [Fig.8] illustrates a method of inserting and / or extracting a bar with the insertion and / or extraction system according to the invention.

[0034] DETAILED DESCRIPTION OF PARTICULAR EMBODIMENTS

[0035] Identical, similar or equivalent parts of the different figures bear the same numerical references so as to facilitate the transition from one figure to another.

[0036] [Fig.l] represents an insertion and / or extraction system 1 and a basket 9. The basket 9 is here a basket for housing wafers of a semiconductor material. It comprises side panels 91 each defining a plane, several fixed bars 92 and a removable bar 93.

[0037] The fixed bars 92 are fixed to the side panels 91 at their ends, for example by fitting, screwing or gluing. The bars 92 serve as a support for the wafers of semiconductor material. They may for example have teeth on a part of their peripheral surface in order to be able to receive the wafers and keep them at a distance from each other.

[0038] The removable bar 93 prevents, when installed on the basket 9, the insertion of the wafers made of semiconductor material into the basket 9 and / or their removal from inside the basket 9. Conversely, when the removable bar 93 is not installed on the basket 9, the wafers made of semiconductor material can be introduced inside the basket 9 and / or removed from the basket 9. The wafers can therefore escape from the basket 9 during the processing steps when the removable bar 93 is not installed.

[0039] In the example shown, the removable bar 93 is installed on the basket 9 and the system 1 is then configured to extract this bar 93 from the basket 9. To simplify the description, reference is made subsequently only to an extraction system, to an extraction method and more generally to the extraction of the bar 93 from the basket 9. Of course, it is entirely understandable for a person skilled in the art that the system 1 and / or the method apply both to insertion and to extraction since the insertion is inversely identical to the extraction. The use of the term “extraction system” or “extraction method” in the description is thus in no way limiting on this point.

[0040] The extraction system 1 here comprises a frame 2 and two drive devices 3 of one end of the bar 92 which define between them a space for receiving the basket 9. Indeed, the two drive devices 3 are here intended to be arranged on either side of the basket 9 as illustrated [Fig.l].

[0041] Each drive device 3 is mounted to be movable in translation relative to the frame 2. In particular, the drive devices 3 are mounted to slide along an axis defined by the frame 2 so as to be able to move towards or away from each other. Preferably, the basket 9 is arranged in the receiving space so that the longitudinal axis of the bar 93 is substantially parallel to the axis of movement of the drive devices 3 on the frame 2. This makes the system 1 adaptable to baskets of different dimensions.

[0042] For example, the frame 2 may comprise a tongue and each drive device 3 comprises a support 4 on which a groove cooperating with the tongue may be provided. The cooperation of the tongue and the groove allows a sliding connection between the frame 2 and each drive device 3.

[0043] More particularly, each support 4 here has a general T shape where at least part of the horizontal bar comprises the groove and the vertical bar comprises a guide path 5 in a plane Pb. The basket 9 is preferably arranged in the receiving space so that the plane defined by each side panel 91 is parallel to the plane Pb.

[0044] The guide path 5 is here defined by a slot provided in the support 4. The slot is a through slot. It has an elongated shape and has a substantially constant section over its entire length.

[0045] Each drive device 3 comprises, in addition to the support 4, a pin 6, a coupling means 7 and drive means 8.

[0046] The pin 6 is guided in the plane Pile along the guide path 5. It is able to rotate around an axis of rotation perpendicular to the plane Pb. In the example shown, the pin 6 is inserted into the slot and is able to move along this slot.

[0047] The pin 6 here has a generally cylindrical shape, better visible in [Fig.6a], the section of which is substantially smaller than the section of the slot defining the guide path 5 to allow its movement in translation and in rotation inside this slot.

[0048] The coupling means 7 is integral in translation with the pin 6. When the pin 6 is moved along the guide path 5, the coupling means 7 follows the same trajectory as the pin 6. It is also capable of performing a rotation around an axis of rotation X perpendicular to the plane Pb.

[0049] In fact, the axis of rotation X of the coupling means 7 is movable in the plane Pb while remaining perpendicular to the latter. In the example shown, the coupling means 7 is integral in translation and in rotation with the pin 6. The coupling means 7 can be mechanically connected directly to the pin 6. For example, the coupling means 7 and the pin 6 can be in one piece, which simplifies the manufacturing process.

