Surface grinding device

Abstract

The supply liquid is designed to prevent splashing during distribution. [Solution] The surface polishing apparatus comprises a rotating upper platen 4, a lower platen 2 facing the upper platen 4, and a supply liquid supply mechanism 5 that supplies supply liquid between the upper platen 4 and the lower platen 2. The supply liquid supply mechanism 5 has a concave cross-sectional shape with an upper opening 57a into which supply liquid is supplied from above, is formed in a ring shape, and has a trough-shaped part (trough 57) with a supply liquid discharge hole 57b at its bottom, and a cover member 60 is provided which is positioned at least above the supply liquid discharge hole 57b at the bottom of the trough 57.

Description

Technical Field

[0006] ,

[0001] The present invention relates to a surface grinding apparatus for grinding the surface of a workpiece.

Background Art

[0002] In a surface grinding apparatus for grinding the surface of a workpiece, grinding is performed by revolving and rotating a carrier that holds the workpiece between a rotating upper and lower platen, and supplying a slurry (abrasive) or the like.

[0003] The slurry is supplied, for example, through a ring-shaped gutter portion that rotates with the upper platen in order to guide it from a nozzle fixedly provided on a frame or the like to a supply hole or the like of the rotating upper platen (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] When the slurry jumps and scatters when being supplied from a nozzle provided on a frame or the like to the gutter portion, it causes scratches on the surface of the workpiece.

[0006] The present invention has been made in view of the above points, and aims to make it difficult for a supply liquid such as a slurry to scatter when being supplied.

Means for Solving the Problems

[0008] As a result, the covering member is provided at least above the supply liquid discharge hole, and the supply liquid discharge hole is covered, which makes it less likely for the supplied liquid to splash around the opening edge of the supply liquid discharge hole 57b. [Effects of the Invention]

[0009] In this invention, it is possible to prevent splashing when supplying the liquid. [Brief explanation of the drawing]

[0010] [Figure 1] Partial cross-sectional view of a surface polishing machine with the upper platen in the lowered position. [Figure 2] Schematic plan showing the rotation and revolution directions of the carrier. [Figure 3] Perspective view showing the configuration of the covering member [Figure 4] A schematic radial cross-sectional view showing the structure of the trough-shaped section. [Figure 5] A schematic cross-sectional view of the trough-shaped section in the circumferential direction. [Figure 6] Schematic diagram showing a modified version of the covering member. [Modes for carrying out the invention]

[0011] Hereinafter, an example of a planar polishing apparatus according to an embodiment of the present invention will be described in detail with reference to the drawings.

[0012] As shown in Figure 1, the surface polishing apparatus comprises a lower platen 2 and an upper platen 4 arranged on concentric axes, with polishing pads 21 and 41 attached to the lower platen 2 and upper platen 4, respectively. A workpiece 7, held in a holding hole 6a of a carrier 6, is sandwiched between these opposing polishing pads 21 and 41 for polishing. The lower platen 2 is rotationally driven by a motor (not shown). The upper platen 4, on the other hand, is mounted so as to hang down from a suspension plate 42 and is provided to be able to move up and down and rotate. More specifically, the suspension plate 42 is attached via a bearing 44 to the piston rod 43a of a cylinder 43 fixed to the frame of the surface polishing apparatus. This allows the upper platen 4 to move between a raised position (not shown) and a lowered position shown in Figure 1. The driver 11 is rotationally driven by a motor (not shown). The upper platen 4 is also provided with a hook 45 near its inner circumference, and when it is in the lowered position, the hook 45 engages with a vertical groove 11a of the driver 11, causing it to rotate. Furthermore, the present invention may also be applied to lapping or grinding without using the polishing pads described above.

