DEVICE FOR GRIPPING A WORKPIECE, METHOD FOR MANUFACTURING THE DEVICE, AND TRANSPORT SYSTEM AND APPARATUS FOR ELECTROCHEMICAL SURFACE TREATMENT COMPRISING AT LEAST ONE SUCH DEVICE - Patent application

Abstract

The device for gripping a workpiece (2) and making electrical contact with at least one surface of the workpiece (2) comprises a first member (9, 44, 82, 120, 155) extending between a first end (12, 47, 85, 123, 158) and a second end (13, 48, 86, 124, 159), and a workpiece (2) extending between a first end (10, 45, 88, 121, 156) and a second end (11, 46, 84, 122, 157) and a first member (8, 9; 43, 44, 82, 120, 155) extending between a first end (12, 47, 85, 123, 158) and a second end (13, 48, 86, 124, 159). and a second member (8, 43, 81, 119, 154) movably journalled relative to the first member (9, 44, 82, 120, 155) to enable the second member (8, 43, 81, 119, 154) to be held between the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) at respective clamping positions closer to the first ends (10, 45, 88, 121, 156) and (12, 47, 85, 123, 158) than the second ends (11, 46, 84, 122, 157) and (13, 48, 86, 124, 159) along the extent of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155). Each of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) includes at least one section located along the extent of that member (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) between the clamping location and the second ends (11, 46, 84, 122, 157) and (13, 48, 86, 124, 159). At least one of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) is electrically conductive and is provided with a contact area in the clamping position for contacting a surface of the workpiece (2), the contact area including at least one exposed surface (25, 30; 63, 68; 100, 105; 137, 142; 173, 178) facing the other of the first member (8, 43, 81, 119, 154) and the second member (9, 44, 82, 120, 155).The device includes at least one shield portion (17, 32-35, 38-40; 70-72, 75-78; 93a, 93b, 94, 107-109, 112-114; 131, 144-147, 149, 150; 166a, 166b, 167, 180-182, 185-187) that is obtainable independently from the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) and is made of a material having a lower electrical conductivity than the conductive material of the conductive members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155). At least one section located between the clamping position and the second ends (11, 46, 84, 122, 157) and (13, 48, 86, 124, 159) of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) that are conductive is a shield part (17, 32-35, 38-40; 70-72, 75-78; 93a, 93b, 94, 10 7-109, 112-114; 131, 144-147, 149, 150; 166a, 166b, 167, 180-182, 185-187) on a side of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) facing the other of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155). A shielding portion (17, 33, 34, 39, 40; 71, 77, 78; 93a, 93b, 94, 108, 113; 131, 145, 146, 150; 166a, 166b, 167, 181, 186) that shields that section of either of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) on a side of that member facing the other of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) is adjacent to a gap through which liquid can flow between the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155).

Description

[Technical field]

[0001] The present invention relates to a device for gripping a workpiece and making electrical contact with at least one surface of the workpiece, the device comprising: a first member extending between a first end and a second end; a second member extending between a first end and a second end and journalled for movement relative to the first member to allow a workpiece to be inserted between the respective first ends and held between the first and second members at respective clamping positions closer to the first ends than to the second ends along the extent of the first and second members; each of the first and second members includes at least one section located along an extent of the member between the clamping location and the second end; a second member, at least one of the first and second members being electrically conductive and provided with a contact area in the clamping position for contacting a surface of the workpiece, the contact area including at least one exposed surface facing the other of the first and second members; and at least one shield portion obtainable independently from the first and second members and made of a material having a lower electrical conductivity than the conductive material of the conductive member.

[0002] The present invention also relates to a transport system.

[0003] The present invention also relates to an apparatus for the electrochemical surface treatment of a workpiece.

[0004] The invention also relates to a method for manufacturing a device of the above mentioned kind. [Background technology]

[0005] Patent Document 1 discloses a clamp for a plating apparatus, which includes a fixed clamp part, a movable clamp part, a clamp bracket, and a connection part. The fixed clamp part has a shape of a vertically elongated plate. The movable clamp part is formed in a plate shape having a vertical length shorter than that of the fixed clamp part, and is inserted in front of the fixed clamp part. An insulating coating is provided at the lower end of the fixed clamp part and the movable clamp part, respectively. Each of the insulating coatings surrounds the lower end of the fixed clamp part and the movable clamp part, thereby exposing the front face of the rear contact part and the rear face of the front contact part.

[0006] US Pat. No. 5,399,363 discloses a power supply unit for the material to be treated in the device for its electrochemical treatment. The material to be treated is held and electrical contact with the material is made by a clamp formed by an upper clamp and a lower clamp, each of which is made of a blank material having good electrical conductivity. At the front ends of the upper and lower clamps, contact means or contact elements are conductively connected to the upper and lower clamps, respectively, in a conductive manner. The material to be treated is engaged between these contact elements. Starting from the contact element, a shell part is fastened to the latter, which surrounds the lower clamp at a small distance. The shell part is designed so that it extends at least until it exceeds the liquid level of the electrolyte in the electrochemical treatment device. The shell part prevents metal ions from migrating back from the electrolyte surrounding the lower clamp to the outside of the lower clamp, which at the same time leads to the shielding of the electric field lines formed between the anode and the material to be treated. In this example, the shell part is open on the side facing the upper clamp, but it is disclosed that a closed design completely surrounding the lower clamp is also possible. Similarly, the further shell part is fastened to the clamp top and bears tightly at least on the outside of the clamp top in order to minimize any possible accumulation between the shell part and the clamp top. The shell part fastened to the clamp top is open in the area facing the clamp bottom, as is the shell part fastened to the clamp bottom. When the clamp formed by the clamp top and the clamp bottom opens and closes, the sliding surfaces formed at the contact points of the shell parts slide tightly against each other, so that good electrical insulation, a liquid seal that prevents metal ions from migrating back, as well as good shielding of the electric field lines are ensured in this case as well. The shell part thus forms a shell that surrounds the clamp top and the clamp bottom starting from the contact element in order to substantially prevent metal ions migrating back from the electrolyte from being found outside the shell.

[0007] Thus, one shell encompasses both the upper and lower clamp portions, which are J-shaped. From a side view, the shell somewhat resembles a Wellington boot with both the upper and lower clamp portions inserted.

[0008] Regions of substantially lower metal ion concentration, such as those present within the shield of known devices, result in regions of relatively high electrical resistance and therefore distortion of the electric field, which is difficult to compensate for in order to maintain uniform processing across the contact surface of the workpiece within the region of the clamp. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] KR 102 332 772 B1 [Patent Document 2] US 2007 / 0039816 A1 [Patent Document 3] US 6,887,113 B1 Summary of the Invention [Problem to be solved by the invention]

[0010] It is an object of the present invention to provide a device, a transport system, an apparatus and a method of the type described above in the opening paragraph, which allows a more uniform surface treatment in the edge area of ​​the workpiece where the device grips the workpiece. [Means for solving the problem]

[0011] This object is achieved according to a first aspect by a device according to the invention, which is characterized in that at least one section located between the clamping position and the second end of each of the first and second members which are electrically conductive is shielded on a side of that member facing the other of the first and second members by at least one of the shielding parts, and the shielding part shielding that section of either of the first and second members on its side facing the other of the first and second members is adjacent to a gap through which liquid can flow between the first and second members.

[0012] The device is used in a transport system for an apparatus for electrochemical surface treatment of a workpiece, in particular for wet electrochemical surface treatment. Examples include electroplating and etching, i.e. the building up or destruction of a conductive layer of material on the surface of the workpiece.

[0013] The first and second members may be elongate members such that they extend longitudinally between a first end and a second end. However, the first and second members need not be straight. Clamping locations are locations along the extent (e.g., length) of the first and second members where a workpiece is held directly or indirectly by the first and second members. These clamping locations may coincide with the location of the first end or may be proximate to the first end. The relative motion of the first and second members is a pinching motion, which may be a linear motion, a pivoting motion, or a combination of the two.

[0014] The device is positioned to grip a planar workpiece at a location proximate an outer edge of the workpiece relative to a direction of movement of the workpiece through processing equipment that includes the gripping device. Depending on the shape of the device, the device may be suitable for incorporation into a horizontal or vertical transport system for transporting workpieces through processing equipment.

[0015] In use, the first end and the section located between the clamping position and the second end of the member along the extent of the member are immersed in an electrolyte in a bath of a device for electrochemical surface treatment of a workpiece. Even when the first and second members contact each other in the clamping position, there is a gap between that section of the first member and that section of the second member. In a configuration in which the workpiece is held between the first and second members, there may be a gap between each member and the workpiece. Since it is a gap through which liquid can flow, the electrolyte can continuously enter the space between the first and second members. There is a relatively small flow resistance, and therefore a relatively small or no concentration gradient. This results in a relatively uniform surface treatment around the contact area between the device and the workpiece.

[0016] At least one of the first and second members is electrically conductive, depending on whether only one or both of the opposing surfaces of the workpiece require surface treatment. The electrically conductive member may be made entirely of an electrically conductive material or may include a non-conductive core. At least one exposed surface is formed by an electrically conductive material. This or these surfaces are exposed so that they can be applied to the workpiece to establish an electrical connection. The member is provided with an electrical contact point at a location distal to the first end for connecting a lead to a current source or a connector of a current source arranged to establish a voltage difference between the member and a counter pole of the processing device. The electrically conductive material may be, for example, titanium or an alloy containing titanium. Titanium is chemically stable, not very expensive, and a fairly good electrical conductor.

[0017] At least one shielding part is separate from the first and second members. They are distinguished from insulating coatings by the fact that they can be obtained independently from the first and second members, for example as a free-standing structure. They are generally mechanically connected to at least one of the first and second members, but may also be joined thereto by gluing or the like. In any case, in contrast to coatings, they may be made of materials that do not adhere well to those surface materials of the first and second members that are in particular electrically conductive. This opens up a relatively wide range of material choices. In addition, the thermal expansion coefficients may be different than if the coatings were applied directly to the first and second members. Some of the shielding parts may be fixed directly to one of the first and second members, or some may be interconnected to form a shell that encompasses one of the first and second members, or a section thereof, but are not fixed directly to that member. One or more of the shielding portions may be provided between the first and second members, as long as there is a gap between the outer edges of the first and second members, possibly shielded, through which liquid can flow between the first and second members. The opposing surfaces of the first and second members are shielded when they are conductive, so that there is little or no deposition or breakdown on the surfaces of the associated conductive members. Furthermore, the conductive members do not distort the electric field to such a significant extent. The shielding portions do not necessarily all need to be made of the same material. Suitable materials include polymeric materials. Examples include polysulfone (PSU) and polypropylene. The latter material is suitable for additive manufacturing using extrusion printing or hot melt printing and is not very expensive.

[0018] In one embodiment, a shielded section located between the clamping location and the second end extends to the clamping location.

[0019] The terms shielded section, clamping position, and extending refer to the direction along the extent of the member between the first end and the second end, i.e. the longitudinal direction in the case of an elongated member. The section may be interrupted in a direction transverse to the direction in which the section extends, for example by an opening through the member. Since the section extends to the clamping position, it is possible to provide a gap between the surface of the shielding device adjacent the exposed surface and the surface of the workpiece. This gap allows electrolyte to flow between the surface of the shielding device and the surface of the workpiece, so that the area between the edge of the workpiece and the contact area between the device and the workpiece can be treated. The result is that the contact area moves further away from the edge towards the center of the workpiece. This is useful in some types of processing, where the workpiece is successively gripped by various gripping devices according to the invention. These can be configured so that each subsequent gripping device contacts the workpiece further away from the edge of the workpiece. The surface treatment extends relatively uniformly to the edge of the workpiece.

