Semiconductor module mounting structure

Abstract

A mounting structure for a semiconductor module comprises: a substrate having a main surface and a rear surface that face mutually opposite sides in the thickness direction; a semiconductor module mounted on the main-surface side of the substrate; and a heat dissipation member that dissipates heat from the semiconductor module. The substrate has a cavity section passing through in the thickness direction. The heat dissipation member includes a main part positioned on the rear-surface side in relation to the substrate; and a projecting part that is accommodated in the cavity section. The semiconductor module is bonded to the projecting part.

Description

[Technical field]

[0001] The present disclosure relates to a mounting structure for a semiconductor module. [Background technology]

[0002] Conventionally, semiconductor module mounting structures have been adopted in automobiles, industrial equipment, and the like. Patent Document 1 discloses an example of a semiconductor module mounting structure. In the semiconductor module mounting structure disclosed in this document, a semiconductor module has a built-in semiconductor element such as a MOSFET, and the semiconductor module is mounted on a substrate. In this mounting structure, the semiconductor module is joined to a heat dissipation member. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2013-94022 A Summary of the Invention [Problem to be solved by the invention]

[0004] The heat dissipation member is provided in an upright state relative to the substrate, which causes a problem that the mounting structure of the semiconductor module becomes bulky in the thickness direction of the substrate.

[0005] In view of the above circumstances, an object of the present disclosure is to provide a mounting structure for a semiconductor module that can be made thinner. [Means for solving the problem]

[0006] The mounting structure of a semiconductor module provided by the present disclosure comprises a substrate having a main surface and a back surface facing opposite each other in a thickness direction, a semiconductor module mounted on the main surface side of the substrate, and a heat dissipation member for dissipating heat from the semiconductor module. The substrate has a gap penetrating in the thickness direction. The heat dissipation member has a main body portion located on the back surface side of the substrate and a protrusion portion housed in the gap portion. The semiconductor module is joined to the protrusion portion.

[0007] Preferably, the heat dissipation member has a cooling passage through which a cooling medium flows.

[0008] Preferably, the cooling passage overlaps with the protrusion when viewed along the thickness direction.

[0009] Preferably, the semiconductor module includes a semiconductor element, an island portion to which the semiconductor element is bonded, lead terminals electrically connected to the semiconductor element, and a resin portion covering the semiconductor element.

[0010] Preferably, the island portion has an exposed surface exposed from the resin portion, and the exposed surface is joined to the protruding portion.

[0011] Preferably, the lead terminal has a base portion protruding from the resin portion in a direction intersecting the thickness direction, and a tip portion extending along the thickness direction, the tip portion penetrating the substrate.

[0012] Preferably, the tip portion protrudes from the rear surface of the substrate and is spaced apart from the heat dissipation member.

[0013] Preferably, the mounting structure further includes an insulating layer interposed between the rear surface of the substrate and the main body of the heat dissipation member.

[0014] Preferably, the insulating layer comprises a gel material.

[0015] Preferably, the insulating layer comprises a ceramic.

[0016] Preferably, the void portion is a through hole having a closed edge when viewed along the thickness direction.

[0017] Preferably, the gap is a cutout having an open edge when viewed along the thickness direction.

[0018] Preferably, the mounting structure further includes a fixing member for fixing the substrate and the heat dissipation member with a gap therebetween.

[0019] Preferably, the protrusion has a joining surface joined to the semiconductor module.

[0020] Preferably, the joining surface is flush with the main surface.

[0021] Preferably, the joining surface is located on a side toward which the main surface faces relative to the main surface in the thickness direction.

[0022] Preferably, the joining surface is located within the gap in the thickness direction. Effect of the Invention

[0023] According to the present disclosure, it is possible to reduce the thickness of the mounting structure of the semiconductor module.

[0024] Other features and advantages of the present disclosure will become more apparent from the following detailed description taken in conjunction with the accompanying drawings. [Brief description of the drawings]

