Cleaning device

Abstract

To provide a cleaning device that can effectively clean the back side of a workpiece and has a simple structure.SOLUTION: A cleaning device for cleaning a workpiece includes a holding table having an upper surface that serves as a holding surface and that can rotate around a straight line that passes through the center of the holding surface and is perpendicular to the holding surface as a rotation axis, a nozzle whose spraying port is located below the holding surface and that can spray cleaning water toward a location on the side of the holding table that is located at a specified coordinate in a coordinate plane parallel to the holding surface, and a container for accommodating the holding table and the nozzle.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to a cleaning device for cleaning a workpiece. [Background technology]

[0002] Chips of devices such as ICs (Integrated Circuits) are essential components in various electronic devices such as mobile phones and personal computers. Such chips are manufactured, for example, by dividing a plate-like object such as a wafer having multiple devices formed on its front surface along the boundaries of the multiple devices.

[0003] In order to prevent the chips produced from the plate from scattering, the plate and the frame are often integrated with each other via a tape whose surface is attached to the rear surface of the plate and the rear surface of the annular frame prior to dividing the plate, and the chips are produced, for example, by cutting a rotating annular cutting blade from the front surface side of the plate until it reaches the tape.

[0004] When multiple chips are manufactured in this manner, cutting waste is generated and may adhere to the surface side of the workpiece (the side of the tape to which the multiple chips and frame are attached). Therefore, after multiple chips are manufactured, the surface side of the workpiece is often cleaned by supplying cleaning water to the surface side of the workpiece while rotating it.

[0005] In addition, cutting chips generated during the manufacture of multiple chips may adhere not only to the front side of the workpiece but also to the back side of the workpiece. The cutting chips attached to the back side of the workpiece are likely to detach during transportation, and may adhere to various devices used after the manufacture of multiple chips and / or other workpieces processed in the devices.

[0006] In consideration of this, a cleaning device capable of cleaning the back side of a workpiece has been proposed (for example, see Patent Document 1). Specifically, this cleaning device includes a holding unit that holds the outer periphery of the workpiece, a rotation mechanism that rotates the holding unit, and a cleaning unit that cleans the back side of the workpiece. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] JP 2023-115438 A Summary of the Invention [Problem to be solved by the invention]

[0008] When the above-mentioned holding unit and rotating mechanism are provided, the structure of the cleaning device becomes complicated, and the manufacturing cost becomes high. In addition, cutting chips generated in the manufacturing of multiple chips are more likely to adhere to the area near the periphery of the back side of the workpiece than to the area near the center. Nevertheless, when the back side of the workpiece is cleaned while the outer periphery of the workpiece is held by the above-mentioned holding unit, the back side of the workpiece may not be effectively cleaned.

[0009] In view of these points, an object of the present invention is to provide a cleaning device that can effectively clean the back side of a workpiece and has a simple structure. [Means for solving the problem]

[0010] According to the present invention, there is provided a cleaning device for cleaning a workpiece, comprising: a holding table having an upper surface that serves as a holding surface and that is rotatable about a rotation axis that is a straight line that passes through the center of the holding surface and is perpendicular to the holding surface; a nozzle having an injection port located below the holding surface and capable of injecting cleaning water toward a location on a side of the holding table that is located at a predetermined coordinate in a coordinate plane parallel to the holding surface; and a container for accommodating the holding table and the nozzle.

