The invention belongs to micro manufacturing field, pointing to the deficiency of traditional method, the quasimolecule laser, integrated circuit producing and etching, electric chemical and scanning probe micro technology are integrated together into a new process method. The steps are: (1) produces micro probe array at first; (2) the base is fixed between the plane electrode and the micro probe array, generates the negative voltage, pours in the protection gas; (3) adds in voltage between the two polars after pouring the electrolyte liquid, at the same time, the quasimolecule laser are poured in to control the electrochemical reaction, completes the process. the correspondent device sets an electrochemical reaction room on the laser microprocess machine platform, it includes a laser air moving window, an inlet of protection air, a vacuum pump interface, an electrolyte liquid inlet, a microprobe array, a plane electrode, an assistant electrochemical reaction air inlet and the waste outlet. The invention can acquires microstructure with width-depth ratio 5-50, the character size 1-50 micro meter on the semiconductor base.