[0050] The drive means 8 are configured to move the pin 6 along the guide path 5 and simultaneously drive, over at least part of the movement for the extraction of the bar 93, the coupling means 7 in rotation.

[0051] Indeed, such a movement is necessary to extract the bar 93 from the basket 9.

[0052] As illustrated in [Fig.2], each side panel 91 of the basket 9 comprises a slot 94 in which the bar 93 is removably housed. This slot 94 requires a movement of the bar 93 for its extraction, and a simultaneous movement of this bar 93, over at least part of this movement, in rotation around an axis of rotation parallel to the bar 93 and in translation along a path falling within a plane perpendicular to this axis. The axis of rotation preferably corresponds to the longitudinal central axis of the bar 93.

[0053] In particular, the bar 93 is movable in the slot 94 between a first position in which it is held in position in the slot 94 and a second position in which it can be extracted by a simple translational movement.

[0054] To move from the first position to the second position, the bar 93 must simultaneously perform a rotational movement around its longitudinal central axis and a translational movement along a path inscribed in a plane perpendicular to the longitudinal central axis of the bar 93. This makes it possible in particular to improve the safety of holding the bar 93 on the basket 9.

[0055] In the example illustrated in [Fig.2], the bar 93 simultaneously performs, to move from the first position to the second position, a rotation of 90° in the counterclockwise direction around its longitudinal central axis as well as a translation along a rectilinear path inscribed in a plane perpendicular to the axis of rotation.

[0056] The bar 93 has, at least at its ends, an elongated section. This section here has a substantially ovoid shape.

[0057] [Fig. 3] shows the end section of the bar 93, which has a height H along the longitudinal direction of this section and a width L in a direction transverse to the longitudinal direction. The width L is less than the height H. This end section of the bar 93 has, at the respective ends of its longitudinal axis, a first rounded surface 931 and a second rounded surface 932. The first rounded surface 931 has a radius which is less than that of the second rounded surface 932.

[0058] [Fig. 4] shows the slot 94 of the side panel comprising, in the direction of insertion of the bar 93, an opening portion 941, a thinned portion 942 and a bottom portion 943. The opening portion 941 is flared, in particular in order to facilitate the insertion of the bar 93.

[0059] The slot 94 has at the level of the thinned portion 942 a width 1 which is less than the height H of the end section of the bar 93, and greater than its width L. The bottom portion 943 is provided with a first housing 945 and a second housing 946.

[0060] When the bar 93 is in the first position, the first rounded surface 931 is received in the first housing 945 and the second rounded surface 932 is received in the second housing 946. The first housing 945 and the second housing 946 are arranged such that, when the bar 93 is in the first position, the longitudinal axis of the end section of the bar 93 is substantially perpendicular to the trajectory defined by the path.

[0061] As shown in [Fig.5], one end of the bar 93 is coupled to means coupling means 7 of the extraction system 1. The coupling means 7 is integral in translation with the drive device 3.

[0062] The coupling means 7 and the bar 93 are configured so that, when they are coupled, the bar 93 is integral in rotation and in translation with the coupling means 7. In other words, the coupling between the coupling means 7 and the bar 93 does not allow any degree of freedom.

[0063] In the present example, the bar 93 comprises a tenon 95 at each of its ends, which tenon 95 is configured to be inserted at least partially into a housing 71 of the coupling means 7.

[0064] Each tenon 95 projects from a respective end of the bar 93 and extends parallel to the longitudinal axis of this bar 93. The tenon 95 extends over a length allowing it to protrude from the basket when the bar 93 is housed in the slot 94. In this way, the tenon 93 is accessible from the outside of the basket 9, and can in particular be inserted sufficiently into the housing 71 of the coupling means 7.

[0065] In particular, the tenon 95 has a non-circular section, for example rectangular as illustrated in [Fig. 5], and the housing 71 has a section of complementary shape to receive the tenon 95. In particular, the housing 71 is here in the form of a notch. This non-circular shape makes it possible in particular to secure the bar 94 to the coupling means 7 both in translation and in rotation.

[0066] The section of the housing 71 may vary in order to adapt to different ends of the bar 93. For example, the coupling means 7 may be interchangeable and chosen so that its housing 71 corresponds to the type of end of the bar 93 to be extracted.