[0025] [Figure 1] 1 is a perspective view showing a main part of a mounting structure of a semiconductor module according to a first embodiment of the present disclosure; [Diagram 2] 1 is a plan view of a main portion showing a mounting structure of a semiconductor module according to a first embodiment of the present disclosure. [Diagram 3]FIG. 3 is a cross-sectional view taken along line III-III in FIG. [Figure 4] 3 is a cross-sectional view of a main part taken along line III-III in FIG. 2. [Diagram 5] 3 is a cross-sectional view of a main part taken along line VV in FIG. 2. [Figure 6] 1 is an enlarged cross-sectional view of a main portion showing a mounting structure of a semiconductor module according to a first embodiment of the present disclosure. [Figure 7] 1 is an enlarged cross-sectional view of a main portion showing a first modified example of a bonding layer of a mounting structure for a semiconductor module according to a first embodiment of the present disclosure. FIG. [Figure 8] 1 is an enlarged cross-sectional view of a main portion showing a mounting structure of a semiconductor module according to a first embodiment of the present disclosure. [Figure 9] 4 is an enlarged cross-sectional view of a main portion showing a first modified example of an insulating layer of the mounting structure for a semiconductor module according to the first embodiment of the present disclosure. FIG. [Figure 10] 11 is an enlarged cross-sectional view of a main portion showing a second modified example of the insulating layer of the mounting structure for the semiconductor module according to the first embodiment of the present disclosure. FIG. [Figure 11] 1 is a plan view of a main portion showing a first modified example of a mounting structure for a semiconductor module according to a first embodiment of the present disclosure. [Figure 12] 11 is a plan view of a main portion showing a mounting structure of a semiconductor module according to a second embodiment of the present disclosure. FIG. [Figure 13] 13 is a cross-sectional view taken along line XIII-XIII in FIG. 12. [Figure 14] 13 is a plan view of a main portion showing a mounting structure of a semiconductor module according to a third embodiment of the present disclosure. FIG. [Figure 15] 13 is a cross-sectional view of a main part showing a mounting structure of a semiconductor module according to a fourth embodiment of the present disclosure. FIG. [Figure 16] 13 is a cross-sectional view of a main part showing a mounting structure of a semiconductor module according to a fifth embodiment of the present disclosure. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0026] Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the drawings.

[0027] First Embodiment 1 to 10 show a semiconductor module mounting structure according to a first embodiment of the present disclosure. The semiconductor module mounting structure A1 of this embodiment includes a substrate 1, a heat dissipation member 2, a semiconductor module 3, a bonding layer 7, an insulating layer 8, and a fixing member 9. The semiconductor module mounting structure A1 is used, for example, in the power supply unit of an automobile.

[0028] FIG. 1 is a perspective view of a main part of the mounting structure A1 of a semiconductor module. FIG. 2 is a plan view of a main part of the mounting structure A1 of a semiconductor module. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 2. FIG. 4 is a cross-sectional view taken along line III-III in FIG. 2. FIG. 5 is a cross-sectional view taken along line VV in FIG. 2. FIG. 6 is an enlarged cross-sectional view of a main part of the mounting structure A1 of a semiconductor module. FIG. 7 is an enlarged cross-sectional view of a main part of a first modified example of a bonding layer of the mounting structure A1 of a semiconductor module. FIG. 8 is an enlarged cross-sectional view of a main part of the mounting structure A1 of a semiconductor module. FIG. 9 is an enlarged cross-sectional view of a main part of a first modified example of an insulating layer of the mounting structure A1 of a semiconductor module. FIG. 10 is an enlarged cross-sectional view of a main part of a second modified example of an insulating layer of the mounting structure A1 of a semiconductor module. In these figures, the z direction corresponds to the thickness direction of the present disclosure. The x direction and the y direction are perpendicular to each other and are each perpendicular to the z direction.

[0029] The substrate 1 has a main surface 11 and a back surface 12 facing opposite sides in the z direction. The substrate 1 has a main material made of, for example, glass epoxy resin, and a wiring pattern (not shown) formed on the main material. The substrate 1 is appropriately provided with connectors and terminals (neither of which are shown) for connection to the outside.

[0030] 3, a semiconductor module 3 and a plurality of electronic components 300 are mounted on a main surface 11 of the substrate 1. Other electronic components may be mounted on a rear surface 12 of the substrate 1.

[0031] The substrate 1 has a void 15. As shown in Figs. 4 and 5, the void 15 penetrates the substrate 1 in the z direction. The shape and position of the void 15 are not particularly limited. As shown in Fig. 2, in this embodiment, the void 15 is a through hole with a closed edge when viewed along the z direction. The shape of the void 15 when viewed along the z direction can be, for example, a rectangular shape, a polygonal shape, a circular shape, an elliptical shape, or the like, and in the illustrated example, it is a rectangular shape.

[0032] The heat dissipation member 2 is a member for dissipating heat from the semiconductor module 3. There are no particular limitations on the material of the heat dissipation member 2, and examples of the material include metals such as aluminum and stainless steel. As shown in Figs. 3 to 5, the heat dissipation member 2 of this embodiment has a main body 21 and a protruding portion 22. The main body 21 is located on the rear surface 12 side of the substrate 1, and is a plate-like portion extending in the x and y directions in the illustrated example.

