Powder particle coating apparatus

Abstract

A powder particle coating apparatus according to embodiments of the present invention comprises: a main body part which forms an exterior and in which coating of a workpiece is performed; a plurality of injection parts spaced apart from each other on the main body part and configured to inject a precursor; and a vibration part disposed on the main body part and configured to vibrate, wherein the main body part may be configured to be rotatable. Accordingly, coating can be effectively performed on the workpiece through precursor injection via the plurality of injection parts and rotation of the main body part.

Description

Powder particle coating device

[0001] The present invention relates to a powder particle coating device.

[0002] In modern industries, powder-form materials are used as important materials in various fields such as chemistry, pharmaceuticals, food, and construction. Powder particles have a very large surface area in the solid state, making them highly reactive and capable of providing diverse physical and chemical properties. However, powder particles can often suffer from problems such as aggregation, clumping, moisture adsorption, and reduced chemical reactivity due to limitations in their surface characteristics. These issues negatively affect the shelf life, processability, and functionality of the powder, and can degrade product quality, particularly in industries requiring high precision.

[0003] To address these issues, technologies for applying various coatings to powder particles have been developed. By forming a coating layer on powder particles, various benefits can be provided, such as controlling surface area, imparting chemical stability, preventing aggregation, and attaching functional additives. In particular, with the advancement of nanotechnology, powder particle coating technology has become more sophisticated and plays a crucial role in manufacturing high-performance materials.

[0004] Conventional powder particle coating devices have primarily utilized fluid immersion, mechanical spraying, and electromagnetic field applications; however, these methods generally require complex equipment, suffer from poor coating uniformity, high energy consumption, and limitations in mass production. Consequently, there is a continuously emerging need for new devices and methods capable of efficient and uniform coating by overcoming the shortcomings of existing technologies.

[0005] Against this backdrop, active research is being conducted on improved coating devices capable of more efficiently coating powder particles, thereby enabling the stable mass production of high-quality powder materials in various industrial fields.

[0006] Embodiments of the present invention aim to provide a powder particle coating apparatus capable of effectively coating a workpiece by including a plurality of precursor injection units.

[0007] In addition, embodiments of the present invention aim to provide a powder particle coating device capable of changing the injection cycle and time of the precursor by considering the characteristics of the workpiece and the reactivity of the precursor.

[0008] In addition, embodiments of the present invention aim to provide a powder particle coating device capable of effectively coating a workpiece by continuously mixing and moving the workpiece through rotation.

[0009] In addition, embodiments of the present invention aim to provide a powder particle coating device capable of generating plasma to promote the reaction between a workpiece and a precursor.

[0010] In addition, embodiments of the present invention aim to provide a powder particle coating device capable of effectively coating a workpiece through the vibration of a vibrating part.

[0011] According to embodiments of the present invention, a powder particle coating device can effectively coat a workpiece by introducing a precursor through a plurality of injection ports.

[0012] Specifically, the device comprises a main body portion that forms an exterior and performs coating of a workpiece internally, an injection portion spaced apart from the main body portion and configured to inject a precursor, and a vibration portion configured to vibrate and configured to be disposed in the main body portion, wherein the main body portion may be configured to be rotatable. That is, the main body portion is configured to be rotatable in horizontal and vertical directions, and uniform mixing and coating of powder particles and precursors can be performed through the rotation of the main body portion.

[0013] In addition, the above-mentioned main body further includes a plasma unit spaced apart from the injection unit and configured to generate plasma, wherein the plasma unit can promote the reaction between the precursor and the workpiece through the plasma. That is, the plasma unit can generate high-energy ions to significantly enhance the reactivity between the precursor and the workpiece, thereby preventing non-uniform reactions that may occur during the coating process and enabling precise control of the coating thickness.

[0014] Additionally, it further includes a rotating part configured to rotate the main body, and the rotating part may be formed with a double axis to perform horizontal rotation and vertical rotation.

[0015] In addition, it further includes a control unit configured to control the main body, the injection unit, the vibration unit, the plasma unit, and the rotation unit, wherein the control unit is configured to periodically inject a precursor through the injection unit, and the injection cycle of the precursor can be adjusted by considering the characteristics of the workpiece and the reactivity of the precursor.

