Treatment device and treatment method

Abstract

To provide a treatment device capable of reducing a heat quantity and a water supply amount.SOLUTION: A treatment apparatus 100 for treating an object to be treated X includes a treatment tank 1, heating means 3, cooling means 3, a hot water recovery tank 5, a high temperature water recovery tank 6, and a low temperature water recovery tank 7. The treatment tank 1 stores the object to be treated X, the heating means 3 heats treatment water in the treatment tank 1, the cooling means 3 cools the treatment water in the treatment tank 1, the hot water recovery tank 5 recovers the treatment water after being heated by the heating means 3 from the treatment tank 1 as hot water and supplies the hot water to the treatment tank 1, the high temperature water recovery tank 6 recovers high temperature water of a temperature lower than that of the hot water from the treatment tank 1 and supplies the high temperature water to the treatment tank 1 so as to pre-heat the object to be treated X, and the low temperature water recovery tank 7 recovers low temperature water of a temperature lower than that of the high temperature water from the treatment tank 1 and supplies the low temperature water to the treatment tank 1 so as to roughly remove the heat of the object to be treated X.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a processing apparatus used for heating or cooling a workpiece. [Background technology]

[0002] Conventionally, there is a treatment apparatus that treats the object by storing the object in a treatment tank, circulating the treatment water, and indirectly heating or cooling the treatment water with steam, cold water, etc. For example, Patent Document 1 discloses a treatment apparatus that can indirectly heat-treat the object by heating the treatment water by supplying steam to a heat exchanger by a heating means, and indirectly cool-treat the object by cooling the treatment water by supplying cooling water to the heat exchanger by a cooling means. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 4229420 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in such treatment devices, the heated and cooled treated water supplied to the treatment tank is then discharged, resulting in a waste of the heat and water supplied by the heating means.

[0005] The present invention has been made in view of the above circumstances, and provides a treatment device capable of reducing the amount of heat and water supply. [Means for solving the problem]

[0006] According to the present invention, the following inventions are provided. [1] A treatment device for treating a material to be treated, comprising a treatment tank, a heating means, a cooling means, a hot water recovery tank, a high-temperature water recovery tank, and a low-temperature water recovery tank, wherein the treatment tank is configured to accommodate the material to be treated, the heating means is configured to heat the treatment water in the treatment tank, the cooling means is configured to cool the treatment water in the treatment tank, the hot water recovery tank is configured to recover the treatment water after heating by the heating means from the treatment tank as hot water and supply the hot water to the treatment tank, the high-temperature water recovery tank is configured to recover high-temperature water that is lower in temperature than the hot water from the treatment tank and supply the high-temperature water to the treatment tank to preheat the material to be treated, and the low-temperature water recovery tank is configured to recover low-temperature water that is lower in temperature than the high-temperature water from the treatment tank and supply the low-temperature water to the treatment tank to remove rough heat from the material to be treated. [2] A treatment device as described in [1], further comprising a cold water recovery tank, the cold water recovery tank being configured to recover the treated water after cooling by the cooling means from the treatment tank as cold water and to supply the cold water to the treatment tank. [3] The treatment apparatus according to [2] further comprises a control means, and the control means is configured to sequentially execute a preheating process, a low-temperature water recovery process, a hot water supplying process, a heating process, a hot water recovery process, a rough heat removal process, a high-temperature water recovery process, a cold water supplying process, a cooling process, and a cold water recovery process, in which in the preheating process, the high-temperature water stored in the high-temperature water recovery tank is supplied to the treatment tank to perform the preheating, in the low-temperature water recovery process, the treated water in the treatment tank after the preheating is recovered in the low-temperature water recovery tank as the low-temperature water, in the hot water supplying process, the hot water stored in the hot water recovery tank is supplied to the treatment tank, and in the heating process, the treated water in the treatment tank is heated by the heating means. a hot water recovery process in which the treated water in the treatment tank heated by the heating means is recovered as the hot water in the hot water recovery tank; a rough heat removal process in which the low-temperature water stored in the low-temperature water recovery tank is supplied to the treatment tank to remove the rough heat; a high-temperature water recovery process in which the treated water in the treatment tank after the rough heat removal is recovered as the high-temperature water in the high-temperature water recovery tank; a cold water supply process in which the cold water stored in the cold water recovery tank is supplied to the treatment tank; a cooling process in which the treated water in the treatment tank is cooled by the cooling means; and a cold water recovery process in which the treated water in the treatment tank cooled by the cooling means is recovered as the cold water in the cold water recovery tank. [4] A treatment device according to any one of [1] to [3], further comprising a circulation means, the circulation means comprising a circulation pump and a circulation line, and configured to circulate the treated water in the treatment tank by the circulation pump. [5] A treatment device as described in [4], further comprising a heat exchanger in the circulation line, wherein the heating means is configured to supply steam to the heat exchanger and heat the treatment water via the heat exchanger, and the cooling means is configured to supply cooling water to the heat exchanger and cool the treatment water via the heat exchanger. [6] A method for treating a material contained in a treatment tank, the method comprising sequentially carrying out a preheating step, a low-temperature water recovery step, a hot water supply step, a heating step, a hot water recovery step, a rough heat removal step, a high-temperature water recovery step, and a cooling step, in which in the preheating step, high-temperature water stored in a high-temperature water recovery tank is supplied to the treatment tank to preheat the material, in the low-temperature water recovery step, the treated water in the treatment tank after the preheating is recovered in a low-temperature water recovery tank as low-temperature water having a lower temperature than the high-temperature water, and in the hot water supply step, hot water having a higher temperature than the high-temperature water stored in the hot water recovery tank is recovered in the low-temperature water recovery tank. to the treatment tank, in the heating process, the treated water in the treatment tank is heated by a heating means, in the hot water recovery process, the treated water in the treatment tank heated by the heating means is recovered as the hot water in the hot water recovery tank, in the rough heat removal process, the low temperature water stored in the low temperature water recovery tank is supplied to the treatment tank to remove rough heat from the object to be treated, in the high temperature water recovery process, the treated water in the treatment tank after the rough heat removal is recovered as the high temperature water in the high temperature water recovery tank, and in the cooling process, the treated water in the treatment tank is cooled by a cooling means.