[0033] The protrusion 22 protrudes from the main body 21 in the z direction. At least a portion of the protrusion 22 is housed in the cavity 15 of the substrate 1. The shape and size of the protrusion 22 are not particularly limited. In the illustrated example, the protrusion 22 is, for example, rectangular when viewed along the z direction as shown in FIG. 2, and is press-fitted into the cavity 15. The protrusion 22 has a bonding surface 221. The bonding surface 221 is a flat surface perpendicular to the z direction. In this embodiment, the bonding surface 221 is flush (or substantially flush) with the main surface 11 of the substrate 1.

[0034] The heat dissipation member 2 has a cooling path 25. The cooling path 25 is a flow path for flowing a cooling medium that contributes to heat dissipation from the semiconductor module 3. The cooling medium is not particularly limited, and examples thereof include liquids such as water and oil, and gases such as air and nitrogen. In the illustrated example, a part of the cooling path 25 overlaps with the protruding portion 22 when viewed along the z direction.

[0035] The fixing member 9 fixes the substrate 1 and the main body 21 of the heat dissipation member 2 with a gap between them. The specific configuration of the fixing member 9 is not particularly limited, and in this embodiment, as shown in FIG. 3, the fixing member 9 is made of a screw 91 and a spacer 92. The spacer 92 is interposed between the rear surface 12 of the substrate 1 and the main body 21 of the heat dissipation member 2, and is an annular member made of, for example, resin or the like. The screw 91 is, for example, inserted through the substrate 1 and the spacer 92 and screwed into a screw hole provided in the main body 21 of the heat dissipation member 2, thereby fixing the substrate 1 and the heat dissipation member 2 to each other.

[0036] The semiconductor module 3 is mounted on a substrate 1. The semiconductor module 3 includes a semiconductor element 4, leads 51, 52 and 53, a wire 48, a wire 49, and a resin portion 6.

[0037] The semiconductor element 4 is an electronic component that is the core of the function of the semiconductor module 3. In this embodiment, the semiconductor element 4 is a power semiconductor element such as a power MOSFET (Metal Oxide Semiconductor Field Effect Transistor) or an IGBT (Insulated Gate Bipolar Transistor). The semiconductor element 4 is not limited to this, and may be other transistors, various diodes, various thyristors, or an IC chip such as a control IC. In this embodiment, the semiconductor element 4 is rectangular when viewed in the z direction, but the present disclosure is not limited to this. The semiconductor element 4 has an element main surface 41, an element back surface 42, a back surface electrode 45, a main surface electrode 43, and a main surface electrode 44.

[0038] The semiconductor element 4 is made of a semiconductor material such as Si, SiC, or GaN. The element main surface 41 faces the z1 direction. The element back surface 42 faces the z2 direction. In this embodiment, the element main surface 41 and the element back surface 42 are flat.

[0039] The back surface electrode 45, the main surface electrode 43, and the main surface electrode 44 are each made of a plating layer of, for example, Cu, Ni, Al, Au, or the like. When the semiconductor element 4 is a power MOSFET, for example, the back surface electrode 45 is a drain electrode, the main surface electrode 43 is a gate electrode, and the main surface electrode 44 is a source electrode. When the semiconductor element 4 is an IGBT, for example, the back surface electrode 45 is a collector electrode, the main surface electrode 43 is a gate electrode, and the main surface electrode 44 is an emitter electrode.

[0040] In this embodiment, the back surface electrode 45 is formed on the back surface 42 of the element. The back surface electrode 45 has a rectangular shape when viewed in the z direction. All edges of the back surface electrode 45 when viewed in the z direction coincide with edges of the back surface 42 of the element when viewed in the z direction. The back surface electrode 45 covers the entire back surface 42 of the element.

[0041] In this embodiment, the principal surface electrode 43 and the principal surface electrode 44 are formed on the element principal surface 41. The area of ​​the principal surface electrode 43 is smaller than the area of ​​the principal surface electrode 44. A wire 48 is connected to the principal surface electrode 43, and a plurality of wires 49 are connected to the principal surface electrode 44.

[0042] The leads 51, 52, and 53 are made of a conductive material. An example of such a conductive material is Cu. The leads 51, 52, and 53 are joined to the substrate 1 to form a conductive path between the semiconductor element 4 and the substrate 1. The number of leads that the semiconductor module has is not limited to three, and may be two, or four or more. The number of leads is set appropriately depending on, for example, the type of the semiconductor element 4.

[0043] The lead 51 includes an island portion 511 and a lead terminal 512 .

[0044] The island portion 511 is a portion on which the semiconductor element 4 is mounted. The island portion 511 has a mounting surface 5111 and an exposed surface 5112.

[0045] The mounting surface 5111 faces one side in the z direction. The mounting surface 5111 is flat all over. Unlike the illustrated example, the island portion 511 may have a recess or groove recessed from the mounting surface 5111, or a through hole, as appropriate. A plating layer (not shown) made of Ag, for example, may be formed on the mounting surface 5111. In this embodiment, the back electrode 45 of the semiconductor element 4 is conductively joined to the mounting surface 5111 by, for example, a conductive bonding material 47. The conductive bonding material 47 is, for example, solder, Ag paste, Ag sintered material, or Cu sintered material.

