Upper electrode assembly and plasma processing device

WO2026116110A1PCT designated stage Publication Date: 2026-06-04TOKYO ELECTRON LTD
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
TOKYO ELECTRON LTD
Filing Date
2025-11-13
Publication Date
2026-06-04

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Abstract

Provided are an upper electrode assembly which fixes an electrode plate to a holding plate, and a plasma processing device.　This upper electrode assembly is used in a plasma processing device. The upper electrode assembly comprises: a holding plate having a through-hole; an electrode plate having an insertion groove; a bush having a female screw structure part having a fastening groove, and a hook structure part for preventing falling out from the insertion groove when fitted in the insertion groove; and a male screw member inserted into the through-hole and screwed with the fastening groove of the female screw structure part to fix the electrode plate to the holding plate.
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Citation Information

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