[0020] In one embodiment, at least one of the first and second members is in the form of an elongated strip.

[0021] The strip is an elongated, narrow bar. In this embodiment, at least one of the first and second members has a basic shape in the form of a strip. However, the width does not have to be constant along the length of the bar. The thickness does not have to be constant over the width, for example, the bar has rounded or chamfered edges. The bar can be bent or curved with a radius of curvature in a plane transverse to the main surfaces of the strip. These main surfaces can be flat over at least part of the extent of the member. Such flat surface sections are useful for support parts attached to the member. The shape of the strip also allows a contact area with the surface of the workpiece that extends over a relatively long distance parallel to the edge of the workpiece, corresponding to the direction of transport of the workpiece through the apparatus for surface treatment, including the gripping device. This can help to avoid buckling of thin, planar workpieces.

[0022] In one embodiment, the first and second members are each provided with a curve along their extent closer to the first end than to the second end.

[0023] Thus, the first and second members include a relatively long section from the second end to the curved portion and a relatively short section from the curved portion to the first end. This embodiment is useful when the device is used in a horizontal transport system for transporting planar workpieces. The relatively short section is immersed in the electrolyte. The relatively long section extends at an angle to the relatively short section. The relatively long section is only partially immersed in the electrolyte during use. The shielding portion need only be provided to the extent that the relatively long section is immersed during use. The electrolyte bath may be relatively narrow or the workpiece may be relatively wide with respect to the electrolyte bath. In certain embodiments, the first and second members may be generally L- or J-shaped when viewed in plan view in a direction corresponding to the transport direction of the workpiece during use.

[0024] In one embodiment of the device, at least one of the first and second members is provided with a liquid permeable window therethrough in a section along the extent of that member located between the clamping location and the second end.

[0025] This allows a relatively large amount of electrolyte to flow between the first and second members as the device is moved through the electrolyte, enhancing uniformity of the surface treatment.

[0026] In one embodiment in which the first and second members are each provided with a curved portion at a position along their extent closer to the first end than the second end, and at least one of the first and second members is provided with a liquid permeable window therethrough in a section along the extent of the member located between the clamping position and the second end, at least a portion of the window is located between the curved portion and the clamping position.

[0027] This specifically allows the electrolyte to reach the surface of the workpiece in the region between the outer edge of that surface and the contact area with the device, thus achieving a relatively uniform surface treatment, unique only where the exposed surface comes into contact with the surface of the workpiece.

[0028] In any embodiment in which the first and second members are each provided with a curved portion at a position along their extent closer to the first end than the second end, and at least one of the first and second members is provided with a liquid permeable window therethrough in a section along the extent of the member located between the clamping position and the second end, at least a portion of the window is located within the curved portion.

[0029] The electrolyte can therefore flow into the space between the first and second members in two directions. One direction is parallel to the section of the member extending between the bend and the first end. This corresponds to a direction parallel to the surface of the workpiece. The other direction is transverse to it. The windowed section is the section that is shielded with respect to each of the first and second members, which are electrically conductive.

[0030] In one example of any embodiment of the device, where at least one of the first and second members is provided with a liquid permeable window through the member in a section located along the extent of the member between the clamping position and the second end, the window being formed by an opening through the member, the at least one shield portion includes a section that extends into the opening at an edge of the opening, the section that extends into the opening covering the edge of the opening.

[0031] The same shielding device may in particular cover a section of the surface around the opening, which becomes the opening to cover the edges. Without the shielding, the edges of the opening would form sharp exposed conductive parts of the member, distorting the uniformity of the electric field. Depending on the section, the shielding part constitutes a liquid-permeable window, leaving no conductive edges exposed.

[0032] In one embodiment of the device, the first and second members are brought into relative linear motion towards and away from each other within the plane in which they extend.

[0033] Thus, the portions of the first and second members in contact with the surface of the workpiece may be moved towards the surface in a straight line perpendicular to the surface. In one embodiment in which the first and second members are each provided with a bend at a location along their extent closer to the first end than to the second end, the plane corresponds to the plane in which the short and long sections on either side of the bend lie. The direction of movement is transverse to the direction in which the short sections of the first and second members extend from their respective bends to their respective first ends.

[0034] In one embodiment of the device, the first and second members are interconnected by at least one guide, for example a linear guide, that movably journals the first and second members relative to one another.

[0035] This means that only one of the first and second members needs to be mounted to mount the device: the guide connects the other and therefore performs two functions: guiding the relative motion and holding the first and second members together.

[0036] In one particular example of this embodiment, at least a subset of the portions forming at least one of the guides is shielded by at least one of the shield portions.

[0037] Therefore, those parts forming at least one of the guides may be made of metal, without the need for a conductive part interposed between the guide and each of the first and second members which are conductive.

[0038] In one example of any embodiment in which the first and second members are interconnected by at least one guide, e.g., a linear guide, that movably supports the first and second members relative to one another, at least a subset of the portions forming at least one of the guides is made of a material having a lower electrical conductivity than the conductive material of the conductive member.

[0039] These portions forming the guide may correspond to respective portions of the shield portion, and when secured to one of the conductive members of the first and second members, the guide portion shields that member and no further shield portion is required for that position.

[0040] In one embodiment of the device, at least one of the first and second members that are electrically conductive is shielded by at least two interlocking shield portions.

[0041] Thus, the shield parts can be fastened together by joints that can be opened and closed. The fastening mechanism includes a snap fit (a handle connected to the body of the associated shield part by a cantilever, the handle engaging a recess in the other of the shield parts). The coupling can also be achieved by simply sliding and engaging a complementary shaped part of the shield part. The number of fasteners required to connect the shield part with one or more of the first and second members is reduced, or even such fasteners can be omitted. For example, the coupling of the shield parts can interlock to form an assembly having an internal shape that is complementary to the section of the member that it contains. In such an embodiment, a shape-lock is provided between the assembly and the associated member. Separate fasteners are not required, as the shape-lock holds the assembly in place. If the shield part is made of a polymeric material, an inlay for the fasteners can be omitted.

[0042] In one embodiment, at least one exposed surface is formed at a distal end of each ridge that projects relative to an adjacent surface section of the conductive member.

[0043] Thus, a well-defined, limited area is defined that is in electrical and physical contact with the surface of the workpiece.

[0044] In one particular example of this embodiment, at least one of the shield portions shields a section of an adjacent surface.

[0045] Thus, electrical current is forced along the surface of the workpiece, through the ridges, and into the conductive members.

[0046] In a particular version of this example, the ridge protrudes relative to at least a portion of the shield that extends from the ridge to the second end.

[0047] Thus, when at least one exposed surface is contacted with the surface of the workpiece, the shielding portion covering the surface of the member around the ridge remains some distance from the surface of the workpiece. A gap exists through which electrolyte can flow. Only that section of the surface of the workpiece corresponding to the area of ​​contact with the exposed surface of the conductive member remains untreated.

[0048] In one example of any embodiment of the device in which at least one exposed surface is formed at a distal end of each ridge that protrudes relative to a section of an adjacent surface of the conductive member, any surface section defined by those shielding portions that are conductive and form a section from the base of the ridge toward the second end along the extent of at least one of the first and second members facing toward the other of the first and second members is recessed relative to the exposed surface formed at the distal end of the ridge.

[0049] When the exposed surface contacts the surface of the (essentially planar) workpiece, a gap between that surface and their shielding parts, forming a section along the extent of the associated member from the base of the ridges towards the second end, is automatically established. The electrolyte can flow unimpeded through this gap. Ion concentration gradients within the electrolyte are reduced or avoided. A comparable level of surface treatment is achieved on either side of the exposed surface, i.e. in the contact area with the surface of the workpiece.

[0050] In one example of any embodiment in which at least one exposed surface is formed at a distal end of each ridge that projects relative to a section of an adjacent surface of the conductive member, the ridge forms an apex, e.g., an apex that extends in a direction transverse to the extent of the conductive member and in the plane of relative motion of the first and second members.

[0051] In practice, the apex defines a line of contact with the surface of the workpiece, the line extending substantially parallel to the direction of movement of the workpiece in the transport system including the gripping device. The effect is that the surface potential of the workpiece decreases from the outer edge towards the center of the workpiece, i.e. in a direction transverse to the direction of movement of the workpiece, but is relatively unchanged in a direction parallel to the direction of movement. It should be noted that if the first and second members are each provided with a curve at a position along their extent closer to the first end than to the second end, the plane of relative movement generally corresponds to a plane in which both the short section of the member from the curve to the first end and the long section of the member from the curve to the second end lie. If the member is in the form of an elongated strip, the plane transverses the plane of the elongated strip.

[0052] According to another aspect, a transport system according to the invention for transporting workpieces through an apparatus for electrochemical processing comprises: At least one, e.g., a plurality of, devices according to the present invention; a drive device for driving movement of at least one device along a path through the apparatus while the device holds a workpiece; The system is arranged to cause relative movement of at least some sections of the first and second members, including clamp locations at the beginning and end of the path, to grip and release the workpiece, respectively.

[0053] The or each device may, for example, include an actuator, e.g., an electric, electromagnetic, hydraulic, or pneumatic actuator, for or in each of the devices to cause relative motion. The drive device may include a chain or belt conveyor to which the device is fixed. The motion of the device for gripping the workpiece, provided by the drive device, causes electrolyte to flow between the first and second members when the first and second members are immersed in electrolyte.

[0054] In one embodiment of the transport system, each device includes a biasing device for exerting a force on at least some sections of the first and second members that include clamp positions toward or away from each other, and the system includes: a first cam for engaging the device at a beginning of a path to move sections of the first and second members including the clamping locations away from or towards each other against a force exerted by a biasing device when the device is moved along the first cam by a drive device; and a second cam at an end of the path for moving sections of the first and second members including the clamping positions away from or towards each other against a force exerted by the biasing device when the device is moved along the second cam by the drive device.

[0055] Thus, the gripping device can be relatively light and simple as it does not need to include a separate actuator. The workpiece is automatically gripped at the beginning of the path and released at the end of the path as the gripping device is transported along the path.

[0056] According to another aspect, the device according to the invention for the electrochemical surface treatment of a workpiece comprises A transport system according to the present invention; at least one processing bath including at least one counter electrode; and at least one current source connected to at least one of the first and second members of the clamping device that are conductive to establish a voltage difference between the connected member and at least one of the at least one counter electrode.

[0057] If the workpiece is gripped at its outer edges which are opposite to the direction of movement through the apparatus, the apparatus includes two transport systems according to the invention. The counter electrode or electrodes form a counter electrode to the workpiece, which acts as an electrode since it is in electrical contact with the gripping device.

[0058] According to another aspect, in the method according to the invention for manufacturing the device according to the invention, at least one of the shielding parts is obtained by additive manufacturing.

