Method for manufacturing metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor

A technology for combining a refractive lens and a metal material, which is applied in the field of manufacturing a parabolic two-dimensional focusing X-ray combined refractive lens of metal materials, can solve the problems of low focusing efficiency, insufficient manufacturing process accuracy, low lens calibration accuracy, and the like, and achieves calibration. The effect of high precision, small material constraints, and large device aspect ratio

Inactive Publication Date: 2011-10-12
菏泽建数智能科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to overcome the deficiencies of the existing two-dimensional focusing X-ray combined refraction lens manufacturing method, the manufacturing process precision is not high enough, the resulting lens calibration precision is low, and the focusing efficiency is low. The present invention provides a lens optical axis with high manufacturing process precision Manufacturing method of metal material parabolic two-dimensional focusing X-ray combined refracting lens capable of high-precision self-calibration and high focusing efficiency

Method used

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  • Method for manufacturing metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor
  • Method for manufacturing metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor
  • Method for manufacturing metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor

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Embodiment 1

[0050] refer to Figure 1a ~ Figure 2b , a method for manufacturing a metal material parabolic two-dimensional focusing X-ray combined refracting lens, the specific steps are as follows:

[0051] (1) The manufacturing steps of the mother mirror of the metal material parabolic two-dimensional focusing X-ray combined refracting lens:

[0052] (A) Make the photolithography mask plate of the mother mirror of glass base metal chromium material with electron beam etching technology, the photolithography mask plate of described mother mirror is arranged as two symmetrical parabolas by the cross-section of a plurality of sequential intervals coaxially Formed first parabolic hole and square hole, the equation of two symmetrical parabolas in the first parabolic hole is expressed as x 2 =2Rz, where R is the radius of curvature at the apex of the parabola, x and z represent the x-axis and the z-axis of the Cartesian coordinate system in Fig. 1 respectively, and the major axis and the min...

Embodiment 2

[0081] refer to Figure 1a ~ Figure 2b , all production steps are the same as in Example 1, except that the major axis is 242 microns, the minor axis is 222 microns, l is 250 microns, δ is 2 microns, n is 100, t is 100 microns, and the electroformed cathode film is aluminum Material, electroforming metal material is nickel.

Embodiment 3

[0083] refer to Figure 1a ~ Figure 2b , all production steps are the same as in Example 1, except that the major axis is 200 microns, the minor axis is 180 microns, l is 210 microns, δ is 1.5 microns, n is 80, t is 80 microns, and the electroformed cathode film is gold Material, the electroforming metal material is iron.

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Abstract

The invention discloses a method for manufacturing a metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor. The method comprises the following steps of: (1) manufacturing a primary lens of the metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor; (2) manufacturing a secondary lens of the metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor; and (3) assembling the metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor, namely putting the manufactured primary lens and the manufactured secondary lens under a microscope, finding and clamping a clamping arm of the secondary lens, aligning embedded lens bodies of the secondary lens with square holes of the primary lens, making a first parabolic curve and a second parabolic curve orthogonal to each other and making n embedded lens bodies on the secondary lens corresponding to n square holes on the primary lens one to one, embedding, and lightly pressing to obtain the metal paraboloid-shaped two-dimensionally-focused X-ray combined refractor. By the method, the manufacturing process is high in precision; the optical axis of the obtained lens can be self-calibrated at high precision; and the focusing efficiency is high.

Description

technical field [0001] The invention relates to a manufacturing method of a novel X-ray microstructure optical device-a parabolic two-dimensional focusing X-ray combined refracting lens, which is suitable for the occasion of making a metal material two-dimensional focusing X-ray combined refracting lens. Background technique [0002] X-ray composite lens is an X-ray microstructure optical device based on refraction effect proposed by A. Snigirev in 1996, which is suitable for high-energy X-ray band (that is, X-ray radiation energy exceeds 5keV). It has the advantages of no need to bend the optical path, good high temperature stability and easy cooling, simple and compact structure, and low requirements on the surface roughness of the lens. It has broad application prospects in the field of ultra-high resolution X-ray diagnostic science and technology. In recent years, research on various X-ray diagnostic techniques based on X-ray combined lenses is very active. For example...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G21K1/06
CPCG02B27/62G21K1/065G21K2201/067Y10T29/49885B23P17/04
Inventor 乐孜纯董文
Owner 菏泽建数智能科技有限公司
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