Drying device

Abstract

To provide a dryer capable of improving drying efficiency.SOLUTION: A dryer dries a surface of an article by blowing hot air. The dryer includes: a drying chamber having a hot air supply port for blowing the hot air; a plurality of temperature sensors provided in the drying chamber and detecting a temperature in the drying chamber; and a control section controlling a drying condition in the drying chamber. The control section acquires temperature distribution information on the basis of the temperatures detected by the plurality of temperature sensors, and controls the drying condition on the basis of the temperature distribution information and a temperature distribution model that is a model related to temperature distribution in the drying chamber prepared beforehand through machine learning.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] Embodiments of the present invention relate to a drying device.

Background Art

[0002] There is a drying device that dries the surface of an article by blowing hot air. In such a drying device, it is required to improve the drying efficiency.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The problem to be solved by the present invention is to provide a drying device capable of improving the drying efficiency.

Means for Solving the Problems

[0005] The drying device according to the embodiment is a drying device that dries the surface of an article by blowing hot air, and includes a drying chamber having a hot air supply port for blowing the hot air, a plurality of temperature sensors provided inside the drying chamber for detecting the temperature inside the drying chamber, and a control unit for controlling the drying conditions inside the drying chamber. The control unit acquires temperature distribution information based on the temperature detected by the plurality of temperature sensors, and controls the drying conditions based on the temperature distribution information and a temperature distribution model that is a model regarding the temperature distribution inside the drying chamber created in advance by machine learning.

Brief Description of the Drawings

[0006] [Figure 1] It is a perspective view schematically showing a drying device according to the first embodiment. [Figure 2]This is an explanatory diagram schematically representing a drying apparatus according to the first embodiment. [Figure 3] This is an explanatory diagram schematically representing a drying apparatus according to the first embodiment. [Figure 4] This is a flowchart illustrating an example of the operation of the drying apparatus according to the first embodiment. [Figure 5] This is a schematic perspective view of a drying apparatus according to the second embodiment. [Figure 6] This is an explanatory diagram schematically showing a drying apparatus according to the second embodiment. [Figure 7] This is an explanatory diagram schematically showing a drying apparatus according to the second embodiment. [Figure 8] This is a flowchart illustrating an example of the operation of the drying apparatus according to the second embodiment. [Modes for carrying out the invention]

[0007] Each embodiment of the present invention will be described below with reference to the drawings. Drawings are schematic or conceptual, and the relationships between the thickness and width of each part, as well as the ratios of the sizes of different parts, are not necessarily identical to those of reality. Even when representing the same part, the dimensions and ratios may differ between drawings. In this specification and in each figure, elements similar to those described above are denoted by the same reference numerals with respect to previously shown figures, and detailed explanations are omitted as appropriate.

[0008] (First Embodiment) Figure 1 is a schematic perspective view of a drying apparatus according to the first embodiment. Figures 2 and 3 are schematic explanatory diagrams showing a drying apparatus according to the first embodiment. Figure 2 shows both a cross-sectional view and a block diagram of the drying apparatus as seen from the front. Figure 3 shows both a cross-sectional view and a block diagram of the drying apparatus as seen from above. As shown in Figures 1 to 3, the drying apparatus 100 according to the first embodiment comprises a drying chamber 10, a temperature sensor 25, and a control unit 30.

[0009] In this example, the drying apparatus 100 is a chamber-type drying apparatus. In a chamber-type drying apparatus, the article 1 to be dried is placed in the drying chamber 10 and dried by blowing hot air onto it. In a chamber-type drying apparatus, multiple articles 1 can be dried simultaneously by placing multiple articles 1 in the drying chamber 10. In a chamber-type drying apparatus, for example, the inside of the drying chamber 10 is sealed. In a chamber-type drying apparatus, for example, drying can be accelerated by lowering the air pressure inside the drying chamber 10 to below atmospheric pressure.

