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164results about How to "Aspect ratio height" patented technology

Manufacturing method of groove-type superjunction device

The invention discloses a manufacturing method of a groove-type superjunction device. The manufacturing method comprises the following steps as follows: determining groove size parameters and the maximum value of a single-process depth; providing a substrate, and forming a first hard mask layer; defining a groove forming region; etching a bottom epitaxial layer to form a bottom groove; removing the first hard mask layer, epitaxially filling the bottom groove, and performing CMP; forming a zero layer aligning mark; forming a top epitaxial layer; forming a second hard mask layer; with the zero layer aligning mark as a aligning condition, defining the groove forming region; etching the top epitaxial layer to form a top groove; removing the second hard mask layer, epitaxially filling the top groove, and performing CMP; checking whether the depth of a laminated superjunction structure reaches a required depth, if so, ending the manufacturing method, otherwise, repeating the top superjunction structure forming step. By the manufacturing method, reverse breakdown voltage of a superjunction device can be increased, the conduction resistance can be reduced, the existing equipment and the existing process can be utilized to the maximum extent.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Multi-stage drawing manufacturing method for superfine fluted tube

InactiveCN101898204AIncrease capillary pressureImprove heat transfer performance% diameter reductionKnife holder
The invention discloses a multi-stage drawing manufacturing method for a superfine fluted tube. The method comprises the following steps of: reducing the external diameter of one end of a copper tube with diameter of 6mm to 2.8 to 3mm on a forging hammer type pipe-shrinkage machine; then clamping and fixing a tube reduction die clamp on a horizontal lathe; allowing the diameter reduction section of the copper tube pass through a tube reduction die, clamping and fixing the tube reduction die on a tool rest of the horizontal lathe, starting the horizontal lathe, and drawing the whole copper tube to pass through the tube reduction die, wherein the tube reduction die comprises an induction section and a reforming section, the induction section is a cone-shaped face with cone angle of 20 to 40 DEG C, the reforming section is a round through hole, and under the extrusion of the tube reduction die, the green body of the copper tube performs plastic deformation and the external diameter is reduced; and after first drawing, replacing the tube reduction die by the tube reduction die with smaller through hole of the reforming section, and repeatedly drawing for multiple times until the external diameter of the copper tube is no more than 3mm. The method has the advantages of breaking through the restriction of the conventional manufacturing process for the fluted thermotube, obtaining superfine fluted tubes which have the diameter of no more than 3mm and good superfine fluted tube characteristic in batches, along with simple device and easy processing.
Owner:SOUTH CHINA UNIV OF TECH

Method and system for laser drilling

The invention discloses a method and a system for laser drilling. The system for laser drilling comprises a laser light source, a beam splitting switch and a beam combining switch; a polarized beam conversion unit; the laser light source is used for emitting a fundamental-mode Gaussian beam; the beam splitting switch is used for controlling whether the fundamental-mode Gaussian beam to be deflected or not, when no deflection occurs, and the fundamental-mode Gaussian beam acts on a workpiece to be machined through the beam splitting switch; the polarized beam conversion unit is used for converting the deflected fundamental-mode Gaussian beam into an annular azimuthally polarization type Laguerre-Gaussian beam when the fundamental-mode Gaussian beam is deflected; and the beam combining switch is used for controlling the annular azimuthally polarization type Laguerre-Gaussian beam to be deflected so as to enable the deflected annular azimuthally polarization type Laguerre-Gaussian beam tobe coaxial with the fundamental-mode Gaussian beam emitted by the laser light source so that the annular azimuthally polarization type Laguerre-Gaussian beam can act on the workpiece to be machined.According to the method and the system, an aperture with a larger depth-to-width ratio and a smaller taper can be obtained under the condition of the same energy output.
Owner:HUAZHONG UNIV OF SCI & TECH