[0016] Additionally, the injection unit is provided in the main body and includes an injection main body forming an exterior, an injection path formed through the interior of the injection main body to provide a path for a precursor to pass through, an injection filter unit movably disposed within the injection main body and provided to remove foreign substances, an injection opening / closing unit disposed at the end of the injection main body to open / close the injection path unit, and an injection fixing unit disposed within the injection main body, coupled with the injection filter unit, and provided to fix the position of the injection filter unit. The injection filter unit is disposed within the injection main body and includes an injection filter performing unit disposed with a plurality of through holes formed to remove foreign substances, an injection filter moving unit connected to one end of the injection filter performing unit and provided to move the injection filter performing unit, an injection filter coupling unit disposed at the other end of the injection filter performing unit and coupled with the injection fixing unit, and an injection filter magnetic unit disposed in the center of the injection filter coupling unit and provided to have magnetism, and the injection fixing unit is fixed within the injection main body. It may include an injection fixing main body, an injection fixing magnetic part provided in the injection fixing main body and coupled to the injection filter magnetic part, and an injection fixing absorption part provided to surround the injection fixing magnetic part and absorb shock.

[0017] In addition, the plasma section comprises a plasma main body section provided in the main body section, a plasma generating section provided inside the plasma main body section to generate plasma, a plasma path section provided outside the plasma main body section to guide plasma to the outside, a plasma support section disposed outside the plasma main body section and connected to the plasma path section to support the plasma path section and adjust the angle of the plasma path section, and a plasma fixing section disposed inside the plasma main body section to fix the plasma generating section. The plasma support section comprises a support outer section coupled to the plasma main body section, a support moving section provided on the support outer section to be movable, a support connecting section provided at the end of the support moving section to be connected to the plasma path section, and a support rotating section connected to the support moving section and the support connecting section to be rotatable. The control section can vary the path of the plasma path section by moving the plasma support section when the main body section rotates.

[0018] In addition, the vibration unit may include a vibration main body unit coupled to the main body unit, a plurality of vibration generating units provided in the vibration main body unit to generate vibration, a vibration moving unit disposed in the vibration main body unit to vary the position of the vibration generating unit, and a vibration rotating unit connected to the vibration moving unit and the vibration generating unit and provided to be rotatable.

[0019] In addition, the plasma part is positioned above the center of the main body part, and the injection part is positioned 2 to 4 times more below the center of the main body part than above, and the injection part may be provided 1.2 to 4 times more than the plasma part.

[0020] Additionally, the injection filter section includes a front filter section positioned to face the injection opening / closing section, a central filter section spaced apart from the front filter section, and a rear filter section spaced apart from the central filter section; the gap (D1) of the front filter section is provided to be 1.2 to 1.8 of the gap (D2) of the central filter section, and the gap (D2) of the central filter section is provided to be 1.5 to 2.3 of the gap (D3) of the rear filter section; and the control section positions the front filter section, the central filter section, and the rear filter section inside the injection main body section when the supply of a precursor is required to be greater than or equal to a first reference amount; when the supply of a precursor is required to be less than the first reference amount but greater than or equal to a second reference amount, the front filter section is positioned in the injection path section, and the central filter section and the rear filter section are positioned inside the injection main body section; and when the supply of a precursor is required to be less than the second reference amount but greater than or equal to a third reference amount, the front filter section and the central filter section are the The injection path portion is positioned therein, the rear filter portion is positioned inside the injection body portion, and when the supply of the precursor is required to be less than the third reference amount, the front filter portion, the central filter portion, and the rear filter portion are positioned in the injection path portion, the first reference amount is provided as 1.2 to 5 of the second reference amount, and the second reference amount can be provided as 1.1 to 7 of the third reference amount.

[0021] In addition, the plasma support member is provided in multiple numbers to surround the plasma path member, and the control member can move the plasma path member in the up-and-down direction when the main body member rotates horizontally, and move the plasma path member in the left-and-right direction when the main body member rotates vertically.

[0022] Embodiments of the present invention may provide a powder particle coating device capable of effectively coating a workpiece by including a plurality of precursor injection parts.

[0023] In addition, embodiments of the present invention can provide a powder particle coating device capable of changing the injection cycle and time of the precursor by considering the characteristics of the workpiece and the reactivity of the precursor.

[0024] In addition, embodiments of the present invention can provide a powder particle coating device capable of effectively coating a workpiece by continuously mixing and moving the workpiece through rotation.

[0025] In addition, embodiments of the present invention can provide a powder particle coating device capable of generating plasma to promote the reaction between a workpiece and a precursor.

[0026] In addition, embodiments of the present invention can provide a powder particle coating device capable of effectively coating a workpiece through the vibration of a vibrating part.

[0027] FIG. 1 is a perspective view of a powder particle coating device according to one embodiment of the present invention.

[0028] FIG. 2 is a drawing showing an injection part according to one embodiment of the present invention.

[0029] FIG. 3 is a drawing showing a plasma section according to one embodiment of the present invention.

[0030] FIG. 4 is a drawing showing a vibration part according to one embodiment of the present invention.

[0031] FIG. 5 is a drawing showing a rotating part according to one embodiment of the present invention.