[0007] According to the present invention, the hot water recovery tank, the high temperature water recovery tank, and the low temperature water recovery tank recover hot water, high temperature water, and low temperature water, respectively, and it is possible to preheat the object to be treated with the high temperature water and to remove the rough heat from the object to be treated with the low temperature water. This makes it possible to reuse the hot water, high temperature water, and low temperature water that have been discharged so far, and to reduce the amount of heat and the amount of water to be supplied. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic diagram showing a sterilization apparatus 100 according to one embodiment of the present invention. [Diagram 2] 2 is a flowchart showing the operation of the sterilization apparatus 100 of FIG. 1. [Diagram 3] FIG. 2 is an explanatory diagram showing a standby state of the sterilization device 100 in FIG. [Figure 4] 2 is an explanatory diagram showing a flow path of treated water in the high-temperature water supplying step S1a of the sterilization apparatus 100 of FIG. [Diagram 5]1. FIG. 3 is an explanatory diagram showing a flow path of treated water in a high-temperature water circulation step S1b of the sterilization apparatus 100 of FIG. [Figure 6] 1. FIG. 3 is an explanatory diagram showing a flow path of treated water in a low-temperature water recovery step S2 of the sterilization apparatus 100 of FIG. [Figure 7] 1. FIG. 3 is an explanatory diagram showing a flow path of treated water in a hot water supplying step S3 of the sterilization apparatus 100 of FIG. [Figure 8] 1. FIG. 4 is an explanatory diagram showing a flow path of treated water in a heating step S4 of the sterilization apparatus 100 of FIG. [Figure 9] 1. FIG. 3 is an explanatory diagram showing a flow path of treated water in a hot water recovery step S5 of the sterilization apparatus 100 of FIG. [Figure 10] 1. FIG. 3 is an explanatory diagram showing a flow path of treated water in a low-temperature water supplying step S6a of the sterilization apparatus 100 of FIG. [Figure 11] 1. FIG. 4 is an explanatory diagram showing a flow path of treated water in a low-temperature water circulation step S6b of the sterilization apparatus 100 of FIG. [Figure 12] 1. FIG. 4 is an explanatory diagram showing a water flow path in a high-temperature water recovery step S7 of the sterilization apparatus 100 of FIG. [Figure 13] 1. FIG. 3 is an explanatory diagram showing a flow path of treated water in a cold water supplying step S8 of the sterilization apparatus 100 of FIG. [Figure 14] 1. FIG. 4 is an explanatory diagram showing a flow path of treated water in a cooling step S9 of the sterilization apparatus 100 of FIG. [Figure 15] 1. FIG. 3 is an explanatory diagram showing a flow path of treated water in a cold water recovery step S10 of the sterilization apparatus 100 of FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, embodiments of the present invention will be described. Various features shown in the following embodiments can be combined with each other. Also, each feature can be an invention independently.

[0010] 1. Configuration of the sterilization device 100 Fig. 1 is a schematic diagram showing a sterilization apparatus 100 as a processing apparatus according to one embodiment of the present invention. The sterilization apparatus 100 of this embodiment is an apparatus for heat-sterilizing and then cooling an object to be processed X. There is no particular limit to the type of object to be processed X, but it is preferably used for food, particularly retort food.

[0011] 1, the sterilization apparatus 100 of this embodiment includes a treatment tank 1, a circulation means 2, a heat exchanger 3 as a heating means and a cooling means, a hot water recovery tank 5, a high temperature water recovery tank 6, a low temperature water recovery tank 7, a cold water recovery tank 8, and a control means 9. In addition, as pipelines connecting these components, the sterilization apparatus 100 includes a circulation line L1, a hot water recovery line L2, a hot water supply line L3, a high temperature water recovery line L4, a high temperature water supply line L5, a low temperature water recovery line L6, a low temperature water supply line L7, a cold water recovery line L8, and a cold water supply line L9. Each component will be specifically described below.

[0012] The treatment tank 1 is a hollow vessel (pressure vessel) that contains the object X to be treated. The shape of the treatment tank 1 is not particularly limited, but in the illustrated example, the treatment tank 1 is provided with a horizontally arranged cylindrical material, one opening of which is closed and the other opening of which can be opened and closed by a door. Therefore, by opening the door, the object X to be treated can be put in and taken out of the treatment tank 1, and by closing the door, the opening of the treatment tank 1 can be airtightly closed. In this embodiment, the object X to be treated is placed on a tray 10 that is accommodated in multiple stages on a dolly in the treatment tank 1, and is subjected to heat sterilization treatment and subsequent cooling treatment above the bottom surface of the treatment tank 1.

[0013] The treatment tank 1 is provided with a temperature sensor (not shown) for detecting the temperature inside the treatment tank 1, and a water level detector (not shown) for detecting the water level inside the treatment tank 1. There is no particular restriction on the configuration of the water level detector, but it is, for example, an electrode-type water level detector.

[0014] In addition, drainage means 11, pressurization means 12, and exhaust means 13 are connected to the treatment tank 1. The drainage means 11 discharges water from within the treatment tank 1 via a drainage channel 11a. The drainage channel 11a is connected to the bottom of the treatment tank 1, and is provided with a drainage valve 11b and a check valve 11c. By opening the drainage valve 11b, the water within the treatment tank 1 can be discharged to the outside.

[0015] The pressurizing means 12 supplies pressurized air (compressed air) through the pressurizing passage 12a into the treatment tank 1. By opening the pressurizing valve 12b provided in the pressurizing passage 12a, the pressurized air from the pressurized air source can be supplied into the treatment tank 1, thereby pressurizing the inside of the treatment tank 1 to a pressure exceeding atmospheric pressure.

[0016] Exhaust means 13 exhausts gas from inside treatment tank 1 under pressure exceeding atmospheric pressure via exhaust path 13a. Exhaust path 13a is connected to the top of treatment tank 1, and is provided with exhaust valve 13b and check valve 13c, in this order from the treatment tank 1 side. When exhaust valve 13b is opened while the pressure inside treatment tank 1 is exceeding atmospheric pressure, gas inside treatment tank 1 is exhausted to the outside via exhaust path 13a, and the pressure inside treatment tank 1 can be reduced.