[0010] The drying apparatus 100 may also be a conveyor-type drying apparatus equipped with a transport section. In a conveyor-type drying apparatus, the articles 1 to be dried are placed on the transport section and transported, and the articles 1 are dried by passing them through a drying chamber 10 from which hot air is blown. In a conveyor-type drying apparatus, drying can be performed continuously on multiple articles 1 transported by the transport section. In a conveyor-type drying apparatus, for example, the inside of the drying chamber 10 is not sealed. The transport section is, for example, a belt conveyor.

[0011] The drying chamber 10 has a main body 11 and a hot air supply port 15 provided in the main body 11. The main body 11 is rectangular in shape. The main body 11 has a plurality of walls facing each other. In this example, the main body 11 has side walls 11a and 11b facing each other in the left-right direction, a ceiling 11c and a bottom 11e facing each other in the up-down direction, and a front wall (not shown) and a rear wall 11f facing each other in the front-back direction. Figures 1 to 3 show the state with the front wall removed. The front wall is, for example, a door.

[0012] The bottom portion 11e is located at the bottom of the main body portion 11. The article 1 is placed, for example, on the bottom portion 11e. The article 1 may also be placed, for example, on a mounting portion provided on the bottom portion 11e. The top portion 11c is located at the top of the main body portion 11 and covers the top of the bottom portion 11e. The side wall portion 11a connects the left end of the bottom portion 11e to the left end of the top portion 11c. The side wall portion 11b connects the right end of the bottom portion 11e to the right end of the top portion 11c. The rear wall portion 11f connects the rear end of the bottom portion 11e to the rear end of the top portion 11c. The rear wall portion 11f connects the rear end of the side wall portion 11a to the rear end of the side wall portion 11b.

[0013] The hot air supply port 15 is located inside the drying chamber 10 and blows hot air into the drying chamber 10. The hot air supply port 15 blows hot air onto an article 1 placed inside the drying chamber 10, for example. This dries the surface of the article 1. The hot air supply port 15 is electrically connected to the control unit 30. The hot air supply port 15 supplies hot air in response to commands from the control unit 30, for example.

[0014] Multiple hot air supply ports 15 can be provided, for example. In this example, the hot air supply ports 15 include a hot air supply port 15a provided on the side wall 11a, a hot air supply port 15b provided on the side wall 11b, and a hot air supply port 15c provided on the ceiling 11c. The hot air supply ports 15 may also be provided on the rear wall 11f or the front wall (door). The number of hot air supply ports 15 can be one or more. It is preferable that the number of hot air supply ports 15 be two or more.

[0015] The hot air supply ports 15a and 15b are provided at positions facing each other in the left - right direction. The blowing direction of the hot air supply port 15a is different from the blowing direction of the hot air supply port 15b. For example, the blowing direction of the hot air supply port 15a is opposite to the blowing direction of the hot air supply port 15b. For example, the hot air supply port 15a blows air toward the right side. For example, the hot air supply port 15b blows air toward the left side. Also, the blowing direction of the hot air supply port 15c is different from the blowing direction of the hot air supply port 15a and the blowing direction of the hot air supply port 15b. For example, the hot air supply port 15c blows air downward. Thereby, hot air can be blown against the article 1 from a plurality of directions, suppressing the occurrence of uneven drying and improving the drying efficiency. In FIGS. 2 and 3, the blowing directions of the respective hot air supply ports 15 are indicated by white arrows.

[0016] The temperature sensor 25 is provided inside the drying chamber 10. The temperature sensor 25 detects the temperature inside the drying chamber 10. The temperature sensor 25 may continuously detect the temperature or may intermittently detect the temperature at predetermined time intervals. The temperature sensor 25 is electrically connected to the control unit 30. The temperature sensor 25 outputs information regarding the detected temperature to the control unit 30.