[0067] Each tenon 95 has a first end connected to the bar 93 and a second end which is free and opposite the first end. The section of the tenon 95 at the second end has smaller dimensions than that at the first end. This makes it easier to guide during coupling between the bar 93 and the coupling means 7. The housing 71 can alternatively or additionally be widened on the side of its opening.

[0068] Figures 6a, 6b and 7a, 7b respectively show the drive device taken in isolation according to a first embodiment and according to a second embodiment.

[0069] With reference to the first embodiment illustrated in Figures 6a and 6b, the drive means 8 comprise a motor element 81 and a follower element 84.

[0070] The motor element 81 is configured to rotate about a first axis of rotation Xi which is fixed relative to the support 4. The axis of rotation Xi of the motor element 81 is preferably perpendicular to the plane Pi.

[0071] The motor element 81 is mechanically connected to an electric motor 83 configured to drive the motor element 81 in rotation around the axis of rotation Xb. The electric motor 83 is also fixed relative to the support 4.

[0072] In the example shown, the driving element 81 is a wheel of generally circular section with a peripheral surface 82 configured to cooperate with the follower element 84. The driving element 81 here comprises a toothed peripheral surface 82.

[0073] Due to the circular section of the driving element 81, the distance between its peripheral surface 82 and its axis of rotation Xi is substantially constant. The driving element 81 can of course be a sector of the wheel described above. In this case, only the circular portion of the peripheral surface of this sector is configured to cooperate with the follower element.

[0074] The follower element 84 is configured to drive, using the motor element 81, the pin 6 in rotation and translation along the guide path 5.

[0075] The follower element 84 then carries the pin 6. In other words, the pin 6 is integral in rotation and in translation with the follower element 84.

[0076] The follower element 84 is configured to rotate around an axis of rotation X2 ([Fig.6b]) which is perpendicular to the plane Pi in which the guide path 5 extends, and here parallel to the axis of rotation Xb

[0077] The follower element 84 comprises two opposite external faces connected to each other by a peripheral surface 85. The pin 6 projects from one of the external faces and extends perpendicular to the plane defined by this face. The pin 6 is here centered on the axis of rotation X2 of the follower element 84. Preferably, the axes of rotation X, Xi and X2 are parallel.

[0078] The peripheral surface 85 of the follower element 84 is configured to cooperate with the peripheral surface 82 of the motor element 81. In the present embodiment, the peripheral surface 85 of the follower element 84 is toothed and the toothing is chosen so as to be able to mesh with that of the motor element 81. The toothing is here straight but can also be helical or herringbone.

[0079] In the example shown, the driving element 81 and the follower element 84 thus form a gear with parallel axes. The driving element and the follower element can also form a gear with concurrent axes. In this case, the driving element and the follower element have a conical shape, and the driving element rotates about an axis of rotation parallel to the plane in which the guide path extends.

[0080] The driving element 81 is located on the side of one end of the guide path 5, and preferably on the side of the lowest end when the device is in the operating position, as shown in Figures 6a and 6b. This allows the follower element 84 to remain in contact with the driving element 81 under the effect of gravity. Other means, for example a return spring or any other elastic return system, may be envisaged to ensure that the follower element 84 is kept at contact of the motor element 81.

[0081] The follower element 84 is here configured so that, when the motor element 81 rotates around the axis of rotation Xb, the distance between the axis of rotation Xi of the motor element 81 and the axis of rotation X2 of the follower element 84 varies. In the present embodiment, the follower element 84 is a wheel of generally elliptical section.

[0082] In particular, the peripheral surface 85 of the follower element 84 is convex and has a variable distance between its axis of rotation X2 and its peripheral surface 85. The follower element 84 can of course be a sector of the wheel described above. In this case, only the portion in which the peripheral surface is convex and the distance between the axis of rotation and the peripheral surface varies is configured to cooperate with the follower element.

[0083] When the driving element 81 rotates the follower element 84, the distance between the axis of rotation X2 of the follower element 84 and the point of contact of the respective peripheral surfaces of the driving element 81 and the follower element 84 varies.

[0084] The distance between the axis of rotation Xi which is fixed relative to the support 4, and X2 also varies and causes the pin 6 to move along the guide path 5. In particular, the pin 6 is driven simultaneously in translation along the guide path 5 and in rotation around the axis X2, when the motor element 81 rotates around the axis Xb.