[0017] The circulation means 2 includes a circulation line L1 and a circulation pump P1, and is configured to circulate the treated water in the treatment tank 1 by the circulation pump P1. Here, one end of the circulation line L1 is connected to the bottom of the treatment tank 1, and the other end is connected to a spray nozzle 20 in the treatment tank 1 via the circulation pump P1 and the heat exchanger 3 in sequence. The spray nozzle 20 sprays the treated water from the circulation line L1 toward the object X to be treated. In the illustrated example, the spray nozzle 20 sprays the treated water from the side and above the object X to be treated. However, it is also possible to configure the spray nozzle 20 to be provided only on the side of the object X to be treated, or only above the object X to be treated (shower type). In addition, the shape and number of the spray nozzle 20 are arbitrary, but it is preferable to configure it so that the treated water is sprayed evenly over the object X to be treated contained in the treatment tank 1. In addition, a circulation valve V1 is also provided in the circulation line L1 between the circulation pump P1 and the heat exchanger 3.

[0018] The heat exchanger 3 is provided in the circulation line L1 and is connected to the treatment tank 1 by the circulation line L1. The heat exchanger 3 is configured to heat and cool water (hereinafter referred to as treated water) circulating between the heat exchanger 3 and the treatment tank 1 via the circulation line L1. Specifically, the heat exchanger 3 of this embodiment is connected to a steam supply means 30 and a cooling water supply means 40, and the heat exchanger 3 heats the treated water with steam supplied from the steam supply means 30 and cools the treated water with cooling water supplied from the cooling water supply means 40. In the following description, the side through which the steam supplied from the steam supply means 30 and the cooling water supplied from the cooling water supply means 40 flow is called the primary side of the heat exchanger 3, and the side connected to the circulation line L1 through which the treated water flows is called the secondary side of the heat exchanger 3.

[0019] The steam supply means 30 supplies steam to the primary side of the heat exchanger 3 to heat the treatment water circulating through the circulation line L1. The steam supply means 30 includes a steam supply path 31 that supplies steam from the boiler to the heat exchanger 3, and this steam supply path 31 is provided with a steam supply valve 32. By adjusting the opening of the steam supply valve 32, the temperature of the treatment water circulating through the circulation line L1, and therefore the temperature inside the treatment tank 1, can be adjusted as desired. Specifically, the opening of the steam supply valve 32 is adjusted based on the temperature detected by a temperature sensor (not shown) in the treatment tank 1.

[0020] The steam supply means 30 also includes a drain discharge passage 33 downstream of the heat exchanger 3, and is configured to discharge condensed water of the steam supplied to the heat exchanger 3 to the outside via the drain discharge passage 33. The drain discharge passage 33 is provided with a drain discharge valve 34, a steam trap 35, and a check valve 36, in that order, and when steam is supplied to the heat exchanger 3, the drain discharge valve 34 can be opened to allow the condensed water of the steam to drop downward and be discharged to the outside.

[0021] The cooling water supplying means 40 supplies cooling water to the primary side of the heat exchanger 3 to cool the treatment water circulating through the circulation line L1. Specifically, the cooling water supplying means 40 of this embodiment includes a cooling tower 41, a cooling water pump 42, a cooling water feed path 43, and a cooling water return path 44. The water cooled in the cooling tower 41 is supplied as cooling water to the heat exchanger 3 by the cooling water pump 42 through the cooling water feed path 43, and the water after passing through the heat exchanger 3 is returned to the cooling tower 41 through the cooling water return path 44. By indirectly cooling the treatment water circulating through the circulation line L1 with the cooling water, the temperature in the treatment tank 1 can be lowered and the object to be treated X can be cooled.

[0022] A cooling water feed valve 45 is provided in the cooling water feed passage 43, while a cooling water return valve 46 is provided in the cooling water return passage 44. When the cooling water feed pump 42 is driven with the cooling water feed valve 45 and the cooling water return valve 46 open, the cooling water can be circulated between the cooling tower 41 and the primary side of the heat exchanger 3. On the other hand, when the cooling water feed valve 45 and the cooling water return valve 46 are closed, the flow of cold water to the heat exchanger 3 can be stopped.

[0023] In this embodiment, the cooling water feed passage 43 is connected to the steam supply passage 31 at a position between the steam supply valve 32 and the heat exchanger 3, and shares a part of the pipe with the steam supply passage 31 downstream of the cooling water feed valve 45. The cooling water return passage 44 is connected to the drain discharge passage 33 at a position between the heat exchanger 3 and the drain discharge valve 34, and shares a part of the pipe with the drain discharge passage 33 upstream of the cooling water return valve 46.

[0024] The steam supply means 30 and the cooling water supply means 40 may be included as components of the sterilization apparatus 100 in this embodiment, or may be external components of the sterilization apparatus 100 and connected to the sterilization apparatus 100 at the installation stage.

[0025] The hot water recovery tank 5 is configured to recover and store the treated water after heating by the heat exchanger 3 from the treatment tank 1 as hot water, and to supply the stored hot water to the treatment tank 1. Specifically, the hot water recovery tank 5 is a hollow container capable of storing treated water, and has a capacity capable of storing treated water used in the heating step S4 described below. The hot water recovery tank 5 is a pressure vessel in order to store the hot water used in the heating step S4 (for example, high-temperature, high-pressure hot water heated to 100°C or higher). However, if the treated water (hot water) used in the heating step S4 is 100°C or lower, it does not have to be a pressure vessel (sealed vessel). Although not shown, the hot water recovery tank 5 is preferably provided with an air supply means for supplying air into the tank and an exhaust means for releasing the pressure inside the tank.

[0026] A hot water recovery line L2 is connected to the hot water recovery tank 5 in order to recover hot water from the treatment tank 1, and a hot water supply line L3 is connected to the hot water recovery tank 5 in order to supply hot water to the treatment tank 1. A hot water recovery valve 50 is provided in the hot water recovery line L2, and a hot water supply valve 51 is provided in the hot water supply line L3. In this embodiment, the hot water recovery line L2 is connected to the circulation line L1 at a position between the circulation pump P1 and the circulation valve V1, and shares a part of the pipeline with the circulation line L1 upstream of the hot water recovery valve 50. By driving the circulation pump P1, the treated water (hot water) in the treatment tank 1 can be recovered to the hot water recovery tank 5. In addition, the hot water supply line L3 is a pipeline separate from the high-temperature water supply line L5, the low-temperature water supply line L7, and the cold water supply line L9 described later in order to circulate high-temperature and high-pressure hot water.