[0046] The exposed surface 5112 faces the other side in the z direction. The exposed surface 5112 is flat all over. The exposed surface 5112 is exposed from the resin portion 6 over its entirety.

[0047] The lead terminal 512 is electrically connected to the back surface electrode 45 of the semiconductor element 4 via the island portion 511 and the wire 49. The lead terminal 512 has a base portion 5121 and a tip portion 5122. The base portion 5121 protrudes from the resin end surface 63 of the resin portion 6 along the y direction, which is one of the directions intersecting with the z direction. The tip portion 5122 is connected to the tip of the base portion 5121 and extends along the z direction. The tip portion 5122 is inserted into the substrate 1 and protrudes toward the back surface 12. The protruding portion of the tip portion 5122 is electrically connected to the substrate 1 by, for example, solder 59.

[0048] As shown in FIG. 1, the lead 52 includes a pad portion 521 and a lead terminal 522 .

[0049] The pad portion 521 has a dimension in the x direction longer than the lead terminal 522. The pad portion 521 is entirely covered with the resin portion 6. As shown in FIGS.

[0050] 1, the lead terminal 522 has a base portion 5221 and a tip portion 5222. The base portion 5221 protrudes from a resin end surface 63 of the resin portion 6 along a direction (y direction) intersecting the z direction. The tip portion 5222 is connected to the tip of the base portion 5221 and extends along the z direction. The tip portion 5222 is inserted into the substrate 1 and protrudes toward the rear surface 12. The protruding portion of the tip portion 5222 is conductively joined to the substrate 1 by, for example, solder 59.

[0051] The lead 53 includes a pad portion 531 and a lead terminal 532 .

[0052] 1 and 2, the pad portion 531 has a dimension in the x direction longer than the lead terminal 532. The pad portion 531 is entirely covered with the resin portion 6. As shown in FIGS. 1 and 2, a plurality of wires 49 are connected to the pad portion 531.

[0053] 1, the lead terminal 532 has a base portion 5321 and a tip portion 5322. The base portion 5321 protrudes from a resin end surface 63 of the resin portion 6 along a direction (y direction) intersecting the z direction. The tip portion 5322 is connected to the tip of the base portion 5321 and extends along the z direction. The tip portion 5322 is inserted into the substrate 1 and protrudes toward the rear surface 12. The protruding portion of the tip portion 5322 is conductively joined to the substrate 1 by, for example, solder 59.

[0054] The lead 51, the lead 52, and the lead 53 are spaced apart from each other. The lead terminal 512 of the lead 51 is disposed between the lead terminal 522 of the lead 52 and the lead terminal 532 of the lead 53 in the x-direction. The portions of the lead terminals 512, 522, and 532 exposed from the resin portion 6 may be covered with plating made of a metal such as Ag (not shown).

[0055] As shown in Figs. 1 and 2, one end of the wire 48 is joined to the pad portion 521, and the other end is joined to the semiconductor element 4 (principal surface electrode 43). The wire 48 electrically connects the pad portion 521 and the principal surface electrode 43. In this embodiment, the main material of the wire 48 is gold (Au). However, the main material may be, for example, aluminum (Al) or copper (Cu). Instead of the linear wire 48, other members such as a wide ribbon wire or a clip member made of a metal such as Cu may be used.

[0056] As shown in FIG. 2 and FIG. 3, each of the wires 49 has one end bonded to the pad portion 531 and the other end bonded to the semiconductor element 4 (principal surface electrode 44). Each wire 49 electrically connects the pad portion 531 and the principal surface electrode 44. In this embodiment, each wire 49 is mainly made of aluminum (Al). The material is not limited to this, and may be, for example, gold (Au) or copper (Cu). In this embodiment, the semiconductor module 3 includes two wires 49, but the number of wires 49 is not limited to this. The number of wires 49 may be one. The wire diameter of the wire 49 is larger than the wire diameter of the wire 48. Instead of the linear wire 49, other members such as a wide ribbon wire or a clip member made of a metal such as Cu may be used.

[0057] The material, number, wire diameter, etc. of wires 48 and 49 may be appropriately designed taking into consideration the current flowing therethrough, etc.

[0058] The resin part 6 is a member that covers the semiconductor element 4, parts of the leads 51, 52, and 53, the wire 48, and the wires 49. The resin part 6 is made of a thermosetting synthetic resin having electrical insulation properties. In this embodiment, the resin part 6 is made of a black epoxy resin. The resin part 6 has a resin main surface 61, a resin back surface 62, a pair of resin end surfaces 63, and a pair of resin side surfaces 64.

