Liquid Delivery Systems

Abstract

A liquid delivery system having a reduced size is provided. [Solution] A modular system for dispensing liquid chemicals includes a substrate block having at least two ports formed in a first major surface of the block and a fluid passage extending between the two ports. The fluid path is preferably a seamless, smooth path whose entire volume is perfectly aligned with the desired fluid flow, so that the fluid flows completely through the entire passage and there are no stagnant volumes or areas within the passage. The substrate block can be formed from a fluoropolymer using a novel composition and manufacturing process. A sealing assembly is provided that uses a combination of replaceable insert-type seals and flange-and-groove seals formed within the modular components.

Description

[Technical field]

[0001] This application was filed on April 4, 2016, which is incorporated herein by reference in its entirety. Chris, whose application was filed under the name "LIQUID DELIVERY SYSTEM" This application claims priority to U.S. Provisional Patent Application No. 62 / 318,202 by Melcer et al. That is why.

[0002] The present invention relates to a liquid chemical delivery system, and more particularly to a liquid chemical delivery system having a significantly reduced footprint. This invention relates to a modular, tubeless liquid chemical delivery system. [Background technology]

[0003] Liquid delivery and dispensing systems are used in a variety of applications including semiconductor device manufacturing, pharmaceutical manufacturing, etc. For example, during the manufacturing process, semiconductor wafers are They are subjected to various liquid handling processes such as chipping, cleaning, polishing, drying and material deposition. Semiconductor substrate processing typically requires the delivery of precise amounts of liquid chemicals on demand. , bubble-free, uniform thickness over the usable portion of the substrate, and cost And environmental concerns require that chemical waste be minimized. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] U.S. Provisional Patent Application No. 62 / 318,202 Summary of the Invention [Problem to be solved by the invention]

[0005] Various types of flow controllers, pressure transducers, flow measurement sensors, pressure regulators, valves, etc. Various systems are used to deliver liquid chemicals from a source to a process that uses active components. Many types of liquid delivery systems are used. In many of these applications, liquid chemicals are The size of a distribution system can dramatically affect the cost. For example, in the manufacture of semiconductor devices In the 2010-2013 11:11 PM, the liquid distribution system or some part of the liquid distribution system is usually In addition, the equipment is housed in extremely clean environments such as the refrigeration and power generation facilities used in semiconductor manufacturing. Many of the liquids used are either toxic or highly reactive, or both. Such distribution systems often require special containment and exhaust equipment. For such systems, a reduction in the size of the fluid distribution system would be advantageous. [Means for solving the problem]

[0006] In accordance with an embodiment of the present invention, a modular system for enabling the dispensing of liquid chemicals is provided. The system includes a substrate block, the substrate block including a first substrate for the block. At least two ports formed on a major surface of the first pipe and a flow path extending between the two ports. The flow of the fluid spreads completely throughout the entire flow path, and the flow of the fluid in the fluid passage The fluid path is designed to have a constant flow rate throughout the entire volume of the fluid path so that there are no stagnant volumes or areas of fluid retention. Preferably, the flow path is seamless and smooth, conforming perfectly to the desired fluid flow.

[0007] In accordance with another embodiment of the present invention, a novel composition and manufacturing process is used to produce fluoropolyethersulfones. A substrate block can be formed from the polymer.

[0008] According to another embodiment of the present invention, a replaceable insert seal and a modular component are provided. A sealing assembly is provided that uses a combination of flange and groove seals formed within the substrate. .

[0009] The above describes the features and advantages of the present invention so that the detailed description of the present invention can be more fully understood. The above has outlined, at a high level, the advantages and technical merits of the present invention. The disclosed concepts and specific embodiments are intended to achieve the same objectives of the present invention. It can easily be used as a basis for modifying or designing other structures to It should be recognized by those skilled in the art that such equivalent structures are within the spirit and scope of the appended claims. It should be understood by those skilled in the art that the above-described embodiments do not depart from the spirit and scope of the present invention as set forth in the appended claims. do.