[0011] Preferably, the internal space of the container is partitioned into a first region, a second region, a third region, and a fourth region by a first imaginary plane that passes through the predetermined coordinates and the center of the holding surface and is perpendicular to the holding surface, and a second imaginary plane that passes through the predetermined coordinates and is perpendicular to the first imaginary plane, the first region, the second region, the third region, and the fourth region are arranged in order along a direction in which the holding table rotates, the holding surface is located in the first region and the second region, and the nozzle is located in the third region. Also, preferably, the holding table includes a step portion whose upper side is recessed more than the lower side in a direction parallel to the holding surface, and the nozzle is capable of spraying the cleaning water toward the upper side of the step portion. Effect of the Invention

[0012] The cleaning device of the present invention includes a nozzle having an injection port located below the holding surface of the holding table and capable of injecting cleaning water toward a location on the side of the holding table that is located at a predetermined coordinate in a coordinate plane parallel to the holding surface. In this cleaning device, the cleaning water injected toward the side of the holding table can clean an area on the back side of the workpiece that protrudes laterally from the holding table (for example, an area near the outer periphery).

[0013] Furthermore, in this cleaning device, there is no need to turn the workpiece over while holding the outer periphery of the workpiece in order to clean the back side of the workpiece, so this cleaning device can effectively clean the back side of the workpiece and has a simple structure. [Brief description of the drawings]

[0014] [Figure 1] FIG. 1 is a perspective view illustrating an example of a workpiece. [Diagram 2] FIG. 2 is a perspective view that illustrates an example of a cutting device for dividing a plate-like object included in the workpiece illustrated in FIG. 1 along the boundaries of a plurality of devices. [Diagram 3] FIG. 3 is a plan view showing components of a cutting unit that are exposed and not housed in a housing of the cutting device shown in FIG. [Figure 4] 4 is a partially cutaway perspective view that illustrates an example of a cleaning device included in the cutting device illustrated in FIG. [Diagram 5] FIG. 5(A) is a plan view showing the positional relationship between the holding table and the nozzle of the cutting device shown in FIG. 4, and FIG. 5(B) is a cross-sectional view showing this positional relationship. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] An embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view showing an example of a workpiece. The workpiece 11 shown in Fig. 1 has a circular front surface 13a and a back surface 13b, and has a plate-like object 13 such as a wafer made of a semiconductor material such as silicon (Si).

[0016] Moreover, a plurality of devices 15 arranged in a matrix are formed on the front surface 13a side of the plate-like object 13. In other words, in this plate-like object 13, the boundaries of the plurality of devices 15, also called the planned division lines, are set in a lattice pattern. Furthermore, a disk-shaped tape 17, the diameter of which is larger than the diameter of the plate-like object 13, is attached to the central region of the front surface of the back surface 13b of the plate-like object 13.

[0017] The tape 17 has, for example, a flexible film-like base layer and an adhesive layer (glue layer) provided on one surface of the base layer (the surface on the plate-like object 13 side). Specifically, the base layer is made of polyolefin (PO), polypropylene (PP), polyethylene terephthalate (PET), polyvinyl chloride (PVC), polystyrene (PS), or the like. The adhesive layer is made of ultraviolet-curing silicone rubber, an acrylic material, an epoxy material, or the like.

[0018] In addition, the back surface of an annular frame 19, in which a circular opening 19a having a diameter larger than that of the plate-like object 13, is attached to the outer circumferential region of the surface of the tape 17. The frame 19 is made of a metal material such as aluminum or stainless steel.

[0019] Fig. 2 is a perspective view that shows a schematic example of a cutting device for dividing a plate-like object 13 included in a workpiece 11 along the boundaries of a plurality of devices 15. Note that the X direction and the Y direction shown in Fig. 2 are directions perpendicular to each other on a horizontal plane, and the Z direction is a direction perpendicular to the X direction and the Y direction (vertical direction).

[0020] The cutting device 2 shown in Fig. 2 includes a base 4 that supports each of the components. A recess 4a extending along the X direction is formed on the upper surface of the base 4. Inside the recess 4a, a flat table cover 6 and a bellows-like dust-proof and drip-proof cover 8 that expands and contracts as the table cover 6 moves are provided.

[0021] A holding table 10 is provided above the table cover 6. The holding table 10 has a frame 10a made of ceramics or the like. The frame 10a has a disk-shaped bottom wall and a cylindrical side wall standing upright from the outer periphery of the bottom wall.