[0017] A plurality of temperature sensors 25 are provided. The plurality of temperature sensors 25 are respectively provided on the inner surfaces of different wall portions of the drying chamber 10. In this example, as the temperature sensors 25, a temperature sensor 25a provided on the inner surface of the side wall portion 11a, a temperature sensor 25b provided on the inner surface of the side wall portion 11b, and a temperature sensor 25c provided on the inner surface of the ceiling portion 11c are provided. The temperature sensor 25 may be provided on the inner surface of the rear wall portion 11f, the inner surface of the front wall portion (door), or the inner surface of the bottom portion 11e. The number of the temperature sensors 25 may be two or more. For example, it is preferable that one or more temperature sensors 25 are provided on the inner surface of each wall portion. For example, two or more temperature sensors 25 may be provided on the inner surface of one wall portion.

[0018] The control unit 30 controls the drying conditions inside the drying chamber 10. The control unit 30 controls the drying conditions, for example, by controlling at least one of the temperature of the hot air blown from the hot air supply port 15, the direction of the hot air, the air volume of the hot air, and the timing of starting and stopping the supply of the hot air. Further, when a plurality of hot air supply ports 15 are provided, the control unit 30 may control the drying conditions, for example, by switching the hot air supply port 15 that blows the hot air.

[0019] Also, a fan for controlling the direction and speed of the air flow inside the drying chamber 10 may be provided inside the drying chamber 10. In this case, the control unit 30 may control the drying conditions, for example, by controlling the rotation direction and rotation speed of the fan.

[0020] Also, the control unit 30 may control the drying conditions, for example, by controlling the air pressure inside the drying chamber 10.

[0021] A temperature distribution model is stored in the control unit 30. The temperature distribution model is a model regarding the temperature distribution inside the drying chamber 10. The temperature distribution model is created by machine learning. The temperature distribution model is created using, for example, a support vector machine or a convolutional neural network. The temperature distribution model is created, for example, using the temperature distribution before starting the drying of the article 1, the temperature distribution during the drying of the article 1, and the temperature distribution in the state where the drying of the article is completed, as teacher data. That is, the temperature distribution model is, for example, a model that models the temporal change of the temperature distribution inside the drying chamber 10 from before starting the drying of the article 1 until the drying of the article 1 is completed.

[0022] The control unit 30 acquires temperature distribution information based on the temperatures detected by the plurality of temperature sensors 25. The temperature distribution information is obtained from the temperatures detected at each of the plurality of temperature sensors 25 provided at different positions.

[0023] The control unit 30 controls the drying conditions based on, for example, temperature distribution information and a temperature distribution model. The control unit 30 performs feedback control on the drying conditions based on, for example, information on the current temperature distribution in the drying chamber 10 and a temperature distribution model created in advance by machine learning. The control unit 30 can also estimate the drying state of article 1 based on, for example, the temperature distribution information and the temperature distribution model. The control unit 30 may, for example, control the drying conditions based on the estimated drying state of article 1.

[0024] The following provides a more detailed explanation of how to control drying conditions based on temperature distribution information and temperature distribution models. Figure 4 is a flowchart illustrating an example of the operation of the drying apparatus according to the first embodiment. As shown in Figure 4, first, the control unit 30 acquires temperature distribution information based on the temperature inside the drying chamber 10 detected by the multiple temperature sensors 25 (step S101).

[0025] Next, the control unit 30 determines whether the temperature distribution information differs from the temperature distribution model (step S102). For example, the control unit 30 determines that the temperature distribution information differs from the temperature distribution model if the temperature at a predetermined location in the temperature distribution information is not approximately the same as the temperature at the same location in the temperature distribution model. The control unit 30 may also determine whether the temperature distribution information differs from the temperature distribution model by comparing the temperature in the temperature distribution information with the temperature in the temperature distribution model at multiple locations (predetermined locations), for example. Alternatively, the control unit 30 may also determine whether the temperature distribution information differs from the temperature distribution model by comparing the temperature in the temperature distribution information with the temperature in the temperature distribution model over the entire drying chamber, for example.

[0026] If it is determined that the temperature distribution information differs from the temperature distribution model (step S102: Yes), the control unit 30 changes the drying conditions (step S103). For example, the control unit 30 changes the drying conditions so that the difference between the temperature distribution information and the temperature distribution model becomes smaller.