[0032] Below, embodiments of the present invention are described in detail with reference to the attached drawings so that those skilled in the art can easily implement the invention.

[0033] However, the present invention may be implemented in various different forms and is not limited to the embodiments described herein. Furthermore, in order to clearly explain the invention in the drawings, parts unrelated to the description have been omitted, and similar parts throughout the specification have been given similar reference numerals.

[0034] In this specification, redundant descriptions of identical components are omitted.

[0035] Furthermore, when a component is described in this specification as being 'connected' or 'connected' to another component, it should be understood that it may be directly connected to or connected to the other component, or that there may be other components in between. On the other hand, when a component is described in this specification as being 'directly connected' or 'directly connected' to another component, it should be understood that there are no other components in between.

[0036] Furthermore, the terms used in this specification are used merely to describe specific embodiments and are not intended to limit the invention.

[0037] Additionally, in this specification, singular expressions may include plural expressions unless the context clearly indicates otherwise.

[0038] Furthermore, in this specification, terms such as 'comprising' or 'having' are intended merely to indicate the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not excluding in advance the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0039] Additionally, in this specification, the term "and / or" includes a combination of the plurality of described items or any of the plurality of described items. In this specification, "A or B" may include "A," "B," or "both A and B."

[0040] FIG. 1 is a perspective view of a powder particle coating device according to an embodiment of the present invention. Referring to FIG. 1, a powder particle coating device (S) according to an embodiment of the present invention may include a main body part (1), an injection part (2), and a vibration part (3).

[0041] The main body (1) forms the exterior and allows for the coating of a workpiece (U) to be performed inside. That is, the main body (1) can perform coating on a workpiece introduced into it or a workpiece stored inside. Additionally, the main body (1) is provided in a spherical shape so that rotation is easy and coating of the workpiece can be easily performed inside. However, the shape of the main body (1) is not limited to a spherical shape and can be set in various shapes such as a rectangular parallelepiped shape and a cylindrical shape.

[0042] Meanwhile, the workpiece may be provided as a conventional powder, but is not limited thereto. Additionally, the coating described above may be an ALD (Atomic Layer Deposition) coating.

[0043] Specifically, ALD (Atomic Layer Deposition) powder coating is an advanced technology used to form a very thin and uniform coating layer on the surface of powder particles. ALD is a method of depositing nanometer-thick coatings at the atomic level, boasts very high precision, and is used to improve the functionality of powders in various industrial fields.

[0044] The principle of ALD powder coating is as follows. ALD is a type of Chemical Vapor Deposition (CVD) that uses two or more gas precursors to build atomic-level layers on the surface of powder particles. This process consists of multiple steps, in which a single molecule reacts with the powder surface to form a coating. An important characteristic of this process is that the reaction occurs only on the surface, and only a very thin layer is deposited at a time. This allows for very precise control of the coating thickness, and the desired thickness can be achieved by repeating the process as many times as needed.

[0045] In addition, the ALD coating process may consist of the following steps. Step 1 is a precursor injection step, where a first precursor is injected into a reaction chamber and adsorbed onto the surface of powder particles. Step 2 is a purging step, where a purge gas is injected to remove unreacted precursors and byproducts. Step 3 is a second precursor injection step, where a second precursor is injected and reacts with the first precursor to form a very thin coating layer. Step 4 is a re-purging step, where the purging process can be repeated to remove remaining gas and byproducts after the reaction. By repeating the above-described process, a coating of a desired thickness can be obtained.

[0046] The above description of the coating describes a conventional coating, and the powder particle coating device (S) according to the embodiments of the present invention includes such content, but specific parts may be modified or provided differently.

[0047] Injection units (2) are spaced apart in multiple locations on the main body (1) and can be provided to inject a precursor (K). That is, the injection units (2) can inject a precursor necessary for coating a workpiece, and by being spaced apart in multiple locations, the precursor can be uniformly injected throughout the entire interior of the main body (1). Thus, the injection units (2) can effectively and uniformly perform coating over the entire surface of the workpiece.

[0048] The vibrating part (3) may be configured to be placed in the main body (1) and vibrate. That is, the vibrating part (3) can uniformly distribute the precursor and the workpiece inside the main body (1) through vibration and maximize contact between the precursor and the workpiece.

[0049] The main body (1) may be provided to be rotatable. That is, the main body (1) can effectively perform coating on the workpiece by continuously mixing and moving the workpiece and precursor inside the main body (1). If the vibration of the vibration unit (3) and the rotation of the main body (1) proceed together, the coating efficiency can be further improved.

[0050] Specifically, the main body (1) is configured to be rotatable in the horizontal and vertical directions, and through the rotation of the main body (1), uniform mixing and coating of powder particles and precursors can be performed.