[0022] Furthermore, a disk-shaped porous plate 10b made of, for example, porous ceramics is fixed above the bottom wall and inside the side wall of the frame 10a, and its upper surface is flush with the upper surface of the side wall of the frame 10a. The porous plate 10b has a diameter roughly equal to the inner diameter of the side wall of the frame 10a. The porous plate 10b also communicates with a suction source (not shown) such as an ejector through a through hole or the like formed in the bottom wall of the frame 10a.

[0023] In the holding table 10, the upper surface parallel to the X-direction and the Y-direction (the upper surface of the side wall of the frame 10a and the upper surface of the porous plate 10b) functions as a holding surface when holding the workpiece 11. Specifically, when holding the workpiece 11, the suction source communicating with the porous plate 10b is operated in a state where the workpiece 11 is placed on the holding surface of the holding table 10 with the plate-like object 13 facing upward. As a result, a suction force acts on the workpiece 11, and the workpiece 11 is held on the holding surface of the holding table 10.

[0024] Additionally, a plurality of clamps 12 are provided around the holding table 10. The clamps 12 are provided at approximately equal angular intervals along the circumferential direction of the holding table 10. When the workpiece 11 is held on the holding surface of the holding table 10, the clamps 12 grip the frame 19 at a position lower than the holding surface.

[0025] Furthermore, the holding table 10 and the multiple clamps 12 are connected to an X-direction movement mechanism (not shown). This X-direction movement mechanism includes, for example, a ball screw and a motor connected to the ball screw. When this X-direction movement mechanism is operated, the holding table 10 and the multiple clamps 12 move in the X direction or the opposite direction. Furthermore, in conjunction with this movement, the table cover 6 moves in the X direction or the opposite direction, and the dust-proof and drip-proof cover 8 expands and contracts.

[0026] The holding table 10 and the clamps 12 are connected to a rotary drive source (not shown). The rotary drive source includes, for example, a spindle and a motor connected to the spindle. When the rotary drive source is operated, the holding table 10 and the clamps 12 rotate around a rotation axis that is a straight line that passes through the center of the holding surface of the holding table 10 and is perpendicular to the holding surface, that is, a straight line that is aligned in the Z direction.

[0027] A support structure 14 is provided in a region near the recess 4a on the upper surface of the base 4. The support structure 14 has an erected portion 14a erected from the upper surface of the base 4, and an arm portion 14b extending in the opposite direction to the Y direction from an upper portion of the erected portion 14a so as to cross the recess 4a. A Y-direction movement mechanism 16 is provided on the front side of the arm portion 14b.

[0028] The Y-direction movement mechanism 16 has a pair of guide rails 18 fixed to the front surface of the arm portion 14b and extending along the Y direction. A moving plate 20 is connected to the front surface of the pair of guide rails 18 in a manner that allows it to slide along the pair of guide rails 18.

[0029] A screw shaft 22 extending along the Y direction is disposed between the pair of guide rails 18. A motor (not shown) for rotating the screw shaft 22 is connected to one end of the screw shaft 22. A nut (not shown) for accommodating a large number of balls that roll on the surface of the rotating screw shaft 22 is provided on the surface of the screw shaft 22 on which a spiral groove is formed, thereby forming a ball screw.

[0030] That is, when the screw shaft 22 rotates, a large number of balls circulate inside the nut, and the nut moves in the Y direction or the opposite direction. In addition, this nut is fixed to the rear side of the moving plate 20. Therefore, when the screw shaft 22 is rotated by a motor connected to one end of the screw shaft 22, the moving plate 20 moves together with the nut in the Y direction or the opposite direction.

[0031] A Z-direction movement mechanism 24 is provided on the front side of the moving plate 20. This Z-direction movement mechanism 24 is fixed to the front side of the moving plate 20 and has a pair of guide rails 26 extending along the Z direction. A moving plate 28 is connected to the front side of the pair of guide rails 26 in a manner that allows it to slide along the pair of guide rails 26.