[0027] For example, when the temperature at a predetermined location in the temperature distribution information is lower than the temperature at the same location in the temperature distribution model, the control unit 30 changes the drying conditions to promote drying in the drying chamber 10. For example, the control unit 30 promotes drying in the drying chamber 10 by increasing the temperature of the hot air blown from the hot air supply port 15, directing the hot air closer to the item 1, increasing the airflow rate of the hot air, or continuing the supply of hot air.

[0028] The control unit 30, for example, changes the drying conditions so as to suppress drying in the drying chamber 10 when the temperature at a predetermined location in the temperature distribution information is greater than the temperature at the same location in the temperature distribution model. The control unit 30 suppresses drying in the drying chamber 10 by, for example, lowering the temperature of the hot air blown from the hot air supply port 15, moving the direction of the hot air away from the article 1, reducing the airflow rate of the hot air, or stopping the supply of hot air.

[0029] If it is determined that the temperature distribution information is the same as that of the temperature distribution model (step S102: No), the control unit 30 maintains the drying conditions (step S104).

[0030] In this way, by controlling drying conditions based on temperature distribution information and a temperature distribution model, uneven drying can be suppressed and drying efficiency can be improved. Furthermore, since the timing of drying completion can be predicted, the drying time can be prevented from becoming too long, thereby improving drying efficiency.

[0031] Furthermore, by acquiring temperature distribution information based on the temperatures detected by multiple temperature sensors 25, the temperature distribution within the drying chamber 10 can be understood more accurately. This improves the efficiency of drying.

[0032] Furthermore, by installing multiple temperature sensors 25 on the inner surfaces of different walls of the drying chamber 10, the temperature distribution within the drying chamber 10 can be grasped more accurately. This improves the efficiency of drying.

[0033] (Second Embodiment) Figure 5 is a schematic perspective view of a drying apparatus according to the second embodiment. Figures 6 and 7 are schematic explanatory diagrams showing a drying apparatus according to the second embodiment. Figure 6 shows both a cross-sectional view and a block diagram of the drying apparatus as seen from the front. Figure 7 shows both a cross-sectional view and a block diagram of the drying apparatus as seen from above. As shown in Figures 5 to 7, the drying apparatus 100A according to the second embodiment is provided with a humidity sensor 26 in addition to the temperature sensor 25. Otherwise, it is the same as the drying apparatus 100 according to the first embodiment.

[0034] The humidity sensor 26 is installed inside the drying chamber 10. The humidity sensor 26 detects the humidity inside the drying chamber 10. The humidity sensor 26 may continuously detect the temperature or intermittently detect the humidity at predetermined intervals. The humidity sensor 26 is electrically connected to the control unit 30. The humidity sensor 26 outputs information about the detected humidity to the control unit 30.

[0035] For example, multiple humidity sensors 26 may be provided. Each of the multiple humidity sensors 26 is provided on the inner surface of a different wall of the drying chamber 10. In this example, the humidity sensors 26 include a humidity sensor 26a provided on the inner surface of the side wall 11a, a humidity sensor 26b provided on the inner surface of the side wall 11b, and a humidity sensor 26c provided on the inner surface of the ceiling 11c. The humidity sensors 26 may also be provided on the inner surface of the rear wall 11f, the front wall (door), or the bottom 11e. The number of humidity sensors 26 may be one or more. Preferably, the number of humidity sensors 26 is two or more. Preferably, the number of humidity sensors 26 is the same as the number of temperature sensors 25. For example, it is preferable that one or more humidity sensors 26 are provided on the inner surface of each wall. For example, two or more humidity sensors 26 may be provided on the inner surface of one wall. The humidity sensors 26 are provided, for example, on the wall where the temperature sensors 25 are provided.