[0010] For a more complete understanding of the present invention and the advantages thereof, reference should now be made to the accompanying drawings, in which: See the following explanation: [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 shows a prior art substrate block. [Diagram 2] FIG. 1 is a perspective view of a modular liquid chemical delivery system according to one embodiment of the present invention. [Diagram 3] FIG. 2 is a bottom perspective view of the modular liquid chemical delivery system of FIG. 1. [Figure 4] FIG. 2 illustrates a modular substrate block according to an embodiment of the present invention. [Figure 5A] FIG. 5 is an exploded view of the base block of FIG. [Figure 5B] FIG. 5 is an exploded view of the base block of FIG. [Figure 6A] FIG. 5 is a cross-sectional perspective view of the substrate block of FIG. [Figure 6B] FIG. 5 is a cross-sectional perspective view of the substrate block of FIG. [Figure 7] FIG. 5 is a cross-sectional view of the substrate block of FIG. [Figure 8A] 13A-13C illustrate another embodiment of a modular substrate block according to an embodiment of the present invention. [Figure 8B] 13A-13C illustrate another embodiment of a modular substrate block according to an embodiment of the present invention. [Figure 9A] FIG. 13 is a top (seal side) perspective view of another modular substrate block according to one embodiment. [Figure 9B] FIG. 9B is a bottom perspective view of the modular substrate block of FIG. 9A. [Figure 10A] FIG. 9B is a top view of the modular substrate block of FIG. 9A. [Figure 10B] 9B is a cross-sectional view of the modular substrate block of FIG. 9A taken along line AA. [Figure 10C] 9B is a cross-sectional view of the modular substrate block of FIG. 9A taken along line BB. [Figure 11A] FIG. 1 illustrates fluid flow paths through the substrate block and active components according to one embodiment. [Figure 11B] FIG. 11B is a partially enlarged view of FIG. 11A. [Figure 12A] FIG. 1 illustrates a replaceable insert seal according to one embodiment. [Figure 12B] FIG. 1 illustrates a replaceable insert seal according to one embodiment. [Figure 13A] FIG. 1 illustrates a replaceable insert seal according to one embodiment. [Figure 13B] FIG. 13B is a cutaway view of the seal of FIG. 13A. [Figure 14A] FIG. 2 illustrates a substrate block according to one embodiment. [Figure 14B] FIG. 13 illustrates another embodiment of a replaceable insert seal. [Figure 15A] Figure 14B shows the replaceable insert seal. [Figure 15B]Figure 14B is a cutaway view of the replaceable insert seal. [Figure 16A] FIG. 1 is a perspective view of another replaceable insert seal according to one embodiment. [Figure 16B] FIG. 16B is a cross-sectional view of the seal of FIG. 16A taken along line AA. [Figure 16C] FIG. 16C is an enlarged view of the cross section of FIG. 16B. [Figure 17A] 1A-1C show various possible flange and groove like structures that can be used as secondary or primary seal structures according to embodiments of the present invention. [Figure 17B] 1A-1C show various possible flange and groove like structures that can be used as secondary or primary seal structures according to embodiments of the present invention. [Figure 17C] 1A-1C show various possible flange and groove like structures that can be used as secondary or primary seal structures according to embodiments of the present invention. [Figure 17D] 1A-1C show various possible flange and groove like structures that can be used as secondary or primary seal structures according to embodiments of the present invention. [Figure 18] FIG. 2 illustrates another embodiment of a liquid chemical delivery system according to an embodiment of the present invention. [Figure 19] FIG. 2 is a perspective view of a substrate block with embedded active components according to one embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] The accompanying drawings are not intended to be drawn to scale. Identical or nearly identical components shown in the figures are each represented by the same reference numerals. For purposes of clarity, all components in all drawings have been numbered. This is not the case.

[0013] Embodiments of the present invention are modular and have a significantly smaller footprint than prior art systems. The present invention provides a tubeless liquid chemical delivery system. While gas-filled fluid delivery systems are well known, these prior art systems are There are several factors that make it unsuitable for a substance delivery system. First, the fluid pathways Prior art modular substrate blocks are typically made of solid metal such as stainless steel. Many of the liquid chemicals used in semiconductor manufacturing are corrosive to metals. In addition, metal ions tend to be extracted into liquids that come into contact with metal surfaces, resulting in very Undesirably, metal ions can become deposited on the wafer surface during the manufacturing process.

[0014] Additionally, the fluid passages, inlet and outlet ports in the prior art substrate blocks are made of Such a prior art substrate block 101 is formed by drilling holes in the block. 1A and 1B. The internal passage in FIG. 1B is shown in dashed lines. As shown, once the desired fluid passages 106 have been drilled, the internal fluid passages 106 are inlet ports. There is a certain amount of “overshoot” (area 102) at the intersection with the inlet and outlet ports 102. 07, 108) are generated with respect to the top surface 104 of the substrate block (containing the port 102). To drill internal fluid paths (running in a direction parallel to the substrate) the substrate block is cut from the side 109 When a drill is required and the drill is inserted from the side 109 of the board block, In order to isolate the desired fluid passage, it is necessary to plug a portion of the drilled passage with a plug 105. All of these factors result in some degree of undesirable stagnant volume in the fluid path. do.

[0015] An embodiment of the present invention is a polypropylene, PTFE, modified PTFE or PFA. A modular substrate block made from a polymer or fluoropolymer is utilized. In a new embodiment, the surface extractable material is surface-extractable in a static leaching test for 7 days in ultrapure water at 85±5°C. Meets the requirements outlined in SEMI F57 for ionic, metallic, and total organic carbon contamination A modular substrate block is formed from the material.

[0016] FIG. 4 shows a modular substrate block 401 according to an embodiment of the present invention. The modular circuit board block 401 connects two ports 402 located on the top surface 404 of the block. In some embodiments, the block may have a single fluid path 406. Blocks can be used, some of which support many port pairs and multiple 2-3, modular substrate block 401 The modular board block 401 can be called a "jumper block." For example, to fluidly connect two active components (connecting the outlet of a first active component to the outlet of a second active component). to the inlet of an active component) or to connect one active component to another substrate block. As will be described later, in some embodiments, multiple flow passages and A substrate block having inlet / outlet ports may also be used.

[0017] FIG. 2 illustrates a modular liquid chemical delivery system 200 in accordance with one embodiment of the present invention. FIG. 3 is a bottom perspective view of the modular liquid chemical delivery system 200 of FIG. The backplane has been omitted, and only some of the board blocks have been shown for clarity. In the embodiment of FIG. 2, there are three layers to the system: The most common components are the active components (controllers, pressure transducers, flow measurement sensors, pressure regulators, valves, etc.). The upper layer, consisting of a substrate block (which serves to form the fluidic connections between the active components) and There is a backplane that acts as the second middle layer, and the support structure for the entire system. do.

[0018] 8A and 8B, the substrate block 201 is generally Fastener holes through the top surface of the board (the same surface that contains the inlet / outlet ports) to hold it in place 852 into the backplane by screws or other similar fasteners. In some embodiments, the adjacent Adjacent substrate blocks may also be bonded together.