[0032] A screw shaft 30 extending along the Z direction is disposed between the pair of guide rails 26. A motor 32 for rotating the screw shaft 30 is connected to one end (upper end) of the screw shaft 30. A nut (not shown) that houses a large number of balls that roll on the surface of the rotating screw shaft 30 is provided on the surface of the screw shaft 30 on which a spiral groove is formed, thereby forming a ball screw.

[0033] That is, when the screw shaft 30 rotates, a large number of balls circulate inside the nut, and the nut moves in the Z direction or the opposite direction. The nut is fixed to the rear side of the moving plate 28. Therefore, when the screw shaft 30 is rotated by the motor 32, the moving plate 28 moves together with the nut in the Z direction or the opposite direction.

[0034] A cylindrical housing 34 is fixed to the lower part of the moving plate 28. A cutting unit 36 ​​is housed in the housing 34. However, some components of the cutting unit 36 ​​are exposed from the housing 34 so as to be positioned above the recess 4a of the base 4.

[0035] Fig. 3 is a plan view showing typically the components of the cutting unit 36 ​​that are exposed and not housed in the housing 34. The components of the cutting unit 36 ​​shown in Fig. 3 are concentric structures centered on a straight line along the Y direction. Therefore, Fig. 3 can also be expressed as a front view showing typically the components of the cutting unit 36 ​​that are exposed and not housed in the housing 34.

[0036] The cutting unit 36 ​​has a spindle 38 that extends along the Y direction and has a tip portion thereof protruding from the housing 34. The spindle 38 is supported by the housing 34 in a manner that allows it to rotate about a straight line parallel to the Y direction as a rotation axis.

[0037] A cutting blade 40 is attached to the tip of the spindle 38. This cutting blade 40 includes a binder made of metal, ceramic, resin, or the like, and abrasive grains made of diamonds or the like dispersed in the binder.

[0038] The base end of the spindle 38 is connected to a rotary drive source (not shown) such as a motor housed in the housing 34. When the rotary drive source is operated, the cutting blade 40 rotates together with the spindle 38 around a straight line along the Y direction as a rotation axis.

[0039] 2, an imaging unit 42 capable of capturing an image of the holding surface side of the holding table 10 is fixed to the lower part of the moving plate 28. The imaging unit 42 includes, for example, a light source such as an LED (Light Emitting Diode), an objective lens, and an imaging element such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor.

[0040] A cleaning device 44 is provided in front of the support structure 14. Fig. 4 is a partially cutaway perspective view showing the cleaning device 44. The cleaning device 44 includes a housing 46 for housing a holding table 56 (described later) and the like. The housing 46 includes a housing 48 and a lid (not shown) connected to the housing 48 in a separable manner.

[0041] The housing 48 has a cylindrical outer plate 48a, an annular bottom plate 48b extending radially inward from the lower end of the outer plate 48a, and a cylindrical inner plate 48c erected from the inner end of the bottom plate 48b and having a height lower than that of the outer plate 48a. In addition, a lid connectable to the housing 48 has, for example, a disk-shaped top plate whose diameter is approximately equal to the outer diameter of the outer plate 48a, and a cylindrical side plate hanging down from the outer end of the top plate.

[0042] An exhaust port (not shown) is formed in the outer plate 48a, and this exhaust port is connected to a suction source (not shown) such as a vacuum pump via an exhaust pipe 50. A drain port 52 is formed in the bottom plate 48b, and a drain pipe (not shown) is connected to this drain port 52. The bottom plate 48b is supported by a plurality of (e.g., two) support legs 54 at approximately equal angular intervals along the circumferential direction of the bottom plate 48b.