[0059] 1, 4, and 5, the resin main surface 61 faces one side in the z direction. The resin back surface 62 faces the other side in the z direction, as shown in FIG.

[0060] 2 and 4, the pair of resin end faces 63 are spaced apart from each other in the y direction. The pair of resin end faces 63 face opposite directions from each other in the y direction. As shown in FIG. 4, one end of each of the pair of resin end faces 63 in the z direction is connected to the resin main surface 61, and the other end in the z direction is connected to the resin back surface 62. In this embodiment, a portion of each of the lead 51 (lead terminal 512), the lead 52 (lead terminal 522), and the lead 53 (lead terminal 532) is exposed from one of the resin end faces 63.

[0061] 5, the pair of resin side surfaces 64 are spaced apart from each other in the x direction. The pair of resin side surfaces 64 face opposite each other in the x direction. One end of each of the pair of resin side surfaces 64 in the z direction is connected to the resin main surface 61, and the other end in the z direction is connected to the resin back surface 62.

[0062] 4 and 5, the bonding layer 7 bonds the semiconductor module 3 and the heat dissipation member 2 to each other. In this embodiment, the bonding layer 7 bonds the exposed surface 5112 of the island portion 511 of the lead 51 of the semiconductor module 3 to the bonding surface 221 of the protrusion 22 of the heat dissipation member 2.

[0063] The specific configuration of the bonding layer 7 is not particularly limited. The bonding layer 7 may be a conductive material or an insulating material. In this embodiment, the lead 51 that is conductive with the back electrode 45 of the semiconductor element 4 is preferably insulated from the heat dissipation member 2, and the bonding layer 7 is made of an insulating material.

[0064] 6 shows an example of the bonding layer 7. In the example shown, the bonding layer 7 is composed of a gel layer 71 made of an insulating gel material, grease, or the like.

[0065] 7 shows a first modified example of the bonding layer 7. In the illustrated example, the bonding layer 7 has a gel layer 71 and a sheet layer 72. The sheet layer 72 is made of an insulating material such as ceramics. In the illustrated example, the gel layers 71 are provided on both sides of the sheet layer 72.

[0066] The insulating layer 8 is interposed between the substrate 1 and the main body 21 of the heat dissipation member 2. The insulating layer 8 serves to insulate the wiring pattern (not shown) of the substrate 1, the leads 51 (lead terminal 512), the leads 52 (lead terminal 522), and the leads 53 (lead terminal 532) from the heat dissipation member 2.

[0067] 8 shows an example of the insulating layer 8. In the example shown, the insulating layer 8 is configured by a gel layer 81 of an insulating gel material, grease, or the like.

[0068] 9 shows a first modified example of the insulating layer 8. In the illustrated example, the insulating layer 8 has a gel layer 81 and a sheet layer 82. The sheet layer 82 is made of an insulating material such as ceramics. In the illustrated example, the gel layer 81 is provided between the sheet layer 82 and the main body portion 21.

[0069] 10 shows a second modified example of the insulating layer 8. In the illustrated example, the insulating layer 8 has a sheet layer 82, and is not provided with a gel layer 81. The sheet layer 82 is disposed, for example, along the main body portion 21, and is spaced apart from the lead 51 (lead terminal 512), the lead 52 (lead terminal 522), and the lead 53 (lead terminal 532).

[0070] Next, the effects of the semiconductor module mounting structure A1 will be described.

[0071] According to this embodiment, the semiconductor module 3 is joined to the protrusion 22 of the heat dissipation member 2 housed in the gap 15 of the substrate 1. For this reason, the heat dissipation member 2 does not need to be provided in an upright position in the z direction from the substrate 1, for example, and can have a shape that spreads in the x and y directions as a whole. This makes it possible to reduce the thickness of the semiconductor module mounting structure A1 in the z direction.

[0072] The heat dissipation member 2 is provided with a cooling path 25. By flowing a cooling medium such as water through the cooling path 25, it is possible to promote heat dissipation from the semiconductor module 3. The cooling path 25 overlaps with the protruding portion 22 when viewed along the z direction. This is preferable for efficiently dissipating the heat transferred from the semiconductor module 3 to the protruding portion 22.

[0073] In the semiconductor module 3, the semiconductor element 4 is mounted on the island portion 511 of the lead 51. An exposed surface 5112 of the island portion 511 is exposed from the resin portion 6, and is joined to the joining surface 221 of the protruding portion 22 of the heat dissipation member 2 by the joining layer 7. This allows heat from the semiconductor module 3 to be dissipated to the protruding portion 22 more efficiently.