[0059] This allows the use of free-standing shielding devices with relatively complex shapes that match relatively closely the shapes of the members that they shield. As a result, it is relatively easy to provide a shape lock between the or those members and the shielding device. The number of parts is minimized. It is still possible to ensure that each shielding device moves with the member that it is placed to shield. Suitable additive manufacturing methods include, among others, extrusion printing (multijet), hot fusion printing and laser sintering. Hot fusion printing and extrusion printing allow polymeric materials, such as polypropylene, to be used for the shielding parts.

[0060] The invention will now be explained in further detail with reference to the accompanying drawings. [Brief description of the drawings]

[0061] [Figure 1] 1 is a schematic top view of an apparatus for electrochemical surface treatment of a workpiece, including a transport system including multiple gripping devices. [Diagram 2] FIG. 2 is a perspective view of a first gripping device. [Diagram 3] FIG. 2 is a side view of the first gripping device. [Figure 4] FIG. 13 is a side view of the upper conductive member of the first gripping device. [Diagram 5] FIG. 5 is a detailed perspective view of a section of the end of the upper member shown in FIG. 4. [Figure 6] FIG. 6 is a further detailed perspective view of a section of the end of the upper member shown in FIGS. 4 and 5. [Figure 7] FIG. 7 is a detailed perspective view of a section of the end of FIGS. 5 and 6 with an electrically insulating shield portion. [Figure 8] FIG. 13 is a perspective view of an end section of the upper member and shield assembly. [Figure 9] FIG. 13 is a rear perspective view of an end section of the upper member and shield assembly. [Figure 10] FIG. 13 is a further rear perspective view of an end section of the top member and shield assembly with one shield removed. [Figure 11] FIG. 11 is a perspective view of one of the shields of the shield assembly of FIG. 10. [Figure 12] 12 is a further perspective view of the shield portion shown in FIG. 11. [Figure 13] 11 is a perspective view of another one of the shields of the shield assembly of FIG. 10. [Figure 14] 11 is a perspective view of yet another one of the shields of the shield assembly of FIG. 10. [Figure 15] FIG. 13 is a side view of the lower conductive member of the first gripping device. [Figure 16] FIG. 16 is a detailed view of a section of the end of the lower conductive member shown in FIG. [Figure 17] FIG. 13 is a detailed view of a section of an end of the lower conductive member with an electrically insulating shield portion assembled thereon. [Figure 18] FIG. 18 is a perspective view of only the assembly of the shield portion of FIG. 17. [Figure 19] FIG. 20 is a perspective view of one of the shield portions in the assembly of FIG. 18. [Figure 20] FIG. 20 is a perspective view of another one of the shield portions in the assembly of FIG. 18. [Figure 21] FIG. 2 is a perspective view of a second gripping device. [Figure 22] FIG. 2 is a side view of the second gripping device. [Figure 23] FIG. 13 is a perspective view of an upper guide interconnecting upper and lower conductive members of a second gripping device. [Figure 24] FIG. 13 is a detailed view of the lower guide interconnecting the upper and lower conductive members of the second gripping device. [Diagram 25]FIG. 13 is a detailed view of a section of the lower end of the second gripping device. [Figure 26] FIG. 13 is a side view of the upper conductive member of the second gripping device. [Figure 27] FIG. 27 is a detailed view of a section of the end of the upper conductive member shown in FIG. 26. [Figure 28] FIG. 28 is a detailed perspective view of a section of the end of the upper conductive member shown in FIGS. 26 and 27. [Figure 29] FIG. 2 is a perspective view of an end section of an upper conductive member with an electrically insulating shield portion assembled thereon. [Diagram 30] FIG. 13 is a rear perspective view of an end section of the upper conductive member with an electrically insulating shield portion assembled thereon. [Diagram 31] FIG. 31 is a perspective view of one of the shield portions shown in FIG. 30. [Diagram 32] FIG. 31 is a perspective view of another one of the shield portions shown in FIG. 30. [Diagram 33] FIG. 13 is a side view of the lower conductive member of the second gripping device. [Diagram 34] FIG. 34 is a detailed view of a section of the end of the lower conductive member shown in FIG. 33. [Diagram 35] FIG. 35 is a detailed view of the end section shown in FIG. 34 with an electrically insulating shield portion assembled thereon. [Diagram 36] FIG. 36 is a perspective view of one of the shield portions shown in FIG. 35. [Figure 37] FIG. 36 is a perspective view of another one of the shield portions shown in FIG. 35. [Figure 38] FIG. 36 is a perspective view of yet another one of the shield portions shown in FIG. 35. [Figure 39] FIG. 13 is a perspective view of a third gripping device. [Diagram 40] FIG. 13 is a side view of a third gripping device. [Diagram 41] FIG. 13 is a detailed side view of a portion of a lower guide interconnecting upper and lower conductive members of the third gripping device. [Diagram 42]FIG. 13 is a detailed perspective view of a portion of the upper guide interconnecting the upper and lower conductive members of the third gripping device. [Diagram 43] FIG. 13 is a side view of the upper conductive member of the third gripping device. [Diagram 44] FIG. 44 is a perspective view of a section of an end of the upper conductive member of FIG. 43. [Diagram 45] FIG. 45 is a perspective view of an assembly of an electrically insulating shield portion to the upper conductive member of FIGS. 43 and 44. [Diagram 46] FIG. 46 is a perspective view of one of the shield portions of the assembly of FIG. 45. [Figure 47] FIG. 46 is a perspective view of another one of the shield portions of the assembly of FIG. 45. [Figure 48] FIG. 46 is a bottom view of the shield assembly of FIG. 45. [Figure 49] FIG. 13 is a side view of the lower conductive member of the third gripping device. [Figure 50] FIG. 50 is a perspective view of a section of the end of the lower conductive member shown in FIG. 49. [Figure 51] FIG. 51 is a perspective view of an electrically insulating shield portion for the lower conductive member shown in FIGS. 49 and 50. [Figure 52] FIG. 51 is a perspective view of a further electrically insulating shield portion for the lower conductive member shown in FIGS. 49 and 50. [Figure 53] FIG. 13 is a detailed side view of the lower end of the third gripping device. [Figure 54] FIG. 13 is a perspective view of a fourth gripping device. [Figure 55] FIG. 13 is a side view of the fourth gripping device. [Figure 56] FIG. 13 is a perspective view of the lower section of the fourth gripping device. [Figure 57] FIG. 13 is a side view of the upper conductive member of the fourth gripping device. [Figure 58] FIG. 58 is a detailed perspective view of the lower section of the upper conductive member shown in FIG. 57. [Figure 59] FIG. 2 is a perspective view of the assembly of an electrically insulating shield portion to an upper conductive member. [Figure 60] FIG. 60 is a perspective view of one of the shield portions of the assembly of FIG. 59. [Figure 61] FIG. 61 is a further perspective view of the shield portion shown in FIG. 60. [Figure 62] FIG. 60 is a perspective view of another one of the shield portions of the assembly of FIG. 59. [Figure 63] FIG. 61 is a perspective view of a further one of the shield portions shown in FIG. 60. [Figure 64] FIG. 13 is a side view of the lower conductive member of the fourth gripping device. [Figure 65] FIG. 13 is a detailed perspective view of a section of an end of the lower conductive member. [Figure 66] FIG. 13 is a detailed perspective view of the lower conductive member with a shield consisting of an electrically insulating shield portion assembled thereon. [Figure 67] FIG. 67 is a perspective view of one of the shield portions of FIG. 66. [Figure 68] FIG. 67 is a perspective view of another one of the shield portions of FIG. 66. [Figure 69] FIG. 13 is a perspective view of a fifth gripping device. [Figure 70] FIG. 13 is a side view of the fifth gripping device. [Figure 71] FIG. 13 is a detailed perspective view of a section of the end of the fifth gripping device. [Figure 72] FIG. 13 is a further detailed perspective view of an end section of the fifth gripping device. [Figure 73] FIG. 13 is a perspective view of an upper conductive member of a fifth gripping device. [Figure 74] FIG. 13 is a detailed perspective view of an end section of the upper conductive member. [Figure 75] FIG. 13 is a detailed perspective view of the upper conductive member with several electrically insulating shield sections assembled thereon. [Figure 76] FIG. 76 is a perspective view of one of the shield portions of FIG. 75. [Figure 77] FIG. 76 is a perspective view of another one of the shield portions of FIG. 75. [Figure 78]FIG. 13 is a side view of the lower conductive member of the fifth gripping device. [Figure 79] FIG. 79 is a detailed perspective view of a section of the end of the lower conductive member shown in FIG. 78. [Figure 80] FIG. 2 is a perspective view of a lower conductive member with several electrically insulating shield sections assembled thereon. [Figure 81] FIG. 81 is a perspective view of one of the shield portions shown in FIG. 80. [Figure 82] FIG. 81 is a perspective view of another one of the shield portions shown in FIG. 80. [Figure 83] 2 is a chart accompanied by a graph showing the thickness of an electroplated copper layer applied by an aperture of the type shown in FIG. 1 . DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0062] The apparatus 1 for electrochemical surface treatment of planar workpieces 2a-2f (FIG. 1) comprises an electrolyte bath 3 and a transport system 4 for transporting the workpieces 2a-2f through the bath 3 (FIG. 1). In the illustrated embodiment, the transport system 4 is a horizontal transport system 4. The workpieces 2a-2f are transported in a direction of movement y and have a constant width in a direction x transverse to the direction of movement y.

[0063] The electrochemical surface treatment can be, for example, etching or electroplating. In the illustrated embodiment, both opposing major surfaces of the planar workpieces 2a-2f are undergoing treatment. Counter electrodes (not shown) are positioned above and below the plane along which the planar workpieces 2a-2f are transported. The surfaces are contacted by a gripping device 5 proximate to an outer edge (with respect to the direction of motion y). In the illustrated embodiment, the workpieces 2a-2f are gripped along only one of their outer edges. In an alternative embodiment, the workpieces 2a-2f are gripped along both outer edges. In such an alternative embodiment, there is a transport system 4 on each side of the path of the workpieces 2a-2f through the apparatus 1.

[0064] The conveying system 4 in the illustrated embodiment includes a drive device in the form of a chain or belt conveyor 6, with the gripping devices 5 attached to the chain or belt at intervals along the chain or belt. Each gripping device 5 includes a biasing device, described in more detail below, which biases the gripping device 5 into a configuration in which the workpieces 2a-2f are gripped. Engagement devices including cams (not shown) are located at the beginning and end of the path of the workpieces 2a-2f through the apparatus 1. When the gripping device 5 is moved along the cam by the drive device against the cam to disengage the gripping device 5 from the gripping configuration against the restoring force exerted by the biasing device, the cam engages the gripping device 5, thus allowing the workpieces 2a-2f to move relative to the gripping device 5. In this way, the workpieces 2a-2f are automatically gripped at the beginning of the path and released at the end of the path.

[0065] The first gripping device 7 (FIGS. 2-20) includes an upper elongated conductive member 8 and a lower elongated conductive member 9. The upper member 8 extends longitudinally between a first end 10 and a second end 11 (FIG. 4). Similarly, the lower member 9 extends longitudinally between a first end 12 and a second end 13.