[0043] A holding table 56 is provided inside the housing 48. The holding table 56 is made of ceramics or the like and has a frame 58 including four step portions 58a, 58b, 58c, and 58d on its side surface. Specifically, the frame 58 has a disk-shaped bottom wall and side walls standing upright from the bottom wall. The side walls of the frame 58 also have four arcuate portions whose outer surfaces are spaced apart from the center of the frame 58 by a distance smaller than the radius of the bottom wall, and four protruding portions that are located between two adjacent arcuate portions and whose outer surfaces are spaced apart from the center of the frame 58 by a distance roughly equal to the radius of the bottom surface.

[0044] The four step portions 58a, 58b, 58c, and 58d are configured by four arc portions included in the side wall of the frame body 58 and portions of the bottom wall of the frame body 58 that are positioned outside the four arc portions in a plan view. In other words, the holding table 56 is provided with four step portions 58a, 58b, 58c, and 58d whose upper sides are recessed more than their lower sides in the radial direction.

[0045] Furthermore, a disk-shaped porous plate 60 made of, for example, porous ceramics, with its upper surface flush with the upper surface of the side wall of the frame body 58, is fixed above the bottom wall and inside the side wall of the frame body 58. This porous plate 60 has a diameter roughly equal to the inner diameter of the side wall of the frame body 58. Furthermore, the porous plate 60 communicates with a suction source (not shown) such as an ejector via a through hole or the like formed in the bottom wall of the frame body 58.

[0046] In addition, in the holding table 56, the upper surface parallel to the X direction and the Y direction (the upper surface of the side wall of the frame body 58 and the upper surface of the porous plate 60) functions as a holding surface when holding the workpiece 11. Specifically, when holding the workpiece 11, the suction source communicating with the porous plate 60 is operated in a state where the workpiece 11 is placed on the holding surface of the holding table 56 with the tape 17 facing down. As a result, a suction force acts on the workpiece 11, and the workpiece 11 is held on the holding surface of the holding table 56.

[0047] Four clamps 62 are provided on the side surface of the holding table 56 at approximately equal angular intervals along the circumferential direction of the holding table 56. Each clamp 62 is located outside each of the four protrusions included in the side wall of the frame 58. When the holding table 56 is rotated along the circumferential direction with the workpiece 11 held on the holding surface of the holding table 56, each clamp 62 falls inward so as to press the frame 19 against the holding table 56 by its upper end.

[0048] The holding table 56 is designed so that an area near the outer periphery on the back side of the workpiece 11 can be exposed when the workpiece 11 is held. For example, the holding table 56 is designed so that the distance between the outer surfaces of the four arcuate portions included in the side wall of the frame 58 and the center of the holding surface is smaller than the radius of the opening 19a formed in the frame 19, and so that at least a portion of the frame 19 is supported by the four protruding portions included in the side wall of the frame 58 when the workpiece 11 is held.

[0049] Furthermore, the upper end of a shaft 64 extending along the Z direction in the space inside the inner plate 48c of the housing 48 is connected to the central region on the lower surface side of the holding table 56. A motor (not shown) is connected to the lower end of this shaft 64, and this motor is contained in a housing 66. When this motor is operated, the holding table 56 rotates, for example, counterclockwise in a plan view, around a rotation axis that passes through the center of the holding surface of the holding table 56 and is aligned in the Z direction.

[0050] A cover member 68 is provided around the shaft 64. The cover member 68 has a top plate (not shown) and a cylindrical side plate 68a hanging down from the outer edge of the top plate. The inner diameter of the side plate 68a is larger than the outer diameter of the inner plate 48c of the housing 48. A through hole is formed in the center of the top plate, and the shaft 64 passes through this through hole.

[0051] Furthermore, for example, an oil seal (not shown) is provided between the top plate and the shaft 64 to seal the through hole. Furthermore, the cover member 68 is supported by the housing 66 via a plurality of connecting members (not shown). Each connecting member is, for example, a cylindrical structure having an upper end fixed to the lower surface of the top plate of the cover member 68 and a lower end fixed to the upper surface of the housing 66.