[0074] When the bonding layer 7 includes the gel layer 71, for example, when there are minute irregularities on the exposed surface 5112 or the bonding surface 221, the irregularities can be filled with the gel layer 71. This is preferable for promoting heat dissipation from the semiconductor module 3. When the bonding layer 7 includes the sheet layer 72, it is preferable for improving the strength and dielectric strength of the bonding layer 7.

[0075] The lead terminal 512 has a base portion 5121 and a tip portion 5122. This allows the semiconductor module 3 to be mounted on the substrate 1 with the tip portion 5122 penetrating the semiconductor element 4, and allows the island portion 511 and the resin portion 6 to be oriented along the substrate 1 (oriented along the x-direction and y-direction). This is preferable for making the semiconductor module mounting structure A1 thinner. The same effect can be achieved by the lead terminal 522 having the base portion 5221 and the tip portion 5222 and the lead terminal 532 having the base portion 5321 and the tip portion 5322.

[0076] An insulating layer 8 is interposed between the rear surface 12 of the substrate 1 and the main body 21 of the heat dissipation member 2. This makes it possible to prevent the substrate 1 and the heat dissipation member 2 from being unduly conductive. Furthermore, by providing the insulating layer 8, it is possible to reduce the distance between the rear surface 12 and the main body 21, compared to a case where, for example, only a gap (air) is interposed between the rear surface 12 of the substrate 1 and the main body 21 of the heat dissipation member 2. This is preferable for making the semiconductor module mounting structure A1 thinner.

[0077] When the insulating layer 8 includes the gel layer 81, for example when the substrate 1 or the main body 21 has an uneven shape, the uneven shape can be filled with the gel layer 81. This is preferable for more reliably insulating the substrate 1 from the heat dissipation member 2. When the insulating layer 8 includes the sheet layer 82, it is preferable for improving the strength and dielectric strength of the insulating layer 8.

[0078] The void 15 has a shape with closed edges when viewed along the z direction. That is, the void 15 can be provided at a position spaced apart from the edge of the substrate 1. This has the advantage that the position of the semiconductor module 3 on the substrate 1 (semiconductor module mounting structure A1) can be set more freely.

[0079] 11 to 16 show modified examples and other embodiments of the present disclosure. In these figures, elements that are the same as or similar to those in the above-described embodiment are given the same reference numerals as those in the above-described embodiment.

[0080] <First Modification of First Embodiment> 1 shows a first modified example of the semiconductor module mounting structure A1. In the semiconductor module mounting structure A11 of this example, the shape of the gap 15 is different from that of the above-mentioned example.

[0081] The gap 15 in this example has a plurality of contact portions 151 and a plurality of recesses 152. Each of the plurality of contact portions 151 contacts the protruding portion 22 of the heat dissipation member 2. The plurality of recesses 152 are arranged alternately with the plurality of contact portions 151. The recesses 152 are recessed toward the side away from the protruding portion 22 when viewed along the z direction. Such a gap 15 is configured, for example, by providing a plurality of through holes in an insulating plate material that is the material of the substrate 1, and removing parts of the insulating plate material along these through holes.

[0082] As can be understood from this example, there is no particular limitation on the specific configuration of the gap 15. The configuration of this example can be appropriately adopted in other embodiments.

[0083] <Second embodiment> 12 and 13 show a semiconductor module mounting structure according to a second embodiment of the present disclosure. The semiconductor module mounting structure A2 of this embodiment differs from the first embodiment described above in the configurations of the gap 15 and the protrusion 22.

[0084] In this embodiment, the void 15 is a cutout having an open edge when viewed along the z direction. More specifically, the void 15 is recessed inward in the y direction from the edge of the substrate 1 when viewed along the z direction.

[0085] A portion of the protrusion 22 is housed in the gap 15. In the illustrated example, a portion of the protrusion 22 protrudes in the y direction from the gap 15. Unlike the illustrated example, the entire protrusion 22 may be housed in the gap 15 when viewed along the z direction.

[0086] This embodiment also makes it possible to reduce the thickness of the semiconductor module mounting structure A2. As can be understood from this embodiment, the specific configurations of the gap 15 and the protrusion 22 are not particularly limited.

[0087] <Third embodiment> 14 shows a semiconductor module mounting structure according to a third embodiment of the present disclosure. A semiconductor module mounting structure A3 of this embodiment differs from the above-described embodiments in the configurations of the gap 15 and the protrusion 22.

[0088] The void 15 in this embodiment is a cutout with open edges when viewed along the z direction. More specifically, the void 15 in this embodiment is recessed inward in the x and y directions when viewed along the z direction from the two edges of the substrate 1.