[0019] Each active component (212, 213, 214, 215, 216, 217) One (or more) base blocks 2 are attached by at least two screws or similar fasteners. 01. At least two screws or similar can be used to hold the The fasteners attach the active components to the substrate block and connect the inlet / outlet ports on the surface of the substrate block. It serves to hold the active components in the proper position relative to the board. Attached to the first base block by two screw holes 854 on either side of the inlet / outlet port. and can be attached to a second board block (and port) in the same way. In some embodiments, a metal female thread that mates with the connecting thread of the active component can be used. The insert having the same shape as the substrate block may be suitably positioned within the polymer body of the substrate block. In the drawings herein, fastener holes and screw holes are not shown in most of the figures for clarity. Not shown.

[0020] This modular approach using circuit board blocks still allows direct access to each component. and active components may be installed and removed using, but not limited to, Allen wrench. Only manual hand tools such as a knife or a handgun are required. No direct access to active components is possible. This simplifies repair by removing only the damaged active components, thereby This reduces downtime. Since the circuit board block is standardized, The active components can be located anywhere in the system.

[0021] In the embodiment of FIG. 2, the liquid connection to the liquid chemical delivery system and the liquid chemical delivery Fluid connections from the system are made by fittings 215. One or more liquid chemicals typically flow through pipes from a storage tank (not shown). is connected to the system 200 by a fitting 215. The liquid chemical is When it enters 0, it flows through the placed board blocks to the various active components, and finally , to one or more delivery pipes (again via fittings 215) that lead to the desired processing site. In the embodiment of FIG. 2, the active components include a regulator 214, a pressure transducer 217, valve 216, liquid flow controller 213 and flow meter 212. As used herein All system components (including active components and substrate blocks) of the liquid delivery system The empty space between such components from the inlet fitting to the outlet fitting is occupied by the element and The total area covered by the system is referred to as the system “footprint.”

[0022] Using the methods described herein, it is possible to produce a cellular membrane having virtually any desired size and configuration. A substrate block can be formed, but in the embodiment of FIG. 4, the substrate block has a width of about 5 mm. 5 mm and approximately 25 mm (1 inch) thick. The inner diameter of the flow passage is, for example, 1 / 4 inch. , 3 / 8 inch or 1 / 2 inch. Important In a preferred embodiment, the internal fluid pathway is a smooth passageway that is substantially seamless. In other words, the entire volume of the passage is perfectly matched to the desired fluid flow. There are no dead volumes or areas or plugged areas as found in the construction of row technology. For slurries, hold-up volume results in particle retention and an undesirable increase in the number of large particles. Substrate blocks according to embodiments of the present invention can achieve <0.05% adhesion in a 300 liter jet. Contributes to achieving a particle size of 0.1 particles / ml (particle size >0.1 μm).

[0023] FIG. 4 shows a modular substrate block 401 according to an embodiment of the present invention. In one embodiment, two separate fluoropolymer layers are machined and then joined together. The substrate blocks of FIG. 4 are joined together by fusion bonding at 426. 5A and 5B show an upper layer 522 and a lower layer 523. 6A and 6B are perspective views of a cross section of the substrate block of FIG. 4 taken along line AA. FIG. 7 shows a cross-sectional view of the substrate block of FIG. 4 taken along line AA. 5. Machine the top surface of the lower layer 523 using a carbide plate to form smooth grooves 528 at the desired flow path locations. The bottom surface of the top layer 522 can be machined to form corresponding grooves (not shown). Further, at each end of the flow path, there may be an inlet port and a The outlet port 402 can be drilled. When these two layers are joined together, the corresponding The two adjacent grooves form the smooth flow channel 606 shown in Figures 6A and 6B.

[0024] These two layers are machined and properly aligned, then fusion bonded together using a combination of heat and pressure. Techniques can be used to bond these two layers together. Necessary for melt bonding The precise temperature / pressure / time combinations that are suitable are known in the art and include: It depends on the particular fluoropolymer used to form the layer. In this embodiment, these two layers can be made of modified PTFA and can be bonded to the PTFA at a pressure of about 450 psi. Heat the mixture under pressure to a temperature of about 350°C to 380°C for an hour (or longer). Under these conditions, the two layers can be bonded together. The modified PTFE polymer chains in the interlock, creating a permanent bond between the two surfaces at the molecular level. The PTFE is then bonded to the PTFE matrix to form a solid homogenous block of modified PTFE.

[0025] The circuit board block in Figure 4 is a very simple single flow circuit with only two inlet / outlet ports. These same techniques can be used to connect any number of inlet / outlet ports with passages between them. Those skilled in the art will recognize that much more complex flow paths can be created. For example, FIGS. 8A and 8B show four different flow paths 825 and eight inlet / outlet ports 822. 0. In some embodiments, two or more fluoropolymer layers are can be used to generate more complex 3D flow paths. The substrate block is connected to a manifold in which the inlet flow paths are combined with a single outlet flow path. It can also be used.

[0026] In another embodiment, known fluoropolymers such as compression molding or isostatic molding may be used. - Using molding techniques, fluoropolymers with the desired flow passages and inlet / outlet ports are The blocks can be produced using any suitable fluoropolymer (such as PFA) are known to be melt processable and their fluorine-containing polymers can be fabricated using injection molding techniques. In another embodiment, the polymer can be molded using PTFE or other fluoropolymers. The powder is filled into a mold, and the mold is then sintered under appropriate conditions to form the mold shown in Figures 5A and 5B. The two layers, such as those made by In a similar manner, PTFE or other fluoropolyethersulfones can be used without the need for a fluororesin. By sintering the polymer powder, a complete substrate block with one or more channels can be obtained. The use of some or all of these techniques or Those skilled in the art will recognize that the use of any combination of these techniques is within the scope of the present invention. do.