[0052] The housing 66 is supported by a support mechanism 70 in a manner that allows it to be raised and lowered. The support mechanism 70 has, for example, a plurality of (e.g., three) air cylinders 72 attached to the housing 66, and a support leg 74 is connected to the lower part of each air cylinder 72. When the plurality of air cylinders 72 are operated simultaneously, the holding table 56 rises and falls together with the housing 66, etc.

[0053] For example, when the workpiece 11 is loaded onto or unloaded from the holding table 56, the support mechanism 70 is operated to position the holding table 56 at a high position (loading / unloading position). At this loading / unloading position, for example, the lower end of the side plate 68a of the cover member 68 is higher than the upper end of the inner plate 48c of the housing 48. Note that Fig. 4 shows the cleaning device 44 in a state where the holding table 56 is in the loading / unloading position.

[0054] When cleaning the workpiece 11 carried onto the holding table 56, the support mechanism 70 is operated to position the holding table 56 at a low position (cleaning position). At this cleaning position, for example, the lower surface of the top plate of the cover member 68 and the upper surface of the inner plate 48c of the housing 48 come into contact with each other.

[0055] In addition, a first cleaning water supply unit 76 and a second cleaning water supply unit 78 are provided around the holding table 56 and the cover member 68 for supplying cleaning water to the workpiece 11 held by the holding table 56 and the four clamps 62.

[0056] The first cleaning water supply unit 76 has a support shaft 76a. This support shaft 76a is a pipe-shaped member that extends vertically through the bottom plate 48b of the housing 48. A rotation drive source (not shown), such as a motor, for rotating the support shaft 76a is connected to the lower end of the support shaft 76a.

[0057] The base end of an arm 76b is connected to the upper end of the support shaft 76a. The arm 76b is a pipe-shaped member that extends in a direction perpendicular to the Z direction and has a length equivalent to the distance from the upper end of the support shaft 76a to the center of the holding table 56 in a plan view.

[0058] Furthermore, at the tip of the arm 76b, a supply port is located above the workpiece 11 held on the holding surface of the holding table 56 positioned at the cleaning position, and a nozzle 76c is provided for supplying cleaning water to the front surface side of the workpiece 11. That is, the nozzle 76c communicates with a cleaning water supply source (not shown) that supplies cleaning water such as water, via the arm 76b, the support shaft 76a, etc.

[0059] The second cleaning water supply unit 78 has an L-shaped arm 78a. This L-shaped arm 78a is a pipe-shaped member having a vertical portion that penetrates the bottom plate 48b of the housing 48 and extends along the Z direction, and a horizontal portion whose base end is connected to the upper end of the vertical portion and extends along a direction perpendicular to the Z direction.

[0060] A nozzle 78b is provided at the tip of the horizontal portion of the L-shaped arm 78a to spray cleaning water toward a location located at a predetermined coordinate on a coordinate plane parallel to the holding surface of the side surface of the holding table 56, i.e., an XY coordinate plane parallel to the X and Y directions. This nozzle 78b is connected to, for example, the above-mentioned cleaning water supply source via the L-shaped arm 78a, etc.

[0061] Fig. 5(A) is a plan view showing the positional relationship between the holding table 56 and the nozzle 78b, and Fig. 5(B) is a cross-sectional view showing this positional relationship. The nozzle 78b has an injection port that is positioned, for example, below the holding surface of the holding table 56 positioned at the cleaning position, specifically, at a height corresponding to the upper side of the stepped portions 58a, 58b, 58c, and 58d included in the holding table 56.

[0062] Nozzle 78b is capable of spraying cleaning water toward a portion of the side surface of holding table 56 that is located at coordinates (x, y) on the XY coordinate plane, i.e., along path R. Furthermore, nozzle 78b is positioned in a predetermined region in the internal space of container 46 that is defined by connecting the lid to housing 48 with holding table 56 positioned at the cleaning position.