STI (Shallow Trench Isolation) structure and manufacturing method thereof

The invention discloses a manufacturing method of an STI (Shallow Trench Isolation) structure. The manufacturing method comprises the following steps of: forming a hard mask layer on a semiconductor substrate; etching the hard mask layer and the semiconductor substrate to form a shallow trench; forming an oxide lining layer on the sidewall of the shallow trench and forming nitride lining layers on the oxide lining layer and the hard mask layer; depositing a first insulating layer, filling of the shallow trench and covering the oxide lining layer; carrying out an annealing process and flattening the first insulating layer to expose the nitride layer; removing a part of the first insulating layer in the shallow trench by carrying out a first wet etching process; removing the nitride lining layer on the hard mask layer by carrying out a second wet etching process to enable the height of the nitride lining layer on the sidewall of the shallow trench to be equal to the height of the first insulating layer; depositing a second insulating layer, filling of the shallow trench and covering the hard mask layer; and removing the second insulating layer and the hard mask layer on the semiconductor substrate to form the STI structure. Through the manufacturing method disclosed by the invention, the generation of seams in the shallow trench can be avoided.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Method for efficiently electroplating and filling silicon-based TSV

The invention discloses a method for efficiently electroplating and filling silicon-based TSV. The method specifically comprises the steps of etching and preparing the TSV on a wafer; preparing an insulating layer on the wafer for etching the TSV; preparing a seed layer on the wafer containing the insulating layer; enabling dry films to the adhered to the two surfaces of the wafer, and performing single-surface photoetching and developing; removing the seed layer from the TSV side wall port position; enabling the dry film to be adhered to the patterned surface and developing the other surface; removing the seed layer from the other port position again; then performing photoetching and developing again; next, performing bisynchronous electroplate copper filling to enable TSV-Cu and TSV-pad to be integrally molded without a separating interface; and removing the dry films, the photoresist and the seed layers. According to the method, the TSV through hole electroplating filling process is converted into two blind-hole-like electroplating filling processes, so that the TSV structure can be firmly combined; the process is more flexible and convenient; the high-aspect-ratio TSV through hole electroplating filling difficulty is greatly lowered; and meanwhile, the electroplating efficiency is effectively improved, and the low-cost and efficient TSV preparation can be realized.
Owner:SHANGHAI JIAO TONG UNIV

Large-discharge electric submerged screw pump oil extracting equipment

ActiveCN101864932AWith anti-vibration effectAspect ratio heightFluid removalElectric machineCoupling
The invention relates to large-discharge electric submerged screw pump oil extracting equipment. Compared with the traditional electric submerged screw pump oil extracting equipment which belongs to a large-discharge series and also mainly comprises an underground motor, an underground rotating type mechanical drive device, an underground screw pump, and the like, the large-discharge electric submerged screw pump oil extracting equipment has the technical scheme key that the underground screw pump is connected with an underground multistage motor by the underground rotating type mechanical drive device; the screw pump is rigidly fixed on the sleeve pipe wall of an oil well by adopting the underground multistage motor with high torque output and vibration resistance, a drum-gear coupling with high torque output, vibration resistance and an opening type structure, a series combined stopping type bear joint and an underground rotating type mechanical drive device of a compensating type lubricating oil tank through an anchoring device; the problem of oil leakage of an oil pipe of a large-gradient well or a horizontal well is solved by adopting a hydraulic type oil pipe oil drainer; and the large discharge of the electric submerged screw pump is realized by the technical measures, and thus the invention can be used for the oil well with large-discharge (more than 200m<3>/d) on the electric submerged screw pump.
Owner:盘锦三阳石油科技发展有限公司

Quasi-molecule laser electrochemical microstructure manufacturing method and equipment