[0027] 9A and 9B show an embodiment of the present invention as viewed from the top (seal side) and bottom, respectively. 9 shows a perspective view of another modular substrate block 901 according to some embodiments. We fabricated the substrate blocks in Figures 9A and 9B by injection molding using a material such as PFA. However, other suitable manufacturing methods and materials may be used within the scope of the present invention. FIG. 10A shows a top (seal) view of a modular substrate block 901. FIG. 10B shows a cross-sectional view along line AA, and FIG. 10C shows a cross-sectional view along line BB.

[0028] In some embodiments, a multi-part mold is used to fabricate modular substrate blocks. The fluid passage 906 may be formed by removing the fluid passage 906 from the body of the casing. Regardless of the exact manufacturing method, the module In the embodiment of the substrate block, the flow of fluid spreads completely throughout the entire flow path, The entire volume of the fluid path is filled with the desired volume so that there are no stagnant volumes or areas within the fluid passage. One or more smooth fluid paths, substantially seamless, that perfectly match the desired fluid flow. In the embodiment of FIG. 10B, the fluid flow path includes a smooth flow path without corners or sharp walls. Such an arc largely eliminates stagnant volumes or areas where liquid can accumulate. It helps to.

[0029] The body of this modular substrate block may include fluid paths and screws, similar to the example discussed above. Except for the holes, it may be formed as a substantially solid block of material. As shown in the example of Figures 9A to 11C, the main body of this modular substrate block 959. Such an embodiment may be formed with only the necessary support walls 959. The thickness of all the different sections of the body is substantially the same, thereby eliminating unwanted voids. It is easier to fill all sections of the mold evenly to avoid voids, making casting easier. Such an embodiment, shown in FIG. 9B, is particularly advantageous for injection molding. The surface area is larger than that of the conventional PCB structure, which allows the modular board block to withstand higher temperatures. This may make it possible to achieve this.

[0030] In some embodiments, the flow path is smooth, eliminating noticeable seams or molding artifacts. To ensure that the desired flow paths are present, after the substrate block is formed, The abrasive can be forced into the substrate block or a specially designed tool can be used. The internal flow paths can also be smoothed manually or automatically using the rule.

[0031] 2-3, the substrate blocks according to the present invention can be assembled to form active components. The liquid source is connected to virtually any desired arrangement (e.g., valves, pressure transducers, flow controllers, etc.) A flow path that connects to the process and forms a flow path that is free of welds and tubes. The liquid flows through passages in the base block rather than through separate tubes. Thus, the present invention provides an inlet and an outlet that access a common surface with at least one fluid passage. and an exit port, by providing a plurality of individual substrate blocks, each having an The present invention provides a solution that overcomes the problems of the prior art. The common surface is used to provide a flow controller, Equipped with standard active components such as pressure transducers, flow measurement sensors, pressure regulators, valves, etc. In some embodiments, to facilitate sealing requirements, adjacent The common surfaces of the manifold blocks are maintained in a common plane. The substrate may bridge or extend across adjacent substrate blocks. The plate block allows each fluid passage to be positioned for sealed interconnection. The components are removably aligned and mounted (as described above) to enable the insertion of the components into the cavity.

[0032] These tasks are made possible by the novel systems and processes described herein. The use of modular components of this type reduces the complexity of typical prior art liquid chemical delivery systems. It is possible to provide a liquid chemical delivery system that has a footprint less than half the size of a conventional liquid chemical delivery system. The applicant has found that it is possible to use a pipe fitting and a pipe assembly that are connected to each other. Unlike conventional liquid delivery systems, embodiments of the system of the present invention eliminate gaps between components. In a preferred embodiment, adjacent components can be arranged in a very small size. The components are spaced apart by less than 20 mm, e.g., less than 10 mm, less than 5 mm, about 1 mm, or 1 m. Further, in some embodiments, the active components may be spaced apart by less than 1 m. Using a standardized width for the flow (e.g. 55 mm) would eliminate the wasteful spacing between parallel liquid flow paths. In a preferred embodiment, the entire system The ratio of wasted space to the total system area can be reduced to about 30%, The percentage can be, for example, 20%, 10% or 5%. The use of the elements further reduces the design time and costs associated with custom parts and / or tube assemblies. This will help you to save a lot of money on your investments.

[0033] As explained above, in some embodiments of the present invention, the active component may be a screw or The base block is mounted on the board by other fasteners. The screw holes 854 are In some embodiments, a metal screw is provided to provide a tight connection. For ease of use, a metal insert is placed inside the screw hole 854. The bottom surface of each active component is held in place over the inlet / outlet ports of the substrate block. In a preferred embodiment, the active components 962 have corresponding inlet / outlet ports. The housing is also formed from a polymer or a fluoropolymer. The fluid flow paths (indicated by arrows 1164) are shown. An active component 1162 (a valve in this example) is placed over the outlet port of A. The inner fluid path of the substrate block 401 is mounted so as to be fluidly connected to the fluid path in the substrate block 401A. Similarly, active component 1162 is also provided on substrate block 401B. 162 outlet ports are located above the inlet ports of the substrate block 401B, and the active components 962 is mounted so as to be fluidly connected to the fluid passage in the base block 401B. It has been done.

[0034] FIG. 11B is an expanded view of the portion inside dashed box 1170 in FIG. 11A. As shown in FIG. 11B, the desired fluid path (line 1164) is from substrate block 401A to , through the inlet / outlet ports on the top surface of the substrate block 401A and the bottom surface of the active component 1162. Component fluid passage 1163 through the substrate block. Even if the pores are tight, leakage (in the direction indicated by arrow 1166) is still possible. Additionally, the surface interface has the potential for trapped liquids, which can lead to microbial growth or This can lead to the generation of large particle counts. Accordingly, in some embodiments, active components To prevent leakage at the connection between the Li is used.