[0085] The drive device 3 of the present embodiment is thus simple in design since it comprises only two elements for driving the pin according to a simultaneous translational and rotational movement. Only one of these elements, namely the motor element 81, is driven in rotation by an electric motor 83. As a result, the drive device 3 is relatively reliable and the manufacturing costs are relatively low.

[0086] In the second embodiment illustrated in Figures 7a and 7b, only the drive means 108 differ from the drive device 3 visible in Figures 6a and 6b.

[0087] In this embodiment, the drive means 108 comprise a first motor element 81, a motor assembly 181, a belt 182 and a follower element 184. The first motor element 81 is configured to rotate around a first axis of rotation Xi which is fixed relative to the support 4.

[0088] The motor element 81 is similar to that of the first embodiment.

[0089] The follower element 184 is configured to rotate around a second axis of rotation X2 which is fixed relative to the support 4 and distinct from the first axis of rotation Xb. Preferably, the first axis of rotation Xi and the second axis of rotation X2 are parallel.

[0090] The follower element 184 is here a wheel of generally circular section with a peripheral surface 185 configured to cooperate with the belt 182. The follower element 184 here comprises a toothed peripheral surface 82.

[0091] The follower element 184 is here located at a first end of the guide path 5 while the motor element 81 is located at a second end opposite the first end. The belt 182 is installed around the motor element 81 and the follower element 184 and extends parallel to the plane Pi between the ends of the guide path 5.

[0092] The motor assembly 181 comprises a conveyor element 183 ([Fig.7b]) and a second electric motor 186. The motor assembly 181 is integral with the belt 182 and mechanically connected to this belt 182 via the conveyor element 183. This conveyor element 183 is fixed to the belt 182, for example by screwing or by any other fixing means. In the case where the guide path 5 is not rectilinear, as in the example illustrated, the belt 182 deforms due to the trajectory of the conveyor element 183 imposed by the pin 6.

[0093] The second electric motor 186 is configured to drive the pin 6 in rotation and comprises a transmission shaft 187 which is mechanically connected to the pin 6. It is mounted free in translation in the drive device 103.

[0094] The transmission shaft 187 is supported by the conveyor element 183 so that the movement of the conveyor element 183 leads to the movement of the motor assembly 181 and the pin 6. The transmission shaft 187 is mounted to be able to rotate relative to the conveyor element 183. The conveyor element 183 therefore makes it possible to both support the transmission shaft 187 while allowing it to rotate.

[0095] Thus, the first electric motor 83 makes it possible to move the motor assembly 181 and the pin 6 in translation along the guide path 5 by rotating the motor element 81 which in turn drives the belt 182 and the conveyor element 183.

[0096] The second electric motor 186 makes it possible to drive the pin 6 in rotation. This makes it possible in particular to move the pin 6 according to a simultaneous translational movement along the guide path 5 and rotation around an axis perpendicular to the plane Pi in which the guide path extends. To improve the guidance of the second electric motor 186 during the upward and / or downward movements, the system may comprise slides along which the second electric motor is guided.

[0097] The drive device 3 may comprise a control unit electrically connected to the first electric motor 83 and to the second electric motor 186 and configured to simultaneously actuate, over at least part of the movement for the extraction of the bar 93, the first electric motor 83 and the second electric motor 186.

[0098] Compared to the drive device of the first embodiment, this device drive device 103 further allows the rotational and translational movements to be separated, in particular when only one of the first electric motor 83 and the second electric motor 186 is in operation. The drive device 103 can be used to extract bars 93 which do not require simultaneous translational and rotational movements.

[0099] [Fig.8] represents a method 200 of extracting the bar 93 using an extraction system 1 according to the first embodiment shown in Figures 6a and 6b or according to the second embodiment shown in Figures 7a and 7b.

[0100] The extraction method 200 comprises a step 201 of coupling the coupling means 7 of the extraction system 1 with one end of the bar 93. The coupling is carried out for example by bringing the drive devices 3, 103 closer to each other until the tenon at the ends of the removable bar is inserted into the housing of the coupling means.

[0101] The coupling is carried out in a removable manner and it is thus possible to uncouple the removable bar and the coupling means, in particular by moving the drive devices 3 apart from each other.