[0051] A powder particle coating device (S) according to one embodiment of the present invention may include a plasma section (4). The plasma section (4) is spaced apart from the injection section (2) in the main body section (1) and may be configured to generate plasma. That is, the plasma section (4) can promote the reaction between the precursor and the workpiece through the plasma. Specifically, the plasma generated by the plasma section (4) can ionize the gaseous precursor or generate radicals to improve reactivity. In other words, the plasma section (4) can generate high-energy ions to significantly improve the reactivity between the precursor and the workpiece, thereby preventing non-uniform reactions that may occur during the coating process and allowing for precise control of the coating thickness.

[0052] In addition, as the plasma section (4) generates plasma internally, the plasma generation area and the reaction area inside the main body (1) where the reaction between the workpiece and the precursor occurs are separated, so that damage to the workpiece and the precursor caused by high-energy ions can be minimized.

[0053] Additionally, the plasma section (4) may be positioned on one side of the main body (1) based on the center of the main body (1). That is, the plasma section (4) is concentrated on one side of the main body (1) so that the plasma generation area and the reaction area are effectively separated, thereby minimizing damage to the workpiece and precursor. As an example, one side of the main body (1) may be the upper side of the main body (1).

[0054] Meanwhile, a powder particle coating device (S) according to one embodiment of the present invention may include a control unit (P). The control unit (P) may be configured to control the main body (1), the injection unit (2), the vibration unit (3), the plasma unit (4), and the rotation unit (5).

[0055] In addition, the control unit (P) is configured to periodically inject a precursor through the injection unit (2), and the injection cycle of the precursor can be adjusted by considering the characteristics of the workpiece and the reactivity of the precursor. That is, the control unit (P) can adjust the injection of the precursor by considering the size of the workpiece, the type of the workpiece and the chemical reactivity of the workpiece, the size of the precursor, the type of the precursor and the chemical reactivity of the precursor.

[0056] In addition, the control unit (P) can individually control each of the multiple injection units (2) to adjust the injection of the precursor according to the position of the injection unit (2), thereby improving the coating quality and efficiency of the workpiece.

[0057] FIG. 2 is a drawing showing an injection section according to an embodiment of the present invention. FIG. 2 is illustrated to show the interior of the injection section for convenience of explanation. Referring to FIG. 2, the injection section (2) may include an injection main body section (21), an injection path section (22), an injection filter section (23), an injection opening / closing section (24), and an injection fixing section (25).

[0058] The injection body (21) is provided in the main body (1) and can form an exterior. That is, one side of the injection body (21) may be positioned outside the main body (1), and the other side may be positioned inside the main body (1). Accordingly, a precursor can be easily and stably injected from the outside into the main body (1).

[0059] The injection path (22) can be formed through the interior of the injection body (21) to provide a path through which the precursor passes. That is, the injection path (22) can provide a path through which the precursor moves from the outside to the interior of the body (1).

[0060] The injection filter section (23) is positioned to be movable inside the injection main body section (21) and can be provided to remove foreign substances. That is, the injection filter section (23) can prevent external foreign substances from entering the main body section (1) when a precursor is injected into the main body section (1), thereby improving coating quality and coating efficiency.

[0061] The injection opening / closing part (24) may be positioned at the end of the injection main body part (21) and configured to open / close the injection path part (22). That is, the injection opening / closing part (24) can control the amount and speed of the precursor injected into the main body part (1) by adjusting the opening of the injection path part (22).

[0062] The injection fixing part (25) is positioned inside the injection main body part (21) and coupled with the injection filter part (23), and can be provided to fix the position of the injection filter part (23). That is, when the injection filter part (23) is positioned in the injection path part (22), the injection fixing part (25) can fix the end of the injection filter part (23) to stably maintain the position of the injection filter part (23).

[0063] The injection filter section (23) may include an injection filter performing section (231), an injection filter moving section (232), an injection filter coupling section (233), and an injection filter magnetic section (234). The injection filter performing section (231) is positioned inside the injection main body section (21) and may be provided with a plurality of through holes formed to remove foreign substances.

[0064] The injection filter moving part (232) may be connected to one end of the injection filter performing part (231) to move the injection filter performing part (231). That is, the injection filter moving part (232) may be placed inside the injection main body part (21) to provide power to move the injection filter performing part (231).

[0065] The injection filter coupling part (233) is provided at the other end of the injection filter performing part (231) and can be coupled with the injection fixing part (25). That is, the injection filter coupling part (233) is formed protruding from the other end of the injection filter performing part (231) and can be fixed in position by engaging with the injection fixing part (25).