[0027] The high-temperature water recovery tank 6 is configured to recover and store high-temperature water, which is lower in temperature than the hot water, from the treatment tank 1, and to supply the stored high-temperature water to the treatment tank 1 to preheat the object to be treated X. Specifically, the high-temperature water recovery tank 6 is a hollow container capable of storing treated water, and has a capacity capable of storing treated water to be used in a preheating step S1 described below. The high-temperature water recovery tank 6 does not have to be an airtight container, but is preferably a container with high thermal insulation in order to store high-temperature water.

[0028] A high temperature water recovery line L4 is connected to the high temperature water recovery tank 6 in order to recover high temperature water from the treatment tank 1, and a high temperature water supply line L5 is connected to the high temperature water recovery tank 6 in order to supply high temperature water to the treatment tank 1. A high temperature water recovery valve 60 is provided in the high temperature water recovery line L4, and a high temperature water supply valve 61 is provided in the high temperature water supply line L5.

[0029] The low-temperature water recovery tank 7 is configured to recover and store low-temperature water, which is lower in temperature than the high-temperature water (but higher than room temperature), from the treatment tank 1, and to supply the stored low-temperature water to the treatment tank 1 to remove rough heat from the workpiece X. The low-temperature water recovery tank 7 is a hollow container capable of storing treated water, and has a capacity capable of storing the amount of treated water used in the rough heat removal step S6 described below. The low-temperature water recovery tank 7 does not have to be an airtight container, but since it stores low-temperature water that is higher in temperature than room temperature, it is preferable that it be a container with high insulation properties. Note that the amount of treated water used in the preheating step S1 and the rough heat removal step S6 is the same, and the high-temperature water recovery tank 6 and the low-temperature water recovery tank 7 can use containers of the same configuration.

[0030] A low-temperature water recovery line L6 is connected to the low-temperature water recovery tank 7 in order to recover low-temperature water from the treatment tank 1, and a low-temperature water supply line L7 is connected to the low-temperature water recovery tank 7 in order to supply low-temperature water to the treatment tank 1. A low-temperature water recovery valve 70 is provided in the low-temperature water recovery line L6, and a low-temperature water supply valve 71 is provided in the low-temperature water supply line L7.

[0031] The cold water recovery tank 8 is configured to recover and store the treated water after cooling by the heat exchanger 3 from the treatment tank 1 as cold water, and to supply the stored cold water to the treatment tank 1. Specifically, the cold water recovery tank 8 is a hollow container capable of storing treated water, and has a capacity capable of storing the amount of treated water used in the cooling step S9 described below. Note that the cold water stored in the cold water recovery tank 8 is at approximately room temperature when the cooling tower 41 is used as the cooling water supply means 40, and therefore does not need to be a sealed container, and does not need to be a container with high thermal insulation. In addition, the capacity that can be stored in the cold water recovery tank 8 does not need to be the same as the capacity that can be stored in the hot water recovery tank 5, the high temperature water recovery tank 6, and the low temperature water recovery tank 7.

[0032] A cold water recovery line L8 is connected to the cold water recovery tank 8 in order to recover cold water from the treatment tank 1, and a cold water supply line L9 is connected to the cold water recovery tank 8 in order to supply cold water to the treatment tank 1. A cold water recovery valve 80 is provided on the cold water recovery line L8, and a cold water supply valve 81 is provided on the cold water supply line L9. In addition, a new water supply line 82 is connected to the cold water recovery tank 8, making it possible to supply tap water to the cold water recovery tank 8. A new water supply valve 83 is provided on the new water supply line 82.

[0033] In this embodiment, the high-temperature water recovery line L4, the low-temperature water recovery line L6, and the cold water recovery line L8 are connected to the circulation line L1 at a position between the circulation pump P1 and the circulation valve V1, and share a part of the pipeline with the circulation line L1 upstream of the hot water recovery valve 50. Then, by driving the circulation pump P1, it is possible to recover the treated water in the treatment tank 1 to the high-temperature water recovery tank 6, the low-temperature water recovery tank 7, and the cold water recovery tank 8, respectively. In addition, the downstream side of the high-temperature water supply valve 61 of the high-temperature water supply line L5, the downstream side of the low-temperature water supply valve 71 of the low-temperature water supply line L7, and the downstream side of the cold water supply valve 81 of the cold water supply line L9 share a pipeline, forming a common water supply line L10, which is a common pipeline. Then, the common water supply line L10 is provided with a water supply pump P2 for supplying the high-temperature water, low-temperature water, and cold water stored in the high-temperature water recovery tank 6, the low-temperature water recovery tank 7, and the cold water recovery tank 8 to the treatment tank 1. In addition, a water supply valve V2 is also provided on the common water supply line L10 between the water supply pump P2 and the treatment tank 1.

[0034] Although not shown, it is preferable to provide each of the hot water recovery tank 5, the high temperature water recovery tank 6, the low temperature water recovery tank 7, and the cold water recovery tank 8 with a temperature sensor for detecting the temperature of the treated water.

[0035] The control means 9 controls the above-mentioned components based on detection signals from a temperature sensor and a water level detector (not shown), elapsed time, etc. Specifically, the control means 9 controls the drain valve 11b, the pressurizing valve 12b, the exhaust valve 13b, the hot water recovery valve 50, the hot water supply valve 51, the high temperature water recovery valve 60, the high temperature water supply valve 61, the low temperature water recovery valve 70, the low temperature water supply valve 71, the cold water recovery valve 80, the cold water supply valve 81, the new water supply valve 83, the circulation valve V1, the water supply valve V2, the circulation pump P1, and the water supply pump P2, etc. In addition, the control means 9 of this embodiment also controls the steam supply means 30 (steam supply valve 32, drain discharge valve 34) and the cooling water supply means 40 (cooling tower 41, cooling water supply pump 42, cooling water supply valve 45, and cooling water return valve 46). In addition, a temperature sensor, a water level detector, etc. are connected to the control means 9. As will be described later, the control means 9 performs thermal sterilization of the object to be treated X in the treatment tank 1 and subsequent cooling in accordance with a predetermined procedure (program).

[0036] Specifically, the control means 9 having the above configuration can be configured, for example, by an information processing device including a CPU, a memory (e.g., a flash memory), an input unit, and an output unit. The processing by each of the above-mentioned components of the control means 9 configured by the information processing device is performed by the CPU reading and executing a program stored in the memory. As the information processing device, for example, a personal computer, a PLC (Programmable Logic Controller), or a microcomputer is used. However, some functions of the control means 9 may be configured to be executed on a cloud connected by any communication means.