[0089] A portion of the protrusion 22 is accommodated in the gap 15. In the illustrated example, a portion of the protrusion 22 protrudes from the gap 15 in the x direction and the y direction. Unlike the illustrated example, the entire protrusion 22 may be accommodated in the gap 15 when viewed along the z direction. The entire protrusion 22 in the x direction or the entire protrusion 22 in the y direction may be accommodated in the gap 15 when viewed along the z direction.

[0090] This embodiment also makes it possible to reduce the thickness of the semiconductor module mounting structure A3. As can be understood from this embodiment, the specific configurations of the gap 15 and the protrusion 22 are not particularly limited.

[0091] <Fourth embodiment> 15 shows a semiconductor module mounting structure according to a fourth embodiment of the present disclosure. A semiconductor module mounting structure A4 of this embodiment differs from the above-described embodiments mainly in the configuration of the protrusion 22 of the heat dissipation member 2.

[0092] In this embodiment, the bonding surface 221 of the protruding portion 22 is located within the gap 15 in the z direction. That is, the bonding surface 221 is located closer to the back surface 12 of the substrate 1 than the main surface 11.

[0093] In this embodiment, the resin portion 6, as viewed along the z direction, is smaller than the gap 15 and the joint surface 221. A part of the semiconductor module 3 including the exposed surface 5112 is accommodated in the gap 15 in the z direction.

[0094] This embodiment also makes it possible to reduce the thickness of the semiconductor module mounting structure A4. In addition, it is possible to further reduce the distance between the semiconductor module 3 and the cooling path 25, which is preferable for promoting heat dissipation from the semiconductor module 3. By accommodating a part of the semiconductor module 3 in the gap portion 15, it is also suitable for reducing the thickness of the semiconductor module mounting structure A4.

[0095] <Fifth embodiment> 16 shows a semiconductor module mounting structure according to a fifth embodiment of the present disclosure. A semiconductor module mounting structure A5 of this embodiment differs from the above-described embodiments mainly in the configuration of the protrusion 22 of the heat dissipation member 2.

[0096] In this embodiment, the bonding surface 221 is located on the side toward which the main surface 11 faces in the z direction relative to the main surface 11. In the illustrated example, the void portion 15 and the protrusion 22 are smaller than the resin portion 6 when viewed along the z direction.

[0097] This embodiment also makes it possible to reduce the thickness of the semiconductor module mounting structure A5. In addition, by reducing the sizes of the gap 15 and the protrusion 22 as viewed in the z direction, it is possible to reduce the size of the semiconductor module mounting structure A5 as viewed in the z direction.

[0098] The mounting structure of the semiconductor module according to the present disclosure is not limited to the above-described embodiment and modified examples. The specific configurations of the components of the mounting structure of the semiconductor module according to the present disclosure can be freely modified in various ways.

[0099] Appendix 1. a substrate having a main surface and a back surface facing in opposite directions in a thickness direction; a semiconductor module mounted on the main surface side of the substrate; a heat dissipation member that dissipates heat from the semiconductor module, the substrate has a void portion penetrating in the thickness direction, the heat dissipation member has a main body portion located on the back surface side of the substrate and a protrusion portion accommodated in the gap portion, The semiconductor module is joined to the protruding portion. Appendix 2. 2. The semiconductor module mounting structure according to claim 1, wherein the heat dissipation member has a cooling path through which a cooling medium flows. Appendix 3. 3. The semiconductor module mounting structure according to claim 2, wherein the cooling path overlaps with the protrusion when viewed along the thickness direction. Appendix 4. 4. A mounting structure of a semiconductor module described in any one of appendix 1 to 3, wherein the semiconductor module has a semiconductor element, an island portion to which the semiconductor element is bonded, a lead terminal electrically connected to the semiconductor element, and a resin portion covering the semiconductor element. Appendix 5. 5. The semiconductor module mounting structure according to claim 4, wherein the island portion has an exposed surface exposed from the resin portion, and the exposed surface is joined to the protrusion. Appendix 6. the lead terminal has a base portion protruding from the resin portion in a direction intersecting the thickness direction and a tip portion extending along the thickness direction, 6. The semiconductor module mounting structure according to claim 5, wherein the tip portion penetrates the substrate. Appendix 7. 7. The semiconductor module mounting structure according to claim 6, wherein the tip portion protrudes from the rear surface of the substrate and is spaced apart from the heat dissipation member. Appendix 8. 8. The mounting structure of a semiconductor module according to claim 1, further comprising an insulating layer interposed between the rear surface of the substrate and the main body of the heat dissipation component. Appendix 9. 9. The semiconductor module mounting structure according to claim 8, wherein the insulating layer includes a gel material. Appendix 10. 10. The semiconductor module mounting structure according to claim 8 or 9, wherein the insulating layer comprises ceramic. Appendix 11. 11. The semiconductor module mounting structure according to any one of claims 1 to 10, wherein the void portion is a through hole having a closed edge when viewed along the thickness direction. Appendix 12. 11. The semiconductor module mounting structure according to any one of claims 1 to 10, wherein the gap is a cutout having an open edge when viewed along the thickness direction. Appendix 13. 13. The semiconductor module mounting structure according to any one of claims 1 to 12, further comprising a fixing member that fixes the substrate and the heat dissipation member with a gap therebetween. Appendix 14. 14. The semiconductor module mounting structure according to claim 1, wherein the protrusion has a bonding surface bonded to the semiconductor module. Appendix 15. 15. The semiconductor module mounting structure according to claim 14, wherein the joint surface is flush with the main surface. Appendix 16. 15. The semiconductor module mounting structure according to claim 14, wherein the joining surface is located on a side toward which the main surface faces in the thickness direction relative to the main surface. Appendix 17. 15. The semiconductor module mounting structure according to claim 14, wherein the joining surface is located within the gap in the thickness direction. [Explanation of symbols]

