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Capacitive accelerometer

An accelerometer, capacitive technology, used in the measurement of acceleration, speed/acceleration/impact measurement, instruments, etc., can solve problems such as lack of instruments, and achieve the effect of reducing difficulty, improving sensitivity, and good electrical conductivity

Inactive Publication Date: 2010-05-19
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the instrument that can measure acceleration and angular accelerometer at the same time is very lacking

Method used

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  • Capacitive accelerometer
  • Capacitive accelerometer
  • Capacitive accelerometer

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Embodiment Construction

[0035] Capacitive accelerometer that the present invention proposes is described in detail as follows in conjunction with accompanying drawing and embodiment:

[0036] see first figure 1 , figure 2 , image 3 and Figure 4 , as can be seen from the figure, the capacitive accelerometer of the present invention comprises:

[0037] The upper end cover 1, on the inner surface of the upper end cover, the upper end cover plate 2 is insulated, and there is a protruding insulating stopper in the center of the inner surface of the upper end cover;

[0038] The lower end cover 16, the lower end cover pole plate 15 is insulatedly pasted on the inner surface of the lower end cover 16, and there is a protruding insulating stopper in the center of the inner surface of the lower end cover;

[0039] The mass block 8 is a solid cylinder in the shape of a "King" with necked necks at the upper and lower ends, respectively. The upper and lower ends of the solid cylinder are respectively prov...

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Abstract

The invention relates to a capacitive accelerometer which comprises an upper end cover with an upper end cover polar plate, a lower end cover with a lower end cover polar plate, a mass block with a mass block upper polar plate and a mass block lower polar plate, a cylinder and eight elastic supporting rods. The upper end cover and the lower end cover are combined with the cylinder to fix the elastic supporting rods; the mass block is connected with the cylinder through the elastic supporting rods to form a sensitive motion mechanism; the upper end cover polar plate, the lower end cover polar plate, the mass block upper polar plate and the mass block lower polar plate are provided with a plurality of sector sub-electrodes which are spaced between each other; and the sector sub-electrodes ensure that the upper end cover polar plate and the lower end cover polar plate form differential capacitive structures with the mass block upper polar plate and the mass block lower polar plate respectively. The capacitive accelerometer can be used for measuring longitudinal acceleration and angular acceleration simultaneously.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical systems (MEMS) inertial sensors. The invention relates to a capacitive accelerometer, in particular to a capacitive accelerometer capable of simultaneously measuring longitudinal acceleration and longitudinal angular acceleration. Background technique [0002] With the development of science and technology, more and more attention is paid to the measurement and control of the motion state of objects, especially in some large and sophisticated high-tech devices, small movements may cause very large effects. The accelerometer is a very common and effective tool for measuring the motion state of an object, so it has received extensive attention from researchers. Due to its high sensitivity, small temperature drift, and simple and compact structure, capacitive accelerometers have attracted much attention and developed rapidly. [0003] As the name implies, the principle of capacitive sensors i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125
Inventor 刘芳张涛孙明营孙平平朱健强
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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