1results about How to "Aspect ratio height" patented technology

The application relates to the technical field of laser micro-nano processing, and particularly provides a femtosecond laser processing system and method, wherein the femtosecond laser processing system comprises a laser emission module and a beam shaping module; the beam shaping module comprises a pulse separator, a spatial light modulator and a beam expander; the laser emission module, the pulse separator, the beam expander and the spatial light modulator are sequentially arranged; the laser emission module is used for emitting laser pulses; the laser pulses sequentially pass through the pulse separator and the beam expander and then reach the spatial light modulator; the pulse separator is used for splitting the laser pulses and introducing a pulse delay time between the split laser pulses; the beam expander is used for expanding the laser beam; and the spatial light modulator is used for shaping a Gaussian beam into a flat-top beam. The application has the effect of improving the processing quality of nanochannels on a grating surface.