The invention discloses a
silicon wafer detection
machine which comprises a feeding part, an AOI detection part and an IV detection part. The feeding part comprises a feeding jacking mechanism, a feeding input guide rail and a feeding transverse moving walking arm. The feeding transverse moving walking arm transversely moves between the feeding jacking mechanism and the feeding input guide rail. The AOI detection part comprises a four-
station turntable mechanism, a back detection mechanism and a front detection mechanism, the back detection mechanism is located below the front end of the four-
station turntable mechanism, and the front detection mechanism is located above one side of the four-
station turntable mechanism; the IV detection part comprises an IV detection mechanism and detection
butt joint guide rails, and the two detection
butt joint guide rails are connected to the two sides of the IV detection mechanism respectively. According to the
silicon wafer detection
machine, AOI and IV detection is carried out in sequence, double half
silicon wafers are tested, a lightweight
rotating disc is adopted, adjustment is more convenient in structure, a positioning structure is additionally arranged in a conveying structure, alignment of the silicon wafers is more tidy, AOI and IV are combined together on the same
production line through a steering structure, and the productivity and quality are improved.