[0102] The extraction method 200 then comprises a step 202 of moving the pin along the guide path in the plane Pi by the drive means and a step 203 of driving the coupling means in rotation about an axis of rotation X perpendicular to the plane Pi by the drive means. The driving step 203 is implemented simultaneously with the moving step 202 over at least part of the movement in order to extract the removable bar.

[0103] Thanks to the removable bar extraction system, the processing of semiconductor material wafers can be facilitated and accelerated. In particular, the extraction of the bar can be fully automated. The same is of course true for insertion, which also makes it possible to improve the positioning of the bar and therefore secure the holding of the wafers.

[0104] In particular, the extraction system makes it possible to automate a complex movement, while being relatively simple, reliable and economical. In addition, it is possible to carry out a reversible movement, namely the insertion and extraction of the bar, with a single system.

[0105] Of course, various modifications can be made by those skilled in the art to the invention which has just been described without departing from the scope of the disclosure of the invention.

[0106] In particular, the extraction system may comprise only one drive device. The drive device may comprise a tongue and the frame may comprise the groove.

[0107] The shape of the guide path may vary. Alternatively, the guide path may have a rectilinear shape, or a shape with rectilinear and curved portions. vilines.

[0108] Alternatively, the coupling means may comprise the tenon and the bar may comprise a housing intended to receive the tenon.

[0109] Alternatively, the coupling means can be offset relative to the pin by means of a connecting piece.

[0110] In a variant of the first embodiment, the peripheral surface of the driving element is convex and the distance between its axis of rotation and its peripheral surface is variable, while the follower element has a constant distance between its axis of rotation and its peripheral surface. In particular, the driving element may have a wheel shape of generally elliptical section while the follower element may have a wheel shape of generally circular section.

[0111] The generally elliptical section of the wheel may vary. Alternatively, the wheel may in particular have an oval, oblong section or any other shape having a portion in which the peripheral surface is convex and the distance between the axis of rotation and the peripheral surface is variable. NOMENCLATURE IN REFERENCE TO THE FIGURES

[0112] 1: extraction and / or insertion system

[0113] 2: built

[0114] 3: training device

[0115] 4: support

[0116] 5: guide path

[0117] 6: pawn

[0118] 7: coupling means

[0119] 8, 108: training means

[0120] 9: basket

[0121] 71: housing

[0122] 81: driving element

[0123] 82: peripheral surface of the driving element

[0124] 83: electric motor

[0125] 84, 184: follower element

[0126] 85, 185: peripheral surface of the follower element

[0127] 91: side panel

[0128] 92: fixed bar

[0129] 93: removable bar

[0130] 94: slot

[0131] 95: tenon

[0132] 181: engine assembly

[0133] 182: belt

[0134] 183 conveyor element

[0135] 186 second electric motor

[0136] 187 transmission shaft

[0137] 200 insertion and / or extraction method

[0138] 201 coupling of the coupling means and the bar

[0139] 202 movement of the pin along the guide path

[0140] 203 driving the coupling means in rotation

[0141] 931 first rounded surface

[0142] 932 second rounded surface

[0143] 941 opening portion

[0144] 942 thinned portion

[0145] 943 bottom portion

[0146] 945 first slot housing

[0147] 946 second slot housing

[0148] Pi: plane of the guide path

[0149] X: axis of rotation of the coupling means

[0150] X!: axis of rotation of the driving element

[0151] X2: axis of rotation of the follower element

Claims

Claims

1. System for inserting a bar (93) into a slot (94) of a basket (9), such as a basket (9) for housing wafers of a semiconductor material comprising the bar (93) for holding the wafers in the basket (9), and / or for extracting this bar (93) when it is housed in the slot (94), this slot (94) imposing, for the insertion and / or extraction of the bar (93), a displacement of the bar (93) and a simultaneous movement of this bar (93), over at least part of the displacement, in rotation around an axis of rotation parallel to the bar (93), and preferably corresponding to the longitudinal central axis of this bar (93), and in translation along a path inscribed in a plane perpendicular to the axis of rotation, the system comprising a drive device (3) for one end of the bar (93),the device comprising: - a support (4) defining a guide path (5) in a plane (Pi) and a pin (6) guided in the plane (Pi) along the guide path (5), - a coupling means (7) intended to couple to one end of the bar (93), the coupling means (7) being integral in translation with the pin (6) and capable of performing a rotation around an axis of rotation perpendicular to the plane (PJ, and - drive means (8) configured to move the pin (6) along the guide path (5) and simultaneously drive, over at least part of the movement for the insertion and / or extraction of the bar (93), the coupling means (7) in rotation.,

2. Insertion and / or extraction system according to claim 1, characterized in that the coupling means (7) is integral in rotation with the pin (6).