[0066] 2 and 15, the upper and lower members 8, 9 have a basic shape in the form of an elongated strip having a width in direction y that is generally parallel to the edges of the workpieces 2a-2f in use. However, the outer edges have an irregular shape and are chamfered, and various openings are provided through the upper and lower members 8, 9. In addition, the upper member 8 is provided with a curved portion 14 at a position along the extent (i.e. length) of the upper member 8 closer to the first end 10 than to the second end 11. The lower member 9 is also provided with a curved portion 15 at a position along the extent (i.e. length) of the lower member 9 closer to the first end 12 than to the second end 13. Each of the curved portions 14, 15 marks a transition between a relatively long section and a relatively short section of the upper and lower members 8, 9, respectively. These sections are at approximately right angles, such that the upper and lower members 8, 9 are approximately J-shaped as viewed in direction y that defines the width of the members 8, 9. The angle may be larger in alternative embodiments, for example up to 135°.

[0067] The upper and lower members 8, 9 are journaled for relative movement in a plane xz perpendicular to a direction y defining the width of the members 8, 9. Relative movement in the direction y defining the width of the members 8, 9 is constrained. This is achieved by a journal bearing including a guide pin 16 (FIG. 3) attached to the lower member 9 and a guide block 17 fixed to the upper member 8, the journal bearing being provided with a hole for receiving the guide pin 16. In addition, the lower and upper members 9, 8 are held by brackets 18, 19 (FIGS. 2, 3) which constrain their relative movement. A biasing device in the form of a spring 20 (FIG. 3) is arranged to urge the upper and lower members 8, 9 towards each other. In this way, the upper and lower members 8, 9 are journaled for primarily linear relative movement towards and away from each other.

[0068] The top member 8 is provided with a primary opening 21 therethrough. In the embodiment shown, there is also a secondary opening 22 therethrough. The primary opening 21 extends across the extent of the turn 14 and slightly beyond the turn 14 towards the second end 11. Thus, at least a portion of the primary opening 21 is located within the turn 14.

[0069] A protuberance in the form of an apex 23 is provided on the side of the top member 8 facing the bottom member 9. In the illustrated embodiment, the apex 23 is elongate and extends in a direction y defining the width of the top member 8 and projects in a direction z defining the thickness of the top member 8 at the first end 10. The apex 23 is provided at the first end 10. In alternative embodiments, the apex 23 may be provided adjacent to, but not directly at, the first end 10. The apex 23 projects relative to adjacent surface sections 24a, 24b (FIG. 6). An exposed surface 25 is defined by the tip of the apex 23. This exposed surface 25 is configured to directly contact the surface of the workpieces 2a-2f in use to provide electrical contact and exert a gripping force.

[0070] In the illustrated embodiment, a section of edge 26 (FIGS. 5-7) of main opening 21 extends essentially along the base of apex 23. In an alternative embodiment, the two sections are spaced apart in the direction that top member 8 extends.

[0071] Similarly, the lower member 9 is provided with a main opening 27 (FIG. 16) through the lower member 9. The main opening 27 is located generally between the curved portion 15 and the first end 12 of the lower member 9.

[0072] A protuberance in the form of an apex 28 is provided on the side of the lower member 9 facing the upper member 8. In the illustrated embodiment, the apex 28 is elongate and extends in a direction y defining the width of the lower member 9 and projects in a direction z defining the thickness of the lower member 9 at the first end 12. The apex 28 is provided at the first end 12. In alternative embodiments, the apex 28 may be provided adjacent to, but not directly at, the first end 12. The apex 28 projects relative to adjacent surface sections 29a, 29b. An exposed surface 30 is defined by the tip of the apex 28. This exposed surface 30 is configured to directly contact the surface of the workpieces 2a-2f in use to provide electrical contact and exert a gripping force.

[0073] In the embodiment shown, a section of edge 31 of main opening 27 extends essentially along the base of apex 28. In an alternative embodiment, the two sections are spaced apart in the direction that lower member 9 extends, such that there is also a section of abutment between apex 28 and main opening 27 against which it projects.

[0074] In use, short sections of the upper and lower members 8, 9 and subsections of the longer sections of the upper and lower members 8, 9 are immersed in an electrolyte solution which can flow between the upper and lower members 8, 9 everywhere except where they are interconnected and where the tops 23, 28 grip the workpieces 2a-2f. To avoid the upper and lower members 8, 9 being connected to respective or common current sources distorting the electric field between the workpiece surface and a counter electrode in the processing apparatus 1, the portions of the upper and lower members 8, 9 which are intended to be immersed are shielded by electrically insulating shielding sections.

[0075] The top member 8 is shielded by the first, second and third top member shield parts 32-34, by the plug 35 (FIG. 8) and by the guide block 17. They are made of a material having a lower electrical conductivity than the material from which the top member 8 is made, although they do not necessarily all have to be made of the same material. The first, second and third top member shield parts 32-34 interlock with each other to form an assembly having an internal shape that complements the shape of the top member 8, so that they are held in place without the need for fasteners. The plug 35 fits into an opening in the first top member shield part 32 and an opening in the second top member shield part 33, so that no further fasteners are needed to hold the plug 35 in place. The secondary opening 22 is closed by the plug. A separate, e.g. elastic, sealing element may be provided to enhance the sealing effect provided by the plug 35 and help keep the plug 35 in place. Guide block 17 is secured to upper member 8 by fasteners (not shown).

[0076] The edge 26 of the main opening 21 is shielded by sections 36a, 36b (FIG. 14) of the third upper member shield part 34 that extend into the main opening 21, as well as by a section 37 (FIG. 7) of the guide block 17 that extends into the main opening 21. Thus, between the contact areas of the outer edges of the workpieces 2a-2f and the exposed faces 25, a shielding frame of liquid permeable windows is provided that expose sections of the surfaces of the workpieces 2a-2f.

[0077] The first top member shield part 32 and the third top member shield part 34 extend towards the base of the top part 23. However, their surfaces facing towards the lower part 9 are recessed with respect to the exposed surface 25. The top part 23 in particular projects towards the third top member shield part 34. The third top member shield part 34 covers the section 24a, 24b of the surface adjacent to the top part 23. When the workpieces 2a-2f are gripped, a gap is formed between the shield (in this case the third top member shield part 34) and the surface of the workpieces 2a-2f. The electrolyte can flow between the shield and the surface of the workpieces 2a-2f, allowing the treatment of that section of the surface. As a result, the exposed surface 25 can come into contact with the surface of the workpieces 2a-2f at a relatively large distance from the outer edge of the workpieces 2a-2f.

[0078] The first, second and third upper member shield parts 32-34 are free-standing parts that can be obtained by additive manufacturing.

[0079] The bottom member 9 is shielded by first and second bottom member shield portions 38, 39 and partially by clips 40. These components interlock to provide an assembly having an internal geometry that complements the geometry of the bottom member 9. Therefore, no fasteners are required to directly fasten any of these components to the bottom member 9.

[0080] The second lower member shield part 39 includes a section that extends into the main opening 27 to cover the edge 31 of the main opening 27. The second lower member shield part 39 also covers the sections 29a, 29b of the surface adjacent to the apex 28. The exposed surface 30 defined by the tip of the apex 28 remains uncovered. In fact, the surface of the second lower member shield part 39 and the clip 40 facing the upper member 8 are recessed with respect to the exposed surface 30. When the workpieces 2a-2f are gripped, a gap is formed between the shield (in this case the second lower member shield part 39 and the clip 40) and the surface of the workpieces 2a-2f. The electrolyte can flow between the shield and the surface of the workpieces 2a-2f, allowing the treatment of that section of the surface. As a result, the exposed surface 30 can come into contact with the surface of the workpieces 2a-2f at a relatively large distance from the outer edge of the workpieces 2a-2f. Only the contact area with the exposed surface 30 remains untreated.

[0081] The first and second bottom member shield portions 38, 39 and the clip 40 are free-standing parts obtainable by additive manufacturing.

[0082] The second gripping device 42 (FIGS. 21-38) similarly includes an upper elongated conductive member 43 and a lower elongated conductive member 44. The upper member 43 extends longitudinally between a first end 45 and a second end 46. Similarly, the lower member 44 extends longitudinally between a first end 47 and a second end 48.

[0083] 26 and 33, the upper and lower members 43, 44 have a basic shape in the form of a strip having a width in direction y that is generally parallel to the edges of the workpieces 2a-2f in use. However, the outer edges have an irregular shape and are chamfered, and various openings are provided through the upper and lower members 43, 44. Additionally, the upper member 43 has an integral protruding pin which may, for example, be welded to the strip-shaped main portion of the upper member 43.

[0084] The upper member 43 is provided with a curved portion 49 at a location along the extent (i.e., length) of the upper member 43 closer to the first end 45 than to the second end 46. The lower member 44 is also provided with a curved portion 50 at a location along the extent (i.e., length) of the lower member 44 closer to the first end 47 than to the second end 48. Each of the curved portions 49, 50 marks a transition between a relatively long section and a relatively short section of the upper member 43 and the lower member 44, respectively. These sections are at approximately right angles such that the upper and lower members 43, 44 are approximately J-shaped as viewed in the direction y that defines the width of the members 43, 44. The angle may be larger in alternative embodiments, for example up to 135°.

[0085] The upper and lower members 43, 44 are journalled for relative movement in a plane xz perpendicular to a direction y defining the width of the members 43, 44. Relative movement in the direction y defining the width of the members 43, 44 is constrained. The manner in which this is achieved differs from that of the first gripping device 7. Instead, the upper guide 51 includes a pin 52 (FIG. 23) which extends through and is movable within a slot 53 formed in the upper member 43. The slot 53 extends in a longitudinal direction. The pin 52 is fixed to and projects from the lower member 44. The lower guide 54 includes a pin 55 (FIG. 24) which also extends through and moves within a slot 56 formed in the upper member 43. Again, the slot 56 extends in a longitudinal direction. The pin 55 is fixed to and projects from the lower member 44. A corrugated shield portion 57 (FIG. 25) shields the pin 55. The corrugated shield portion 57 is made of a conductive material, such as a polymeric material. One or both of the opposing ends of the corrugated shield portion 57 may be fixed in place relative to the upper and lower members 43, 44, respectively. The corrugated shield portion 57 flexes as the upper and lower members 43, 44 move relative to one another. Additionally, the elastic force from the compression of the corrugated shield portion 57 keeps both ends of the corrugated shield portion 57 pressing against the upper and lower members 43, 44.

[0086] A biasing device in the form of a spring 58 is arranged to urge the upper and lower members 43, 44 towards one another. In this manner, the upper and lower members 43, 44 are journalled for primarily linear relative movement towards and away from one another.

[0087] In addition to the guide slots 53, 56, the top member 43 is provided with a primary opening 59 (FIG. 27) therethrough. In the embodiment shown, there is also a secondary opening 60 through the top member 43 located between the primary opening 59 and the slot 56 in the lower guide 54. The primary opening 59 extends across the entire extent of the curved portion 49 and slightly beyond the curved portion 49 towards the second end 46. Thus, at least a portion of the primary opening 59 is located within the curved portion 49.

[0088] A protuberance in the form of an apex 61 (FIG. 28) is provided on the side of the upper member 43 facing the lower member 44. In the illustrated embodiment, the apex 61 is elongate and extends in a direction y defining the width of the upper member 43 and projects in a direction z defining the thickness of the upper member 43 at the first end 45. The apex 61 is provided at the first end 45. In an alternative embodiment, the apex 61 may be provided adjacent to, but not directly at, the first end 45. The apex 61 projects relative to adjacent surface sections 62a, 62b (FIG. 6). An exposed surface 63 is defined by a tip of the apex 61. This exposed surface 63 is configured to directly contact the surface of the workpieces 2a-2f in use to provide electrical contact and exert a gripping force.