[0066] The injection filter magnetic part (234) may be positioned in the center of the injection filter coupling part (233) and provided to have magnetism. That is, when the injection filter magnetic part (234) is coupled with the injection fixing part (25), the coupling force can be improved by magnetism.

[0067] Meanwhile, the injection fixing part (25) may include an injection fixing main body part (251), an injection fixing magnetic part (252), and an injection fixing absorption part (253). The injection fixing main body part (251) may be fixed inside the injection main body part (21). That is, the injection fixing main body part (251) may be provided with a material having greater rigidity than the injection main body part (21) to ensure structural rigidity.

[0068] The injection fixing magnetic part (252) is provided in the injection fixing main body part (251) and can be combined with the injection filter magnetic part (234). That is, the injection fixing magnetic part (252) is positioned inside the injection fixing main body part (251) to face the injection filter magnetic part (234), and is provided to have magnetism so that it can be strongly combined with the injection filter magnetic part (234) by magnetism.

[0069] The injection fixing absorption part (253) can be provided to surround the injection fixing magnetic part (252) and absorb shock. That is, the injection fixing absorption part (253) is provided with an elastic material so that shock can be effectively dispersed when the injection filter coupling part (233) and the injection filter magnetic part (234) are combined.

[0070] Meanwhile, the injection filter section (23) may include a front filter section (23a), a central filter section (23b), and a rear filter section (23c). The front filter section (23a) may be positioned to face the injection opening / closing section (24). The central filter section (23b) may be positioned spaced apart from the front filter section (23a). The rear filter section (23c) may be positioned spaced apart from the central filter section (23b).

[0071] The pore (D1) of the front filter section (23a) is provided with a size of 1.2 to 1.8 of the pore (D2) of the central filter section (23b), and the pore (D2) of the central filter section (23b) can be provided with a size of 1.5 to 2.3 of the pore (D3) of the rear filter section (23c). That is, the pores are provided to become smaller as they go from the front filter section (23a) to the rear filter section (23c), so that foreign substances of various sizes can be effectively removed.

[0072] Specifically, the pore (D1) of the front filter section (23a) is provided with a size of 1.45 to 1.65 of the pore (D2) of the central filter section (23b), and the pore (D2) of the central filter section (23b) can be provided with a size of 1.85 to 2.05 of the pore (D3) of the rear filter section (23c). That is, the pores are provided to become smaller as they go from the front filter section (23a) toward the rear filter section (23c), so that foreign substances of various sizes can be removed more effectively.

[0073] More specifically, the pore (D1) of the front filter section (23a) is provided as 1.5 of the pore (D2) of the central filter section (23b), and the pore (D2) of the central filter section (23b) can be provided as 1.95 of the pore (D3) of the rear filter section (23c). That is, the pores are provided to become smaller as they go from the front filter section (23a) to the rear filter section (23c), so that foreign substances of various sizes can be removed more effectively.

[0074] Additionally, the front filter section (23a), the central filter section (23b), and the rear filter section (23c) may each include an injection filter performing section (231), an injection filter moving section (232), an injection filter coupling section (233), and an injection filter magnetic section (234).

[0075] Meanwhile, the control unit (P) may position the front filter unit (23a), the central filter unit (23b), and the rear filter unit (23c) inside the injection main body (21) when the supply of the precursor is required to be greater than the first reference amount. That is, if the supply of the precursor is required to be greater than the first reference amount, the control unit (P) may not position the front filter unit (23a), the central filter unit (23b), and the rear filter unit (23c) inside the injection path unit (22) so that the flow of the precursor is not obstructed by the front filter unit (23a), the central filter unit (23b), and the rear filter unit (23c).

[0076] When the supply of precursor is required to be less than the first reference amount and greater than the second reference amount, the control unit (P) may position the front filter unit (23a) in the injection path unit (22) and position the central filter unit (23b) and the rear filter unit (23c) inside the injection main body (21). That is, if the supply of precursor is required to be less than the first reference amount and greater than the second reference amount, the control unit (P) may position only the front filter unit (23a) in the injection path unit (22) so that the flow of precursor is not obstructed by the central filter unit (23b) and the rear filter unit (23c).

[0077] When the supply of precursor is required to be less than the second reference amount and greater than the third reference amount, the control unit (P) may position the front filter unit (23a) and the central filter unit (23b) in the injection path unit (22) and position the rear filter unit (23c) inside the injection main body unit (21). That is, if the supply of precursor is required to be less than the second reference amount and greater than the third reference amount, the control unit (P) may position only the front filter unit (23a) and the central filter unit (23b) in the injection path unit (22) so that the flow of precursor is not obstructed by the rear filter unit (23c).