[0035] Some embodiments of the present invention utilize flange and groove structures and / or inserts. In some embodiments, the active components are bonded to the substrate block to provide a seal between the active components and the substrate block. Such seals can be used to directly form fluid connections between substrate blocks or active components. As shown in Figures 10B and 10C, the two component bodies The flange and groove connections (957 and 956, respectively) are formed directly (i.e., one (A small protruding "ridge" on one surface fits into a "groove" on the corresponding surface.) Separate inserts are formed and fitted into grooves on one or both of the mating faces to provide a replaceable seal. An encapsulation component can be placed.

[0036] 112 and 12B show a fluid connection between the substrate block 401 and the active component 1162. A replaceable insert seal 970 can be placed in a contoured groove around the periphery of the 12A and 12B show an embodiment of the present invention. In the cross-sectional views of FIGS. is a test fixture used to test flow and extractable particle requirements. The seal arrangement would be the same for an actual active component such as a valve or liquid flow meter. 14A shows a substrate block 401, and line BB indicates the location of the cross section of FIGS. 12A and 12B. FIG. 13A shows a perspective view of the seal 970, and FIG. 13B shows a cross-sectional view of the seal 970. A cutaway view of the seal 970 is shown. In the embodiment shown, the chamfered horizontal Portion 972 is easily inserted into a groove in one of the mounting surfaces (in this embodiment, the underside of the active component). This aids in proper installation of the seal by providing a leading edge that can be 8A and 8B, a seal groove 860 is provided around each inlet / outlet port 820. The periphery is machined or otherwise formed.

[0037] In a preferred embodiment, the seal 970 is also fabricated from a polymer or a fluoropolymer. For structures machined or otherwise formed in a polymer body, The size of the seal ring 970 is 100% larger than the seal ring 970 because of the need for larger tolerances. The applicant of the present application has determined that the leading edge 972 of the gasket should always be determined to have an interference. In other words, while installed, the seal ring is always in a liquid state. In contrast, in some implementations, In this state, there is little or no vertical interference or compression on the horizontal portion 971 of the ring. The size of the seal is determined so that it does not

[0038] FIG. 14B illustrates another embodiment of a replaceable seal ring 1280 in a substrate block 40. 14A is a cross-sectional view of an active component 1162 mounted on a substrate 1. A plate block 401 is shown, with line BB indicating the location of the cross section of FIG. 14A.

[0039] FIG. 15A shows a perspective view of 1280, and FIG. 15B shows a cross-sectional view of seal 1280. A cutaway view of 280 is shown. The seal ring 1280 prevents water (which could potentially allow leakage) from entering the seal ring. It features a conical inner sleeve 1283 that has no flats. When in the fixed position, the liquid flows all over the inside of the sleeve 1283. The outer ring 1282 connected to the conical sleeve portion via the bridge portion 1284 of , behind the cone-shaped seal part 1283, acts as a backup and provides additional positioning. The tapered shape of the conical center section 1283 also provides an additional seal. This serves to aid in the installation of the seal ring 1280. Similarly, the 1280 size seal ring also has a groove that, when installed, provides vertical clamping. It is determined to produce a horizontal interference rather than a meshing margin.

[0040] FIG. 16A illustrates an inlet and outlet port of a modular substrate block according to an embodiment of the present invention. Replaceable seal ring 1680 used to provide a liquid seal at the port location FIG 16B shows a perspective view of another embodiment of the seal of FIG 16A taken along line AA. FIG. 16C is an enlarged view of one half of the cross section of FIG. 16B. The seal ring 1680 is It features a conical inner sleeve 1683. The conical sleeve 1683 slopes outward. The portion 1685 is inclined toward the port opening. 1686 (sloped toward the port opening), as well as an outer vertical portion 1687. In the embodiment of FIG. 16A, the conical sleeve portion of the seal (potentially allowing leakage) In some embodiments, the outwardly sloping portion 1685 does not have a horizontal surface. The inclination is about 25 degrees to about 35 degrees, for example about 30 degrees, relative to the vertical axis (or the inner wall of the seal). In some embodiments, the slope of the inwardly sloping portion 1686 is 40 to 50 degrees, for example about 45 degrees, which is greater than the inclination of the outwardly sloping part. degrees.

[0041] In some embodiments of the seal featuring a conical inner sleeve, the height of the cone ( 1695) and the thickness of the cone wall (indicated by the arrow and reference 1976) is about 1.0 to 2.0, about 1.1 to 1.8, or is in the range of about 0.5 to about 2.5, such as about 1.1 to 1.6.

[0042] In some embodiments, the size of the seal is such that when the seal is installed it forms a cone. The outwardly tapered portion 1685 of the sleeve is compressed as shown by arrow 1690. The size of the seal is also determined so that the port is The upper edge of the port opening (the board fitting portion) is determined not to come into contact with the outwardly inclined portion 1685. Instead, the upper edge of the port opening slides over the outer vertical portion 1687 to form a seal. The area indicated by reference numeral 1688 can be seen in the tapered central portion 1683 of the cone. The grooved shape also serves to aid in the installation of the seal ring 1680. When the seal is in place, the liquid flows all over the inside of the sleeve 1683. can be.

[0043] The outer ring 1682 acts as a backup behind the cone-shaped sealing portion 1683. , providing an additional seal that serves to provide additional positioning. The seal ring size 1680, when installed, fits the modular board block. The grooves around the port openings in the lock are aligned with the outer ring indicated by arrows 1691 and 1692. The horizontal interference is determined to occur on the outer and inner surfaces of the gage 1688. In some embodiments, the top or bottom of the ring, the horizontal bridge portion or the middle portion 16 There is no vertical interference on 84 and / or on the conical center portion 1683.