[0036] The control unit 30 stores a humidity distribution model in addition to the temperature distribution model. The humidity distribution model is a model of the humidity distribution inside the drying chamber 10. The humidity distribution model is created using machine learning. For example, the humidity distribution model is created using a support vector machine or a convolutional neural network. For example, the humidity distribution model is created using the humidity distribution before drying of item 1 begins, the humidity distribution while drying item 1 is in progress, and the humidity distribution when drying of item 1 is complete as training data. In other words, the humidity distribution model models the change in humidity distribution inside the drying chamber 10 over time, for example, from before drying of item 1 begins until drying of item 1 is complete.

[0037] The control unit 30 acquires humidity distribution information based on the humidity detected by the humidity sensor 26. The humidity distribution information is obtained, for example, from the humidity detected at each of the multiple humidity sensors 26 located at different positions. The humidity distribution information may also be, for example, the humidity detected at a single humidity sensor 26.

[0038] The control unit 30 controls the drying conditions based, for example, on temperature distribution information, a temperature distribution model, humidity distribution information, and a humidity distribution model. The control unit 30 performs feedback control on the drying conditions based, for example, on the current temperature distribution information in the drying chamber 10, a temperature distribution model created in advance by machine learning, and the current humidity distribution information in the drying chamber 10 and a humidity distribution model created in advance by machine learning. The control unit 30 can also estimate the drying state of article 1 based, for example, on temperature distribution information, a temperature distribution model, humidity distribution information, and a humidity distribution model. The control unit 30 may, for example, control the drying conditions based on the estimated drying state of article 1.

[0039] The following provides a more detailed explanation of temperature distribution information, temperature distribution models, humidity distribution information, and the control of drying conditions based on humidity distribution models. Figure 8 is a flowchart illustrating an example of the operation of the drying apparatus according to the second embodiment. As shown in Figure 8, first, the control unit 30 acquires temperature distribution information based on the temperature inside the drying chamber 10 detected by the multiple temperature sensors 25 (step S201). Step S201 can be performed in the same manner as step S101.

[0040] Next, the control unit 30 acquires humidity distribution information based on the humidity inside the drying chamber 10 detected by the humidity sensor 26 (step S202).

[0041] Next, the control unit 30 determines whether the temperature distribution information differs from the temperature distribution model (step S203). Step S203 can be performed in the same manner as step S102.

[0042] If it is determined that the temperature distribution information differs from the temperature distribution model (step S203: Yes), the control unit 30 changes the drying conditions (step S204). Step S204 can be performed in the same manner as step S103.

[0043] If it is determined that the temperature distribution information is the same as the temperature distribution model (step S203: No), the control unit 30 determines whether the humidity distribution information is different from the temperature distribution model (step S205). For example, the control unit 30 determines that the humidity distribution information is different from the humidity distribution model if the humidity at a predetermined location in the humidity distribution information is not the same as the humidity at the same location in the humidity distribution model. The control unit 30 may also determine whether the humidity distribution information is different from the humidity distribution model by comparing the humidity in the humidity distribution information with the humidity in the humidity distribution model at multiple locations (predetermined locations), for example. Alternatively, the control unit 30 may also determine whether the humidity distribution information is different from the humidity distribution model by comparing the humidity in the humidity distribution information with the humidity in the humidity distribution model over the entire drying room, for example.

[0044] If it is determined that the humidity distribution information differs from the humidity distribution model (step S205: Yes), the control unit 30 proceeds to step S204. The control unit 30 changes the drying conditions, for example, so that the difference between the humidity distribution information and the humidity distribution model becomes smaller.

[0045] For example, when the humidity at a predetermined location in the humidity distribution information is greater than the humidity at the same location in the humidity distribution model, the control unit 30 changes the drying conditions to promote drying in the drying chamber 10. For example, the control unit 30 promotes drying in the drying chamber 10 by increasing the temperature of the hot air blown from the hot air supply port 15, directing the hot air closer to the item 1, increasing the airflow rate of the hot air, or continuing the supply of hot air.