[0089] In the illustrated embodiment, a section of edge 64 of main opening 59 extends essentially along the base of apex 61. In an alternative embodiment, the two sections are spaced apart in the direction that top member 43 extends.

[0090] Similarly, lower member 44 is provided with a main opening 65 (FIG. 34) therethrough that is also located partially within curved portion 50 and partially within the section of lower member 44 extending between curved portion 50 and first end 47.

[0091] A protuberance in the form of an apex 66 is provided on the side of the lower member 44 facing the upper member 43. In the illustrated embodiment, the apex 66 is elongate and extends in a direction y defining the width of the lower member 44 and projects in a direction z defining the thickness of the lower member 44 at the first end 47. The apex 66 is provided at the first end 47. In alternative embodiments, the apex 66 may be provided adjacent to, but not directly at, the first end 47. The apex 66 projects relative to adjacent surface sections 67a, 67b. An exposed surface 68 is defined by a tip of the apex 66. This exposed surface 68 is configured to directly contact the surface of the workpieces 2a-2f in use to provide electrical contact and exert a gripping force.

[0092] In the illustrated embodiment, a section of edge 69 of main opening 65 extends essentially along the base of apex 66. In an alternative embodiment, the two sections are spaced apart in the direction that lower member 44 extends, such that there is also an abutment section between apex 66 and main opening 65 against which it projects.

[0093] In use, short sections of the upper and lower members 43, 44 and subsections of the longer sections of the upper and lower members 43, 44 are immersed in the electrolyte. The electrolyte can flow between the upper and lower members 43, 44 everywhere except where they are interconnected, particularly by the lower guide 54 and the corrugated shield portion 57, and where the tops 61, 66 grip the workpieces 2a-2f. To avoid the upper and lower members 43, 44 being connected to respective or common current sources distorting the electric field between the workpiece surface and the counter electrode in the processing device 1, the parts of the upper and lower members 43, 44 that are intended to be immersed are shielded by electrically insulating shield portions.

[0094] The top member 43 is shielded by the first and second top member shielding portions 70, 71, by the plug 72, and by the corrugated shielding portion 57. They are made of a material having a lower electrical conductivity than the material from which the top member 43 is made, although they do not necessarily all have to be made of the same material. The first and second top member shielding portions 70, 71 interlock with each other to form an assembly having an internal shape that complements the shape of the top member 43, so that they are held in place without the need for fasteners. The plug 72 fits into an opening in the first top member shielding portion 70 and an opening in the second top member shielding portion 71, so that no additional fasteners are needed to hold the plug 72 in place. The secondary opening 60 is closed by the plug. A separate, e.g., elastic, sealing element may be provided to enhance the sealing effect provided by the plug 72 and help keep the plug 72 in place.

[0095] The edge 64 of the main opening 59 is shielded by sections 73 (only one of which is visible in the drawings) of the first top member shield part 70 which extend into the main opening 59. Thus, between the outer edges of the workpieces 2a-2f and the contact areas with the exposed faces 63, a shielding frame of liquid permeable windows is provided which expose sections of the surfaces of the workpieces 2a-2f.

[0096] A second top member shield portion 71 extends toward the base of the apex 61. A first top member shield portion 70 also extends toward the base of the apex 61 but covers the first end 45 such that the exposed surface 63 remains unshielded.

[0097] The surfaces 74a, 74b (FIG. 30) of the second upper member shield part 71 facing towards the lower member 44 are recessed with respect to the exposed surface 63. When the workpieces 2a-2f are gripped, a gap is formed between the shield (in this case the second upper member shield part 71) and the surface of the workpieces 2a-2f. The electrolyte can flow between the shield and the surface of the workpieces 2a-2f, allowing the treatment of that section of the surface. As a result, the exposed surface 63 can come into contact with the surface of the workpieces 2a-2f at a relatively large distance from the outer edges of the workpieces 2a-2f.

[0098] The first and second top member shield parts 70, 71 are free-standing parts obtainable by additive manufacturing.

[0099] Lower member 44 is shielded by first, second and third lower member shield portions 75-77 and partially by clip 78. These components interlock to provide an assembly having an internal geometry that complements the geometry of lower member 44. Therefore, no fasteners are required to directly fasten any of these components to lower member 44.

[0100] The third bottom member shield part 77 includes a section 79 that extends into the main opening 65 to cover the edge 69 of the main opening 65. The third bottom member shield part 77 and the clip 78 also cover the sections 67a, 67b of the surface adjacent to the apex 66. The exposed surface 68 defined by the tip of the apex 66 remains uncovered. In fact, the surface of the third bottom member shield part 77 and the clip 78 facing the top member 43 are recessed with respect to the exposed surface 68. When the workpieces 2a-2f are gripped, a gap is formed between the shield (in this case the third bottom member shield part 77 and the clip 78) and the surface of the workpieces 2a-2f. The electrolyte can flow between the shield and the surface of the workpieces 2a-2f, allowing the treatment of that section of the surface. As a result, the exposed surface 68 can contact the surface of the workpieces 2a-2f at a relatively large distance from the outer edge of the workpieces 2a-2f. Only the area in contact with exposed surface 68 remains untreated.

[0101] The first, second and third bottom member shield parts 75, 76, 77 and the clip 78 are free-standing parts obtainable by additive manufacturing.

[0102] The third gripping device 80 (FIGS. 39-53) similarly includes an upper elongated conductive member 81 and a lower elongated conductive member 82. The upper member 81 extends longitudinally between a first end 83 and a second end 84 (FIG. 43). Similarly, the lower member 82 extends longitudinally between a first end 85 and a second end 86 (FIG. 49).

[0103] 43 and 49, the upper and lower members 81, 82 have a basic shape in the form of an elongated strip having a width in direction y that, in use, is generally parallel to the edges of the workpieces 2a-2f. However, the outer edges have an irregular shape and are chamfered and various openings are provided through the upper and lower members 81, 82.

[0104] The upper member 81 is provided with a curved portion 87 at a location along the extent (i.e., length) of the upper member 81 closer to the first end 83 than to the second end 84. The lower member 82 is also provided with a curved portion 88 at a location along the extent (i.e., length) of the lower member 82 closer to the first end 85 than to the second end 86. Each of the curved portions 87, 88 marks a transition between a relatively long section and a relatively short section of the upper member 81 and the lower member 82, respectively. These sections are at approximately right angles such that the upper and lower members 81, 82 are approximately J-shaped as viewed in the direction y that defines the width of the members 81, 82. The angle may be larger in alternative embodiments, for example up to 135°.

[0105] The upper and lower members 81, 82 are journalled for relative movement in a plane xz perpendicular to a direction y defining the width of the members 81, 82. Relative movement in the direction y defining the width of the members 81, 82 is constrained. The manner in which this is achieved differs slightly from that of the first gripping device 7 and the second gripping device 42. The upper guide 89 is constructed in the same manner as the upper guide 51 of the second gripping device 42, i.e. with a pin 90 projecting from the lower member 82 movable in an elongated slot 91 through the longitudinally extending upper member 81 (FIG. 42).

[0106] The lower guide 92 (FIGS. 40, 41) comprises lower guide blocks 93a, 93b provided with V-shaped grooves extending in the longitudinal direction and facing each other, in which a lower guide part 94, comprising a lateral inverted V-shaped profile, is arranged to move. This lower guide 92 also interconnects the upper and lower members 81, 82. The lower guide blocks 93a, 93b and the lower guide part 94 are made of electrically conductive material. In an alternative embodiment, they may be made of metal or alloy, in which case electrical insulation may be interposed between them and the upper and lower members 81, 82 on which they are mounted.

[0107] A biasing device in the form of a spring 95 (FIGS. 40, 42) is arranged to urge the upper and lower members 81, 82 towards one another. In this manner, the upper and lower members 81, 82 are journalled for primarily linear relative movement towards and away from one another.

[0108] In addition to the upper guide slot 91, the top member 81 is provided with a primary opening 96 (FIG. 44) therethrough. In the embodiment shown, there is also a secondary opening 97 therethrough. The primary opening 96 extends across the extent of the curved portion 87 and slightly beyond the curved portion 87 towards the second end 84. Thus, at least a portion of the primary opening 96 is located within the curved portion 87.

[0109] A protuberance in the form of an apex 98 is provided on the side of the upper member 81 facing the lower member 82. In the illustrated embodiment, the apex 98 is elongate and extends in a direction y defining the width of the upper member 81 and projects in a direction z defining the thickness of the upper member 81 at the first end 83. The apex 98 is provided at the first end 83. In alternative embodiments, the apex 98 may be provided adjacent to, but not directly at, the first end 83. The apex 98 projects relative to adjacent surface sections 99a, 99b. An exposed surface 100 is defined by the tip of the apex 98. This exposed surface 100 is configured to directly contact the surface of the workpieces 2a-2f in use to provide electrical contact and exert a gripping force.

[0110] In the illustrated embodiment, a section of edge 101 of main opening 96 extends essentially along the base of top 98. In an alternative embodiment, the two sections are spaced apart in the direction that top member 81 extends.

[0111] Similarly, lower member 82 is provided with a main opening 102 (FIG. 50) therethrough that is also located partially within curved portion 88 and partially within the section of lower member 82 that extends between curved portion 88 and first end 85.

[0112] A protuberance in the form of an apex 103 is provided on the side of the lower member 82 facing the upper member 81. In the illustrated embodiment, the apex 103 is elongate and extends in a direction y defining the width of the lower member 82 and projects in a direction z defining the thickness of the lower member 82 at a first end 85. The apex 103 is provided at the first end 85. In an alternative embodiment, the apex 103 may be provided adjacent to, but not directly at, the first end 85. The apex 103 projects relative to adjacent surface sections 104a, 104b (FIG. 6). An exposed surface 105 is defined by a tip of the apex 103. This exposed surface 105 is configured to directly contact the surface of the workpieces 2a-2f in use to provide electrical contact and exert a gripping force.

[0113] In the illustrated embodiment, a section of edge 106 of main opening 102 extends essentially along the base of top 103. In an alternative embodiment, the two sections are spaced apart in the direction that bottom member 82 extends, such that there is also an abutment section between top 103 and main opening 102 against which it projects.

[0114] In use, short sections of the upper and lower members 81, 82 and subsections of the longer sections of the upper and lower members 81, 82 are immersed in the electrolyte. The electrolyte can flow between the upper and lower members 81, 82 everywhere except where they are interconnected, particularly by the lower guide 92, and where the tops 98, 103 grip the workpieces 2a-2f. To avoid the upper and lower members 81, 82 being connected to respective or common current sources distorting the electric field between the workpiece surface and the counter electrode in the processing device 1, the parts of the upper and lower members 81, 82 that are intended to be immersed are shielded by electrically insulating shielding sections.

[0115] The top member 81 is shielded by first and second top member shield parts 107, 108, by lower guide blocks 93a, 93b, and by plug 109 (FIG. 45). They are made of a material having a lower electrical conductivity than the material from which the top member 81 is made, although they do not necessarily all have to be made of the same material. The first and second top member shield parts 107, 108 interlock with each other to form an assembly having an internal shape that complements the shape of the top member 81, so that they are held in place without the need for fasteners. The plug 109 fits with an opening in the first top member shield part 107, so that no additional fasteners are needed to hold the plug 109 in place. The secondary opening 97 is closed by the plug. A separate, e.g., elastic, sealing element may be provided to enhance the sealing effect provided by the plug 109 and help keep the plug 109 in place.