[0037] 2. Operation of the sterilization device 100 The control means 9 performs thermal sterilization of the object X in the treatment tank 1 and subsequent cooling by controlling various valves and pumps according to a predetermined procedure (program). Specifically, as shown in Fig. 2, the control means 9 sequentially executes a preheating step S1, a low-temperature water recovery step S2, a hot water supply step S3, a heating step S4, a hot water recovery step S5, a rough heat removal step S6, a high-temperature water recovery step S7, a cold water supply step S8, a cooling step S9, and a cold water recovery step S10 while the object X is accommodated in the treatment tank 1. Here, in this embodiment, the preheating step S1 includes a high-temperature water supply step S1a and a high-temperature water circulation step S1b, and the rough heat removal step S6 includes a low-temperature water supply step S6a and a low-temperature water circulation step S6b. Each step will be described in more detail below with reference to the explanatory diagrams of Figs. 4 to 15 showing the flow paths of the treatment water.

[0038] In the sterilization apparatus 100 of this embodiment, as shown in FIG. 3, during standby before starting operation, the hot water, high temperature water, and cold water recovered in the hot water recovery step S5, high temperature water recovery step S7, and cold water recovery step S10 of the previous lot are stored in the hot water recovery tank 5, high temperature water recovery tank 6, and cold water recovery tank 8, respectively. However, during the initial operation (initial lot), since there is no previous lot, high temperature water is not stored in the high temperature water recovery tank 6 (hot water heated by steam is separately stored in the hot water recovery tank 5, and tap water is supplied as cold water to the cold water recovery tank 8). Therefore, during the initial operation, the operation is started in a state where low temperature water is separately supplied to the low temperature water recovery tank 7, and the preheating step S1 and the low temperature water recovery step S2 are omitted, and only the subsequent steps are executed. Whether or not water is stored in each recovery tank in advance during the initial operation can be appropriately determined depending on whether water of a predetermined temperature can be easily prepared in each facility, regardless of the above example.

[0039] During standby before starting operation, the drain valve 11b, the pressurizing valve 12b, the exhaust valve 13b, the hot water recovery valve 50, the hot water supply valve 51, the high temperature water recovery valve 60, the high temperature water supply valve 61, the low temperature water recovery valve 70, the low temperature water supply valve 71, the cold water recovery valve 80, the cold water supply valve 81, the new water supply valve 83, the circulation valve V1, and the feed water valve V2 are all closed, and the circulation pump P1 and the feed water pump P2 are stopped. Also, the steam supply valve 32 and the drain discharge valve 34 of the steam supply means 30, and the cooling water feed valve 45 and the cooling water return valve 46 of the cooling water supply means 40 are all closed, and the cooling tower 41 and the cooling water feed pump 42 are also stopped.

[0040] <Preheating process S1> When the sterilization apparatus 100 starts operation, first, in a preheating step S1, the control means 9 sequentially executes a high-temperature water supply step S1a and a high-temperature water circulation step S1b to supply high-temperature water stored in the high-temperature water recovery tank 6 to the treatment tank 1 for preheating. Specifically, first, in the high-temperature water supply step S1a, the control means 9 opens the high-temperature water supply valve 61 and the water supply valve V2 and drives the water supply pump P2. As a result, as shown in FIG. 4, the high-temperature water stored in the high-temperature water recovery tank 6 is supplied to the treatment tank 1 as treatment water via the high-temperature water supply line L5 (common water supply line L10). Then, when all the high-temperature water in the high-temperature water recovery tank 6 is supplied to the treatment tank 1, the control means 9 closes the high-temperature water supply valve 61 and the water supply valve V2 and stops the water supply pump P2, thereby completing the high-temperature water supply step S1a.

[0041] Next, in the high-temperature water circulation step S1b, the control means 9 opens the circulation valve V1 and drives the circulation pump P1. As a result, as shown in Fig. 5, the treated water circulates through the circulation line L1 and is sprayed from the spray nozzle 20 toward the workpiece X, promoting heat exchange between the treated water and the workpiece X. Then, the control means 9 executes the high-temperature water circulation step S1b for a predetermined time to preheat the workpiece X, and then closes the circulation valve V1 and stops the circulation pump P1, thereby terminating the high-temperature water circulation step S1b (preheating step S1).

[0042] <Low temperature water recovery process S2> Next, in the low-temperature water recovery step S2, the control means 9 recovers the treated water in the treatment tank 1 as low-temperature water in the low-temperature water recovery tank 7. Specifically, in the low-temperature water recovery step S2, the control means 9 opens the low-temperature water recovery valve 70 and drives the circulation pump P1. As a result, the treated water is recovered in the low-temperature water recovery tank 7 via the low-temperature water recovery line L6, as shown in Fig. 6. Then, when the treated water in the treatment tank 1 has been recovered, the control means 9 closes the low-temperature water recovery valve 70 and stops the circulation pump P1, thereby completing the low-temperature water recovery step S2.

[0043] <Hot water supply process S3> Next, in the hot water supplying step S3, the control means 9 supplies the hot water stored in the hot water recovery tank 5 to the treatment tank 1. Specifically, in the hot water supplying step S3, the control means 9 opens the hot water supply valve 51. As a result, as shown in FIG. 7, the hot water stored in the hot water recovery tank 5 is supplied to the treatment tank 1 as treated water via the hot water supply line L3. Here, no pump is provided in the hot water supply line L3, but since the pressure of the hot water recovery tank 5 is higher than that of the treatment tank 1, hot water can be supplied due to the pressure difference. However, it is also possible to provide a pump in the hot water supply line L3. When all the hot water in the hot water recovery tank 5 is supplied to the treatment tank 1, the control means 9 closes the hot water supply valve 51 and ends the hot water supplying step S3.