[0013] Furthermore, a sun gear 1, which is rotationally driven by a motor (not shown), is formed near the inner circumference of the lower platen 2, while an internal gear 3, which is rotationally driven by a motor (not shown), is provided near the outer circumference of the lower platen 2. The sun gear 1 and the internal gear 3 are rotationally driven around the same axis L as the lower platen 2 and the upper platen 4. The carrier 6, which holds the workpiece 7, has external teeth formed on its outer circumference, and as shown in Figure 2, it meshes with the sun gear 1 and the internal gear 3, and rotates and revolves, so that both the front and back surfaces of the workpiece 7 are polished simultaneously by the rotating lower platen 2 and upper platen 4.

[0014] Here, the material, size, and shape of the workpiece 7 held by the carrier 6 are not particularly limited, and can be polished on thin plate-shaped workpieces such as hard disk substrates made of aluminum or glass, semiconductor substrates made of silicon, ceramics, or quartz.

[0015] Above the upper platen 4, a slurry supply mechanism 5 (supply liquid supply mechanism) for supplying a slurry (supply liquid) containing abrasive grains between the lower platen 2 and the upper platen 4 is provided. Specifically, the hanging plate 42 is provided with a gutter 57 (gutter-shaped part) formed in a ring shape. This gutter 57 has a concave cross-sectional shape such as a substantially U-shaped, V-shaped, or C-shaped longitudinal cross-section with an upper opening 57a, and the slurry is supplied from above through the flow pipe 58, the cock 58a, and the slurry nozzle 58b from the slurry supply source 59. At the bottom of the gutter 57, a slurry discharge hole 57b (supply liquid discharge hole) is provided, and the slurry is sent through the tube 56 to the slurry supply holes 51 to 54 arranged in plurality on the upper platen 4, and flows out from the lower end openings of the slurry supply holes 51 to 54 toward the lower platen 2.

[0016] As shown in FIGS. 4 to 5, at the bottom of the gutter 57, a covering member 60 having an upper surface portion 60a and a leg portion 60b is provided at least above the slurry discharge hole 57b. Note that the shape and arrangement of the leg portions 60b are not limited to being provided in a pair in the width direction as shown in the figure. For example, they may be arranged in a staggered manner, one by one, alternately on both sides in the width direction, or provided in a shape and arrangement in which they are not continuous and are spaced apart in the circumferential direction and the radial direction of the gutter 57, so that the slurry discharge hole 57b is blocked or the flow of the slurry in the radial and circumferential directions of the gutter 57 around the slurry discharge hole 57b is not impaired, that is, it may be provided in a shape and arrangement that does not prevent the flow of the slurry to the slurry discharge hole 57.

[0017] Further, the covering member 60 may be integrally formed in a ring shape, or may be divided into a plurality of arc-shaped portions. Also, the covering member 60 may be fixedly attached to the gutter 57, or may be merely placed on the bottom of the gutter 57. In this case, it is easy to clean the inside of the covering member 60 and the gutter 57. In particular, it may be provided so that there is play inside the gutter 57, that is, the position can be slightly displaced. As a result, since the covering member 60 is easy to remove, it is even easier to clean the inside of the covering member 60 and the gutter 57.

[0018] By providing the covering member 60 as described above at least above the slurry delivery hole 57b, it is possible to prevent the slurry dropped from the slurry nozzle 58b of the slurry supply mechanism 5 from splashing, such as bouncing near the opening edge of the slurry delivery hole 57b. Also, during the landing when the upper platen 4 descends, during the processing of the workpiece 7, and during the take-off of the upper platen 4 (when air or the like is blown to peel off the workpiece 7 to prevent the workpiece 7 from sticking when the upper platen 4 ascends), etc., it is also possible to easily prevent slurry, air, etc. from entering the tube 56 and the slurry flowing back from the slurry delivery hole 57b from splashing. Therefore, it is possible to easily prevent the occurrence of scratches on the surface of the workpiece due to, for example, the solid matter of the dried and coagulated slurry falling into the gutter 57 after the splashed slurry adheres to the surrounding structures and being supplied to the workpiece together with the liquid slurry for polishing. Also, it is possible to easily maintain the cleanliness of the device.