[0116] An edge 101 of the main opening 96 is shielded by a section 110 of the second top member shield portion 108 that extends into the main opening 96. Thus, between the outer edges of the workpieces 2a-2f and the contact areas with the exposed faces 100, a shielding frame of liquid permeable windows is provided that exposes sections of the surfaces of the workpieces 2a-2f.

[0117] A second top member shield portion 108 extends toward and around the base of the apex 98. The apex 98 extends through an opening in the second top member shield portion 108, thereby allowing the exposed surface 100 to escape shielding.

[0118] The surfaces 111a, 111b of the second upper member shield part 108 facing towards the lower member 82 are recessed with respect to the exposed surface 100 (Fig. 48). When the workpieces 2a-2f are gripped, a gap is formed between the shield (in this case the second upper member shield part 108) and the surface of the workpieces 2a-2f. The electrolyte can flow between the shield and the surface of the workpieces 2a-2f, allowing the treatment of that section of the surface. As a result, the exposed surface 100 can come into contact with the surface of the workpieces 2a-2f at a relatively large distance from the outer edges of the workpieces 2a-2f.

[0119] The first and second top member shield parts 107, 108 are free-standing parts obtainable by additive manufacturing.

[0120] Bottom member 82 is shielded by first and second bottom member shield portions 112, 113 and by mounting block 114. First and second bottom member shield portions 112, 113 interlock to provide an assembly having an internal geometry that complements the geometry of bottom member 82. Therefore, no fasteners are required to directly fasten any of these components to bottom member 82.

[0121] The second bottom member shield part 113 includes sections 115a, 115b (FIG. 52) that extend into the main opening 102 to cover the edge 106 of the main opening 102. The second bottom member shield part 76 also covers sections 104a, 104b of the surface adjacent to the apex 103. In fact, the apex 103 protrudes through an opening 116 in the second bottom member shield part 113. Thus, the exposed surface 105 defined by the tip of the apex 103 remains uncovered. Sections 117a, 117b of the surface of the second bottom member shield part 113 facing the top member 81 are recessed with respect to the exposed surface 105. When the workpieces 2a-2f are gripped, a gap is formed between the shield (in this case the second bottom member shield part 113) and the surface of the workpieces 2a-2f. The electrolyte can flow between the shield and the surface of the workpieces 2a-2f, allowing treatment of that section of the surface. As a result, the exposed surface 105 can contact the surface of the workpieces 2a-2f at a relatively large distance from the outer edge of the workpieces 2a-2f. Only the area of ​​contact with the exposed surface 105 remains untreated.

[0122] The first and second bottom member shield parts 112, 113 are free-standing parts obtainable by additive manufacturing.

[0123] The fourth gripping device 118 (FIGS. 54-68) similarly includes an upper elongated conductive member 119 and a lower elongated conductive member 120. The upper member 119 extends longitudinally between a first end 121 and a second end 122. Similarly, the lower member 120 extends longitudinally between a first end 123 and a second end 124.

[0124] 57 and 64, the upper and lower members 119, 120 have a basic shape in the form of an elongated strip having a width in direction y that, in use, is generally parallel to the edges of the workpieces 2a-2f. However, the outer edges have an irregular shape and are chamfered and various openings are provided through the upper and lower members 119, 120.

[0125] The upper member 119 is provided with a curved portion 125 at a location along the extent (i.e., length) of the upper member 119 closer to the first end 121 than to the second end 122. The lower member 120 is also provided with a curved portion 126 at a location along the extent (i.e., length) of the lower member 120 closer to the first end 123 than to the second end 124. Each of the curved portions 125, 126 marks a transition between a relatively long section and a relatively short section of the upper member 119 and the lower member 120, respectively. These sections are at approximately right angles such that the upper and lower members 119, 120 are approximately J-shaped as viewed in the direction y that defines the width of the members 119, 120. The angle may be larger in alternative embodiments, for example up to 135°.

[0126] The upper and lower members 119, 120 are journaled for relative movement in a plane xz perpendicular to a direction y defining the width of the members 119, 120. Relative movement in the direction y defining the width of the members 119, 120 is constrained. The manner in which this is accomplished is essentially the same as that of the first gripping device 7. An upper bracket 127 and a lower bracket 128 (FIGS. 54, 55) are provided at respective locations along the extent of the upper and lower members 119, 120. The brackets 127, 128 are provided between the curved portions 125, 126 and the second ends 122, 124. In alternative embodiments, one of the brackets 127, 128 may be omitted or additional brackets may be used.

[0127] The lower guide 129 includes a journal bearing that includes a guide pin 130 attached to the lower member 120 and a guide block 131 fixed to the upper member 119 and provided with a hole for receiving the guide pin 130 (FIG. 56).

[0128] A biasing device in the form of a spring 132 is positioned to urge the upper and lower members 119, 120 toward one another. In this manner, the upper and lower members 119, 120 are journaled for primarily linear relative movement toward and away from one another.

[0129] The top member 119 is provided with a primary opening 133 therethrough. In the embodiment shown, there is also a secondary opening 134 therethrough. The primary opening 133 extends across the extent of the curved portion 125 and slightly beyond the curved portion 125 towards the second end 122. Thus, at least a portion of the primary opening 133 is located within the curved portion 125.

[0130] A protuberance in the form of an apex 135 is provided on the side of the top member 119 facing the bottom member 120 (FIG. 58). In the illustrated embodiment, the apex 135 is elongate and extends in a direction y defining the width of the top member 119 and projects in a direction z defining the thickness of the top member 119 at the first end 121. The apex 135 is provided at the first end 121. In an alternative embodiment, the apex 135 may be provided adjacent to, but not directly at, the first end 121. The apex 135 projects relative to adjacent surface sections 136a, 136b. An exposed surface 137 is defined by a tip of the apex 135. This exposed surface 137 is configured to directly contact the surface of the workpieces 2a-2f in use to provide electrical contact and exert a gripping force.

[0131] In the illustrated embodiment, a section of edge 138 of main opening 133 extends essentially along the base of top portion 135. In an alternative embodiment, the two sections are spaced apart in the direction that top member 119 extends.

[0132] Similarly, the lower member 120 is provided with a main opening 139 therethrough which is also located partially within the curved portion 126 and partially within the section of the lower member 120 extending between the curved portion 126 and the first end 123.

[0133] A protuberance in the form of an apex 140 (FIG. 65) is provided on the side of the lower member 120 facing the upper member 119. In the illustrated embodiment, the apex 140 is elongate and extends in a direction y defining the width of the lower member 120 and projects in a direction z defining the thickness of the lower member 120 at the first end 123. The apex 140 is provided at the first end 123. In alternative embodiments, the apex 140 may be provided adjacent to, but not directly at, the first end 123. The apex 140 projects relative to adjacent surface sections 141a, 141b. An exposed surface 142 is defined by the tip of the apex 140. This exposed surface 142 is configured to directly contact the surface of the workpieces 2a-2f in use to provide electrical contact and exert a gripping force.

[0134] In the illustrated embodiment, a section of edge 143 of main opening 139 extends essentially along the base of top 140. In an alternative embodiment, the two sections are spaced apart in the direction that bottom member 120 extends, such that there is also a section of abutment between top 140 and main opening 139 against which it projects.

[0135] In use, short sections of the upper and lower members 119, 120 and subsections of the longer sections of the upper and lower members 119, 120 are immersed in an electrolyte solution. The electrolyte solution can flow between the upper and lower members 119, 120 everywhere except where they are interconnected, particularly by the lower guide 129, and where the tops 135, 140 grip the workpieces 2a-2f. To avoid the upper and lower members 119, 120 being connected to respective or common current sources distorting the electric field between the workpiece surface and the counter electrode in the processing device 1, the parts of the upper and lower members 119, 120 that are intended to be immersed are shielded by electrically insulating shielding sections.

[0136] The top member 119 is shielded by the first, second and third top member shield parts 144-146, by the plug 147 and by the guide block 131. These parts are essentially the same as the parts of the first gripping device 7. They are made of a material that has a lower electrical conductivity than the material from which the top member 119 is made, although they do not necessarily all have to be made of the same material. The first, second and third top member shield parts 144-146 interlock with each other to form an assembly that has an internal shape that complements the shape of the top member 119, so that they are held in place without the need for fasteners. The plug 147 fits into an opening in the first top member shield part 144 and an opening in the second top member shield part 145, so that no additional fasteners are needed to hold the plug 147 in place. The secondary opening 134 is closed by the plug. A separate, e.g., resilient, sealing element may be provided to enhance the sealing effect provided by plug 147 and help keep plug 147 in place. Guide block 131 is secured to upper member 119 by fasteners (not shown).

[0137] An edge 138 of the main opening 133 is shielded by sections 148a, 148b (FIG. 63) of the third top member shield portion 146 that extend into the main opening 133, as well as by a section (not shown) of the guide block 131 that extends into the main opening 133. Thus, between the contact areas of the outer edges of the workpieces 2a-2f and the exposed faces 25, a shielding frame of liquid permeable windows is provided that expose sections of the surfaces of the workpieces 2a-2f.

[0138] The first top member shield part 144 and the third top member shield part 146 extend to the base of the top part 135. However, their surfaces facing towards the lower part 120 are recessed with respect to the exposed surface 137. The top part 135 in particular protrudes with respect to the third top member shield part 146. The third top member shield part 146 covers the sections 136a, 136b of the surface adjacent to the top part 135. When the workpieces 2a-2f are gripped, a gap is formed between the shield (in this case the third top member shield part 146) and the surface of the workpieces 2a-2f. The electrolyte can flow between the shield and the surface of the workpieces 2a-2f, allowing the treatment of that section of the surface. As a result, the exposed surface 137 can come into contact with the surface of the workpieces 2a-2f at a relatively large distance from the outer edge of the workpieces 2a-2f.

[0139] The first, second and third top member shield portions 144, 145, 146 are free-standing parts obtainable by additive manufacturing.

[0140] Bottom member 82 is shielded by first and second bottom member shield portions 149, 150. First and second bottom member shield portions 149, 150 interlock to provide an assembly having an internal shape that complements the shape of bottom member 120. Therefore, no fasteners are required to fasten either of these parts directly to bottom member 120. In contrast to first gripping device 7, clip 40 is also omitted.

[0141] The second bottom member shield part 150 includes sections 151a, 151b that extend into the main opening 139 (FIG. 68) to cover the edge 143 of the main opening 139. The second bottom member shield part 150 also covers the section 141a, 141b of the surface adjacent to the apex 140. Thus, the exposed surface 142 defined by the tip of the apex 140 remains uncovered. The section 152a, 152b of the surface of the second bottom member shield part 150 facing the top member 119 is recessed relative to the exposed surface 142. When the workpieces 2a-2f are gripped, a gap is formed between the shield (in this case the second bottom member shield part 150) and the surface of the workpieces 2a-2f. Electrolyte can flow between the shield and the surface of the workpieces 2a-2f, allowing processing of that section of the surface. As a result, exposed surface 142 can contact the surfaces of workpieces 2a-2f at a relatively large distance from the outer edges of the workpieces 2a-2f. Only the contact area with exposed surface 142 remains untreated.