[0044] <Heating process S4> Next, in the heating step S4, the control means 9 heats the treatment water in the treatment tank 1 by the heat exchanger 3. Specifically, in the heating step S4, the control means 9 opens the steam supply valve 32 and the drain discharge valve 34 of the steam supply means 30. As a result, as shown in FIG. 8, heated steam is supplied to the primary side of the heat exchanger 3. In addition, the control means 9 opens the circulation valve V1 and drives the circulation pump P1. As a result, the treatment water circulates through the circulation line L1 and flows through the secondary side of the heat exchanger 3, and is heated by heat exchange with the heated steam. Then, the heated treatment water is sprayed from the spray nozzle 20 toward the treatment object X, and heats and sterilizes the treatment object X. At this time, the control means 9 adjusts the opening of the steam supply valve 32 to maintain the detected temperature of the temperature sensor (not shown) of the treatment tank 1 at or above a predetermined sterilization temperature. Furthermore, the control means 9 controls the pressurizing valve 12b of the pressurizing means 12 and the exhaust valve 13b of the exhaust means 13 to maintain the inside of the treatment tank 1 at a set pressure exceeding atmospheric pressure. The heated steam that has supplied heat to the treatment water in the heat exchanger 3 becomes condensed water and is discharged to the outside through the drain discharge path 33. After performing the heating step S4 for a predetermined time, the control means 9 closes the circulation valve V1 and stops the circulation pump P1, and closes the steam supply valve 32 and the drain discharge valve 34, thereby terminating the heating step S4.

[0045] <Hot water recovery process S5> Next, in a hot water recovery step S5, the control means 9 recovers the treated water in the treatment tank 1, which has been heated by the heat exchanger 3, as hot water in the hot water recovery tank 5. Specifically, in the hot water recovery step S5, the control means 9 opens the hot water recovery valve 50 and drives the circulation pump P1. As a result, the treated water is recovered in the hot water recovery tank 5 via the hot water recovery line L2, as shown in Fig. 9. Then, when the treated water in the treatment tank 1 has been recovered, the control means 9 closes the hot water recovery valve 50 and stops the circulation pump P1, thereby completing the hot water recovery step S5.

[0046] <Rough cooling process S6> Next, in the rough heat removal step S6, the control means 9 sequentially executes a low-temperature water supply step S6a and a low-temperature water circulation step S6b to supply the low-temperature water stored in the low-temperature water recovery tank 7 to the treatment tank 1 to remove rough heat. Specifically, first, in the low-temperature water supply step S6a, the control means 9 opens the low-temperature water supply valve 71 and the water supply valve V2 and drives the water supply pump P2. As a result, as shown in FIG. 10, the low-temperature water stored in the low-temperature water recovery tank 7 is supplied to the treatment tank 1 as treatment water via the low-temperature water supply line L7 (common water supply line L10). Then, when all the low-temperature water in the low-temperature water recovery tank 7 is supplied to the treatment tank 1, the control means 9 closes the low-temperature water supply valve 71 and the water supply valve V2 and stops the water supply pump P2, thereby completing the low-temperature water supply step S6a.

[0047] Next, in the low-temperature water circulation step S6b, the control means 9 opens the circulation valve V1 and drives the circulation pump P1. As a result, as shown in Fig. 11, the treated water circulates through the circulation line L1 and is sprayed from the spray nozzle 20 toward the workpiece X, promoting heat exchange between the treated water and the workpiece X. Then, after the control means 9 executes the low-temperature water circulation step S6b for a predetermined time to remove the rough heat from the workpiece X, it closes the circulation valve V1 and stops the circulation pump P1, thereby terminating the low-temperature water circulation step S6b (rough heat removal step S6).

[0048] <High-temperature water recovery process S7> Next, in a high-temperature water recovery step S7, the control means 9 recovers the treated water in the treatment tank 1 as high-temperature water in the high-temperature water recovery tank 6. Specifically, in the high-temperature water recovery step S7, the control means 9 opens the high-temperature water recovery valve 60 and drives the circulation pump P1. As a result, the treated water is recovered in the high-temperature water recovery tank 6 via the high-temperature water recovery line L4, as shown in Fig. 12. Then, when the treated water in the treatment tank 1 has been recovered, the control means 9 closes the high-temperature water recovery valve 60 and stops the circulation pump P1, thereby completing the high-temperature water recovery step S7.

[0049] <Cold water supply process S8> Next, in a cold water supplying step S8, the control means 9 supplies the cold water stored in the cold water recovery tank 8 to the treatment tank 1. Specifically, in the cold water supplying step S8, the control means 9 opens the cold water supply valve 81 and the water supply valve V2 and drives the water supply pump P2. As a result, as shown in Fig. 13, the cold water stored in the cold water recovery tank 8 is supplied to the treatment tank 1 as treated water via the cold water supply line L9 (common water supply line L10). When all the cold water in the cold water recovery tank 8 has been supplied to the treatment tank 1, the control means 9 closes the cold water supply valve 81 and the water supply valve V2 and stops the water supply pump P2, thereby completing the cold water supplying step S8.

[0050] <Cooling process S9> Next, in the cooling step S9, the control means 9 cools the treated water in the treatment tank 1 by the heat exchanger 3. Specifically, in the cooling step S9, the control means 9 opens the cooling water feed valve 45 and the cooling water return valve 46 of the cooling water supply means 40, and drives the cooling tower 41 and the cooling water feed pump 42. As a result, as shown in FIG. 14, the cooling water is supplied to the primary side of the heat exchanger 3. In addition, the control means 9 opens the circulation valve V1 and drives the circulation pump P1. As a result, the treated water circulates through the circulation line L1 and flows through the secondary side of the heat exchanger 3, and is cooled by heat exchange with the cooling water. Then, the cooled treated water is sprayed from the spray nozzle 20 toward the treated object X, and cools the treated object X. The cooling water that has taken heat from the treated water in the heat exchanger 3 is returned to the cooling tower 41 through the cooling water return path 44. Then, after executing the cooling process S9 for a predetermined time, the control means 9 closes the circulation valve V1 and stops the circulation pump P1, closes the cooling water supply valve 45 and the cooling water return valve 46, and stops the cooling tower 41 and the cooling water supply pump 42, thereby completing the cooling process S9.

[0051] <Cold water recovery process S10> Next, in a cold water recovery step S10, the control means 9 recovers the treated water in the treatment tank 1, which has been cooled by the heat exchanger 3, as cold water in the cold water recovery tank 8. Specifically, in the cold water recovery step S10, the control means 9 opens the cold water recovery valve 80 and drives the circulation pump P1. As a result, the treated water is recovered in the cold water recovery tank 8 via the cold water recovery line L8, as shown in Fig. 15. Then, when the treated water in the treatment tank 1 has been recovered, the control means 9 closes the cold water recovery valve 80 and stops the circulation pump P1, thereby completing the cold water recovery step S10.

[0052] It is preferable that the small amount of treated water remaining in the treatment tank 1, which is not recovered in the cold water recovery step S10, is drained by opening the drain valve 11b (drainage step).