[0078] The control unit (P) can position the front filter unit (23a), the central filter unit (23b), and the rear filter unit (23c) in the injection path unit (22) when the supply of the precursor is required to be less than the third reference amount. That is, if the supply of the precursor is required to be less than the third reference amount, the control unit (P) can position the front filter unit (23a), the central filter unit (23b), and the rear filter unit (23c) all in the injection path unit (22) to effectively perform foreign substance removal.

[0079] Meanwhile, the first standard amount is provided as 1.2 to 5 of the second standard amount, and the second standard amount can be provided as 1.1 to 7 of the third standard amount. Accordingly, the control of the inflow amount of the precursor and the removal of foreign substances can be effectively performed simultaneously.

[0080] Specifically, the first standard amount is provided as 2.7 of the second standard amount, and the second standard amount can be provided as 4.2 of the third standard amount. Accordingly, the control of the precursor inflow amount and the removal of foreign substances can be performed more effectively at the same time.

[0081] FIG. 3 is a drawing showing a plasma section according to an embodiment of the present invention. FIG. 3 is illustrated so that the interior of the plasma section is shown for convenience of explanation. Referring to FIG. 3, the plasma section (4) may be provided in the main body section (1), where the plasma main body section (41) forms the exterior.

[0082] The plasma generating unit (42) is provided inside the plasma main body (41) to generate plasma. That is, the plasma generating unit (42) can generate plasma on its own or receive plasma from the outside and provide plasma into the main body (1).

[0083] The plasma path section (43) is provided on the outside of the plasma main body section (41) to guide the plasma to the outside. That is, the plasma path section (43) can provide a path to guide the plasma supplied by the plasma generation section (42) to the main body section (1).

[0084] The plasma support member (44) is positioned on the outside of the plasma main body (41) and is connected to the plasma path member (43) to support the plasma path member (43) and can adjust the angle of the plasma path member (43). That is, the plasma support member (44) can supply plasma uniformly inside the main body (1) by adjusting the angle of the plasma path member (43), and can supply plasma to a specific location in the main body (1) depending on the situation.

[0085] The plasma fixing part (45) is positioned inside the plasma main body part (41) to fix the plasma generating part (42). That is, the plasma fixing part (45) forms a frame so that the plasma generating part (42) can be fixed inside. Accordingly, the plasma fixing part (45) can guide the plasma generating part (42) to stably supply plasma into the main body part (1).

[0086] Meanwhile, the plasma support part (44) may include a support outer part (441), a support moving part (442), a support connecting part (443), and a support rotating part (444). The support outer part (441) may be coupled to the plasma main body part (41). That is, the support outer part (441) forms an outer part and may be fixed to the plasma main body part (41).

[0087] The support moving part (442) can be provided on the support outer part (441) so as to be movable. That is, the position of the plasma path part (43) can be adjusted and the angle changed according to the movement of the support moving part (442).

[0088] The support connection part (443) is provided at the end of the support movement part (442) and can be connected to the plasma path part (43). That is, the support connection part (443) connects the plasma path part (43) and the support movement part (442) so that the angle of the plasma path part (43) can be adjusted according to the movement of the support movement part (442).

[0089] The support pivot part (444) can be configured to connect the support moving part (442) and the support connecting part (443) and to be rotatable. That is, the support pivot part (444) rotates according to the movement of the support moving part (442) to effectively adjust the position and angle of the plasma path part (43).

[0090] The plasma support members (44) are provided in multiple numbers to surround the plasma path member (43), so that the angle of the plasma path member (43) can be efficiently adjusted in any direction.

[0091] The control unit (P) can vary the path of the plasma path unit (43) by moving the plasma support unit (44) when the main body unit (1) rotates. Specifically, when the main body unit (1) rotates vertically, the control unit (P) can move the plasma support unit (44) in a horizontal direction to move the plasma path unit (43) in a horizontal direction. Additionally, when the main body unit (1) rotates horizontally, the control unit (P) can move the plasma support unit (44) in a vertical direction to move the plasma path unit (43) in a vertical direction. Accordingly, the control unit (P) can supply plasma uniformly and efficiently into the main body unit (1).

[0092] The control unit (P) can reciprocate the plasma path unit (43) in the horizontal direction 2n+2 times when the main body unit (1) rotates n times in the vertical direction. Accordingly, plasma is uniformly supplied inside the main body unit (1), so that the coating of the workpiece can be efficiently performed.

[0093] In addition, the control unit (P) can reciprocate the plasma path unit (43) in the vertical direction 2n+2 times when the main body unit (1) rotates n times in the horizontal direction. Accordingly, plasma is uniformly supplied inside the main body unit (1), so that the coating of the workpiece can be efficiently performed.

