Nano-focusing X ray lens combination

Abstract

The invention provides a nanometer focusing X-ray lens combination, comprising a lens body and a liner positioned below the lens body, wherein, the lens body is provided with a plurality of pylome-shaped air gaps arranged in a straight line, each pylome-shaped air gap and a lens body material form a refraction unit of the lens combination, the cross section of each air gap is elliptic, the maximum caliber sizes of the air gaps corresponding to the direction of a minor axis are less than the size of the minor axis, the major axis corresponding to the air gap is positioned in the same line, the elliptical size corresponding to the air gap is decreased gradually, the sizes are arranged in the order of magnitude, an incident X-ray first goes and passes through the refraction unit of the elliptical air gap with the maximum size.

Description

(1) Technical field

[0001] The invention belongs to an X-ray microstructure optical device, in particular to a microstructure X-ray optical device capable of focusing X-rays at a nanometer scale, and is suitable for one-dimensional focusing and imaging of high-energy X-ray band (>5keV) radiation. (2) Background technology

[0002] X-ray composite lens is an X-ray microstructure optical device based on refraction effect proposed by A. Snigirev in 1996, which is suitable for high-energy X-ray band (that is, X-ray radiation energy exceeds 5keV). It has the advantages of no need to bend the optical path, good high temperature stability and easy cooling, simple and compact structure, and low requirements on the surface roughness of the lens. It has broad application prospects in the field of ultra-high resolution X-ray diagnostic science and technology. In recent years, research on various X-ray diagnostic techniques based on X-ray combined lenses is very active. For example...

Examples

Embodiment 1

[0018] As shown in Figure 1, a nano-focusing X-ray composite lens includes a lens body 2, a substrate 1 located below the lens body, and a plurality of through-hole air gaps 3 arranged in a straight line sequence are opened on the lens body , each through-hole-shaped air gap forms a refractive unit of a combined lens together with the lens main body material, the cross-sectional shape of the air gap is elliptical, and the maximum diameter of the air gap corresponding to the short axis of the ellipse is smaller than the short axis of the ellipse , the long axis of the ellipse corresponding to the air gap is on the same straight line, the size of the ellipse corresponding to the air gap decreases gradually, and they are arranged in order from large to small, and the incident X-ray beam first enters and passes through the elliptical air gap with the largest size refraction unit. The geometric aperture of the refraction unit is determined by the elliptical geometric size of its ai...

Embodiment 2

[0022] As shown in Figure 1, a nano-focusing X-ray composite lens includes a lens body 2, a substrate 1 located below the lens body, and a plurality of through-hole air gaps 3 arranged in a straight line sequence are opened on the lens body , each through-hole-shaped air gap forms a refractive unit of a combined lens together with the lens main body material, the cross-sectional shape of the air gap is elliptical, and the maximum diameter of the air gap corresponding to the short axis of the ellipse is smaller than the short axis of the ellipse , the long axis of the ellipse corresponding to the air gap is on the same straight line, the size of the ellipse corresponding to the air gap decreases gradually, and they are arranged in order from large to small, and the incident X-ray beam first enters and passes through the elliptical air gap with the largest size refraction unit. The geometric aperture of the refraction unit is determined by the elliptical geometric size of its ai...

Embodiment 3

[0026] As shown in Figure 1, a nano-focusing X-ray composite lens includes a lens body 2, a substrate 1 located below the lens body, and a plurality of through-hole air gaps 3 arranged in a straight line sequence are opened on the lens body , each through-hole-shaped air gap forms a refractive unit of a combined lens together with the lens main body material, the cross-sectional shape of the air gap is elliptical, and the maximum diameter of the air gap corresponding to the short axis of the ellipse is smaller than the short axis of the ellipse , the long axis of the ellipse corresponding to the air gap is on the same straight line, the size of the ellipse corresponding to the air gap decreases gradually, and they are arranged in order from large to small, and the incident X-ray beam first enters and passes through the elliptical air gap with the largest size refraction unit. The geometric aperture of the refraction unit is determined by the elliptical geometric size of its ai...

(1) Technical field

[0001] The invention belongs to an X-ray microstructure optical device, in particular to a microstructure X-ray optical device capable of focusing X-rays at a nanometer scale, and is suitable for one-dimensional focusing and imaging of high-energy X-ray band (>5keV) radiation. (2) Background technology

[0002] X-ray composite lens is an X-ray microstructure optical device based on refraction effect proposed by A. Snigirev in 1996, which is suitable for high-energy X-ray band (that is, X-ray radiation energy exceeds 5keV). It has the advantages of no need to bend the optical path, good high temperature stability and easy cooling, simple and compact structure, and low requirements on the surface roughness of the lens. It has broad application prospects in the field of ultra-high resolution X-ray diagnostic science and technology. In recent years, research on various X-ray diagnostic techniques based on X-ray combined lenses is very active. For example...

Examples

Embodiment 1

[0018] As shown in Figure 1, a nano-focusing X-ray composite lens includes a lens body 2, a substrate 1 located below the lens body, and a plurality of through-hole air gaps 3 arranged in a straight line sequence are opened on the lens body , each through-hole-shaped air gap forms a refractive unit of a combined lens together with the lens main body material, the cross-sectional shape of the air gap is elliptical, and the maximum diameter of the air gap corresponding to the short axis of the ellipse is smaller than the short axis of the ellipse , the long axis of the ellipse corresponding to the air gap is on the same straight line, the size of the ellipse corresponding to the air gap decreases gradually, and they are arranged in order from large to small, and the incident X-ray beam first enters and passes through the elliptical air gap with the largest size refraction unit. The geometric aperture of the refraction unit is determined by the elliptical geometric size of its ai...

Embodiment 2

[0022] As shown in Figure 1, a nano-focusing X-ray composite lens includes a lens body 2, a substrate 1 located below the lens body, and a plurality of through-hole air gaps 3 arranged in a straight line sequence are opened on the lens body , each through-hole-shaped air gap forms a refractive unit of a combined lens together with the lens main body material, the cross-sectional shape of the air gap is elliptical, and the maximum diameter of the air gap corresponding to the short axis of the ellipse is smaller than the short axis of the ellipse , the long axis of the ellipse corresponding to the air gap is on the same straight line, the size of the ellipse corresponding to the air gap decreases gradually, and they are arranged in order from large to small, and the incident X-ray beam first enters and passes through the elliptical air gap with the largest size refraction unit. The geometric aperture of the refraction unit is determined by the elliptical geometric size of its ai...

Embodiment 3

[0026] As shown in Figure 1, a nano-focusing X-ray composite lens includes a lens body 2, a substrate 1 located below the lens body, and a plurality of through-hole air gaps 3 arranged in a straight line sequence are opened on the lens body , each through-hole-shaped air gap forms a refractive unit of a combined lens together with the lens main body material, the cross-sectional shape of the air gap is elliptical, and the maximum diameter of the air gap corresponding to the short axis of the ellipse is smaller than the short axis of the ellipse , the long axis of the ellipse corresponding to the air gap is on the same straight line, the size of the ellipse corresponding to the air gap decreases gradually, and they are arranged in order from large to small, and the incident X-ray beam first enters and passes through the elliptical air gap with the largest size refraction unit. The geometric aperture of the refraction unit is determined by the elliptical geometric size of its ai...

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