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Wireless passive capacitive accelerometer

An accelerometer and wireless passive technology, applied in the field of sensors, can solve problems such as non-contact measurement that cannot be realized without wireless, and achieve the effect of simple structure, high precision and wide application range

Inactive Publication Date: 2013-09-11
ZHONGBEI UNIV
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a wireless passive capacitive accelerometer in order to solve the problem that the existing capacitive accelerometer cannot realize non-contact wireless measurement, so that the accelerometer can be applied to realize fast and airtight movement in harsh environments Non-contact measurement of objects

Method used

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Embodiment Construction

[0027] The present invention will be further described below in conjunction with accompanying drawing:

[0028] Such as Figure 1 to Figure 3As shown, a wireless passive capacitive accelerometer includes a substrate 1, a closed cavity 2 is arranged in the substrate 1, a mass block 3 is arranged in the closed cavity 2, and cantilevers are fixedly connected around the mass block 3 Beam 4, the other end of the cantilever beam 4 is fixed on the cavity wall of the closed cavity 2, the mass block 3 is located at the center of the closed cavity 2; the position above the mass block 3 in the closed cavity 2 is provided with a first capacitor 5 , A second capacitor 6 is provided at a position below the mass block 3; the first lower plate 5-1 of the first capacitor 5 is connected to the upper surface of the mass block 3, and the first upper plate 5-2 is connected to the closed cavity At the position facing the mass block 3 on the top of the 2 cavity, the second upper plate 6-1 of the se...

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Abstract

The invention discloses a wireless passive capacitive accelerometer comprising a substrate with a closed cavity inside. A mass is fixed in the closed cavity through a cantilever; a first capacitor is arranged above the mass in the closed cavity, and a second capacitor is arranged below the mass in the closed cavity; a plane spiral inductor is arranged on the bottom surface of the substrate, electric connecting lines are sputtered on the substrate and the mass through TSV (through silicon via) technique punching, and the first capacitor, the second capacitor and the plane spiral inductor are in series connection to form a closed loop circuit through the electric connecting lines. The wireless passive capacitive accelerometer is skillful in design, simple in structure, high in sensitivity and accurate in test results, is wireless and passive, and can be used in severe environment; non-contact measurement is adopted during measuring, so that the range of application of the sensor is greatly broadened.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a wireless passive capacitive accelerometer suitable for non-contact measurement of fast and airtight moving objects in harsh environments. Background technique [0002] Capacitive accelerometers have the advantages of high sensitivity, strong overload capacity, and good adaptability to harsh conditions such as high temperature, radiation, and strong vibration, and are one of the hot spots in the field of accelerometer research. However, in many special occasions, due to environmental restrictions, it is not suitable to connect wires or replace batteries, especially in some harsh environments with high temperature and high pressure, wired measurement will cause problems such as circuit failure and high-temperature degradation of electrical leads, which greatly affects This limits the scope of application of capacitive accelerometers. [0003] In some developed countries such as ...

Claims

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Application Information

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IPC IPC(8): G01P15/125B81B7/02
Inventor 梁庭洪应平李赛男熊继军谭秋林李晨王伟葛冰儿
Owner ZHONGBEI UNIV
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