[0044] In some embodiments, in addition to the removable inserts described above, flanges and grooves may be used. inserts as backup or secondary seals and in ports on active components This can be used as an additional aid in properly aligning the board with the port on the PCB block. FIG. 17A shows a schematic diagram of a primary seal insert 1770 according to one embodiment of the present invention. 17. The location of a flange and groove secondary seal 1790 is shown. In other embodiments, a flange and groove structure may be used. The primary seal structure (closest to the desired flow path) can be the seal insert. 17B to 17D show the secondary seal structure or the primary seal. FIG. 17B shows various possible flange and groove structures that can be used as the guide structure. FIG. 17C shows a simple corresponding flange and groove ring 1790. 1793 shows the addition of an inverted concentric shoulder 1792 which serves to protect the nut from damage. FIG. 17D shows a double set of concentric flange and groove rings (1793, 1794). In some embodiments, the leak detector is embedded in the substrate between the primary and secondary seals. This can be done.

[0045] FIG. 18 illustrates a liquid crystal display (LCD) device having one or more active components embedded in a substrate block 1801. FIG. 19 shows another embodiment of a system for delivering chemical substances 1800. A perspective view of the plate block 1801 is shown. In the embodiment of FIG. 19, liquid passes through the inlet 1920A. 1925 to the check valve 1992 and the static mixer 1994. In this way, the two fluid flows are combined and reach the outlet port 1920. It exits the base block through B. As explained above, for use with liquid chemicals The substrate block 1401 for the semiconductor device can be made of a polymer or a fluoropolymer. In some embodiments, the substrate block 1401 for use with a gas mixture may be The substrate block 1401 may be made of a metal such as stainless steel. The substrate block may be formed with slots for the components or may have slots in the substrate block. The slots / openings can also be machined. The flow paths can be formed as explained above. or machined using prior art methods. In this state, the embedded active components are replaceable and are held in place by screws / fasteners 1991. The mounting bracket is removably held in place.

[0046] Many different aspects and embodiments are possible. Some of the embodiments have been described. After reading this specification, those aspects and embodiments may be understood as examples. Those skilled in the art will appreciate that the present invention is for illustrative purposes only and is not intended to limit the scope of the present invention. The embodiments may be based on any one or more of the following: do.

[0047] Item 1. A first substrate port and a second substrate port formed on a first surface, and a liquid passage extending in the direction of the substrate and fluidly connecting the first substrate port to the second substrate port. a plate block; a first active component fluidly connected to the first substrate port; and a first active structure. a second active component separate from the component elements and fluidly connected to a second substrate port; and an active component, the first liquid passage having no stagnation volume or area in which liquid may stagnate. Fluid delivery system.

[0048] Item 2. A system for dispensing a liquid chemical, comprising: a first surface formed with a A first board port and a second board port, the first board port extending in a first direction, a first liquid passage fluidly connecting the first port to a second substrate port; The first substrate port is adapted to be fluidly connected to a first active component and the second Such that the substrate port is fluidly connected to a second active component separate from the first active component. adapted such that the first liquid passage is a smooth flow passage having no stagnation volume or area in which liquid may stagnate. A system that is a convenient passageway.

[0049] Item 3. A system for dispensing a liquid chemical, comprising: a first surface formed with a A first board port and a second board port, the first board port extending in a first direction, a first liquid passage fluidly connecting the first port to a second substrate port; The first substrate port is adapted to be fluidly connected to a first active component and the second Such that the substrate port is fluidly connected to a second active component separate from the first active component. A system adapted such that the entire volume of the first liquid passage is matched to the fluid flow.

[0050] Item 4. The first liquid passage is shaped so that the liquid flows thoroughly throughout the entire volume of the liquid passage. Any one of the above items formed.

[0051] Item 5. Any of the preceding items, wherein the entire volume of the first liquid passage is consistent with the flow of the fluid. Or one item.

[0052] Item 6. Any of the preceding items, wherein the substrate block comprises a polymer or a fluoropolymer. One of the items.

[0053] Item 7. The substrate block contains polypropylene, PTFE, modified PTFE or PFA. any one of the preceding items.

[0054] Item 8. A substrate block having third and fourth substrate ports formed on a first surface, and and a second liquid passage fluidly connecting the third substrate port to a fourth substrate port. Any one of the items.

[0055] Item 9. Machine a smooth groove on the top surface of the first substrate layer and a matching groove on the bottom surface of the second substrate layer. and machine smooth grooves into the first substrate so that these aligned grooves form liquid passageways. A second substrate layer is placed on top of the board layer and the two layers are glued together to form a substrate block. Any one of the preceding items, in which a quotation has been formed.

[0056] Item 10. At both ends of the formed groove, a first port and a second port are formed through the second layer. Item 9 further includes drilling a hole.

[0057] Item 11. Bonding two substrate layers is the process of bonding two poles together by applying heat and pressure. The method of any one of the preceding claims, including melt bonding the polymer or fluoropolymer layers together. Any one item.

[0058] Item 12. The substrate block is formed by molding a polymer or a fluoropolymer. Any one of the above items.

[0059] Item 13. Molding includes compression molding, isostatic molding, melt processing, or injection molding. Hmm, item 12.

[0060] Item 14. The substrate block is formed by sintering a fluoropolymer in a mold. Or any one of the above items.

[0061] Item 15. Two substrate layers are sintered separately in a mold and then the layers are fusion bonded together any one of the preceding items, wherein a substrate block is formed.

[0062] Item 16. Active components include flow controllers, pressure transducers, flow measurement sensors, pressure regulators, and and a valve. Any one item.