[0053] After all the above steps are completed, the door of the treatment tank 1 is opened, the object to be treated X is removed, and the series of steps is completed. The sterilization apparatus 100 of this embodiment is configured to repeat the thermal sterilization and subsequent cooling of the object to be treated X, treating the preheating step S1 to the cold water recovery step S10 (see FIG. 2) as a series of processes (one lot). Note that the temperatures of the high-temperature water recovered in the high-temperature water recovery tank 6 and the low-temperature water recovered in the low-temperature water recovery tank 7 may be different between each lot.

[0054] 3. Effects The sterilization apparatus 100 according to this embodiment is configured to execute a hot water recovery step S5 and a cold water recovery step S10 under the control of the control means 9, and to recover hot water and cold water in the hot water recovery tank 5 and the cold water recovery tank 8. This allows the hot water and cold water to be reused in the hot water supply step S3 and the cold water supply step S8 of the next lot. This makes it possible to reduce the amount of steam (amount of heat) from the steam supply means 30 (boiler, not shown) used to heat the treated water in the heating step S4 and the load on the cooling water supply means 40 (cooling tower 41) in the cooling step S9, as well as reduce the amount of water supply.

[0055] The sterilization apparatus 100 further includes a high-temperature water recovery tank 6 and a low-temperature water recovery tank 7, and is configured to execute a high-temperature water recovery step S7 and a low-temperature water recovery step S2 under the control of the control means 9, and recover high-temperature water and low-temperature water in the high-temperature water recovery tank 6 and the low-temperature water recovery tank 7. This allows the high-temperature water and low-temperature water to be reused in the preheating step S1 (high-temperature water supplying step S1a) and rough heat removal step S6 (low-temperature water supplying step S6a) of the next lot. This makes it possible to preheat the workpiece X with high-temperature water and to remove rough heat from the workpiece X with low-temperature water, and further reduce the amount of steam (amount of heat) from the steam supplying means 30 (boiler, not shown) used to heat the treatment water and the load on the cooling water supplying means 40 (cooling tower 41).

[0056] In addition, the sterilization apparatus 100 according to this embodiment includes a circulation means 2 and is configured to circulate the treatment water in the treatment tank 1. This makes it possible to promote heat exchange between the object to be treated X and the high-temperature water or low-temperature water in the preheating step S1 (high-temperature water circulation step S1b) and the rough heat removal step S6 (low-temperature water circulation step S6b) performed by the control means 9.

[0057] 4. Variations The present invention can also be implemented in the following aspects.

[0058] In the above embodiment, the preheating step S1 (high-temperature water circulation step S1b) and the rough heat-removing step S6 (low-temperature water circulation step S6b) were ended when a predetermined time had elapsed. However, the preheating step S1 and the rough heat-removing step S6 may be ended when the temperature of the treatment water detected by a temperature sensor (not shown) provided in the treatment tank 1 reaches a predetermined temperature. The heating step S4 and the cooling step S9 may also be ended when the temperature of the treatment water detected by a temperature sensor (not shown) provided in the treatment tank 1 reaches a predetermined temperature.

[0059] The heating means in the above embodiment was configured to heat the treated water with heated steam supplied to the heat exchanger 3 in the heating step S4. However, other configurations can also be used as the heating means for heating the treated water. For example, it is possible to use a configuration in which heated steam is directly supplied to the treatment tank 1 or the circulation line L1 to heat the treated water, or a configuration in which the treatment tank 1 is directly heated. Note that in the case of a configuration in which the treatment tank 1 is directly heated, the circulation means 2 does not need to be provided.

[0060] In the above embodiment, the sterilization apparatus 100 is provided with the cold water recovery tank 8, but the cold water recovery tank 8 is not essential. That is, cold water may not be recovered, and feed water (tap water) may simply be supplied in the cold water supply step S8. In this case, although the amount of water used increases, the thermal efficiency can be at a level equivalent to that of the configuration of the above embodiment.

[0061] In the above embodiment, the hot water recovery tank 5 is a pressure vessel, but depending on the temperature of the hot water, it may be an unsealed vessel (open tank).

[0062] In the above embodiment, the cooling water supply means 40 cools the cooling water by the cooling tower 41, but it may also be configured to cool the cooling water by a chiller. It is also possible to have both a cooling tower and a chiller as the cooling water supply means 40 and cool the cooling water by switching between them.

[0063] In the above embodiment, the sterilization apparatus 100 includes the control means 9, and automatically performs each process of recovering hot water, high temperature water, low temperature water, and cold water into the hot water recovery tank 5, high temperature water recovery tank 6, low temperature water recovery tank 7, and cold water recovery tank 8, and supplying these to the treatment tank 1, by controlling predetermined valves and pumps. However, the control means 9 may not be provided, and each valve and pump may be operated manually.

[0064] The sterilization apparatus 100 of the above embodiment is configured to heat and cool the object X to be treated with a small amount of treated water (spray type) by supplying the treated water into the treatment tank 1 through the ejection nozzle 20 of the circulation means 2. However, it is also possible to supply a large amount of treated water into the treatment tank 1, fill the treatment tank 1 with water, and immerse the object X to be treated in the treated water to heat and cool the object X to be treated (hot water storage type).

[0065] The sterilization apparatus 100 of the above embodiment is configured to reuse high temperature water and low temperature water in the preheating step S1 (high temperature water supplying step S1a) and rough heat removal step S6 (low temperature water supplying step S6a) of the next lot by using a pair of high temperature water recovery tank 6 and low temperature water recovery tank 7. However, in addition to the pair of high temperature water recovery tank 6 and low temperature water recovery tank 7, one more pair of recovery tanks may be added and further cascaded to perform preheating and rough heat removal in multiple stages.

