Method and system for laser drilling

Abstract

The invention discloses a method and a system for laser drilling. The system for laser drilling comprises a laser light source, a beam splitting switch and a beam combining switch; a polarized beam conversion unit; the laser light source is used for emitting a fundamental-mode Gaussian beam; the beam splitting switch is used for controlling whether the fundamental-mode Gaussian beam to be deflected or not, when no deflection occurs, and the fundamental-mode Gaussian beam acts on a workpiece to be machined through the beam splitting switch; the polarized beam conversion unit is used for converting the deflected fundamental-mode Gaussian beam into an annular azimuthally polarization type Laguerre-Gaussian beam when the fundamental-mode Gaussian beam is deflected; and the beam combining switch is used for controlling the annular azimuthally polarization type Laguerre-Gaussian beam to be deflected so as to enable the deflected annular azimuthally polarization type Laguerre-Gaussian beam tobe coaxial with the fundamental-mode Gaussian beam emitted by the laser light source so that the annular azimuthally polarization type Laguerre-Gaussian beam can act on the workpiece to be machined.According to the method and the system, an aperture with a larger depth-to-width ratio and a smaller taper can be obtained under the condition of the same energy output.

Description

Technical field [0001] The invention belongs to the technical field of laser processing, and more specifically, relates to a laser drilling method and system. Background technique [0002] With the rapid development of science and technology, traditional processing methods can no longer meet the requirements of increasingly complex aperture processing. For example, processing micro-pores with a diameter of micrometers on a high melting point metal molybdenum plate; processing small holes with a diameter of tens of microns on a hard tungsten carbide alloy; processing a few hundred microns in diameter on a hard and brittle red and sapphire For hard and brittle materials such as deep holes, conventional machining methods are impossible. [0003] The laser beam is a beam of photons that are highly concentrated in space and time. The application of optical focusing technology can converge it in a very small range on the order of micrometers to obtain 10 5 W / cm 2 ~10 15 W / cm 2 Very high...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a compound laser drilling method and system, aiming to solve the problem that the depth or taper of the aperture processed by the existing laser drilling processing device cannot be improved, the smoothness of the hole wall is poor, and the hole The roundness is not good, especially the recasting layer on the hole wall, which may even lead to hole blockage and other technical problems that affect the accuracy of the hole

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