[0019] (Other matters) The radial cross-sectional shape on the upper surface of the covering member 60 (the cross-sectional shape in the plane including the rotation axis L of the upper platen 4) is not limited to the shape including the two sides sandwiching the apex angle of the isosceles triangle as described above. For example, as shown in FIG. 6, it may be formed into a shape such as an arc shape, an inclined shape that becomes lower from the outer peripheral side to the inner peripheral side of the ring-shaped gutter 57, a shape including the hypotenuse on the outer peripheral side of the apex angle of the triangle and the hypotenuse on the inner peripheral side with a gentler inclination. Thereby, in addition to preventing the splashing of the slurry as described above, it is also possible to easily disperse the slurry supplied from the slurry supply source 59 uniformly in the gutter 57, or to suppress the slurry from shifting to the outer peripheral side due to centrifugal force.

[0020] Also, the covering member 60 may be formed into a solid columnar shape, or may be formed of a plate-like member with the above-described upper surface shape. Also, the material is not particularly limited and may be formed of resin, metal, or a composite material.

[0021] Furthermore, although the above example shows a slurry as the supply fluid supplied between the upper and lower platens, it is not limited to this, and various supply fluids may be used, such as polishing slurry, lapping fluid, coolant, rinsing fluid, surfactant, etc., supplied between the upper and lower platens during polishing, lapping, grinding, etc. In other words, in addition to supply fluids that themselves contain abrasive particles, even if they themselves do not contain abrasive particles, as long as they are liquids that are likely to contain abrasive particles, it is easy to prevent the occurrence of scratches on the workpiece surface and maintain the cleanliness of the equipment by making them less likely to splatter. [Explanation of Symbols]

[0022] 1 Sangear 2 Lower surface plate 3 Internal Gear 4 Upper surface plate 5. Slurry supply mechanism 6 carriers 6a Retaining hole 7 Work 11 Drivers 11a Vertical groove 21·41 Polishing Pad 42 Hanging plate 43 cylinders 43a Piston rod 44 bearings 45 hooks 51-54 Slurry supply holes 56 tubes 57 Gutter 57a Top opening 57b Slurry discharge hole 58 Flow pipe 58a Cock 58b Slurry nozzle 59 Slurry Source 60 Covering member 60a Top part 60b Legs

Claims

1. A surface polishing apparatus for polishing the surface of a workpiece, A rotating upper platen, The lower surface plate opposite the upper surface plate mentioned above, A supply fluid supply mechanism that supplies supply fluid between the upper and lower plates, Equipped with, The above-mentioned supply liquid supply mechanism is, It has a concave cross-sectional shape with an upper opening into which the supply liquid is supplied from above, is formed in a ring shape, and has a trough-shaped section with a supply liquid discharge hole at the bottom, A planar polishing apparatus characterized by having a covering member provided at least above the supply liquid discharge hole at the bottom of the trough-shaped portion.

2. A planar polishing apparatus according to claim 1, A surface polishing apparatus characterized in that the cross-sectional shape of the surface on the upper surface of the covering member that includes the rotation axis of the upper platen is one of the following: an arc shape, a sloping shape that gets lower from the outer circumference to the inner circumference of the ring-shaped trough, a shape that includes two sides that enclose the vertex angle of an isosceles triangle, and a shape that includes a hypotenuse on the outer circumference side of the triangle and a hypotenuse on the inner circumference side that has a gentler slope.

3. A planar polishing apparatus according to claim 1, The surface polishing apparatus is characterized in that the covering member has at least an upper portion that covers the supply liquid discharge hole and legs that support the upper portion so as to leave a gap between it and the bottom of the trough-shaped portion, and the shape and arrangement of the legs are set so as not to obstruct the flow of the supply liquid to the supply liquid discharge hole.

4. A planar polishing apparatus according to claim 1, The above-mentioned covering member is characterized in that it is divided into multiple sections in the circumferential direction of the trough-shaped portion, and is a planar polishing apparatus.

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