3. Insertion and / or extraction system according to claim 2, characterized in that the drive means (8) comprise: a motor element (81) configured to rotate about an axis of rotation (XJ fixed relative to the support (4), a follower element (84) carrying the pin (6) and having a peripheral surface (85) of which at least one portion is configured to cooperate with at least one portion of a peripheral surface (82) of the motor element (81) so that when the motor element (81) rotates, the follower element (84) is rotated about another axis of rotation (X2) by cooperation of the at least one portion of its peripheral surface peripheral (85) with the at least a portion of the peripheral surface (82) of the driving element (81), the follower element (84) or the driving element (81) being configured so that, when the driving element (81) rotates, the distance between the axis of rotation (XJ of the driving element (81) and the axis of rotation (X2) of the follower element (84) varies.

4. Insertion and / or extraction system according to claim 3, characterized in that the driving element (81) has a constant distance between its axis of rotation (XJ) and at least one portion of its peripheral surface (82), the follower element (84) having a variable distance between its axis of rotation (X2) and at least one portion of its peripheral surface (85), the at least one portion of the peripheral surface (85) of the follower element (84) being convex.

5. Insertion and / or extraction system according to one of claims 3 or 4, characterized in that the follower element (84) has a generally elliptical shape, the pin (6) being arranged in its center.

6. Insertion and / or extraction system according to any one of claims 3 to 5, characterized in that the motor element (81) has a generally circular cross-section.

7. Insertion and / or extraction system according to any one of claims 3 to 6, characterized in that the motor element (81) is driven in rotation by an electric motor (83).

8. Insertion and / or extraction system according to claim 2, characterized in that the drive assembly (3) comprises: a first motor element (81) driving a follower element (184) in rotation by means of a belt (182), the first motor element (81) and the follower element (184) being respectively configured to rotate around an axis of rotation (Xb X 2) fixed relative to the support (4), and a motor assembly (181) secured to the belt (182) and configured to drive the pin (6) in rotation.

9. Insertion and / or extraction system according to claim 8, characterized in that the first motor element (81) is driven in rotation by a first electric motor (83), the motor assembly (181) comprising a second electric motor (186) configured to drive the pin (6) in rotation.

10. Insertion and / or extraction system according to one of claims 8 or 9, characterized in that the motor assembly (181) comprises: - a conveyor element (183) fixed on the belt (182) and an electric motor (186) configured to drive the pin (6) in rotation by means of a transmission shaft (187) of the electric motor (186), the pin (6) being mechanically connected to the transmission shaft (187), the transmission shaft (187) being supported by the conveyor element (183) and mounted to move in rotation relative to this conveyor element.

11. Insertion and / or extraction system according to any one of claims 1 to 10, characterized in that the guide path (5) has a generally curvilinear shape.

12. Insertion and / or extraction system according to any one of claims 1 to 11, characterized in that the coupling means (7) comprises a housing (71) of non-circular shape, intended to receive a tenon (95) of the bar (93) of shape complementary to the housing (71).

13. Insertion and / or extraction system according to any one of claims 1 to 12, characterized in that it comprises a frame (2) on which are mounted so as to be movable in translation two drive devices (3) for one end of the bar (93) so that the coupling means (7) of the drive devices (3) are opposite each other, and intended to cooperate respectively with the two opposite ends of the bar (93), the drive devices (3) being able to move towards or away from each other in a direction parallel to the axis of rotation (X) of the coupling means (7).

14. Method for inserting and / or extracting a bar (93) using an insertion and / or extraction system according to any one of the preceding claims, the method comprising: - coupling (201) the coupling means (7) with one end of the bar (93), moving (202) the pin (6) along the guide path (5) by the drive means (8), and - driving (203) the coupling means (7) in rotation by the drive means (8), the driving (203) of the coupling means (7) in rotation being implemented simultaneously with the movement (202) of the pin (6), over at least part of the movement for the insertion and / or extraction of the bar (93).

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