[0063] Specifically, the internal space of the container 46 can be divided into a first region A1, a second region A2, a third region A3 and a fourth region A4 by a first imaginary plane VP1 that passes through the coordinates (x, y) and the center C of the holding surface of the holding table 56 and is perpendicular to this holding surface, and a second imaginary plane VP2 that passes through the coordinates (x, y) and is perpendicular to the first imaginary plane VP1.

[0064] The first area A1, the second area A2, the third area A3, and the fourth area A4 are arranged in order along a direction D in which the holding table 56 rotates, for example, a counterclockwise direction in a plan view, and the holding surface of the holding table 56 is located in the first area A1 and the second area A2. In this case, the nozzle 78b is positioned in the third area A3.

[0065] The cleaning of the workpiece 11 in the cleaning device 44 is performed, for example, in the following order. First, the lid is separated from the housing 48, and with the holding table 56 positioned at the loading / unloading position, the workpiece 11 is placed on the holding surface of the holding table 56 with the tape 17 facing down. Next, the suction source communicating with the porous plate 60 is operated so that a suction force acts on the workpiece 11 and the workpiece 11 is held on the holding surface of the holding table 10.

[0066] Next, the holding table 56 is moved to the cleaning position. Next, a lid is connected to the housing 48 so as to define the internal space of the container 46. Next, the support shaft 76a is rotated so that the nozzle 76c of the first cleaning water supply unit 76 is positioned above the workpiece 11. Next, the holding table 56 is rotated so that the frame 19 is pressed against the holding table 56 by the upper ends of the four clamps 62.

[0067] Next, while the holding table 56 is being rotated, cleaning water is supplied onto the surface of the workpiece 11 from the nozzle 76c of the first cleaning water supply unit 76, and cleaning water is sprayed onto the side surface of the holding table 56 from the nozzle 78b of the second cleaning water supply unit 78. This cleans the workpiece 11.

[0068] The above-mentioned cleaning device 44 includes a nozzle 78b whose injection port is located below the holding surface of the holding table 56 and capable of injecting cleaning water toward a location located at a predetermined coordinate (x, y) on the XY coordinate plane on the side of the holding table 56. In the cleaning device 44, the cleaning water injected toward the side of the holding table 56 can clean an area of ​​the back surface of the workpiece 11 that protrudes laterally from the holding table 56 (for example, an area near the outer periphery).

[0069] Moreover, in the cleaning device 44, it is not necessary to turn over the workpiece 11 while holding the outer periphery of the workpiece 11 in order to clean the back side of the workpiece 11. Therefore, the cleaning device 44 is capable of effectively cleaning the back side of the workpiece 11 and has a simple structure.

[0070] Furthermore, in the cleaning device 44, centrifugal force acts on the cleaning water supplied to the upper side of the step portions 58a, 58b, 58c, and 58d included in the holding table 56, causing the cleaning water to be scattered so as to reach the inner surface of the container 46 (for example, the inner surface of the outer panel 48a of the housing 48, etc.).

[0071] As a result, in the cleaning device 44, when cleaning the workpiece 11, cutting chips and the like scattered from the workpiece 11 and attached to the inner surface of the container 46 can be washed away at the same time. As a result, in the cleaning device 44, the frequency of cleaning the inner surface of the container 46 can be reduced.

[0072] The above is one aspect of the present invention, and the present invention is not limited to the above. For example, the cleaning device 44 may be provided in a processing device (for example, a grinding device) other than the cutting device 2. Alternatively, the cleaning device 44 may be independent and not incorporated in another device.

[0073] Moreover, the cleaning device 44 does not necessarily have to be provided with the first cleaning water supply unit 76. That is, the cleaning device 44 may be a cleaning device that cleans only the back side of the workpiece 11. Moreover, the cleaning device 44 may be provided with a fluid supply unit capable of supplying a mixed fluid (two fluids) of cleaning water and a gas such as air to the front side of the workpiece 11, instead of the first cleaning water supply unit 76.