[0094] In other words, the plasma support member (44) is provided in multiple numbers to surround the plasma path member (43), and the control member (P) can move the plasma path member (43) in the up-and-down direction when the main body member (1) rotates horizontally, and move the plasma path member (43) in the left-and-right direction when the main body member (1) rotates vertically.

[0095] FIG. 4 is a drawing showing a vibration unit according to an embodiment of the present invention. FIG. 4 is illustrated to show the interior of the vibration unit for convenience of explanation. Referring to FIG. 4, the vibration unit (3) may include a vibration main body (31), a vibration generating unit (32), a vibration moving unit (33), and a vibration rotating unit (34).

[0096] The vibration body part (31) forms an exterior and can be coupled to the main body part (1). A plurality of vibration generating parts (32) can be provided in the vibration body part (31) to generate vibration. That is, the vibration generating parts (32) can generate vibration to promote the reaction between the workpiece and the precursor inside the main body part (1).

[0097] The vibration moving part (33) may be provided to be positioned in the vibration main body part (31) to vary the position of the vibration generating part (32). That is, the vibration moving part (33) can adjust the position of the vibration generating part (32) inside the main body part (1) so that the coating of the workpiece can be performed efficiently.

[0098] The vibration rotating part (34) can be configured to connect the vibration moving part (33) and the vibration generating part (32) and to be rotatable. That is, the vibration rotating part (34) can adjust the angle of the vibration generating part (32) through rotation. Accordingly, the vibration rotating part (34) can provide vibration uniformly throughout the interior of the main body part (1).

[0099] Additionally, the vibration unit (3) may include a vibration assist unit (35). The vibration assist unit (35) may protrude in multiple numbers from the outside of the vibration generating unit (32) to generate micro-vibrations. Accordingly, the vibration assist unit (35) can generate vibrations of a different frequency from the vibration generating unit (32) to maximize the coating efficiency of the workpiece. That is, the vibration assist unit (35) may generate micro-vibrations compared to the vibration of the vibration generating unit (32).

[0100] Meanwhile, the plasma section (4) can be positioned on the upper side relative to the center of the main body (1). That is, the plasma section (4) can be positioned off-center relative to the center of the main body (1) so that more plasma is supplied to one side of the main body (1). Accordingly, coating of the workpiece can be performed quickly on one side of the main body (1). In addition, the vibration section (3) is also provided on one side of the main body (1) to improve the coating efficiency of the workpiece according to the plasma supply.

[0101] Afterwards, by rotating the main body (1) horizontally and vertically, the workpiece can be coated sequentially on the other side of the main body (1), thereby improving the overall coating speed and maximizing the coating quality.

[0102] Additionally, the injection section (2) can be positioned two to four times more on the lower side than on the upper side relative to the center of the main body (1). That is, the injection section (2) can be positioned more on the other side of the main body (1) to efficiently utilize space with the vibration section (3) and the plasma section (4), and the precursor supplied relatively more on the other side of the main body (1) can be sequentially supplied through rotation to the side of the main body (1) where there is relatively more plasma and vibration, thereby maximizing the coating efficiency of the entire main body (1).

[0103] Additionally, the injection section (2) may be provided in quantities 1.2 to 4 times greater than the plasma section (4). Accordingly, the supply of precursors, which are a more important factor in coating, can be supplied in greater quantities than the plasma, thereby improving coating efficiency.

[0104] For example, seven injection units (2) may be provided on the other side of the main body (1) and two may be provided on one side of the main body (1). One side of the main body (1) may be the upper side, and the other side of the main body (1) may be the lower side. In addition, six plasma units (4) may be provided. Accordingly, the overall coating efficiency and coating quality inside the main body (1) can be improved.

[0105] FIG. 5 is a drawing showing a rotating part according to an embodiment of the present invention. Referring to FIG. 5, a powder particle coating device (S) according to an embodiment of the present invention may include a rotating part (5). The rotating part (5) may be provided to rotate the main body part (1). That is, the rotating part (5) may be formed with a double axis and provided to perform horizontal rotation and vertical rotation.

[0106] Accordingly, the rotating part (5) can effectively mix the workpiece and the precursor inside the main body (1) through horizontal rotation and vertical rotation, thereby enabling uniform coating and efficient coating to be performed.

[0107] Specifically, the rotating part (5) may include a rotating main body part (51), a rotating horizontal part (53), and a rotating vertical part (52). The rotating main body part (51) forms the exterior and may be positioned outside the main body part (1). The rotating horizontal part (53) is connected to the rotating main body part (51) and can rotate the main body part (1) in a horizontal direction as it rotates.