[0142] The first and second bottom member shield parts 149, 150 are free-standing parts obtainable by additive manufacturing.

[0143] Fifth gripping device 153 (FIGS. 69-82) is similar to third gripping device 80. Fifth gripping device 153 also includes upper elongated conductive member 154 and lower elongated conductive member 155. Upper member 154 extends longitudinally between first end 156 and second end 157. Similarly, lower member 155 extends longitudinally between first end 158 and second end 159.

[0144] 73 and 78, the upper and lower members 154, 155 have a basic shape in the form of an elongated strip having a width in direction y that, in use, is generally parallel to the edges of the workpieces 2a-2f. However, the outer edges have an irregular shape and are chamfered and various openings are provided through the upper and lower members 154, 155.

[0145] The upper member 154 is provided with a curved portion 160 at a location along the extent (i.e., length) of the upper member 154 closer to the first end 156 than to the second end 157. The lower member 155 is also provided with a curved portion 161 at a location along the extent (i.e., length) of the lower member 155 closer to the first end 158 than to the second end 159. Each of the curved portions 160, 1616 marks a transition between the relatively long and relatively short sections of the upper and lower members 154, 155, respectively. These sections are at approximately right angles such that the upper and lower members 154, 155 are approximately J-shaped as viewed in the direction y that defines the width of the members 154, 155. The angle may be larger in alternative embodiments, for example up to 135°.

[0146] The upper and lower members 154, 155 are journaled for relative movement in a plane xz perpendicular to a direction y defining the width of the members 154, 155. Relative movement in the direction y defining the width of the members 154, 155 is constrained. The manner in which this is accomplished is the same as for the third gripping device 80. The upper guide 162 includes a pin 163 projecting from the lower member 155 which is movable in an elongated slot 164 (FIG. 73) through the longitudinally extending upper member 154.

[0147] The lower guide 165 comprises lower guide blocks 166a, 166b provided with V-shaped grooves extending in the longitudinal direction and facing each other, in which a lower guide part 167 comprising a lateral inverted V-shaped profile is arranged to move. This lower guide 165 also interconnects the upper and lower members 154, 155. The lower guide blocks 166a, 166b and the lower guide part 167 are made of electrically conductive material. In alternative embodiments, they may be made of metal or alloy, in which case electrical insulation may be interposed between them and the upper and lower members 154, 155 on which they are mounted.

[0148] A biasing device in the form of a spring 168 is positioned to urge the upper and lower members 154, 155 toward one another. In this manner, the upper and lower members 154, 155 are journaled for primarily linear relative movement toward and away from one another.

[0149] In addition to the upper guide slot 164, the top member 154 is provided with a primary opening 169 therethrough. In the embodiment shown, there is also a secondary opening 170 therethrough. The primary opening 169 extends across the entire extent of the curved portion 160 and slightly beyond the curved portion 160 towards the second end 157. Thus, at least a portion of the primary opening 169 is located within the curved portion 160.

[0150] A protuberance in the form of an apex 171 is provided on the side of the upper member 154 facing the lower member 155. In the illustrated embodiment, the apex 171 is elongate and extends in a direction y defining the width of the upper member 154 and projects in a direction z defining the thickness of the upper member 154 at the first end 156. The apex 171 is provided at the first end 156. In an alternative embodiment, the apex 171 may be provided adjacent to, but not directly at, the first end 156. The apex 171 projects relative to adjacent surface sections 172a, 172b (FIG. 74). An exposed surface 173 is defined by a tip of the apex 171. This exposed surface 173 is configured to directly contact the surface of the workpieces 2a-2f during use to provide electrical contact and exert a gripping force.

[0151] In the illustrated embodiment, a section of edge 174 of main opening 169 extends essentially along the base of top portion 171. In an alternative embodiment, the two sections are spaced apart in the direction that top member 154 extends.

[0152] Similarly, lower member 155 is provided with a main opening 175 therethrough that is also located partially within curved portion 161 and partially within the section of lower member 155 extending between curved portion 161 and first end 158.

[0153] A protuberance in the form of an apex 176 is provided on the side of the lower member 155 facing the upper member 154. In the illustrated embodiment, the apex 176 is elongate and extends in a direction y defining the width of the lower member 155 and projects in a direction z defining the thickness of the lower member 155 at the first end 158. The apex 176 is provided at the first end 158. In an alternative embodiment, the apex 176 may be provided adjacent to, but not directly at, the first end 158. The apex 176 projects relative to adjacent surface sections 177a, 177b (FIG. 79). An exposed surface 178 is defined by a tip of the apex 176. This exposed surface 178 is configured to directly contact the surface of the workpieces 2a-2f during use to provide electrical contact and exert a gripping force.

[0154] In the illustrated embodiment, a section of edge 179 of main opening 175 extends essentially along the base of top 176. In an alternative embodiment, the two sections are spaced apart in the direction that bottom member 154 extends, such that there is also an abutment section between top 176 and main opening 175 against which it projects.

[0155] In use, short sections of the upper and lower members 154, 155 and subsections of the longer sections of the upper and lower members 154, 155 are immersed in an electrolyte solution. The electrolyte solution can flow between the upper and lower members 154, 155 everywhere except where they are interconnected, particularly by the lower guide 165, and where the tops 171, 176 grip the workpieces 2a-2f. To avoid the upper and lower members 154, 155 being connected to respective or common current sources distorting the electric field between the workpiece surface and the counter electrode in the processing device 1, the parts of the upper and lower members 154, 155 that are intended to be immersed are shielded by electrically insulating shielding sections.

[0156] The top member 154 is shielded by first and second top member shield parts 180, 181, by lower guide blocks 166a, 166b, and by plug 182 (FIG. 72). They are not necessarily all made of the same material, but they are made of a material having a lower electrical conductivity than the material from which the top member 154 is made. The first and second top member shield parts 180, 181 interlock with each other to form an assembly having an internal shape that complements the shape of the top member 154, so that they are held in place without the need for fasteners. The plug 182 fits with an opening in the first top member shield part 180, so that no additional fasteners are needed to hold the plug 182 in place. The secondary opening 170 is closed by the plug. A separate, e.g., elastic, sealing element may be provided to enhance the sealing effect provided by the plug 182 and help keep the plug 182 in place.

[0157] An edge 174 of the main opening 169 is shielded by a section 183 (FIG. 77) of second top member shield portion 181 which extends into the main opening 169. Thus, between the outer edges of the workpieces 2a-2f and the contact areas with the exposed faces 173, a shielding frame of liquid permeable windows is provided which expose sections of the surfaces of the workpieces 2a-2f.

[0158] A second top member shield portion 181 extends toward and around the base of the top portion 171. The top portion 171 extends through an opening in the second top member shield portion 181 such that the exposed surface 173 is free of shielding.

[0159] The surfaces 184a, 184b of the second upper member shield part 181 facing towards the lower member 155 are recessed with respect to the exposed surface 173. When the workpieces 2a-2f are gripped, a gap is formed between the shield (in this case the second upper member shield part 181) and the surfaces of the workpieces 2a-2f. The electrolyte can flow between the shield and the surfaces of the workpieces 2a-2f, allowing the treatment of that section of the surface. As a result, the exposed surface 173 can come into contact with the surfaces of the workpieces 2a-2f at a relatively large distance from the outer edges of the workpieces 2a-2f.

[0160] The first and second top member shield parts 180, 181 are free-standing parts obtainable by additive manufacturing.

[0161] Bottom member 155 is shielded by first and second bottom member shield portions 185, 186 and by mounting block 187 (FIG. 72). First and second bottom member shield portions 185, 186 interlock to provide an assembly having an internal geometry that complements the geometry of bottom member 155. Therefore, no fasteners are required to directly fasten any of these components to bottom member 155.

[0162] The second bottom member shield part 186 includes sections 188a, 188b (FIG. 82) that extend into the main opening 175 to cover the edge 179 of the main opening 175. The second bottom member shield part 186 also covers sections 177a, 177b of the surface adjacent to the apex 176. In fact, the apex 176 protrudes through an opening 189 in the second bottom member shield part 186. Thus, the exposed surface 178 defined by the tip of the apex 176 remains uncovered. Sections 190a, 190b of the surface of the second bottom member shield part 186 facing the top member 154 are recessed relative to the exposed surface 178. When the workpieces 2a-2f are gripped, a gap is formed between the shield (in this case the second bottom member shield part 186) and the surface of the workpieces 2a-2f. The electrolyte can flow between the shield and the surface of the workpieces 2a-2f, allowing treatment of that section of the surface. As a result, the exposed surface 178 can contact the surface of the workpieces 2a-2f at a relatively large distance from the outer edge of the workpieces 2a-2f. Only the area of ​​contact with the exposed surface 178 remains untreated.

[0163] The first and second bottom member shield parts 185, 186 are free-standing parts obtainable by additive manufacturing.

[0164] A gripping device 5 having the features of one of the gripping devices 7, 42, 80, 118, 153 was used in an apparatus similar to that described above to electroplate a panel, with the results shown in FIG. 83. The thickness of the deposited layer is plotted against the distance in a direction x transverse to the direction y of movement of the panel through the apparatus. The first position P1 is the position at the location where the gripping device 5 gripped the panel. The second position P2 is the position at a location adjacent thereto. It can be seen that the graph for the first position P1 shows an indentation where the exposed surface of the gripping device 5 contacted the panel, but the thickness on both sides in the direction x transverse to the direction of movement is substantially the same. Thus, the contact area no longer needs to be close to the edge of the panel.

[0165] The invention is not limited to the embodiments described above, which may vary within the scope of the claims. Instead of a single peak 28, 23, there may for example be a pattern of protrusions defining the respective exposed surfaces. In this respect, reference is made to US Pat. No. 5,399,363. [Explanation of symbols]