The present invention belongs to the field of micro-manufacturing. Aiming at the shortcomings of traditional methods, excimer laser, integrated circuit plate-making lithography, electrochemistry and scanning probe microscopic technology are fused into a new processing method. The steps are: (1) first prepare a microscopic probe Needle array; (2) Fix the substrate between the plate electrode and the microprobe array, generate negative pressure, and inject protective gas; (3) Apply voltage between the electrodes after injecting the electrolyte solution, and at the same time pass through the excimer laser The electrochemical reaction is controlled to complete the machining process. The corresponding device is equipped with an electrochemical reaction chamber on the workbench of the laser microprocessing machine, which includes a laser pneumatic window, a protective gas inlet, a vacuum pump interface, an electrolyte solution inlet, a microprobe array, a flat electrode, an auxiliary electrochemical reaction gas inlet, and a waste outlet. . The invention can obtain a microstructure with an aspect ratio of 5-50 and a characteristic size of 1-50 microns on metal and semiconductor substrates, and has wide applications in the fields of environmental protection, textiles, papermaking, energy, information and national defense.
Owner:HUAZHONG UNIV OF SCI & TECH

Method for manufacturing metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor

The invention discloses a method for manufacturing a metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor. The method comprises the following steps of: (1) manufacturing a primary lens of the metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor; (2) manufacturing a secondary lens of the metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor; and (3) assembling the metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor, namely putting the manufactured primary lens and the manufactured secondary lens under a microscope, finding and clamping a clamping arm of the secondary lens, aligning embedded lens bodies of the secondary lens with square holes of the primary lens, making a first parabolic curve and a second parabolic curve orthogonal to each other and making n embedded lens bodies on the secondary lens corresponding to n square holes on the primary lens one to one, embedding, and lightly pressing to obtain the metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor. By the method, the manufacturing process is high in precision; the optical axis of the obtained lens can be self-calibrated at high precision; and the focusing efficiency is high.
Owner:菏泽建数智能科技有限公司

Method for performing phase change memory cell integration by using electrochemical deposition

The invention discloses a method for performing phase change memory cell integration by using electrochemical deposition. The method comprises the following steps of: S1, preparing a conductive substrate; S2, preparing an insulating layer; S3, preparing deep holes; S4, preparing a reaction solution mixed with two different electrolytes; S5, performing electrochemical deposition in the deep holes from bottom to top, and depositing an upper-layer material and a lower-layer material, namely a gating tube and a phase change unit, in each deep hole by adjusting deposition parameters; S6, preparingupper electrodes. The deep holes with nanoscale apertures are etched through a micro-nano machining technology, and then the deep holes are rapidly and effectively filled through the electrochemical deposition method; the nano phase change material can be grown from the bottom of each nano hole; the ultra-large depth-to-width ratio small holes can be filled with a sulfur phase-change material witha multi-layer complex structure; the growth of the materials can be accurately regulated and controlled by regulating and controlling the deposition parameters; graphical growth is realized by designing the shape of electrodes of which the bottom can apply potentials; and preparation of various materials with complex structures is carried out.
Owner:HUAZHONG UNIV OF SCI & TECH

Method for preparing organic acid and calcium sulfate whisker from organic acid calcium salt by hydrochloric acid method

The invention relates to the technical fields of organic acid separation and whisker synthesis, in particular to a method for preparing an organic acid and a calcium sulfate whisker from organic acidcalcium salt by a hydrochloric acid method. The method is characterized by comprising the following steps: (1) taking organic acid calcium salt and hydrochloric acid as raw materials, mixing the organic acid calcium salt with hydrochloric acid to undergo a metathesis reaction to obtain a mixed solution which mainly contains the organic acid, the organic acid calcium salt, calcium chloride and hydrochloric acid; (2) performing solvent extraction on the obtained mixed solution by utilizing an organic solvent to obtain a raffinate and a supported organic phase (I), washing the supported organic phase (I) to obtain a supported organic phase (II), performing RP-extraction on the organic phase (II) to obtain an organic acid washing solution and a blank organic phase; and (3) concentrating or crystallizing the organic acid washing solution obtained in the step (2) to obtain an organic acid product, and reacting the raffinate obtained in the step (2) with sulfuric acid or sulfate to prepare the calcium sulfate whisker. The method has the advantages of zero waste, low cost, high length-diameter ratio of the prepared calcium sulfate whisker and the like.
Owner:HARBIN INST OF TECH AT WEIHAI
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