[0074] In addition, in the cleaning device 44, a holding table that does not include a step portion may be provided instead of the holding table 56. However, in order to splash the cleaning water onto the inner surface of the container 46 to clean the inner surface of the container 46 as described above, it is preferable that the cleaning device 44 is provided with the holding table 56 that includes the step portions 58a, 58b, 58c, and 58d.

[0075] In addition, in the cleaning device 44, the nozzle 78b of the second cleaning water supply unit 78 may be provided in the fourth area A4 shown in Fig. 5(A) or so as to overlap the boundary between the third area A3 and the fourth area A4. However, in order to splash the cleaning water from above the step portions 58a, 58b, 58c, and 58d onto the inner surface of the container 46 as described above, it is preferable that the nozzle 78b is provided in the third area A3. Furthermore, in the nozzle 78b, the angle θ between the second imaginary plane VP2 and the path R of the cleaning water sprayed from the nozzle 78b in a plan view is more preferably 5° or more and 45° or less, and most preferably 10° or more and 30° or less.

[0076] In addition, the structures and methods according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention. [Explanation of symbols]

[0077] 2:Cutting device 4: Base (4a: recess) 6: Table cover 8: Dust-proof and water-resistant cover 10: Holding table (10a: frame, 10b: porous plate) 11: Work 12: Clamp 13: Plate-like object (13a: front surface, 13b: back surface) 14: Support structure (14a: standing part, 14b: arm part) 15: Device 16:Y direction movement mechanism 17: Tape 18: Guide rail 19: Frame (19a: Opening) 20: Moving plate 22: Screw shaft 24:Z direction movement mechanism 26: Guide rail 28: Moving plate 30: Screw shaft 32: Motor 34: Housing 36: Cutting unit 38: Spindle 40:Cutting blade 42: Imaging unit 44: Cleaning equipment 46: Containment Unit 48: Housing (48a: outer plate, 48b: bottom plate, 48c: inner plate) 50: Exhaust pipe 52:Drain port 54:Support leg 56: Holding table 58: Frame body (58a, 58b, 58c, 58d: step portion) 60:Porous plate 62: Clamp 64: Shaft 66: Housing 68: Cover member (68a: side plate, 68b:) 70:Support mechanism 72: Air cylinder 74:Support leg 76: first cleaning water supply unit (76a: support shaft, 76b: arm, 76c: nozzle) 78: Second cleaning water supply unit (78a: L-shaped arm, 78b: nozzle)

Claims

1. A cleaning device for cleaning a workpiece, comprising: a holding table having an upper surface serving as a holding surface and rotatable about a rotation axis that is a straight line that passes through the center of the holding surface and is perpendicular to the holding surface; a nozzle having an ejection port located below the holding surface and capable of ejecting cleaning water toward a location on a side surface of the holding table that is located at a predetermined coordinate in a coordinate plane parallel to the holding surface; a container for housing the holding table and the nozzle; A cleaning device comprising:

2. an internal space of the container is partitioned into a first region, a second region, a third region, and a fourth region by a first imaginary plane that passes through the predetermined coordinates and the center of the holding surface and is perpendicular to the holding surface, and a second imaginary plane that passes through the predetermined coordinates and is perpendicular to the first imaginary plane; the first area, the second area, the third area, and the fourth area are arranged in order along a direction in which the holding table rotates; the support surface is located in the first region and the second region; 2. The cleaning device of claim 1, wherein the nozzle is located in the third region.

3. the holding table includes a step portion whose upper side is recessed more than its lower side in a direction parallel to the holding surface, 3. The cleaning device according to claim 1, wherein the nozzle is capable of spraying the cleaning water toward the upper side of the step portion.

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