[0046] For example, when the humidity at a predetermined location in the humidity distribution information is lower than the humidity at the same location in the humidity distribution model, the control unit 30 changes the drying conditions so that drying in the drying chamber 10 is suppressed. For example, the control unit 30 suppresses drying in the drying chamber 10 by lowering the temperature of the hot air blown from the hot air supply port 15, moving the direction of the hot air away from the item 1, reducing the airflow rate of the hot air, or stopping the supply of hot air.

[0047] If it is determined that the humidity distribution information is the same as that of the humidity distribution model (step S205: No), the control unit 30 maintains the dry conditions (step S206). Step S206 can be performed in the same manner as step S104.

[0048] In this example, the drying conditions are changed when the temperature distribution information differs from the temperature distribution model (step S203: Yes), or when the humidity distribution information differs from the humidity distribution model (step S205: Yes). However, the drying conditions may also be changed when the temperature distribution information differs from the temperature distribution model (step S203: Yes) AND the humidity distribution information differs from the humidity distribution model (step S205: Yes). In other words, steps S203 and S205 may have an AND relationship instead of an OR relationship.

[0049] In this way, by controlling drying conditions based on temperature distribution information, temperature distribution models, humidity distribution information, and humidity distribution models, uneven drying can be suppressed, and drying efficiency can be further improved. In addition, since the timing of drying completion can be predicted more accurately, the drying time required can be prevented from becoming too long, further improving drying efficiency.

[0050] Furthermore, by acquiring humidity distribution information based on the humidity detected by multiple humidity sensors 26, the humidity distribution within the drying chamber 10 can be understood more accurately. This improves the efficiency of drying.

[0051] Furthermore, by installing multiple humidity sensors 26 on the inner surfaces of different walls of the drying chamber 10, the humidity distribution within the drying chamber 10 can be determined more accurately. This improves the efficiency of drying.

[0052] As described above, according to the embodiment, a drying apparatus is provided that can improve drying efficiency.

[0053] The drying apparatus according to the embodiment can be used, for example, in the manufacture of semiconductor devices. The drying apparatus according to the embodiment can be used, for example, in a film formation process to dry a coating applied to a substrate, or in a cleaning process to clean and dry a substrate.

[0054] Although several embodiments of the present invention have been illustrated above, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. Furthermore, the embodiments described above can be implemented in combination with each other. [Explanation of Symbols]

[0055] 1. Item; 10. Drying Chamber; 11. Main Body; 11a, 11b. Side Walls; 11c. Opening; 11e. Bottom; 11f. Rear Wall; 15, 15a, 15b, 15c. Hot Air Supply Port; 25, 25a, 25b, 25c. Temperature Sensor; 26, 26a, 26b, 26c. Humidity Sensor; 30. Control Unit; 100, 100A. Drying Device

Claims

1. A drying device that dries the surface of an item by blowing hot air, a drying chamber having a hot air supply port for blowing the hot air; a plurality of temperature sensors provided inside the drying chamber for detecting the temperature inside the drying chamber; a control unit that controls drying conditions inside the drying chamber; Equipped with The control unit acquires temperature distribution information based on the temperatures detected by the plurality of temperature sensors, and controls the drying conditions based on the temperature distribution information and a temperature distribution model, which is a model of the temperature distribution inside the drying chamber that has been created in advance by machine learning.

2. The drying chamber has a plurality of wall portions facing in different directions, The drying device according to claim 1 , wherein the plurality of temperature sensors are provided on the inner surfaces of different wall portions.

3. a humidity sensor provided inside the drying chamber to detect humidity inside the drying chamber; 3. The drying device according to claim 1, wherein the control unit acquires humidity distribution information based on the humidity detected by the humidity sensor, and controls the drying conditions based on the temperature distribution information, the temperature distribution model, the humidity distribution information, and a humidity distribution model that is a model regarding humidity distribution inside the drying chamber that is created in advance by machine learning.

4. The humidity sensor is provided in plurality, The drying chamber has a plurality of wall portions facing in different directions, The drying device according to claim 3 , wherein the plurality of humidity sensors are provided on the inner surfaces of different wall portions.

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