[0100] A1, A11, A2, A3, A4, A5: Mounting structure 1: Substrate 2: Heat dissipation material 3: Semiconductor module 4: Semiconductor element 6: Resin part 7: Bonding layer 8: Insulating layer 9: Fixing member 11: Main surface 12: Back surface 15: Gap portion 21: Main body portion 22: Protrusion 25: Cooling path 41: Element main surface 42: Back surface of element 43, 44: Main surface electrodes 45: Back surface electrode 47: Conductive bonding material 48, 49: Wire 51, 52, 53: Leads 59: Solder 61: Resin main surface 62: Resin back surface 63: Resin end surface 64: Resin side surface 71: Gel layer 72: Sheet layer 81: Gel layer 82: Sheet layer 91: Screw 92: Spacer 151: contact portion 152: recess 221: joint surface 300: Electronic parts 511: Island part 512: Lead terminal 521: Pad section 522: Lead terminal 531: Pad section 532: Lead terminal 5111: Mounting surface 5112: Exposed surface 5121: Base 5122: Tip 5221: Base 5222: Tip 5321: Base 5322: Tip

Claims

1. a substrate having a main surface and a back surface facing in opposite directions in a thickness direction; a semiconductor module mounted on the main surface side of the substrate; a heat dissipation member that dissipates heat from the semiconductor module, the substrate has a void portion penetrating in the thickness direction, the heat dissipation member has a main body portion located on the back surface side of the substrate and a protrusion portion accommodated in the gap portion, the semiconductor module is joined to the protrusion, the semiconductor module includes a semiconductor element, a lead terminal electrically connected to the semiconductor element, and a resin portion covering the semiconductor element; the lead terminal has a base portion protruding from the resin portion in a direction intersecting the thickness direction and a tip portion extending along the thickness direction, the tip portion penetrates the substrate, protrudes from the rear surface of the substrate, and is spaced apart from the heat dissipation member; an insulating layer interposed between the rear surface of the substrate and the main body of the heat dissipation member; A mounting structure for a semiconductor module, wherein the insulating layer is interposed between the tip portion and the heat dissipation member.

2. 2. The semiconductor module mounting structure according to claim 1, wherein the heat dissipation member has a cooling passage through which a cooling medium flows.

3. The semiconductor module mounting structure according to claim 2 , wherein the cooling path overlaps with the protruding portion when viewed along the thickness direction.

4. 4. The semiconductor module mounting structure according to claim 1, wherein the semiconductor module has an island portion to which the semiconductor element is bonded.

5. 5. The semiconductor module mounting structure according to claim 4, wherein the island portion has an exposed surface exposed from the resin portion, and the exposed surface is joined to the protruding portion.

6. 6. The semiconductor module mounting structure according to claim 1, wherein the insulating layer includes a gel material.

7. 7. The semiconductor module mounting structure according to claim 1, wherein the insulating layer includes a ceramic.

8. 8. The semiconductor module mounting structure according to claim 1, wherein the gap is a through hole having a closed edge when viewed along the thickness direction.

9. 8. The semiconductor module mounting structure according to claim 1, wherein the gap is a notch having an open edge when viewed along the thickness direction.

10. 10. The semiconductor module mounting structure according to claim 1, further comprising a fixing member for fixing said substrate and said heat dissipation member with a gap therebetween.

11. 11. The semiconductor module mounting structure according to claim 1, wherein the protrusion has a joining surface joined to the semiconductor module.

12. The semiconductor module mounting structure according to claim 11 , wherein the joining surface is flush with the main surface.

13. The semiconductor module mounting structure according to claim 11 , wherein the joining surface is located on a side of the main surface toward which the main surface faces in the thickness direction.

14. The semiconductor module mounting structure according to claim 11 , wherein the joint surface is located within the gap in the thickness direction.

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