[0166] 1 Processing equipment 2a~2f Workpiece 3. Bus 4. Transport System 5. Grasping Device 6 Conveyor 7 First gripping device 8 Upper member 9 Lower member 10 First end of upper member 11 second end of upper member 12 First end of lower member 13 Second end of lower member 14 Curved portion of upper member 15 Curved part of lower member 16 Guide pin 17 Guide block 18 Upper bracket 19 Lower bracket 20 Spring 21 Main opening in upper member 22 Secondary opening in upper member 23 Top of upper member 24a, 24b Proximal sections 25 Exposed surface of upper member 26 Main opening edge 27 Main opening of lower member 28 Top of lower member 29a, 29b Proximal sections 30 Exposed surface of lower member 31 Main opening edge 32 First upper member shield part 33 Second upper member shield part 34 Third upper member shield part 35 Plug 36a, 36b Section of third upper member shield 37 Guide Block Section 38 First lower member shield part 39 Second lower member shield part 40 clips 41 Second Lower Member Shield Section 42 Second gripping device 43 Upper member 44 Lower member 45 First end of upper member 46 second end of upper member 47 First end of lower member 48 Second end of lower member 49 Curved portion of upper member 50 Curved part in lower member 51 Upper guide 52 Upper guide pin 53 Upper guide slot 54 Lower guide 55 Lower guide pin 56 Lower guide slot 57 Corrugated shield section 58 Spring 59 Main opening in upper member 60 Secondary opening in upper member 61 Top of upper member 62a, 62b Proximal sections 63 Exposed surface on upper member 64 Main opening edge 65 Main opening in lower member 66 Top of lower member 67a, 67b Proximal sections 68 Exposed surface of lower member 69 Main opening edge 70 First upper member shield part 71 Second upper member shield part 72 Plug 73 First upper member shield section 74a, 74b Surface of second upper member shield part 75 First lower member shield part 76 Second lower member shield part 77 Third Lower Component Shield Part 78 clips 79 Third Lower Member Shield Section 80 Third gripping device 81 Upper member 82 Lower member 83 First end of upper member 84 Second end of upper member 85 First end of lower member 86 Second end of lower member 87 Curved part in upper member 88 Curved part in lower member 89 Upper guide 90 Upper guide pin 91 Upper guide slot 92 Lower guide 93a, 93b Lower guide block 94 Lower guide part 95 Spring 96 Main opening in upper member 97 Secondary opening in upper member 98 Top of upper member 99a, 99b Proximal sections 100 Exposed surface of upper member 101 Main opening edge 102 Main opening in lower member 103 Top of lower member 104a, 104b Proximal sections 105 Exposed surface of lower member 106 Main opening edge 107 First upper member shield part 108 Second upper member shield part 109 Plug 110 Second upper member shield section 111a, 111b Surface of second upper member shield part 112 first lower member shield part 113 Second lower member shield part 114 Mounting Block 115a, 115b Sections of second upper member shield portion 116 Second lower member shield opening 117a, 117b Sections of the surface of the second lower member shield part 118 Fourth Grasping Device 119 Upper member 120 Lower member 121 first end of upper member 122 second end of upper member 123 First end of lower member 124 Second end of lower member 125 Curved part in upper member 126 Curved part in lower member 127 Upper bracket 128 Bottom Bracket 129 Lower guide 130 Guide pin 131 Guide block 132 Spring 133 Main opening in upper member 134 Secondary opening in upper member 135 Top of upper member 136a, 136b Proximal sections 137 Exposed surface 138 Main opening edge 139 Main opening in lower member 140 Top of lower member 141a, 141b Proximal sections 142 Exposed surface 143 Main opening edge 144 First upper member shield part 145 Second upper member shield part 146 Third upper member shield part 147 Plug 148a, 148b Sections of third upper member shield 149 First lower member shield part 150 Second lower member shield part 151a, 151b Sections of second upper member shield 152a, 152b Sections of the surface of the second lower member shield part 153 Fifth Grasping Device 154 Upper member 155 Lower member 156 First end of upper member 157 Second end of upper member 158 First end of lower member 159 Second end of lower member 160 Curved part in upper member 161 Curved part in lower member 162 Upper guide 163 Upper guide pin 164 Upper guide slot 165 Lower guide 166a, 166b Lower guide block 167 Lower guide part 168 Spring 169 Main opening in upper member 170 Secondary opening in upper member 171 Top of upper member 172a, 172b Proximal sections 173 Exposed surface 174 Main opening edge 175 Main opening in lower member 176 Top of lower member 177a, 177b Proximal sections 178 Exposed surface 179 Main opening edge 180 First upper member shield part 181 Second upper member shield part 182 Plug 183 Second upper member shield section 184a, 184b Surface of second upper member shield part 185 First lower member shield part 186 Second Lower Member Shield Part 187 Mounting Block 188a, 188b Sections of second lower member shield 189 Opening in second lower member shield 190a, 190b Sections of the surface of the second lower member shield part

Claims

1. A device for gripping a workpiece (2) and making electrical contact with at least one surface of said workpiece (2), comprising: a first member (9, 44, 82, 120, 155) extending between a first end (12, 47, 85, 123, 158) and a second end (13, 48, 86, 124, 159); a second member (8, 43, 81, 119, 154) extending between a first end (10, 45, 88, 121, 156) and a second end (11, 46, 84, 122, 157) and journalled for movement relative to said first member (9, 44, 82, 120, 155), wherein said workpiece (2) is inserted between each of said first ends (10, 12; 45, 47; 83, 85; 121, 123; 156, 158) and moved along the extent of said first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) to said second ends (11, 13; 46, 48; ８４，８６； 122, 124; 157, 159) than the first end (10, 12; 45, 47; 154, 155) in respective clamping positions close to the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155), each of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) comprises at least one section located along the extent of that member (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) between the clamping location and the second end (11, 13; 46, 48; 84, 86; 122, 124; 157, 159); a second member (8, 43, 81, 119, 154), at least one of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) being electrically conductive and provided with a contact area in the clamping position for contacting a surface of the workpiece (2), the contact area including at least one exposed surface (25, 30; 63, 68; 100, 105; 137, 142; 173, 178) facing the other of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155); and at least one shield portion (17, 32-35, 38-40; 70-72, 75-77, 78; 93a, 93b, 94, 107-109, 112-114; 131, 144-147, 149, 150; 166a, 166b, 167, 180-182, 185-187) that is obtainable independently from the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) and made of a material having a lower electrical conductivity than the conductive material of the conductive members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155), At least one of the sections located between the clamping position and the second end (11, 13, 46, 48, 84, 86, 122, 124, 157, 159) of each of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) that are electrically conductive is the shield part (17, 32-35, 38-40; 70-72, 75-78; 93a, 93b, 94, 107 109, 112-114; 131, 144-147, 149, 150; 166a, 166b, 167, 180-182, 185-187) on a side of one of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) facing the other of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155), 166a, 166b, 167, 181, 186) on a side of one of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) facing the other, the shielding portion (17, 33, 34, 39, 40; 71, 77, 78; 93a, 93b, 94, 108, 113; 131, 145, 146, 150; 166a, 166b, 167, 181, 186) shielding a section of one of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) adjacent to a gap through which liquid can flow between the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155).

2. 2. The device of claim 1, wherein the shielded section located between the clamping location and the second end (11, 13; 46, 48; 84, 86; 122, 124; 157, 159) extends to the clamping location.

3. 3. A device according to claim 1 or 2, wherein at least one of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) is in the form of an elongated strip.

4. 2. The device of claim 1, wherein the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) are each provided with a curved portion (14, 15; 49, 50; 87, 88; 125, 126; 160, 161) along their extent at a position closer to the first end than to the second end (11, 13; 46, 48; 84, 86; 122, 124; 157, 159).

5. 2. The device of claim 1, wherein at least one of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) is provided with a liquid-permeable window (21, 27; 59, 65; 96, 102; 133, 139; 169, 175) through that member (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) in the section located along the extent of that member (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) between the clamping location and the second end (11, 13; 46, 48; 84, 86; 122, 124; 157, 159).

6. 6. The device according to claim 5, wherein at least a portion of the liquid-permeable window (21, 27; 59, 65; 96, 102; 133, 139; 169, 175) is located between the curved portion (14, 15; 49, 50; 87, 88; 125, 126; 160, 161) and the clamping position.

7. the liquid-permeable window is formed by an opening (21, 27; 59, 65; 96, 102; 133, 139; 169, 175) through the member (8, 9; 43, 44; 81, 82; 119, 120; 154, 155); at least one shield portion (17, 34, 39; 70, 77; 108, 113; 131, 146, 150; 181, 186) includes a section (37, 36a, 36b, 41; 73, 79; 110, 115a, 115b; 148a, 148b, 151a, 151b; 183, 188a, 188b) extending into said opening (21, 27; 59, 65; 96, 102; 133, 139; 169, 175) at an edge (26, 31; 64, 69; 101, 106; 138, 143; 174, 179) of said opening; 7. The device of claim 5 or 6, wherein the sections (37, 36a, 36b, 41; 73, 79; 110, 115a, 115b; 148a, 148b, 151a, 151b; 183, 188a, 188b) extending into the opening (21, 27; 59, 65; 96, 102; 133, 139; 169, 175) cover the edges (26, 31; 64, 69; 101, 106; 138, 143; 174, 179) of the opening (21, 27; 59, 65; 96, 102; 133, 139; 169, 175).

8. 2. The device of claim 1, wherein the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) are interconnected by at least one guide (16, 17, 18, 19; 51, 54; 89, 92; 127, 128, 129; 162, 165), e.g., a linear guide, that pivotally supports the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) for movement relative to one another.

9. 2. The device of claim 1, wherein the at least one exposed surface (25, 30; 63, 68; 100, 105; 137; 142; 173, 178) is formed at a distal end of a respective ridge (23, 28; 61, 66; 98, 103; 135, 140; 171, 176) that projects relative to adjacent surface sections (24a, 24b, 29a, 29b; 62a, 62b, 67a, 67b; 99a, 99b, 104a, 104b; 136a, 136b, 141a, 141b; 172a, 172b, 177a, 177b) of the conductive members (8, 43, 81, 119, 154) and (9, 44, 82, 120, 155).

10. 10. The device of claim 9, wherein at least one of the shielding portions shields a section (24a, 24b, 29a, 29b; 62a, 62b, 67a, 67b; 99a, 99b, 104a, 104b; 136a, 136b, 141a, 141b; 172a, 172b, 177a, 177b) of the adjacent surface.

11. 11. The device of claim 10, wherein the ridges (23, 28; 61, 66; 98, 103; 135, 140; 171, 176) protrude relative to at least one of the shield portions extending from the ridges (23, 28; 61, 66; 98, 103; 135, 140; 171, 176) toward the second ends (11, 46, 84, 122, 157) and (13, 48, 86, 124, 159).

12. any surface section (74a, 74b) defined by said shielding portion (34, 39; 71, 77; 108, 113; 146, 150; 181, 186) that is electrically conductive and forms a section along the extent of at least one of said first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) facing the other of said first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) from the base of said ridge (23, 28; 61, 66; 98, 103; 135, 140; 171, 176) towards said second end (11, 46, 84, 122, 157) and (13, 48, 86, 124, 159); 12. The device of claim 9, wherein the protrusions (23, 28; 61, 66; 98, 103; 135, 140; 171, 176) are recessed relative to the exposed surfaces (25, 30; 63, 68; 100, 105; 137, 142; 173, 178) formed at the distal ends of the protrusions (23, 28; 61, 66; 98, 103; 135, 140; 171, 176).

13. A transport system for transporting workpieces (2) through an apparatus (1) for electrochemical processing, comprising: At least one, for example a plurality of devices (7; 42; 80; 118; 153) according to claim 1; a drive device for driving the movement of at least one of said devices (7; 42; 80; 118; 153) along a path through said apparatus (1) while said device (7; 42; 80; 118; 153) holds said workpiece (2), the transport system is arranged to cause relative movement of at least some sections of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) including clamping positions at the beginning and end of the path to grip and release the workpiece (2), respectively.

14. 1. An apparatus for the electrochemical surface treatment of a workpiece (2), comprising: A conveying system (4) according to claim 13, at least one processing bath (3) containing at least one counter electrode; and at least one current source connected to at least one of the first and second members (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) of the device that are electrically conductive, the at least one current source establishing a voltage difference between the connected member (8, 9; 43, 44; 81, 82; 119, 120; 154, 155) and at least one of the at least one counter electrode.

15. 10. A method for manufacturing a device (7; 42; 80; 118; 153) according to claim 1, comprising the steps of:

10. The method of claim 1, wherein at least one of the shield portions (32-34, 38-40; 70, 71, 75-78; 107, 108, 112, 113; 144-146, 149, 150; 180, 181, 185, 186) is obtained by additive manufacturing.

Images