[0066] In the above embodiment, the sterilization device 100 that sterilizes the object X such as food has been described as an example of a processing device that processes the object X. However, the processing device is not limited to the sterilization device 100, and may be a device that heats and cools the object X for other purposes. [Explanation of symbols]

[0067] 1: Treatment tank 2: Circulation means 3: Heat exchanger (heating means, cooling means) 5: Hot water recovery tank 6: High temperature water collection tank 7: Low temperature water collection tank 8: Cold water collection tank 9: Control means 10: Tray 11: Drainage means 11a:Drainage channel 11b: Drain valve 11c: Check valve 12: Pressurizing means 12a: Pressure path 12b: Pressure valve 13: Exhaust means 13a: Exhaust passage 13b: Exhaust valve 13c: Check valve 20: Jet nozzle 30: Steam supply means 31:Steam supply path 32:Steam supply valve 33: Drain discharge passage 34: Drain discharge valve 35: Steam trap 36: Check valve 40: Cooling water supply means 41: Cooling tower 42: Cooling water pump 43: Cooling water supply passage 44: Cooling water return passage 45: Cooling water supply valve 46: Cooling water return valve 50: Hot water recovery valve 51: Hot water supply valve 60: High temperature water recovery valve 61: High temperature water supply valve 70: Low temperature water recovery valve 71: Low temperature water supply valve 80: Chilled water recovery valve 81: Cold water supply valve 82: New water supply line 83: New water supply valve 100: Sterilization equipment (treatment equipment) L1: Circulation line L10: Common water supply line L2: Hot water recovery line L3: Hot water supply line L4: High temperature water recovery line L5: Hot water supply line L6: Low temperature water recovery line L7: Low temperature water supply line L8: Cold water recovery line L9: Chilled water supply line P1: Circulation pump P2: Water supply pump S1: Preheating process S1a: High temperature water supply process S1b: High temperature water circulation process S2: Low temperature water recovery process S3:Hot water supply process S4: Heating process S5: Hot water recovery process S6: Rough cooling process S6a: Low temperature water supply process S6b: Low temperature water circulation process S7: High-temperature water recovery process S8: Cold water supply process S9: Cooling process S10: Cold water recovery process V1: Circulation valve V2: Water supply valve X: Processing object

Claims

1. A processing apparatus for processing a workpiece, The apparatus includes a treatment tank, a heating means, a cooling means, and a control means, The treatment tank is configured to accommodate the object to be treated, The heating means is configured to heat the treatment water in the treatment tank, The cooling means is configured to cool the treatment water in the treatment tank, The control means is configured to sequentially execute a preheating process, a low-temperature water recovery process, a hot water supply process, a heating process, a hot water recovery process, a rough heat removal process, a high-temperature water recovery process, and a cooling process; In the preheating step, stored high-temperature water is supplied to the treatment tank to preheat the object to be treated, In the low-temperature water recovery step, the treated water in the treatment tank after the preheating is recovered as low-temperature water having a lower temperature than the high-temperature water, In the hot water supplying step, hot water having a higher temperature than the stored high-temperature water is supplied to the treatment tank, In the heating step, the treatment water in the treatment tank is heated by a heating means, In the hot water recovery step, the treated water in the treatment tank heated by the heating means is recovered as the hot water, In the rough heat removal step, the stored low-temperature water is supplied to the treatment tank to remove rough heat from the object to be treated, In the high-temperature water recovery step, the treated water in the treatment tank after the rough heat removal is recovered as the high-temperature water, In the cooling step, the treatment water in the treatment tank is cooled by a cooling means.

2. The treatment device according to claim 1, comprising a hot water recovery tank, a high-temperature water recovery tank, and a low-temperature water recovery tank; In the preheating step, the high-temperature water stored in the high-temperature water recovery tank is supplied to the treatment tank, In the low-temperature water recovery step, the low-temperature water is recovered in the low-temperature water recovery tank, In the hot water supplying step, the hot water stored in the hot water recovery tank is supplied to the treatment tank, In the hot water recovery step, the hot water is recovered in the hot water recovery tank, In the rough heat removal step, the low-temperature water stored in the low-temperature water recovery tank is supplied to the treatment tank, In the high-temperature water recovery step, the high-temperature water is recovered in the high-temperature water recovery tank.

3. The processing device according to claim 2, Further comprising a cold water recovery tank; The cold water recovery tank is configured to recover the treated water cooled by the cooling means from the treatment tank as cold water, and to supply the cold water to the treatment tank.

4. A processing device according to claim 3, The control means is configured to execute a cold water recovery step after the cooling step; In the cold water recovery step, the treated water in the treatment tank cooled by the cooling means is recovered as the cold water in the cold water recovery tank.

5. The processing apparatus according to any one of claims 1 to 4, Further comprising a circulation means; The treatment device, wherein the circulation means includes a circulation pump and a circulation line, and is configured to circulate the treatment water in the treatment tank using the circulation pump.

6. The processing device according to claim 5, The circulation line further includes a heat exchanger; The heating means is configured to supply steam to the heat exchanger and heat the treatment water through the heat exchanger, The treatment device, wherein the cooling means is configured to supply cooling water to the heat exchanger and cool the treatment water through the heat exchanger.

7. A method for treating a material contained in a treatment tank, comprising the steps of: A preheating step, a low-temperature water recovery step, a hot water supply step, a heating step, a hot water recovery step, a rough heat removal step, a high-temperature water recovery step, and a cooling step are sequentially carried out; In the preheating step, stored high-temperature water is supplied to the treatment tank to preheat the object to be treated, In the low-temperature water recovery step, the treated water in the treatment tank after the preheating is recovered as low-temperature water having a lower temperature than the high-temperature water, In the hot water supplying step, hot water having a higher temperature than the stored high-temperature water is supplied to the treatment tank, In the heating step, the treatment water in the treatment tank is heated by a heating means, In the hot water recovery step, the treated water in the treatment tank heated by the heating means is recovered as the hot water, In the rough heat removal step, the stored low-temperature water is supplied to the treatment tank to remove rough heat from the object to be treated, In the high-temperature water recovery step, the treated water in the treatment tank after the rough heat removal is recovered as the high-temperature water, In the cooling step, the treated water in the treatment tank is cooled by a cooling means.

8. A processing apparatus for processing a workpiece, The system includes a treatment tank, a heating means, a cooling means, a hot water recovery tank, a high temperature water recovery tank, and a low temperature water recovery tank, The treatment tank is configured to accommodate the object to be treated, The heating means is configured to heat the treatment water in the treatment tank, The cooling means is configured to cool the treatment water in the treatment tank, The hot water recovery tank is configured to recover the treated water heated by the heating means from the treatment tank as hot water and to supply the hot water to the treatment tank, The high-temperature water recovery tank is configured to recover high-temperature water having a lower temperature than the hot water from the treatment tank and to supply the high-temperature water to the treatment tank to preheat the object to be treated, The low-temperature water recovery tank is configured to recover low-temperature water that is lower in temperature than the high-temperature water from the treatment tank, and to supply the low-temperature water to the treatment tank to remove rough heat from the object to be treated.

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