[0063] Item 17. The ratio of free space to system components is 30% or less, 20% or less, Any one of the above items with an exclusive area of ​​10% or less or 5% or less eye.

[0064] Item 18. The spacing between active components is less than 10 mm, less than 5 mm, about 1 mm or 1 m. The above paragraph has active components mounted so that the distance between the active components is less than 20 mm, such as less than 20 m. Any one of the items.

[0065] Item 19. A first substrate port and a second substrate port formed on a first surface, a first fluid passage extending in the direction of the first substrate port and fluidly connecting the first substrate port to the second substrate port; a substrate block including a first active structure having a lower surface fluidly connected to the first substrate port; A seal assembly that seals the fluid connection of the component and the fluid connection of the component. A primary seal with an insert and a first surface of the substrate block and below the active components and a secondary seal having a flange and groove-like structure formed on the surface. Fluid delivery system.

[0066] Item 20. Item 19, wherein the seal insert comprises a polymer or a fluoropolymer.

[0067] Item 21. The seal assembly is compressed horizontally when installed and compressed vertically. Any one of items 19 to 20, which is provided with a seal ring that is not compressed in the forward direction. eye.

[0068] Item 22.2 The following flange and groove structures are located on the top surface of the substrate block or the bottom surface of the active components. A circular groove on one of the base blocks, with a corresponding circular flange on the top of the base block. The above items 19 to 21 extend from either the upper surface or the lower surface of the active component. Any one of these items.

[0069] Item 23. A circular flange and groove structure having a larger diameter than the insert seal. Any one of items 19 to 22, including structure.

[0070] Item 24. The flange and groove structure includes at least two concentric circular flange and groove structures. Yes, any one of items 19 to 23.

[0071] Item 25. The seal has a cone-shaped opening through which liquid flows when the seal is in place. Any one of items 19 to 24, including the central part.

[0072] Item 26. The ratio of the height of the cone in the central part of the cone to the thickness of the seal wall in the central part of the cone is , about 1.0 to 2.0, 1.1 to 1.8, or 1.1 to 1.6, etc., about 0.5 to 2 .5, item 25.

[0073] The invention described herein has broad applicability and is illustrated and shown in the examples above. The embodiments of the present invention can provide many advantages depending on the particular application. Differently, not all embodiments provide all of these advantages, and the present invention may provide some advantages. Nor will it achieve all achievable objectives.

[0074] When the terms "automated," "automated," or similar terms are used herein, These terms may also refer to automated processes or automated steps or automated processes. It is understood that this includes manual initiation of automated steps. In the claims, the terms "including" and "comprises" are used in an open-ended manner. These terms are therefore used as a set of terms that "include but are not limited to..." Unless a term is specifically defined herein, it should be construed to mean "without limitation." Unless otherwise specified, the term is intended to be used in its ordinary and customary sense. The accompanying drawings are intended to aid in the understanding of the invention and are specifically illustrated in the drawings. As used herein, the words "right" and "left" refer to ", "lower", "top", "bottom", "horizontal", "vertical", etc. refer to directions within the drawing to which they refer. These terms are used for convenience only and are not intended to be limiting. .

[0075] Furthermore, embodiments of the present invention may be implemented using computer hardware or software, or or a combination of hardware and software. The method of the present invention can be implemented using standard programming techniques in the manner described herein. This computer program can be implemented based on the method and diagram. A computer program is a computer program that is configured to include a computer program. The storage medium may include a computer readable storage medium, the storage medium configured to enable a computer to To communicate with the computer system, each processor The program is a high-level procedural programming language or an object-oriented programming language. However, if desired, these programs may be implemented in It may be implemented in a compile-time language or machine code. In either case, the language must be compiled The program may be in any language, interpreted or executable. The present invention may be implemented on a dedicated integrated circuit programmed to execute the program.

[0076] The scope of the present application is to provide any and all embodiments of the process, machine, manufacture, composition of matter, means, methods and / or processes described in the specification. It is not intended that the present invention be limited to the specific embodiments of the methods and steps. As will be readily understood from the disclosure of the present application, the present application is substantially similar to the corresponding embodiment described herein. any existing or later developed process that performs the same function or achieves substantially the same results Utilizing any process, machine, manufacture, composition of matter, means, methods or steps in accordance with the present invention. The appended claims therefore include within their scope such processes, The present disclosure is intended to include any such machines, manufacture, compositions of matter, means, methods, or steps. The figures depicted herein are generally schematic and embodiments of the present invention are not necessarily drawn to proper proportion or scale. It is not depicted in the.

Claims

1. 1. A liquid delivery system comprising: a substrate block including a first substrate port and a second substrate port formed in a top surface thereof, and a first liquid passage extending in a first direction and fluidly connecting the first substrate port to the second substrate port; a first active component having a lower surface with an active component port fluidly connected to the first substrate port; and a removable seal ring sized to surround the fluidly connected first substrate port and the active component port and to fit within corresponding seal grooves formed in an upper surface of the substrate block and a lower surface of the first active component to seal a fluid connection between the substrate block and the first active component; (a) a cylindrical inner sleeve having conical top and bottom portions surrounding an internal liquid passage and sized to fit within the seal groove such that liquid flowing between the first substrate port and the first active component port passes through the internal liquid passage, the inner sleeve tapering toward the top and bottom of the inner sleeve by having sloped outer portions at both the top and bottom of the inner sleeve that are sloped away from the internal passage at an angle relative to a vertical axis of the inner sleeve; and (b) an annular outer ring connected to an outer portion of the inner sleeve and having a larger diameter than the inner sleeve, the outer ring extending vertically toward both the top and bottom of the outer ring; A removable seal ring Including, 1. A liquid delivery system, wherein the inner sleeve has a first height extending from a top of the inner sleeve to a bottom of the inner sleeve, and the outer ring has a second height extending from a top of the outer ring to a bottom of the outer ring, the first height being greater than the second height.