[0108] The rotating vertical section (52) is connected to the rotating horizontal section (53), and as it rotates, the main body (1) can be rotated vertically. That is, the rotating horizontal section (53) and the rotating vertical section (52) are formed as a double axis to perform horizontal rotation and vertical rotation. Accordingly, the coating on the workpiece inside the main body (1) can be effectively performed. Meanwhile, the rotating main body (51) is not separately provided, and is provided only with the rotating horizontal section (53) and the rotating vertical section (52), and rotation can be performed by receiving power.

[0109] Although representative embodiments of the present invention have been described in detail above, those skilled in the art will understand that various modifications can be made to the above-described embodiments without departing from the scope of the present invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined by the claims set forth below as well as equivalents thereof.

[0110] [Explanation of the symbol]

[0111] S: Powder particle coating device P: Control unit

[0112] 1: Main body 2: Injection part

[0113] 3: Vibration section 4: Plasma section

[0114] 5: Rotating part

Claims

1. A main body part that forms the exterior and performs coating of the workpiece internally; Injection parts spaced apart in plurality from each other in the main body and configured to inject a precursor; and It includes a vibration part disposed in the main body and configured to vibrate; A powder particle coating device characterized in that the main body is configured to rotate in horizontal and vertical directions, and uniform mixing and coating of powder particles and precursors is performed through the rotation of the main body.

2. In Paragraph 1, It further includes a plasma part spaced apart from the injection part in the main body and configured to generate plasma. A powder particle coating device characterized by the above-mentioned plasma section promoting the reaction between a precursor and a workpiece through plasma.

3. In Paragraph 2, It further includes a rotating part configured to rotate the above main body part; and A powder particle coating device characterized by the above-mentioned rotating part being formed as a double axis and configured to perform horizontal rotation and vertical rotation.

4. In Paragraph 3, It further includes a control unit configured to control the main body, the injection unit, the vibration unit, the plasma unit, and the rotation unit; The above control unit A powder particle coating device characterized by being configured to periodically inject a precursor through the injection port, and controlling the injection cycle of the precursor by taking into account the characteristics of the workpiece and the reactivity of the precursor.

5. In Paragraph 4, The above injection part An injection body part provided in the above main body part and forming an exterior; An injection path portion formed through the interior of the injection body portion above to provide a path for the precursor to pass through; An injection filter part disposed movably inside the injection main body and configured to remove foreign substances; An injection opening / closing part disposed at the end of the injection main body part and configured to open / close the injection path part; and It includes an injection fixing part disposed inside the injection main body and coupled to the injection filter part, and configured to fix the position of the injection filter part; The above injection filter part An injection filter performing part disposed inside the injection main body and configured to remove foreign substances by forming a plurality of through holes; An injection filter moving part connected to one end of the injection filter performing part and configured to move the injection filter performing part; An injection filter coupling part provided at the other end of the injection filter performing part and coupled with the injection fixing part; and It includes an injection filter magnetic part positioned at the center of the injection filter coupling part and configured to have magnetism; The above injection fixing part is Injection fixing body part fixed inside the above injection body part; An injection fixing magnetic part provided in the injection fixing main body and coupled to the injection filter magnetic part; and A powder particle coating device characterized by including an injection fixing absorption part that surrounds the injection fixing magnetic part and is provided to absorb shock.

6. In Paragraph 5, The above plasma part Plasma main body part provided in the above main body part; A plasma generating unit provided on the inner side of the above-mentioned plasma main body to generate plasma; A plasma path portion provided on the outer side of the above-mentioned plasma main body portion to guide the plasma to the outside; A plasma support member disposed on the outer side of the above plasma main body, connected to the above plasma path member to support the plasma path member and adjust the angle of the above plasma path member; and It includes a plasma fixing part disposed inside the plasma main body and fixing the plasma generating part; The above plasma support A supporting outer casing coupled to the above plasma main body; A supporting moving part provided on the above supporting outer part and configured to be movable; A support connection part provided at the end of the support moving part and connected to the plasma path part; and A supporting pivoting member configured to connect the supporting moving member and the supporting connecting member and to be rotatable; comprising The above control unit A powder particle coating device characterized by moving the plasma support member when the main body is rotated to vary the path of the plasma path member.

7. In Paragraph 6, The above vibration part A vibrating main body part coupled to the above main body part; A plurality of vibration generating parts provided in the above-mentioned vibration main body to generate vibration; A vibration moving part disposed in the above-mentioned vibration main body and configured to vary the position of the above-mentioned vibration generating part; and A powder particle coating device characterized by including a vibration rotating part that connects the vibration moving part and the vibration generating part and is configured to be rotatable.

8. In Paragraph 7, The above plasma part is positioned above the center of the main body part, and The injection portion is positioned 2 to 4 times more on the lower side than on the upper side, based on the center of the main body portion, and A powder particle coating device characterized by having the injection section provided in an amount 1.2 to 4 times greater than the plasma section.

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