Process kit ring for substrate processing chamber

JP1831225SActive Publication Date: 2026-07-09APPLIED MATERIALS INC
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Patent Information

Application Number
JP2026005515D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2025-09-25
Filing Date
2026-03-25
Publication Date
2026-07-09
Estimated Expiration
2051-03-25

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Abstract

This article relates to a process kit ring for a substrate processing chamber used to process semiconductor substrates and the like.
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