2. 2. The liquid delivery system of claim 1, wherein the seal groove comprises a port opening having a sloped surface that mates with a sloped outer portion of the inner sleeve when the removable seal ring is installed.

3. 3. The liquid delivery system of claim 2, wherein the seal groove further comprises a circular groove having a diameter larger than the port opening into which an outer ring of the removable seal ring is inserted when the removable seal ring is installed.

4. The liquid delivery system of claim 3 , wherein the outer ring has a width greater than a width of the circular groove.

5. 5. The liquid delivery system of claim 4, wherein the outer ring is horizontally compressed but not vertically compressed when installed, and the angled outer portion of the inner sleeve is vertically compressed when the removable sealing ring is installed.

6. the outer ring has a height defined as the distance the outer ring extends vertically from a central horizontal axis toward both the top and bottom of the removable seal ring; The liquid delivery system of claim 3 , wherein the height of the outer ring is less than the depth of the circular groove.

7. The fluid delivery system of claim 1 , wherein the angled outer portion of the inner sleeve is vertically compressed when the removable sealing ring is installed.

8. 2. The liquid delivery system of claim 1, wherein the inner sleeve further includes a sloped inner portion at both the top and bottom of the inner sleeve away from the sloped outer portion and sloped toward the internal liquid passage at an angle relative to a vertical axis of the inner sleeve, the slope of the sloped inner portion being at a greater angle relative to the vertical axis than the slope of the sloped outer portion.

9. 2. The liquid delivery system of claim 1, wherein the inner sleeve has an axial height from a horizontal axis of the removable sealing ring to an upper or lower end of the inner sleeve, and a ratio of the axial height to an inner sleeve wall thickness is between about 0.5 and 2.

5.

10. 2. The liquid delivery system of claim 1, wherein the removable sealing ring is symmetrical above and below a central horizontal plane, and the cylindrical inner sleeve includes an inner portion inclined at a greater angle relative to the vertical axis than the inclined outer portion.

11. The fluid delivery system of claim 1 , wherein the removable sealing ring is symmetrical about a central vertical plane.

12. The fluid delivery system of claim 1 , wherein the removable sealing ring comprises a polymer or a fluoropolymer.

13. The fluid delivery system of claim 1 , wherein the removable sealing ring comprises a compressible material.

14. The fluid delivery system of claim 1 , wherein the removable sealing ring includes a bridge portion extending between the inner sleeve and the outer ring, the bridge portion having substantially parallel upper and lower surfaces.

15. The fluid delivery system of claim 14 , wherein the inner sleeve has a vertical wall extending between the angled outer portion and the bridge portion.

16. The liquid delivery system of claim 15 , wherein the vertical wall portion has a height that is less than a height of the sloped outer portion.

17. The fluid delivery system of claim 14 , wherein the bridge portion has a thickness less than a radial thickness of the inner sleeve.

18. 15. The fluid delivery system of claim 14, wherein the bridge portion is not vertically compressed when the removable sealing ring is installed.

19. a removable sealing ring for sealing around a fluid connection formed when two substrates are joined, each substrate having a fluid flow passage opening to a first substrate surface, said sealing ring comprising: an inner sleeve having conical upper and lower portions surrounding an internal fluid passage and sized to fit within a corresponding seal groove in the face of the substrate such that fluid flowing between the fluidly connected substrates passes through the internal fluid passage, the inner sleeve tapering toward the top and bottom of the inner sleeve by having sloped outer portions at both the top and bottom of the inner sleeve that are sloped away from the internal passage at an angle relative to a normal axis of the inner sleeve; an annular outer ring connected to an outer portion of the inner sleeve and having a larger diameter than the inner sleeve, the outer ring extending vertically toward both the top and bottom of the outer ring and sized to fit within corresponding circular grooves formed in the surfaces of the substrates and surrounding the fluid connection between the substrates; Equipped with a removable seal ring, the inner sleeve having a first height extending from a top of the inner sleeve to a bottom of the inner sleeve, and the outer ring having a second height extending from a top of the outer ring to a bottom of the outer ring, the first height being greater than the second height;

20. 20. The removable seal ring of claim 19, wherein the inner sleeve has an axial height from a horizontal axis of the removable seal ring to an upper or lower end of the inner sleeve, and a ratio of the axial height to an inner sleeve wall thickness is between about 0.5 and 2.

5.

21. 20. The removable seal ring of claim 19, wherein the removable seal ring is symmetrical above and below a central horizontal plane, and the cylindrical inner sleeve includes an inner portion inclined at a greater angle relative to the vertical axis than the inclined outer portion.

22. 20. The removable seal ring of claim 19, wherein the removable seal ring is symmetrical about a central vertical plane.

23. 20. The removable seal ring of claim 19, wherein the removable seal ring comprises a polymer or a fluoropolymer.

24. 20. The removable sealing ring of claim 19, wherein the removable sealing ring comprises a compressible material.

25. 20. The removable seal ring of claim 19, further comprising a bridge portion extending between said inner sleeve and said outer ring, said bridge portion having substantially parallel upper and lower surfaces.

26. 26. The removable seal ring of claim 25, wherein the inner sleeve has a vertical wall extending between the angled outer portion and the bridge portion.

27. 27. The removable seal ring of claim 26, wherein the vertical wall portion has a height that is less than a height of the angled outer portion.

28. 26. The removable seal ring of claim 25, wherein the bridge portion has a thickness less than a radial thickness of the inner sleeve.

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