This application discloses a real-time self-testing method and
system for a
capacitive accelerometer, relating to the field of accelerometers. The method includes: applying a fixed-phase
excitation signal to an upper fixed
electrode; applying an
excitation signal that switches back and forth between a first
phase state and a second
phase state to a lower fixed
electrode; wherein, in the first
phase state, the
excitation signal of the lower fixed
electrode is in phase with the excitation
signal of the upper fixed electrode, and in the second phase state, the excitation
signal of the lower fixed electrode is
out of phase with the excitation
signal of the upper fixed electrode; in the first phase state, acquiring a first current signal output by a movable sensitive
mass; in the second phase state, acquiring a second current signal output by the movable sensitive
mass; and performing a self-test on the
accelerometer based on the first and second current signals. Real-time self-testing of the
accelerometer is achieved through phase transformation.